title: Fabrication of nanoscale lithium niobate waveguides for second-harmonic generation.
abstract: Nanoscale waveguides are basic building blocks of integrated optical devices. Especially, waveguides made from nonlinear optical materials, such as lithium niobate, allow access to a broad range of applications using second-order nonlinear frequency conversion processes. Based on a lithium niobate on insulator substrate, millimeter-long nanoscale waveguides were fabricated with widths as small as 200 nm. The fabrication was done by means of potassium hydroxide-assisted ion-beam-enhanced etching. The waveguides were optically characterized in the near infrared wavelength range showing phase-matched second-harmonic generation.
authors.forename: Reinhard
authors.initials: R
authors.lastname: Geiss
authors.forename: Sina
authors.initials: S
authors.lastname: Saravi
authors.forename: Anton
authors.initials: A
authors.lastname: Sergeyev
authors.forename: Séverine
authors.initials: S
authors.lastname: Diziain
authors.forename: Frank
authors.initials: F
authors.lastname: Setzpfandt
authors.forename: Frank
authors.initials: F
authors.lastname: Schrempel
authors.forename: Rachel
authors.initials: R
authors.lastname: Grange
authors.forename: Ernst-Bernhard
authors.initials: EB
authors.lastname: Kley
authors.forename: Andreas
authors.initials: A
authors.lastname: Tünnermann
authors.forename: Thomas
authors.initials: T
authors.lastname: Pertsch