title: Room temperature direct imprinting of porous glass prepared from phase-separated glass.
abstract: This work describes a room-temperature imprinting of nanoporous glass prepared by selective chemical etching of phase-separated glass. A highly porous (58%) and highly transparent (>90%) porous glass layer can be formed on a transparent phase-separated glass substrate. It is shown that the lateral resolution of the imprinting is a few tens of nanometers. As the porosity increases, the imprint depth increases and reaches up to 90% of the height of the mold pattern. The porous glass has a wider transmittance window (300-2700 nm) and a higher thermal durability (~500 °C) than other materials used for imprinting. The technique has various potential applications such as diffraction optical elements, waveguides, biosensors, and microfluidic devices.
authors.affiliation: Department of Electrical and Electronic Engineering, Graduate School of Engineering, Kobe University, 1-1 Rokkodai, Nada, Kobe, 657-8501, Japan.
authors.forename: Kenji
authors.initials: K
authors.lastname: Imakita
authors.forename: Takeshi
authors.initials: T
authors.lastname: Kamada
authors.forename: Jun-Ichi
authors.initials: J
authors.lastname: Kamatani
authors.forename: Minoru
authors.initials: M
authors.lastname: Mizuhata
authors.forename: Minoru
authors.initials: M
authors.lastname: Fujii