title: Fabrication and characterization of free-standing, high-line-density transmission gratings for the vacuum UV to soft X-ray range.
abstract: We present state-of-the-art high resolution transmission gratings, applicable for spectroscopy in the vacuum ultraviolet (VUV) and the soft X-ray (SRX) wavelength range, fabricated with a novel process using ultraviolet based nano imprint lithography (UV-NIL). Free-standing, high-line-density gratings with up to 10,000 lines per mm and various space-to-period ratios were fabricated. An optical characterization of the gratings was carried out in the range from 17 to 34 nm wavelength using high-harmonic generation in a capillary waveguide filled with Ne, and around 13.5 nm wavelength (from 10 to 17 nm) using a Xenon discharge plasma.
authors.forename: S J
authors.initials: SJ
authors.lastname: Goh
authors.forename: H J M
authors.initials: HJ
authors.lastname: Bastiaens
authors.forename: B
authors.initials: B
authors.lastname: Vratzov
authors.forename: Q
authors.initials: Q
authors.lastname: Huang
authors.forename: F
authors.initials: F
authors.lastname: Bijkerk
authors.forename: K J
authors.initials: KJ
authors.lastname: Boller