title: Phase-Engineered Synthesis of Centimeter-Scale 1T'- and 2H-Molybdenum Ditelluride Thin Films.
abstract: We report the synthesis of centimeter-scale, uniform 1T'- and 2H-MoTe2 thin films via the tellurization of Mo thin films. 1T'-MoTe2 was initially grown and converted gradually to 2H-MoTe2 over a prolonged growth time under a Te atmosphere. Maintaining excessive Te was essential for obtaining the stable stoichiometric 2H-MoTe2 phase. Further annealing under a lower partial pressure of Te at the same temperature, followed by a rapid quenching, led to the reverse phase transition from 2H-MoTe2 to 1T'-MoTe2. The orientation of the 2H-MoTe2 film was determined by the tellurization rate. Slow tellurization was the key for obtaining a highly oriented 2H-MoTe2 film over the entire area, while fast tellurization led to a 2H-MoTe2 film with a randomly oriented c-axis.
authors.forename: Jin Cheol
authors.initials: JC
authors.lastname: Park
authors.forename: Seok Joon
authors.initials: SJ
authors.lastname: Yun
authors.forename: Hyun
authors.initials: H
authors.lastname: Kim
authors.forename: Ji-Hoon
authors.initials: JH
authors.lastname: Park
authors.forename: Sang Hoon
authors.initials: SH
authors.lastname: Chae
authors.forename: Sung-Jin
authors.initials: SJ
authors.lastname: An
authors.forename: Jeong-Gyun
authors.initials: JG
authors.lastname: Kim
authors.affiliation: ⊥Institute of Advanced Composite Materials, Korea Institute of Science and Technology (KIST), San101 Eunha-Ri, Bongdong-Eup, Wanju-Gun, Jeollabuk-Do 565-902, Republic of Korea.
authors.forename: Soo Min
authors.initials: SM
authors.lastname: Kim
authors.affiliation: ∥Department of Energy and Materials Engineering, Dongguk University, Seoul 100-715, Republic of Korea.
authors.forename: Ki Kang
authors.initials: KK
authors.lastname: Kim
authors.forename: Young Hee
authors.initials: YH
authors.lastname: Lee
keywords: chemical vapor deposition; molybdenum ditelluride; phase engineering; phase transition; tellurization