title: Achromatic and high-resolution full-field X-ray microscopy based on total-reflection mirrors.
abstract: We developed an achromatic and high-resolution full-field X-ray microscope based on advanced Kirkpatrick-Baez mirror optics that comprises two pairs of elliptical mirrors and hyperbolic mirrors utilizing the total reflection of X-rays. Performance tests to investigate the spatial resolution and chromatic aberration were performed at SPring-8. The microscope clearly resolved the pattern with ~100-nm feature size. Imaging the pattern by changing the X-ray energy revealed achromatism in the wide energy range of 8-11 keV.
authors.forename: Satoshi
authors.initials: S
authors.lastname: Matsuyama
authors.forename: Yoji
authors.initials: Y
authors.lastname: Emi
authors.forename: Hidetoshi
authors.initials: H
authors.lastname: Kino
authors.forename: Yoshiki
authors.initials: Y
authors.lastname: Kohmura
authors.forename: Makina
authors.initials: M
authors.lastname: Yabashi
authors.forename: Tetsuya
authors.initials: T
authors.lastname: Ishikawa
authors.forename: Kazuto
authors.initials: K
authors.lastname: Yamauchi