title: Biosensor for human IgE detection using shear-mode FBAR devices.
abstract: Film bulk acoustic resonators (FBARs) have been evaluated for use as biosensors because of their high sensitivity and small size. This study fabricated a novel human IgE biosensor using shear-mode FBAR devices with c-axis 23°-tilted AlN thin films. Off-axis radio frequency (RF) magnetron sputtering method was used for deposition of c-axis 23°-tilted AlN thin films. The deposition parameters were adopted as working pressure of 5 mTorr, substrate temperature of 300°C, sputtering power of 250 W, and 50 mm distance between off-axis and on-axis. The characteristics of the AlN thin films were investigated by X-ray diffraction and scanning electron microscopy. The frequency response was measured with an HP8720 network analyzer with a CASCADE probe station. The X-ray diffraction revealed (002) preferred wurtzite structure, and the cross-sectional image showed columnar structure with 23°-tilted AlN thin films. In the biosensor, an Au/Cr layer in the FBAR backside cavity was used as the detection layer and the Au surface was modified using self-assembly monolayers (SAMs) method. Then, the antigen and antibody were coated on biosensor through their high specificity property. Finally, the shear-mode FBAR device with k t (2) of 3.18% was obtained, and the average sensitivity for human IgE detection of about 1.425 × 10(5) cm(2)/g was achieved.
authors: Department of Electrical Engineering, National Sun Yat-Sen University, Kaohsiung, 80424 Taiwan.
authors: Ying-Chung
authors: YC
authors: Chen
authors: Department of Electrical Engineering, National Sun Yat-Sen University, Kaohsiung, 80424 Taiwan.
authors: Wei-Che
authors: WC
authors: Shih
authors: Department of Electrical Engineering, National Sun Yat-Sen University, Kaohsiung, 80424 Taiwan.
authors: Wei-Tsai
authors: WT
authors: Chang
authors: Department of Electrical Engineering, National Sun Yat-Sen University, Kaohsiung, 80424 Taiwan.
authors: Chun-Hung
authors: CH
authors: Yang
authors: Department of Computer and Communication, Shu-Te University, Kaohsiung, 82445 Taiwan.
authors: Kuo-Sheng
authors: KS
authors: Kao
authors: Department of Electronic Engineering, De Lin Institute of Technology, Taipei, 23654 Taiwan.
authors: Chien-Chuan
authors: CC
authors: Cheng
keywords: AlN; Biosensor; FBAR; Shear mode