title: Two-dimensional in situ metrology of X-ray mirrors using the speckle scanning technique.
abstract: In situ metrology overcomes many of the limitations of existing metrology techniques and is capable of exceeding the performance of present-day optics. A novel technique for precisely characterizing an X-ray bimorph mirror and deducing its two-dimensional (2D) slope error map is presented. This technique has also been used to perform fast optimization of a bimorph mirror using the derived 2D piezo response functions. The measured focused beam size was significantly reduced after the optimization, and the slope error map was then verified by using geometrical optics to simulate the focused beam profile. This proposed technique is expected to be valuable for in situ metrology of X-ray mirrors at synchrotron radiation facilities and in astronomical telescopes.
authors.affiliation: Diamond Light Source Ltd, Harwell Science and Innovation Campus, Didcot OX11 0DE, UK.
authors.forename: Hongchang
authors.initials: H
authors.lastname: Wang
authors.affiliation: Diamond Light Source Ltd, Harwell Science and Innovation Campus, Didcot OX11 0DE, UK.
authors.forename: Yogesh
authors.initials: Y
authors.lastname: Kashyap
authors.affiliation: Diamond Light Source Ltd, Harwell Science and Innovation Campus, Didcot OX11 0DE, UK.
authors.forename: David
authors.initials: D
authors.lastname: Laundy
authors.affiliation: Diamond Light Source Ltd, Harwell Science and Innovation Campus, Didcot OX11 0DE, UK.
authors.forename: Kawal
authors.initials: K
authors.lastname: Sawhney
keywords: X-ray optics; metrology; speckle