title: Large-scale two-dimensional MoS₂ photodetectors by magnetron sputtering.
abstract: We report on the demonstration of photodetectors based on large scale two-dimensional molybdenum disulfide (MoS2) transition metal dichalcogenides. Excellent film uniformity and precise control of the MoS2 thickness down to a monolayer (~0.75nm) were achieved by magnetron sputtering synthesis approach. In particular, the photodetectors integrated with five MoS2 monolayers exhibit a high photoresponsivity of 1.8 A/W, an external quantum efficiency exceeding 260%, and a photodetectivity of ~5 x 10(8) Jones for a wavelength of 850 nm, surpassing the performance of mechanically exfoliated based photodetectors.
authors.forename: Z P
authors.initials: ZP
authors.lastname: Ling
authors.forename: R
authors.initials: R
authors.lastname: Yang
authors.forename: J W
authors.initials: JW
authors.lastname: Chai
authors.forename: S J
authors.initials: SJ
authors.lastname: Wang
authors.forename: W S
authors.initials: WS
authors.lastname: Leong
authors.forename: Y
authors.initials: Y
authors.lastname: Tong
authors.forename: D
authors.initials: D
authors.lastname: Lei
authors.forename: Q
authors.initials: Q
authors.lastname: Zhou
authors.forename: X
authors.initials: X
authors.lastname: Gong
authors.forename: D Z
authors.initials: DZ
authors.lastname: Chi
authors.forename: K-W
authors.initials: KW
authors.lastname: Ang