Hard X-ray nanofocusing using adaptive focusing optics based on piezoelectric deformable mirrors.
An adaptive Kirkpatrick-Baez mirror focusing optics based on piezoelectric deformable mirrors was constructed at SPring-8 and its focusing performance characteristics were demonstrated. By adjusting the voltages applied to the deformable mirrors, the shape errors (compared to a target elliptical shape) were finely corrected on the basis of the mirror shape determined using the pencil-beam method, which is a type of at-wavelength figure metrology in the X-ray region. The mirror shapes were controlled with a peak-to-valley height accuracy of 2.5 nm. A focused beam with an intensity profile having a full width at half maximum of 110 × 65 nm (V × H) was achieved at an X-ray energy of 10 keV.
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan.
Takumi
T
Goto
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan.
Hiroki
H
Nakamori
Research Institute for Electronic Science, Hokkaido University, Kita 21 Nishi 10, Kita-ku, Sapporo 001-0021, Japan.
Takashi
T
Kimura
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan.
Yasuhisa
Y
Sano
SPring-8/RIKEN, 1-1-1 Kouto, Sayo, Hyogo 679-5198, Japan.
Yoshiki
Y
Kohmura
SPring-8/RIKEN, 1-1-1 Kouto, Sayo, Hyogo 679-5198, Japan.
Kenji
K
Tamasaku
SPring-8/RIKEN, 1-1-1 Kouto, Sayo, Hyogo 679-5198, Japan.
Makina
M
Yabashi
SPring-8/RIKEN, 1-1-1 Kouto, Sayo, Hyogo 679-5198, Japan.
Tetsuya
T
Ishikawa
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan.
Kazuto
K
Yamauchi
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan.
Satoshi
S
Matsuyama