title: Gentle quantitative measurement of helium density in nanobubbles in silicon by spectrum imaging.
abstract: We propose an original method for the determination of the physical properties of nanometer sized helium bubbles using spectrum imaging in an energy-filtered transmission electron microscope. Helium bubbles synthesized by high fluence implantation and thermal annealing in silicon are investigated. The acquisition parameters are determined to optimize both signal/noise ratio and time. The limitations to the extent of observable areas on a typical sample are explained. The necessary data correction and helium K-edge position measurement procedures are detailed and the accuracy of the method is discussed. Finally helium density maps are obtained and discussed.
authors.affiliation: Institut Pprime, UPR3346 CNRS-Université de Poitiers, 86962 Futuroscope-Chasseneuil, France.
authors.forename: Kévin
authors.initials: K
authors.lastname: Alix
authors.affiliation: Institut Pprime, UPR3346 CNRS-Université de Poitiers, 86962 Futuroscope-Chasseneuil, France. Electronic address: marie-laure.david@univ-poitiers.fr.
authors.forename: Marie-Laure
authors.initials: ML
authors.lastname: David
authors.affiliation: CIME, EPFL-SB-CIME-GE, CH-1015 Lausanne, Switzerland.
authors.forename: Guillaume
authors.initials: G
authors.lastname: Lucas
authors.affiliation: CIME, EPFL-SB-CIME-GE, CH-1015 Lausanne, Switzerland.
authors.forename: Duncan T L
authors.initials: DT
authors.lastname: Alexander
authors.affiliation: Institut Pprime, UPR3346 CNRS-Université de Poitiers, 86962 Futuroscope-Chasseneuil, France.
authors.forename: Frédéric
authors.initials: F
authors.lastname: Pailloux
authors.affiliation: CIME, EPFL-SB-CIME-GE, CH-1015 Lausanne, Switzerland.
authors.forename: Cécile
authors.initials: C
authors.lastname: Hébert
authors.affiliation: Institut Pprime, UPR3346 CNRS-Université de Poitiers, 86962 Futuroscope-Chasseneuil, France.
authors.forename: Laurent
authors.initials: L
authors.lastname: Pizzagalli
keywords: EELS; EFTEM; Helium bubbles; Implantation; Spectrum imaging