title: Nanoporous Ge thin film production combining Ge sputtering and dopant implantation.
abstract: In this work a novel process allowing for the production of nanoporous Ge thin films is presented. This process uses the combination of two techniques: Ge sputtering on SiO2 and dopant ion implantation. The process entails four successive steps: (i) Ge sputtering on SiO2, (ii) implantation preannealing, (iii) high-dose dopant implantation, and (iv) implantation postannealing. Scanning electron microscopy and transmission electron microscopy were used to characterize the morphology of the Ge film at different process steps under different postannealing conditions. For the same postannealing conditions, the Ge film topology was shown to be similar for different implantation doses and different dopants. However, the film topology can be controlled by adjusting the postannealing conditions.
authors.affiliation: Aix-Marseille University, IM2NP, Faculté des Sciences de Saint-Jérôme case 142, 13397 Marseille, France ; CNRS, IM2NP, Faculté des Sciences de Saint-Jérôme case 142, 13397 Marseille, France.
authors.forename: Jacques Perrin
authors.initials: JP
authors.lastname: Toinin
authors.affiliation: CNRS, IM2NP, Faculté des Sciences de Saint-Jérôme case 142, 13397 Marseille, France.
authors.forename: Alain
authors.initials: A
authors.lastname: Portavoce
authors.affiliation: Aix-Marseille University, IM2NP, Faculté des Sciences de Saint-Jérôme case 142, 13397 Marseille, France.
authors.forename: Khalid
authors.initials: K
authors.lastname: Hoummada
authors.affiliation: Aix-Marseille University, IM2NP, Faculté des Sciences de Saint-Jérôme case 142, 13397 Marseille, France.
authors.forename: Michaël
authors.initials: M
authors.lastname: Texier
authors.affiliation: CNRS, IM2NP, Faculté des Sciences de Saint-Jérôme case 142, 13397 Marseille, France.
authors.forename: Maxime
authors.initials: M
authors.lastname: Bertoglio
authors.affiliation: Aix-Marseille University, IM2NP, Faculté des Sciences de Saint-Jérôme case 142, 13397 Marseille, France.
authors.forename: Sandrine
authors.initials: S
authors.lastname: Bernardini
authors.affiliation: Aix-Marseille University, IM2NP, Faculté des Sciences de Saint-Jérôme case 142, 13397 Marseille, France.
authors.forename: Marco
authors.initials: M
authors.lastname: Abbarchi
authors.affiliation: Department of Physics, University of Central Florida, Orlando, FL 32816, USA.
authors.forename: Lee
authors.initials: L
authors.lastname: Chow
keywords: germanium; ion implantation; porous material
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