title: "Multipoint Force Feedback" Leveling of Massively Parallel Tip Arrays in Scanning Probe Lithography.
abstract: Nanoscale patterning with massively parallel 2D array tips is of significant interest in scanning probe lithography. A challenging task for tip-based large area nanolithography is maintaining parallel tip arrays at the same contact point with a sample substrate in order to pattern a uniform array. Here, polymer pen lithography is demonstrated with a novel leveling method to account for the magnitude and direction of the total applied force of tip arrays by a multipoint force sensing structure integrated into the tip holder. This high-precision approach results in a 0.001° slope of feature edge length variation over 1 cm wide tip arrays. The position sensitive leveling operates in a fully automated manner and is applicable to recently developed scanning probe lithography techniques of various kinds which can enable "desktop nanofabrication."
authors.affiliation: Research and Development Center, Park Systems, Suwon, 443-270, South Korea.
authors.forename: Hanaul
authors.initials: H
authors.lastname: Noh
authors.affiliation: Research and Development Center, Park Systems, Suwon, 443-270, South Korea.|Department of Physics, Korea University, Seoul, 136-713, South Korea.
authors.forename: Goo-Eun
authors.initials: GE
authors.lastname: Jung
authors.affiliation: Research and Development Center, Park Systems, Suwon, 443-270, South Korea.
authors.forename: Sukhyun
authors.initials: S
authors.lastname: Kim
authors.affiliation: Research and Development Center, Park Systems, Suwon, 443-270, South Korea.
authors.forename: Seong-Hun
authors.initials: SH
authors.lastname: Yun
authors.affiliation: Research and Development Center, Park Systems, Suwon, 443-270, South Korea.
authors.forename: Ahjin
authors.initials: A
authors.lastname: Jo
authors.affiliation: Department of Physics, Korea University, Seoul, 136-713, South Korea.
authors.forename: Se-Jong
authors.initials: SJ
authors.lastname: Kahng
authors.affiliation: School of Materials Science and Engineering, Nanyang Technological University, 50 Nanyang, Avenue, 639798, Singapore.|Centre for Biomimetic Sensor Science, Nanyang Technological University, 50 Nanyang Drive, 637553, Singapore.|School of Chemical and Biomedical Engineering, Nanyang Technological University, 62 Nanyang, Drive, 637459, Singapore.
authors.forename: Nam-Joon
authors.initials: NJ
authors.lastname: Cho
authors.affiliation: Research and Development Center, Park Systems, Suwon, 443-270, South Korea.|Advanced Institute of Convergence Technology, Seoul National University, Suwon, 443-270, South Korea.
authors.forename: Sang-Joon
authors.initials: SJ
authors.lastname: Cho
keywords: dip pen nanolithography; leveling; lithography; polymer pen lithography; scanning probe lithography; tip arrays