title: Fabrication and optical characterization of large scale membrane containing InP/AlGaInP quantum dots.
abstract: Single-photon sources with a high extraction efficiency are a prerequisite for applications in quantum communication and quantum computation schemes. One promising approach is the fabrication of a quantum dot containing membrane structure in combination with a solid immersion lens and a metal mirror. We have fabricated an 80 nm thin semiconductor membrane with incorporated InP quantum dots in an AlGaInP double hetero barrier via complete substrate removal. In addition, a gold layer was deposited on one side of the membrane acting as a mirror. The optical characterization shows in detail that the unique properties of the quantum dots are preserved in the membrane structure.
authors.affiliation: Institut fuer Halbleiteroptik und Funktionelle Grenzflaechen, University of Stuttgart, Allmandring 3, 70569 Stuttgart, Germany.
authors.forename: H
authors.initials: H
authors.lastname: Niederbracht
authors.forename: F
authors.initials: F
authors.lastname: Hargart
authors.forename: M
authors.initials: M
authors.lastname: Schwartz
authors.forename: E
authors.initials: E
authors.lastname: Koroknay
authors.forename: C A
authors.initials: CA
authors.lastname: Kessler
authors.forename: M
authors.initials: M
authors.lastname: Jetter
authors.forename: P
authors.initials: P
authors.lastname: Michler