title: Titanium dioxide slot waveguides for visible wavelengths.
abstract: We present the first, to our knowledge, experimental demonstration of a titanium dioxide slot waveguide operating in the visible range of light. Ring resonators based on slot waveguides were designed, fabricated, and characterized for λ≃650  nm. The fabrication method includes atomic layer deposition, electron beam lithography, and reactive ion etching. The required narrow slot widths of a few tens of nanometers were achieved by using a conformal atomic layer re-coating technique. This unique feature-size-reduction technique was applied after the final etching step.
authors.forename: Markus
authors.initials: M
authors.lastname: Häyrinen
authors.forename: Matthieu
authors.initials: M
authors.lastname: Roussey
authors.forename: Antti
authors.initials: A
authors.lastname: Säynätjoki
authors.forename: Markku
authors.initials: M
authors.lastname: Kuittinen
authors.forename: Seppo
authors.initials: S
authors.lastname: Honkanen