title: Analysis of HR-STEM theory for thin specimen.
abstract: A compact mathematical model of the STEM imaging process including bright field (BF) and dark field (DF) is derived. This description is valid for thin samples, does not rely on the weak phase approximation and does not require time-consuming simulation of the scanning process. It is well-known that STEM imaging is a nonlinear technique and therefore cannot be described in terms of a sample-independent linear contrast transfer function (CTF). In this work we derive a nonlinear description showing that a STEM image can in fact be described with two terms. Both terms are cross-correlations between a function that is independent of the sample and a function that depends only on the sample. The latter two can be seen as two different objects. These objects directly correspond to two specific cases: the weak phase approximation (WPA) and annular dark field (ADF) imaging, which are known from the literature. We clarify the need for recognizing and understanding what the object is of any particular STEM technique. The model was validated using simulated STEM images and an excellent agreement as well as a reduction in computation time of 3 orders of magnitude was found.
authors.affiliation: FEI Company, Achtseweg Noord 5, PO Box 80066, 5600 KA Eindhoven, The Netherlands.
authors.forename: Eric G T
authors.initials: EG
authors.lastname: Bosch
authors.affiliation: FEI Company, Achtseweg Noord 5, PO Box 80066, 5600 KA Eindhoven, The Netherlands. Electronic address: ivan.lazic@fei.com.
authors.forename: Ivan
authors.initials: I
authors.lastname: Lazić
keywords: Annular dark field imaging; Bright field imaging; Contrast transfer function; Scanning transmission electron microscopy