title: Surface-modified piezoresistive nanocomposite flexible pressure sensors with high sensitivity and wide linearity.
abstract: Flexible pressure sensors working in a low pressure range (<10 kPa) have become an important part of recent research due to their applications in "artificial skin", foldable electronics and so on. Several efforts have been focused on the high sensitivity of devices with the neglect of linearity which is essential for real applications. Here, we present a device with a new Gaussian random distribution contact surface profile and a novel contact and piezoresistive composite working principle by numerical simulation, which predicts the combination of wide linearity and high sensitivity. With the modified surfaces' contact effect and the piezoresistive capability of these nanocomposite structures, an outstanding linearity can be achieved all along the measuring scale from 0 to 14 kPa, with a high sensitivity around 13.8 kPa(-1). The random distribution surface also provides the device with fine stability and reproducibility, which are validated in the test.
authors.affiliation: Institute of Microelectronics, Tsinghua University, Beijing 100084, China. RenTL@tsinghua.edu.cn.
authors.forename: Yi
authors.initials: Y
authors.lastname: Shu
authors.forename: He
authors.initials: H
authors.lastname: Tian
authors.forename: Yi
authors.initials: Y
authors.lastname: Yang
authors.forename: Cheng
authors.initials: C
authors.lastname: Li
authors.forename: Yalong
authors.initials: Y
authors.lastname: Cui
authors.forename: Wentian
authors.initials: W
authors.lastname: Mi
authors.forename: Yuxing
authors.initials: Y
authors.lastname: Li
authors.forename: Zhe
authors.initials: Z
authors.lastname: Wang
authors.forename: Ningqin
authors.initials: N
authors.lastname: Deng
authors.forename: Bo
authors.initials: B
authors.lastname: Peng
authors.forename: Tian-Ling
authors.initials: TL
authors.lastname: Ren