title: Characteristics of the Energetic Igniters Through Integrating B/Ti Nano-Multilayers on TaN Film Bridge.
abstract: The energetic igniters through integrating B/Ti nano-multilayers on tantalum nitride (TaN) ignition bridge are designed and fabricated. The X-ray diffraction (XRD) and temperature coefficient of resistance (TCR) results show that nitrogen content has a great influence on the crystalline structure and TCR. TaN films under nitrogen ratio of 0.99 % exhibit a near-zero TCR value of approximately 10 ppm/°C. The scanning electron microscopy demonstrates that the layered structure of the B/Ti multilayer films is clearly visible with sharp and smooth interfaces. The electrical explosion characteristics employing a capacitor discharge firing set at the optimized charging voltage of 45 V reveal an excellent explosion performance by (B/Ti) n /TaN integration film bridge with small ignition delay time, high explosion temperature, much more bright flash of light, and much large quantities of the ejected product particles than TaN film bridge.
authors.affiliation: State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, 610054, China, yanyichao@uestc.edu.cn.
authors.forename: YiChao
authors.initials: Y
authors.lastname: Yan
authors.forename: Wei
authors.initials: W
authors.lastname: Shi
authors.forename: HongChuan
authors.initials: H
authors.lastname: Jiang
authors.forename: XianYao
authors.initials: X
authors.lastname: Cai
authors.forename: XinWu
authors.initials: X
authors.lastname: Deng
authors.forename: Jie
authors.initials: J
authors.lastname: Xiong
authors.forename: WanLi
authors.initials: W
authors.lastname: Zhang