title: 300-mW narrow-linewidth deep-ultraviolet light generation at 193 nm by frequency mixing between Yb-hybrid and Er-fiber lasers.
abstract: A narrow-linewidth, high average power deep-ultraviolet (DUV) coherent laser emitting at 193 nm is demonstrated by frequency mixing a Yb-hybrid laser with an Er-fiber laser. The Yb-hybrid laser consists of Yb-fiber lasers and an Yb:YAG amplifier. The average output power of the 193 nm laser is 310 mW at 6 kHz, which corresponds to a pulse energy of 51 μJ. To the best of our knowledge, this is the highest average power and pulse energy ever reported for a narrow-linewidth 193 nm light generated by a combination of solid-state and fiber lasers with frequency mixing. We believe this laser will be beneficial for the application of interference lithography by seeding an injection-locking ArF eximer laser.
authors.forename: Hongwen
authors.initials: H
authors.lastname: Xuan
authors.forename: Zhigang
authors.initials: Z
authors.lastname: Zhao
authors.forename: Hironori
authors.initials: H
authors.lastname: Igarashi
authors.forename: Shinji
authors.initials: S
authors.lastname: Ito
authors.forename: Kouji
authors.initials: K
authors.lastname: Kakizaki
authors.forename: Yohei
authors.initials: Y
authors.lastname: Kobayashi