title: Complex Materials by Atomic Layer Deposition.
abstract: Complex materials are defined as nanostructured materials with combinations of structure and/or composition that lead to performance surpassing the sum of their individual components. There are many methods that can create complex materials; however, atomic layer deposition (ALD) is uniquely suited to control composition and structural parameters at the atomic level. The use of ALD for creating complex insulators, semiconductors, and conductors is discussed, along with its use in novel structural applications.
authors.affiliation: The Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA, 94720, USA.
authors.forename: Adam M
authors.initials: AM
authors.lastname: Schwartzberg
authors.affiliation: The Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA, 94720, USA.
authors.forename: Deirdre
authors.initials: D
authors.lastname: Olynick
keywords: atomic layer deposition; ceramic plasmonics; complex materials; nano laminates; transition metal dichalcogenides