title: The development of love wave-based humidity sensors incorporating multiple layers.
abstract: A Love wave humidity sensor is developed by using a multilayer structure consisting of PVA/SiO2 layers on an ST-90°X quartz substrate. The theoretical result shows that the sensor with such a two-layer structure can achieve a higher sensitivity and a smaller loss than the structures with a single polymer layer. Comparative experiments are performed for the sensor incorporating PVA/SiO2 layers and the sensor incorporating a PVA layer. The experimental results agree well with the theoretical predication.
authors: Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China. wanglijun12@mails.ucas.ac.cn.
authors: Lijun
authors: L
authors: Wang
authors: Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China. liujs98@hotmail.com.
authors: Jiansheng
authors: J
authors: Liu
authors: Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China. heshitang@mail.ioa.ac.cn.
authors: Shitang
authors: S
authors: He