title: Diffractive microlens integrated into Nb(5)N(6) microbolometers for THz detection.
abstract: We fabricated square diffractive microlens array with five staircases in the THz wave band for Nb5N6microbolometers. With each microlens intergrated with an Nb5N6microbolometer on the same substrate, an array chip was fabricated in the 4 inches silicon wafer. The lens exhibits good focusing and improves the coupling efficiency. The voltage response of the microbolometer integrated with diffractive microlens is 16 times higher than that of the microbolometer fabricated on silicon substrate. The microbolometers used as room-temperature detectors yield a good responsivity of 71 V/W and a noise equivalent power of 1.0 × 10-10W/Hz. The diffractive microlens array features light weight, low absorption loss, and high resolution and can be mass produced using standard micro-fabrication techniques.
authors.forename: Xuecou
authors.initials: X
authors.lastname: Tu
authors.forename: Lin
authors.initials: L
authors.lastname: Kang
authors.forename: Chao
authors.initials: C
authors.lastname: Wan
authors.forename: Lei
authors.initials: L
authors.lastname: Xu
authors.forename: Qingkai
authors.initials: Q
authors.lastname: Mao
authors.forename: Peng
authors.initials: P
authors.lastname: Xiao
authors.forename: Xiaoqing
authors.initials: X
authors.lastname: Jia
authors.forename: Wenbin
authors.initials: W
authors.lastname: Dou
authors.forename: Jian
authors.initials: J
authors.lastname: Chen
authors.forename: Peiheng
authors.initials: P
authors.lastname: Wu
mesh_terms: D003198:Computer Simulation; D007909:Lenses; D009556:Niobium / Q000737:chemistry*; D055095:Optics and Photonics / Q000295:instrumentation*; D055053:Terahertz Radiation; D013997:Time Factors
chemical_list: D009556:Niobium