title: Dense arrays of millimeter-sized glass lenses fabricated at wafer-level.
abstract: This paper presents the study of a fabrication technique of lenses arrays based on the reflow of glass inside cylindrical silicon cavities. Lenses whose sizes are out of the microfabrication standards are considered. In particular, the case of high fill factor arrays is discussed in detail since the proximity between lenses generates undesired effects. These effects, not experienced when lenses are sufficiently separated so that they can be considered as single items, are corrected by properly designing the silicon cavities. Complete topographic as well as optical characterizations are reported. The compatibility of materials with Micro-Opto-Electromechanical Systems (MOEMS) integration processes makes this technology attractive for the miniaturization of inspection systems, especially those devoted to imaging.
authors.forename: Jorge
authors.initials: J
authors.lastname: Albero
authors.forename: Stéphane
authors.initials: S
authors.lastname: Perrin
authors.forename: Sylwester
authors.initials: S
authors.lastname: Bargiel
authors.forename: Nicolas
authors.initials: N
authors.lastname: Passilly
authors.forename: Maciej
authors.initials: M
authors.lastname: Baranski
authors.forename: Ludovic
authors.initials: L
authors.lastname: Gauthier-Manuel
authors.forename: Florent
authors.initials: F
authors.lastname: Bernard
authors.forename: Justine
authors.initials: J
authors.lastname: Lullin
authors.forename: Luc
authors.initials: L
authors.lastname: Froehly
authors.forename: Johann
authors.initials: J
authors.lastname: Krauter
authors.forename: Wolfgang
authors.initials: W
authors.lastname: Osten
authors.forename: Christophe
authors.initials: C
authors.lastname: Gorecki