Fabrication and characterization of high-contrast mid-infrared GeTe₄ channel waveguides.
We report the fabrication and characterization of high index contrast (Δn≈0.9) GeTe4 channel waveguides on ZnSe substrate for evanescent-field-based biosensing applications in the mid-IR spectral region. GeTe4 films were deposited by RF sputtering and characterized for their structure, composition, transparency, and dispersion. The lift-off technique was used to pattern the waveguide channels. Waveguiding from 2.5-3.7 and 6.4-7.5 μm was demonstrated, and mode intensity profile and estimated propagation losses are given for the 3.5 μm wavelength.
Vinita
V
Mittal
Armen
A
Aghajani
Lewis G
LG
Carpenter
James C
JC
Gates
Jonathan
J
Butement
Peter G R
PG
Smith
James S
JS
Wilkinson
Ganapathy Senthil
GS
Murugan
D004867:Equipment Design; D005857:Germanium; D007259:Infrared Rays; D061848:Optical Imaging / Q000295:instrumentation / Q000379:methods*; D055620:Optical Phenomena; D013691:Tellurium
D005857:Germanium; D013691:Tellurium