title: Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition.
abstract: Platinum-carbon nanostructures deposited via electron beam induced deposition from MeCpPt(IV)Me3 are purified during a post-deposition electron exposure treatment in a localized oxygen ambient at room temperature. Time-dependent studies demonstrate that the process occurs from the top-down. Electron beam energy and current studies demonstrate that the process is controlled by a confluence of the electron energy loss and oxygen concentration. Furthermore, the experimental results are modeled as a 2nd order reaction which is dependent on both the electron energy loss density and the oxygen concentration. In addition to purification, the post-deposition electron stimulated oxygen purification process enhances the resolution of the EBID process due to the isotropic carbon removal from the as-deposited materials which produces high-fidelity shape retention.
authors.affiliation: Materials Science and Engineering Department, University of Tennessee, Knoxville, TN 37996, USA.
authors.forename: Brett B
authors.initials: BB
authors.lastname: Lewis
authors.affiliation: Materials Science and Engineering Department, University of Tennessee, Knoxville, TN 37996, USA.
authors.forename: Michael G
authors.initials: MG
authors.lastname: Stanford
authors.affiliation: Materials Science and Engineering Department, University of Tennessee, Knoxville, TN 37996, USA ; Nanofabrication Research Laboratory, Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37381, USA.
authors.forename: Jason D
authors.initials: JD
authors.lastname: Fowlkes
authors.affiliation: Nanofabrication Research Laboratory, Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37381, USA.
authors.forename: Kevin
authors.initials: K
authors.lastname: Lester
authors.affiliation: Institute for Electron Microscopy and Nanoanalysis, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria.
authors.forename: Harald
authors.initials: H
authors.lastname: Plank
authors.affiliation: Materials Science and Engineering Department, University of Tennessee, Knoxville, TN 37996, USA ; Nanofabrication Research Laboratory, Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37381, USA.
authors.forename: Philip D
authors.initials: PD
authors.lastname: Rack
keywords: beam induced processing; direct-write; electron beam induced deposition; nano