title: A compact time-of-flight mass spectrometer for ion source characterization.
abstract: A compact time-of-flight mass spectrometer with overall dimension of about 413 × 250 × 414 mm based on orthogonal injection and angle reflection has been developed for ion source characterization. Configuration and principle of the time-of-flight mass spectrometer are introduced in this paper. The mass resolution is optimized to be about 1690 (FWHM), and the ion energy detection range is tested to be between about 3 and 163 eV with the help of electron impact ion source. High mass resolution and compact configuration make this spectrometer useful to provide a valuable diagnostic for ion spectra fundamental research and study the mass to charge composition of plasma with wide range of parameters.
authors.affiliation: Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang, Sichuan 621900, China.
authors.forename: L
authors.initials: L
authors.lastname: Chen
authors.affiliation: Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang, Sichuan 621900, China.
authors.forename: X
authors.initials: X
authors.lastname: Wan
authors.affiliation: Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang, Sichuan 621900, China.
authors.forename: D Z
authors.initials: DZ
authors.lastname: Jin
authors.affiliation: Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang, Sichuan 621900, China.
authors.forename: X H
authors.initials: XH
authors.lastname: Tan
authors.affiliation: Institute of Atmosphere Environment Security and Pollution Control, Jinan University, Guangzhou 510632, China.
authors.forename: Z X
authors.initials: ZX
authors.lastname: Huang
authors.affiliation: School of Environmental and Chemical Engineering, Institute of Environmental Pollution and Health, Shanghai University, Shanghai 200444, China.
authors.forename: G B
authors.initials: GB
authors.lastname: Tan