title: Optical properties and residual stress in Nb-Si composite films prepared by magnetron cosputtering.
abstract: This paper investigates Nb-Si metal composite films with various proportions of niobium in comparison to pure Nb films. Films were prepared by two-target RF-DC magnetron cosputtering deposition. The optical properties and residual stress were analyzed. A composition of Nb(0.74)Si(0.26) was chosen toward the design and fabrication of solar absorbing coatings having a high absorption in a broad wavelength range, a low residual stress, and suitable optical constants. The layer thicknesses and absorption characteristics of the Nb-Si composite films adhere more closely to the design than other coatings made of dielectric film materials.
authors.forename: Chien-Jen
authors.initials: CJ
authors.lastname: Tang
authors.forename: Glen Andrew
authors.initials: GA
authors.lastname: Porter
authors.forename: Cheng-Chung
authors.initials: CC
authors.lastname: Jaing
authors.forename: Fang-Ming
authors.initials: FM
authors.lastname: Tsai