title: Fundamental edge broadening effects during focused electron beam induced nanosynthesis.
abstract: The present study explores lateral broadening effects of 3D structures fabricated through focused electron beam induced deposition using MeCpPt(IV)Me3 precursor. In particular, the scaling behavior of proximity effects as a function of the primary electron energy and the deposit height is investigated through experiments and validated through simulations. Correlated Kelvin force microscopy and conductive atomic force microscopy measurements identified conductive and non-conductive proximity regions. It was determined that the highest primary electron energies enable the highest edge sharpness while lower energies contain a complex convolution of broadening effects. Moreover, it is demonstrated that intermediate energies lead to even more complex proximity effects that significantly reduce lateral edge sharpness and thus should be avoided if desiring high lateral resolution.
authors.affiliation: Graz Centre for Electron Microscopy, 8010 Graz, Austria.
authors.forename: Roland
authors.initials: R
authors.lastname: Schmied
authors.affiliation: Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831, USA ; Department of Materials Science and Engineering, University of Tennessee, Knoxville, Tennessee 37996, USA.
authors.forename: Jason D
authors.initials: JD
authors.lastname: Fowlkes
authors.affiliation: Graz Centre for Electron Microscopy, 8010 Graz, Austria.
authors.forename: Robert
authors.initials: R
authors.lastname: Winkler
authors.affiliation: Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831, USA ; Department of Materials Science and Engineering, University of Tennessee, Knoxville, Tennessee 37996, USA.
authors.forename: Phillip D
authors.initials: PD
authors.lastname: Rack
authors.affiliation: Graz Centre for Electron Microscopy, 8010 Graz, Austria ; Institute for Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria.
authors.forename: Harald
authors.initials: H
authors.lastname: Plank
keywords: focused electron beam induced deposition; nanofabrication; platinum; simulation
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