title: Multiplexed gas sensor based on heterogeneous metal oxide nanomaterial array enabled by localized liquid-phase reaction.
abstract: A novel method for the selective and localized synthesis of nanomaterials and their in situ integration based on serial combination of localized liquid-phase reaction has been developed for the fabrication of heterogeneous nanomaterial array. This method provides simple, fast and cost-effective fabrication process by using well-controlled thermal energy and therefore solves the challenging problems of assembly and integration of heterogeneous nanomaterial array in functional microelectronic devices. We have fabricated a parallel array of TiO2 nanotubes, CuO nanospikes, and ZnO nanowires, which exhibited adequate gas sensing response. Furthermore, we could approximately determine individual gas concentrations in a mixture gas consisting of 0-2 ppm of NO2 and 0-800 ppm of CO gas species by analyzing multiple data from an array of heterogeneous sensing nanomaterials.
authors.affiliation: †Mechanical Engineering Department, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 305-701, South Korea.|‡KI for the NanoCentury, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 305-701, South Korea.
authors.forename: Daejong
authors.initials: D
authors.lastname: Yang
authors.affiliation: †Mechanical Engineering Department, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 305-701, South Korea.|‡KI for the NanoCentury, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 305-701, South Korea.
authors.forename: M Kasyful
authors.initials: MK
authors.lastname: Fuadi
authors.affiliation: †Mechanical Engineering Department, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 305-701, South Korea.|‡KI for the NanoCentury, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 305-701, South Korea.
authors.forename: Kyungnam
authors.initials: K
authors.lastname: Kang
authors.affiliation: †Mechanical Engineering Department, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 305-701, South Korea.|§Korea Electric Power Research Institute (KEPRI), Korea Electric Power Corporation (KEPCO), Daejeon 300-760, South Korea.
authors.forename: Donghwan
authors.initials: D
authors.lastname: Kim
authors.affiliation: ∥Systems Research Lab, Hewlett-Packard Laboratory, Palo Alto, California 94304-1126, United States.
authors.forename: Zhiyong
authors.initials: Z
authors.lastname: Li
authors.affiliation: †Mechanical Engineering Department, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 305-701, South Korea.|‡KI for the NanoCentury, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 305-701, South Korea.
authors.forename: Inkyu
authors.initials: I
authors.lastname: Park
keywords: heterogeneous nanomaterial array; local synthesis; mixture gas sensor; one-dimensional nanomaterial; semiconductor nanomaterial