title: Surface modification and characterization of electrosprayed Sn-doped In2O3 thin films.
abstract: We synthesized Sn-doped In2O3 (Indium tin oxide, ITO) thin films using electrospray and spin-coating. Scanning electron microscopy, atomic force spectroscopy, X-ray diffraction, X-ray photoelectron spectroscopy, Hall-effect measurement, and UV-vis spectrophotometry measurements were performed to investigate the morphological, structural, chemical, electrical, and optical properties of the electrosprayed ITO films with a sol-layer coating for surface modification. To obtain the optimum performance of the resultant ITO thin films after surface modification, we heat-treated them at four different temperatures of 450 degrees C (sample A), 550 degrees C (sample B), 650 degrees C (sample C), and 750 degrees C (sample D) using microwave heating. Surface modified ITO thin films calcined at 550 degrees C (sample B) using electrospray and spin-coating are observed to have superior resistivity (9.9 x 10(-3) 2 Ω x cm) and optical transmittance (-92.08%) owing to the improved densification of the ITO surface by spin-coating and the formation of uniform ITO thin films by electrospraying.
authors.forename: Bon-Ryul
authors.initials: BR
authors.lastname: Koo
authors.forename: Hyo-Jin
authors.initials: HJ
authors.lastname: Ahn
mesh_terms: D007204:Indium / Q000737:chemistry*; D008855:Microscopy, Electron, Scanning; D013056:Spectrophotometry, Ultraviolet; D013499:Surface Properties; D014001:Tin / Q000737:chemistry*; D014961:X-Ray Diffraction
chemical_list: D007204:Indium; C047711:indium oxide; D014001:Tin