title: Optimal ADF STEM imaging parameters for tilt-robust image quantification.
abstract: An approach towards experiment design and optimisation is proposed for achieving improved accuracy of ADF STEM quantification. In particular, improved robustness to small sample mis-tilts can be achieved by optimising detector collection and probe convergence angles. A decrease in cross section is seen for tilted samples due to the reduction in channelling, resulting in a quantification error, if this is not taken into account. At a smaller detector collection angle the increased contribution from elastic scattering, which initially increases with tilt, can be used to offset the decrease in the TDS signal.
authors.affiliation: Department of Materials, University of Oxford, Parks Road OX1 3PH, UK. Electronic address: katherine.macarthur@materials.ox.ac.uk.
authors.forename: K E
authors.initials: KE
authors.lastname: MacArthur
authors.affiliation: School of Physics, University of Melbourne, Parkville, Victoria 2010, Australia.
authors.forename: A J
authors.initials: AJ
authors.lastname: D'Alfonso
authors.affiliation: Johnson Matthey Technology Centre, Blounts Court Road, Sonning Common, Reading RG4 9NH, UK.
authors.forename: D
authors.initials: D
authors.lastname: Ozkaya
authors.affiliation: School of Physics, University of Melbourne, Parkville, Victoria 2010, Australia.
authors.forename: L J
authors.initials: LJ
authors.lastname: Allen
authors.affiliation: Department of Materials, University of Oxford, Parks Road OX1 3PH, UK.
authors.forename: P D
authors.initials: PD
authors.lastname: Nellist
keywords: Electron channelling; Quantitative ADF; Sample tilt