title: Optimization of capacitive acoustic resonant sensor using numerical simulation and design of experiment.
abstract: Optimization of the acoustic resonant sensor requires a clear understanding of how the output responses of the sensor are affected by the variation of different factors. During this work, output responses of a capacitive acoustic transducer, such as membrane displacement, quality factor, and capacitance variation, are considered to evaluate the sensor design. The six device parameters taken into consideration are membrane radius, backplate radius, cavity height, air gap, membrane tension, and membrane thickness. The effects of factors on the output responses of the transducer are investigated using an integrated methodology that combines numerical simulation and design of experiments (DOE). A series of numerical experiments are conducted to obtain output responses for different combinations of device parameters using finite element methods (FEM). Response surface method is used to identify the significant factors and to develop the empirical models for the output responses. Finally, these results are utilized to calculate the optimum device parameters using multi-criteria optimization with desirability function. Thereafter, the validating experiments are designed and deployed using the numerical simulation to crosscheck the responses.
authors.affiliation: Centre Microélectronique de Provence, Ecole des Mines de Saint-Etienne, Gardanne 13541, France. haque@emse.fr.|TAGSYS RFID, 13600 La Ciotat, France. haque@emse.fr.
authors.forename: Rubaiyet Iftekharul
authors.initials: RI
authors.lastname: Haque
authors.affiliation: TAGSYS RFID, 13600 La Ciotat, France. christophe.loussert@tagsysrfid.com.
authors.forename: Christophe
authors.initials: C
authors.lastname: Loussert
authors.affiliation: Aix-Marseille Université, LISA EA 4672, 13397 Marseille Cedex 20, France. michelle.sergent@univ-amu.fr.
authors.forename: Michelle
authors.initials: M
authors.lastname: Sergent
authors.affiliation: Centre Microélectronique de Provence, Ecole des Mines de Saint-Etienne, Gardanne 13541, France. benaben@emse.fr.
authors.forename: Patrick
authors.initials: P
authors.lastname: Benaben
authors.affiliation: Centre Microélectronique de Provence, Ecole des Mines de Saint-Etienne, Gardanne 13541, France. boddaert@emse.fr.
authors.forename: Xavier
authors.initials: X
authors.lastname: Boddaert