title: Graphitic Patterns on CVD Diamond Plate as Microheating/Thermometer Devices.
abstract: A simple compact temperature sensor and microheater in a wide temperature range has been developed, realizing a laser-patterned resistive structure on the surface of a synthetic polycrystalline diamond plate. Imaging and spectroscopy techniques used to investigate morphology, structure, and composition of the pattern showed that it incorporates different nondiamond carbon phases. Transport experiments revealed the semiconducting behavior of this microresistor. Thermal power measurements versus temperature are presented. A possible application of this device that may easily match compact experimental layouts avoiding both thermal anchoring offset and mechanical stress between sample and sensor is discussed. The patterned structure undergoes testing as a microthermometer, providing fast response and excellent stability versus time. It exhibits a good sensitivity that coupled to an easy calibration procedure minimizes errors and guarantees high accuracy. Plot of temperature versus input power of the resistive patterned line used as microheater shows a linear behavior in an extended temperature range.
authors.affiliation: †INFN- National Laboratory of Frascati, Via Enrico Fermi 40, 00044 Roma, Italy.
authors.forename: Daniele
authors.initials: D
authors.lastname: Di Gioacchino
authors.affiliation: †INFN- National Laboratory of Frascati, Via Enrico Fermi 40, 00044 Roma, Italy.|‡Rome International Center for Materials Science Superstripes, Via dei Sabelli 119A, 00185 Roma, Italy.
authors.forename: Augusto
authors.initials: A
authors.lastname: Marcelli
authors.affiliation: †INFN- National Laboratory of Frascati, Via Enrico Fermi 40, 00044 Roma, Italy.
authors.forename: Alessandro
authors.initials: A
authors.lastname: Puri
authors.affiliation: ∥University of Firenze, Physics and Astronomy Department, Largo Enrico Fermi 2, 50125 Florence, Italy.
authors.forename: Antonio
authors.initials: A
authors.lastname: De Sio
authors.affiliation: †INFN- National Laboratory of Frascati, Via Enrico Fermi 40, 00044 Roma, Italy.
authors.forename: Mariangela
authors.initials: M
authors.lastname: Cestelli Guidi
authors.affiliation: ⊥University of Camerino, Science and Technology Faculty, Via Madonna delle Carceri 9, 62032 Camerino, Macerata, Italy.
authors.forename: Yimamu
authors.initials: Y
authors.lastname: Kamili
authors.affiliation: §Department of Geological Science, University of Roma Tre, Largo San Leonardo Murialdo 1, 00146 Roma, Italy.
authors.forename: Giancarlo
authors.initials: G
authors.lastname: Della Ventura
authors.affiliation: #IFN- Institute for Photonic and Nanotechnologies, Via Cineto Romano 32, 00156 Rome, Italy.
authors.forename: Andrea
authors.initials: A
authors.lastname: Notargiacomo
authors.affiliation: ∇CNR-IOM and University of Rome Sapienza, Piazzale Aldo Moro 5, 00185 Rome, Italy.
authors.forename: Paolo
authors.initials: P
authors.lastname: Postorino
authors.affiliation: ∇CNR-IOM and University of Rome Sapienza, Piazzale Aldo Moro 5, 00185 Rome, Italy.
authors.forename: Sara
authors.initials: S
authors.lastname: Mangialardo
authors.affiliation: ○Diamond Materials GmbH, Hans-Bunte-Strasse 19, 79108 Freiburg, Germany.
authors.forename: Eckhard
authors.initials: E
authors.lastname: Woerner
authors.affiliation: †INFN- National Laboratory of Frascati, Via Enrico Fermi 40, 00044 Roma, Italy.|∥University of Firenze, Physics and Astronomy Department, Largo Enrico Fermi 2, 50125 Florence, Italy.
authors.forename: Emanuele
authors.initials: E
authors.lastname: Pace
keywords: CVD diamond; graphitic planar structure; laser patterning; microheater; microthermometer