title: Localized attachment of carbon nanotubes in microelectronic structures.
abstract: Carbon Nanotubes (CNTs) are covalently modified by the monodiadozium salt of ethylene dianiline; further diazotation of the free amino group permits the selective attachment of these CNTs to the Si or Ti bottom of SiO2 trenches. The symmetrical electrografting of the bottom of the trenches, followed by the attachment of pristine CNTs, is also described.
authors.affiliation: Alchimer 15 rue du Buisson aux Fraises 91300 Massy (France).
authors.forename: Xavier
authors.initials: X
authors.lastname: Joyeux
authors.affiliation: Alchimer 15 rue du Buisson aux Fraises 91300 Massy (France).
authors.forename: Paolo
authors.initials: P
authors.lastname: Mangiagalli
authors.affiliation: Alchimer 15 rue du Buisson aux Fraises 91300 Massy (France). jean.pinson@alchimer.com.
authors.forename: Jean
authors.initials: J
authors.lastname: Pinson
keywords: carbon nanotubes; microelectronics