title: DNA-functionalized silicon nitride nanopores for sequence-specific recognition of DNA biosensor.
abstract: Nanopores have been proven to be novel and versatile single-molecule sensors for individual unlabeled biopolymer detection and characterization. In the present study, a relatively large silicon nitride (Si3N4) nanopore with a diameter of approximately 60 nm was fabricated successfully using a focused Ga ion beam (FIB). We demonstrated a simple ex situ silanization procedure to control the size and functionality of solid-state nanopores. The presented results show that by varying the silanization time, it is possible to adjust the efficiency of probe molecule attachment, thus shrinking the pore to the chosen size, while introducing selective sensing probes. The functionalization of nanopores was verified by analysis of field-emission scanning electron microscopy (FESEM), energy-dispersive X-ray spectroscopy (EDS), and electrical measurements. Based on this study, we envision that the functionalized silicon nitride nanopores with the DNA probe might provide a biosensing platform for the detection and discrimination of a short single-stranded DNA oligomer of unknown sequences in the future.
authors.affiliation: State Key Laboratory of Bioelectronics, School of Biological Science and Medical Engineering, Southeast University, No. 2 Sipailou, Nanjing, 210096 People's Republic of China.
authors.forename: Shengwei
authors.initials: S
authors.lastname: Tan
authors.affiliation: State Key Laboratory of Bioelectronics, School of Biological Science and Medical Engineering, Southeast University, No. 2 Sipailou, Nanjing, 210096 People's Republic of China.
authors.forename: Lei
authors.initials: L
authors.lastname: Wang
authors.affiliation: State Key Laboratory of Bioelectronics, School of Biological Science and Medical Engineering, Southeast University, No. 2 Sipailou, Nanjing, 210096 People's Republic of China.
authors.forename: Jingjing
authors.initials: J
authors.lastname: Yu
authors.affiliation: State Key Laboratory of Bioelectronics, School of Biological Science and Medical Engineering, Southeast University, No. 2 Sipailou, Nanjing, 210096 People's Republic of China.
authors.forename: Chuanrong
authors.initials: C
authors.lastname: Hou
authors.affiliation: Department of Automation, Tsinghua University, No. 1 Tsinghua Yuan, Beijing, 1000084 People's Republic of China.
authors.forename: Rui
authors.initials: R
authors.lastname: Jiang
authors.affiliation: Jiangxi-OAI Joint Research Institute, Nanchang University, No. 235 Nanjing Dong Lu, Nanchang, 330047 People's Republic of China.
authors.forename: Yanping
authors.initials: Y
authors.lastname: Li
authors.affiliation: State Key Laboratory of Bioelectronics, School of Biological Science and Medical Engineering, Southeast University, No. 2 Sipailou, Nanjing, 210096 People's Republic of China.
authors.forename: Quanjun
authors.initials: Q
authors.lastname: Liu
keywords: Biosensor; DNA hybridization; Sequence-specific recognition; Silicon nitride nanopores