title: Interferometric broadband Fourier spectroscopy with a partially coherent gas-discharge extreme ultraviolet light source.
abstract: Extreme ultraviolet (EUV) spectroscopy is a powerful tool for studying fundamental processes in plasmas as well as for spectral characterization of EUV light sources and EUV optics. However, a simultaneous measurement covering a broadband spectral range is difficult to realize. Here, we propose a method for interferometric broadband Fourier spectroscopy connecting soft x ray and visible spectral ranges with moderate spectral resolution. We present an analytical model to recover the spectrum from a double-slit interferogram. We apply our model for spectral characterization of a partially coherent gas-discharge EUV light source operated with different gases in the spectral range between 10 and 110 nm wavelengths. Our approach allows a simple and fast broadband spectroscopy with fully or partially spatially coherent light sources, for instance, to characterize out-of-band radiation in EUV lithography applications.
authors.forename: Denis
authors.initials: D
authors.lastname: Rudolf
authors.forename: Jan
authors.initials: J
authors.lastname: Bußmann
authors.forename: Michal
authors.initials: M
authors.lastname: Odstrčil
authors.forename: Minjie
authors.initials: M
authors.lastname: Dong
authors.forename: Klaus
authors.initials: K
authors.lastname: Bergmann
authors.forename: Serhiy
authors.initials: S
authors.lastname: Danylyuk
authors.forename: Larissa
authors.initials: L
authors.lastname: Juschkin