title: High resolution double-sided diffractive optics for hard X-ray microscopy.
abstract: The fabrication of high aspect ratio metallic nanostructures is crucial for the production of efficient diffractive X-ray optics in the hard X-ray range. We present a novel method to increase their structure height via the double-sided patterning of the support membrane. In transmission, the two Fresnel zone plates on the two sides of the substrate will act as a single zone plate with added structure height. The presented double-sided zone plates with 30 nm smallest zone width offer up to 9.9% focusing efficiency at 9 keV, that results in a factor of two improvement over their previously demonstrated single-sided counterparts. The increase in efficiency paves the way to speed up X-ray microscopy measurements and allows the more efficient utilization of the flux in full-field X-ray microscopy.
authors.forename: Istvan
authors.initials: I
authors.lastname: Mohacsi
authors.forename: Ismo
authors.initials: I
authors.lastname: Vartiainen
authors.forename: Manuel
authors.initials: M
authors.lastname: Guizar-Sicairos
authors.forename: Petri
authors.initials: P
authors.lastname: Karvinen
authors.forename: Vitaliy A
authors.initials: VA
authors.lastname: Guzenko
authors.forename: Elisabeth
authors.initials: E
authors.lastname: Müller
authors.forename: Elina
authors.initials: E
authors.lastname: Färm
authors.forename: Mikko
authors.initials: M
authors.lastname: Ritala
authors.forename: Cameron M
authors.initials: CM
authors.lastname: Kewish
authors.forename: Andrea
authors.initials: A
authors.lastname: Somogyi
authors.forename: Christian
authors.initials: C
authors.lastname: David