Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion.
A dual-servo nanopositioning stage for high-accuracy rotary motion is presented in this article. A piezoelectric actuator is employed to achieve both the coarse motion and fine motion. By the coarse motion and fine motion, the designed dual-servo nanopositioning stage can obtain large-range rotary motion and high resolution simultaneously. The configuration and motion principle of the dual-servo nanopositioning stage were illustrated and discussed. A prototype was fabricated to test the working performance and the results demonstrate that the maximum speed of the presented dual-servo nanopositioning stage is 32,000 μrad/s and the rotary resolution is about 1.54 μrad. The working performance confirms the feasibility of the dual-servo nanopositioning stage.
School of Mechanical Science and Engineering, Jilin University, Changchun 130025, China.
Jianping
J
Li
School of Mechanical Science and Engineering, Jilin University, Changchun 130025, China.
Xiaoqin
X
Zhou
School of Mechanical Science and Engineering, Jilin University, Changchun 130025, China.
Hongwei
H
Zhao
School of Mechanical Science and Engineering, Jilin University, Changchun 130025, China.
Mingkun
M
Shao
School of Mechanical Science and Engineering, Jilin University, Changchun 130025, China.
Zunqiang
Z
Fan
School of Mechanical Science and Engineering, Jilin University, Changchun 130025, China.
Hui
H
Liu