title: CrAIN film deposited by magnetron sputtering for the inkjet printer head.
abstract: CrAIN film has advantages of stability and multifunctionality over the commercial TaN0.8. This study investigated the characteristics of CrAIN film deposited by radio frequency magnetron sputtering as a function of Al content after deposition heat treatment. With a 600 degrees C heat treatment and 20% Al content, the low temperature coefficient of resistance (-2670.6 ppm/k), high oxidation resistance, and thermal conductivity were acquired. This was found due to the high-density columnar NaCI structure with 20% Al and the recrystallization utilized by heat treatment.
authors.forename: Seon-Cheol
authors.initials: SC
authors.lastname: Moon
authors.forename: Sang Ho
authors.initials: SH
authors.lastname: Kim