title: Resolving 45-pm-separated Si-Si atomic columns with an aberration-corrected STEM.
abstract: Si-Si atomic columns separated by 45 pm were successfully resolved with a 300-kV aberration-corrected scanning transmission electron microscope (STEM) equipped with a cold-field emission gun. Using a sufficiently small Gaussian effective source size and a 0.4-eV energy spread at 300 kV, the focused electron probe on the specimen was simulated to be sub-50 pm. Image simulation showed that the present probe condition was sufficient to resolve 45 pm Si-Si dumbbells. A silicon crystalline specimen was observed from the [114] direction with a high-angle annular dark field STEM and the intensity profile showed 45 pm separation. A spot corresponding to (45 pm)(-1) was confirmed in the power spectrum of the Fourier transform.
authors.affiliation: JEOL Ltd, 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan hsawada@jeol.co.jp.
authors.forename: Hidetaka
authors.initials: H
authors.lastname: Sawada
authors.affiliation: JEOL Ltd, 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan.
authors.forename: Naoki
authors.initials: N
authors.lastname: Shimura
authors.affiliation: JEOL Ltd, 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan.
authors.forename: Fumio
authors.initials: F
authors.lastname: Hosokawa
authors.affiliation: Institute of Engineering Innovation, The University of Tokyo, Tokyo 113-8656, Japan Japan Science and Technology Agency, PRESTO, Saitama 332-0012, Japan.
authors.forename: Naoya
authors.initials: N
authors.lastname: Shibata
authors.affiliation: Institute of Engineering Innovation, The University of Tokyo, Tokyo 113-8656, Japan.
authors.forename: Yuichi
authors.initials: Y
authors.lastname: Ikuhara
keywords: Sub-50 pm resolution; aberration correction; cold field emission gun; high-angle annular dark field image; scanning transmission electron microscope