Model based control of dynamic atomic force microscope.
A model-based robust control approach is proposed that significantly improves imaging bandwidth for the dynamic mode atomic force microscopy. A model for cantilever oscillation amplitude and phase dynamics is derived and used for the control design. In particular, the control design is based on a linearized model and robust H(∞) control theory. This design yields a significant improvement when compared to the conventional proportional-integral designs and verified by experiments.
Department of Mechanical System Design Engineering, Seoul National University of Science and Technology, Seoul 139-743, South Korea.
Chibum
C
Lee
Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, USA.
Srinivasa M
SM
Salapaka