title: μ-Biomimetic flow-sensors--introducing light-guiding PDMS structures into MEMS.
abstract: In the area of biomimetics, engineers use inspiration from natural systems to develop technical devices, such as sensors. One example is the lateral line system of fish. It is a mechanoreceptive system consisting of up to several thousand individual sensors called neuromasts, which enable fish to sense prey, predators, or conspecifics. So far, the small size and high sensitivity of the lateral line is unmatched by man-made sensor devices. Here, we describe an artificial lateral line system based on an optical detection principle. We developed artificial canal neuromasts using MEMS technology including thick film techniques. In this work, we describe the MEMS fabrication and characterize a sensor prototype. Our sensor consists of a silicon chip, a housing, and an electronic circuit. We demonstrate the functionality of our μ-biomimetic flow sensor by analyzing its response to constant water flow and flow fluctuations. Furthermore, we discuss the sensor robustness and sensitivity of our sensor and its suitability for industrial and medical applications. In sum, our sensor can be used for many tasks, e.g. for monitoring fluid flow in medical applications, for detecting leakages in tap water systems or for air and gas flow measurements. Finally, our flow sensor can even be used to improve current knowledge about the functional significance of the fish lateral line.
authors: Institut für Zoologie der Rheinischen Friedrich-Wilhelms-Universität Bonn, Poppelsdorfer Schloss, D-53115 Bonn, Germany. Micro Systems Technology (MST), Center of Advanced European Studies and Research (caesar), D-53175 Bonn, Germany.
authors: Hendrik
authors: H
authors: Herzog
authors: Adrian
authors: A
authors: Klein
authors: Horst
authors: H
authors: Bleckmann
authors: Peter
authors: P
authors: Holik
authors: Sam
authors: S
authors: Schmitz
authors: Georg
authors: G
authors: Siebke
authors: Simon
authors: S
authors: Tätzner
authors: Manfred
authors: M
authors: Lacher
authors: Siegfried
authors: S
authors: Steltenkamp
mesh_terms: D000818:Animals; D032701:Biomimetics / Q000295:instrumentation*; D004129:Dimethylpolysiloxanes / Q000737:chemistry*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D005399:Fishes / Q000502:physiology*; D053403:Lateral Line System / Q000502:physiology*; D008027:Light; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D012031:Refractometry / Q000295:instrumentation; D012212:Rheology / Q000295:instrumentation*; D020349:Surface Plasmon Resonance / Q000295:instrumentation; D014159:Transducers
chemical_list: D004129:Dimethylpolysiloxanes; C013830:baysilon