title: The development of a μ-biomimetic uncooled IR-Sensor inspired by the infrared receptors of Melanophila acuminata.
abstract: The beetle Melanophila acuminata uses a specialized organ to detect infrared radiation. The organ consists of about 100 individual sensilla. The main component of the sensillum is a pressure chamber. Upon absorption of radiation, the pressure increases, and the tip of a dendrite is deformed. A unique feature of the organ is a compensation mechanism that prevents large pressures. The beetle uses this organ to detect forest fires and to navigate inside burning woods. However, the sensitivity is part of a long-lasting discussion, providing thresholds between [Formula: see text] and [Formula: see text]. To end the decade-long discussion and to provide a novel type of infrared sensor, we are developing an uncooled μ-biomimetic infrared (IR) sensor inspired by Melanophila acuminata using MEMS technology. Here, we present the development of a μ-capacitor that is used to detect pressure changes and the characterization of the compensation mechanism. We describe the microtechnological fabrication process for air-filled capacitors with a ratio of diameter-to-electrode distance of 1000 and a technique to fill the sensor bubble-free with water. Finally, we estimate the sensitivity of the beetle using a theoretical model of the sensillum.
authors.affiliation: Micro Systems Technology (MST), Center of Advanced European Studies and Research (CAESAR), 53175 Bonn, Germany.
authors.forename: Georg
authors.initials: G
authors.lastname: Siebke
authors.forename: Peter
authors.initials: P
authors.lastname: Holik
authors.forename: Sam
authors.initials: S
authors.lastname: Schmitz
authors.forename: Simon
authors.initials: S
authors.lastname: Tätzner
authors.forename: Jan
authors.initials: J
authors.lastname: Thiesler
authors.forename: Siegfried
authors.initials: S
authors.lastname: Steltenkamp
mesh_terms: D000818:Animals; D032701:Biomimetics / Q000295:instrumentation*; D001517:Coleoptera / Q000502:physiology*; D003198:Computer Simulation; D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007259:Infrared Rays; D008904:Miniaturization; D008954:Models, Biological; D012679:Sense Organs / Q000502:physiology; D013055:Spectrophotometry, Infrared / Q000295:instrumentation*; D013696:Temperature; D013817:Thermography / Q000295:instrumentation*; D013823:Thermoreceptors / Q000502:physiology*; D013697:Thermosensing / Q000502:physiology