title: High-throughput patterning of photonic structures with tunable periodicity.
abstract: A patterning method termed "RIPPLE" (reactive interface patterning promoted by lithographic electrochemistry) is applied to the fabrication of arrays of dielectric and metallic optical elements. This method uses cyclic voltammetry to impart patterns onto the working electrode of a standard three-electrode electrochemical setup. Using this technique and a template stripping process, periodic arrays of Ag circular Bragg gratings are patterned in a high-throughput fashion over large substrate areas. By varying the scan rate of the cyclically applied voltage ramps, the periodicity of the gratings can be tuned in situ over micrometer and submicrometer length scales. Characterization of the periodic arrays of periodic gratings identified point-like and annular scattering modes at different planes above the structured surface. Facile, reliable, and rapid patterning techniques like RIPPLE may enable the high-throughput and low-cost fabrication of photonic elements and metasurfaces for energy conversion and sensing applications.
authors: Department of Chemistry and Chemical Biology, Harvard University, Cambridge, MA 02138; tkempa@fas.harvard.edu hgpark@korea.ac.kr dnocera@fas.harvard.edu.
authors: Thomas J
authors: TJ
authors: Kempa
authors: Department of Chemistry and Chemical Biology, Harvard University, Cambridge, MA 02138;
authors: D Kwabena
authors: DK
authors: Bediako
authors: Department of Applied Physics, Kyung Hee University, Gyeonggi-do 446-701, Republic of Korea; and.
authors: Sun-Kyung
authors: SK
authors: Kim
authors: Department of Physics, Korea University, Seoul 136-701, Republic of Korea tkempa@fas.harvard.edu hgpark@korea.ac.kr dnocera@fas.harvard.edu.
authors: Hong-Gyu
authors: HG
authors: Park
authors: Department of Chemistry and Chemical Biology, Harvard University, Cambridge, MA 02138; tkempa@fas.harvard.edu hgpark@korea.ac.kr dnocera@fas.harvard.edu.
authors: Daniel G
authors: DG
authors: Nocera
keywords: electrochemistry; nanofabrication; nanopattern; photonics; silicon