Quantum dot made in metal oxide silicon-nanowire field effect transistor working at room temperature.
We report the observation of an atomic like behavior from T = 4.2 K up to room temperature in n- and p-type Ω-gate silicon nanowire (NW) transistors. For that purpose, we modified the design of a NW transistor and introduced long spacers between the source/drain and the channel in order to separate the channel from the electrodes. The channel was made extremely small (3.4 nm in diameter with 10 nm gate length) with a thick gate oxide (7 nm) in order to enhance the Coulomb repulsion between carriers, which can be as large as 200 meV when surface roughness promotes charge confinement. Parasitic stochastic Coulomb blockade effect can be eliminated in our devices by choosing proper control voltages. Moreover, the quantum dot can be tuned so that the resonant current at T = 4.2 K exceeds that at room temperature.
†Université Grenoble Alpes, F-38000 Grenoble, France.|‡CEA, LETI MINATEC campus, F-38054 Grenoble, France.
Romain
R
Lavieville
†Université Grenoble Alpes, F-38000 Grenoble, France.|‡CEA, LETI MINATEC campus, F-38054 Grenoble, France.
François
F
Triozon
†Université Grenoble Alpes, F-38000 Grenoble, France.|‡CEA, LETI MINATEC campus, F-38054 Grenoble, France.
Sylvain
S
Barraud
§Université Grenoble Alpes, INAC-SPSMS, F-38000 Grenoble, France.|∥CEA, INAC-SPSMS, F-38054 Grenoble, France.
Andrea
A
Corna
§Université Grenoble Alpes, INAC-SPSMS, F-38000 Grenoble, France.|∥CEA, INAC-SPSMS, F-38054 Grenoble, France.
Xavier
X
Jehl
§Université Grenoble Alpes, INAC-SPSMS, F-38000 Grenoble, France.|∥CEA, INAC-SPSMS, F-38054 Grenoble, France.
Marc
M
Sanquer
⊥Université Grenoble Alpes, INAC-SPMM, F-38000 Grenoble, France.|#CEA, INAC-SPMM, F-38054 Grenoble, France.
Jing
J
Li
⊥Université Grenoble Alpes, INAC-SPMM, F-38000 Grenoble, France.|#CEA, INAC-SPMM, F-38054 Grenoble, France.
Antoine
A
Abisset
⊥Université Grenoble Alpes, INAC-SPMM, F-38000 Grenoble, France.|#CEA, INAC-SPMM, F-38054 Grenoble, France.
Ivan
I
Duchemin
⊥Université Grenoble Alpes, INAC-SPMM, F-38000 Grenoble, France.|#CEA, INAC-SPMM, F-38054 Grenoble, France.
Yann-Michel
YM
Niquet
Silicon nanowire; artificial atom; quantum dot; silicon single electron transistor