title: Formation of Thick Dense Yttrium Iron Garnet Films Using Aerosol Deposition.
abstract: Aerosol deposition (AD) is a thick-film deposition process that can produce layers up to several hundred micrometers thick with densities greater than 95% of the bulk. The primary advantage of AD is that the deposition takes place entirely at ambient temperature; thereby enabling film growth in material systems with disparate melting temperatures. This report describes in detail the processing steps for preparing the powder and for performing AD using the custom-built system. Representative characterization results are presented from scanning electron microscopy, profilometry, and ferromagnetic resonance for films grown in this system. As a representative overview of the capabilities of the system, focus is given to a sample produced following the described protocol and system setup. Results indicate that this system can successfully deposit 11 µm thick yttrium iron garnet films that are  > 90% of the bulk density during a single 5 min deposition run. A discussion of methods to afford better control of the aerosol and particle selection for improved thickness and roughness variations in the film is provided.
authors.affiliation: Power Electronics Branch, Naval Research Laboratory; scooter.johnson.ctr@nrl.navy.mil.
authors.forename: Scooter D
authors.initials: SD
authors.lastname: Johnson
authors.affiliation: Physics of Electronic Materials Branch, Naval Research Laboratory.
authors.forename: Evan R
authors.initials: ER
authors.lastname: Glaser
authors.affiliation: Power Electronics Branch, Naval Research Laboratory.
authors.forename: Fritz J
authors.initials: FJ
authors.lastname: Kub
authors.affiliation: Power Electronics Branch, Naval Research Laboratory.
authors.forename: Charles R
authors.initials: CR
authors.lastname: Eddy
mesh_terms: D000336:Aerosols / Q000737:chemistry; D058085:Iron Compounds / Q000737:chemistry*; D008855:Microscopy, Electron, Scanning; D013696:Temperature; D015019:Yttrium / Q000737:chemistry*
chemical_list: D000336:Aerosols; D058085:Iron Compounds; D015019:Yttrium