title: High aspect ratio 10-nm-scale nanoaperture arrays with template-guided metal dewetting.
abstract: We introduce an approach to fabricate ordered arrays of 10-nm-scale silica-filled apertures in a metal film without etching or liftoff. Using low temperature (<400°C) thermal dewetting of metal films guided by nano-patterned templates, apertures with aspect ratios up to 5:1 are demonstrated. Apertures form spontaneously during the thermal process without need for further processing. Although the phenomenon of dewetting has been well studied, this is the first demonstration of its use in the fabrication of nanoapertures in a spatially controllable manner. In particular, the achievement of 10-nm length-scale patterning at high aspect ratio with thermal dewetting is unprecedented. By varying the nanotemplate design, we show its strong influence over the positions and sizes of the nanoapertures. In addition, we construct a three-dimensional phase field model of metal dewetting on nano-patterned substrates. The simulation data obtained closely corroborates our experimental results and reveals new insights to template dewetting at the nanoscale. Taken together, this fabrication method and simulation model form a complete toolbox for 10-nm-scale patterning using template-guided dewetting that could be extended to a wide range of material systems and geometries.
authors: Institute of Materials and Research Engineering, A*STAR, Singapore 117602, Singapore.
authors: Ying Min
authors: YM
authors: Wang
authors: Institute of High Performance Computing, A*STAR, Singapore 138632, Singapore.
authors: Liangxing
authors: L
authors: Lu
authors: Institute of High Performance Computing, A*STAR, Singapore 138632, Singapore.
authors: Bharathi Madurai
authors: BM
authors: Srinivasan
authors: Institute of Materials and Research Engineering, A*STAR, Singapore 117602, Singapore.
authors: Mohamed
authors: M
authors: Asbahi
authors: Institute of High Performance Computing, A*STAR, Singapore 138632, Singapore.
authors: Yong Wei
authors: YW
authors: Zhang
authors: 1] Institute of Materials and Research Engineering, A*STAR, Singapore 117602, Singapore [2] Singapore University of Technology and Design, Singapore 138682, Singapore.
authors: Joel K W
authors: JK
authors: Yang