title: Characterization of Nanoporous Materials with Atom Probe Tomography.
abstract: A method to characterize open-cell nanoporous materials with atom probe tomography (APT) has been developed. For this, open-cell nanoporous gold with pore diameters of around 50 nm was used as a model system, and filled by electron beam-induced deposition (EBID) to obtain a compact material. Two different EBID precursors were successfully tested-dicobalt octacarbonyl [Co2(CO)8] and diiron nonacarbonyl [Fe2(CO)9]. Penetration and filling depth are sufficient for focused ion beam-based APT sample preparation. With this approach, stable APT analysis of the nanoporous material can be performed. Reconstruction reveals the composition of the deposited precursor and the nanoporous material, as well as chemical information of the interfaces between them. Thus, it is shown that, using an appropriate EBID process, local chemical information in three dimensions with sub-nanometer resolution can be obtained from nanoporous materials using APT.
authors.affiliation: 1Institute of Materials Physics,Georg-August-University Göttingen,Friedrich-Hund Platz 1,37077 Göttingen,Germany.
authors.forename: Björn
authors.initials: B
authors.lastname: Pfeiffer
authors.affiliation: 1Institute of Materials Physics,Georg-August-University Göttingen,Friedrich-Hund Platz 1,37077 Göttingen,Germany.
authors.forename: Torben
authors.initials: T
authors.lastname: Erichsen
authors.affiliation: 1Institute of Materials Physics,Georg-August-University Göttingen,Friedrich-Hund Platz 1,37077 Göttingen,Germany.
authors.forename: Eike
authors.initials: E
authors.lastname: Epler
authors.affiliation: 1Institute of Materials Physics,Georg-August-University Göttingen,Friedrich-Hund Platz 1,37077 Göttingen,Germany.
authors.forename: Cynthia A
authors.initials: CA
authors.lastname: Volkert
authors.affiliation: 2FEI Electron Optics,Achtseweg Noord 5,5651 GG Eindhoven,The Netherlands.
authors.forename: Piet
authors.initials: P
authors.lastname: Trompenaars
authors.affiliation: 1Institute of Materials Physics,Georg-August-University Göttingen,Friedrich-Hund Platz 1,37077 Göttingen,Germany.
authors.forename: Carsten
authors.initials: C
authors.lastname: Nowak
keywords: atom probe tomography; electron beam-induced deposition; nanoporous gold; nanoporous material; tomographic reconstruction