title: Stencil nano lithography based on a nanoscale polymer shadow mask: towards organic nanoelectronics.
abstract: A stencil lithography technique has been developed to fabricate organic-material-based electronic devices with sub-micron resolution. Suspended polymethylmethacrylate (PMMA) membranes were used as shadow masks for defining organic channels and top electrodes. Arrays of pentacene field effect transistors (FETs) with various channel lengths from 50 μm down to 500 nm were successfully produced from the same batch using this technique. Electrical transport measurements showed that the electrical contacts of all devices were stable and the normalized contact resistances were much lower than previously studied organic FETs. Scaling effects, originating from the bulk space charge current, were investigated by analyzing the channel-length-dependent mobility and hysteresis behaviors. This novel lithography method provides a reliable means for studying the fundamental transport properties of organic materials at the nanoscale as well as enabling potential applications requiring the fabrication of integrated organic nanoelectronic devices.
authors.affiliation: Division of Quantum Phases and Devices, School of Physics, Konkuk University, 143-701, Seoul, Korea.
authors.forename: Hoyeol
authors.initials: H
authors.lastname: Yun
authors.affiliation: Department of Chemistry, Konkuk University, 143-701, Seoul, Korea.
authors.forename: Sangwook
authors.initials: S
authors.lastname: Kim
authors.affiliation: Division of Quantum Phases and Devices, School of Physics, Konkuk University, 143-701, Seoul, Korea.
authors.forename: Hakseong
authors.initials: H
authors.lastname: Kim
authors.affiliation: Department of Chemistry, Konkuk University, 143-701, Seoul, Korea.
authors.forename: Junghyun
authors.initials: J
authors.lastname: Lee
authors.affiliation: Division of Quantum Phases and Devices, School of Physics, Konkuk University, 143-701, Seoul, Korea.
authors.forename: Kirstie
authors.initials: K
authors.lastname: McAllister
authors.affiliation: Department of Organic and Nano System Engineering, Konkuk University, 143-701, Seoul, Korea.
authors.forename: Junhyung
authors.initials: J
authors.lastname: Kim
authors.affiliation: Department of Chemistry, Konkuk University, 143-701, Seoul, Korea.
authors.forename: Sengmoon
authors.initials: S
authors.lastname: Pyo
authors.affiliation: Department of Physics, Pohang University of Science and Technology, Pohang, Gyungbuk 790-784, Korea.
authors.forename: Jun
authors.initials: J
authors.lastname: Sung Kim
authors.affiliation: 1] Division of Quantum Phases and Devices, School of Physics, Konkuk University, 143-701, Seoul, Korea [2] EaStCHEM, School of Chemistry, University of Edinburgh, David Brewster Road, Edinburgh EH9 3FJ, United Kingdom.
authors.forename: Eleanor E B
authors.initials: EE
authors.lastname: Campbell
authors.affiliation: Department of Organic and Nano System Engineering, Konkuk University, 143-701, Seoul, Korea.
authors.forename: Wi
authors.initials: W
authors.lastname: Hyoung Lee
authors.affiliation: Division of Quantum Phases and Devices, School of Physics, Konkuk University, 143-701, Seoul, Korea.
authors.forename: Sang
authors.initials: S
authors.lastname: Wook Lee