Ultrahigh-Q silicon resonators in a planarized local oxidation of silicon platform.
We describe a platform for the fabrication of smooth waveguides and ultrahigh-quality-factor (Q factor) silicon resonators using a modified local oxidation of silicon (LOCOS) technique. Unlike the conventional LOCOS process, our approach allows the fabrication of nearly planarized structures, supporting a multilayer silicon photonics configuration. Using this approach we demonstrate the fabrication and the characterization of a microdisk resonator with an intrinsic Q factor that is one of the highest Q factors achieved with a compact silicon-on-insulator platform.
Alex
A
Naiman
Boris
B
Desiatov
Liron
L
Stern
Noa
N
Mazurski
Joseph
J
Shappir
Uriel
U
Levy
D055096:Optical Devices; D010084:Oxidation-Reduction; D012825:Silicon / Q000737:chemistry*
D012825:Silicon