title: Methodology exploration of specimen preparation for atom probe tomography from nanowires.
abstract: Semiconductor nanowires have been intensively explored for applications in electronics, photonics, energy conversion and storage. A fundamental and quantitative understanding of growth-structure-property relationships is central to applications where nanowires exhibit clear advantages. Atom Probe Tomography (APT) is able to provide 3 dimensional quantitative elemental distributions at atomic-resolution and is therefore unique in understanding the growth-structure-property relationships. However, the specimen preparation with nanowires is extremely challenging. In this paper, two ion beam free specimen preparation methods for APT are presented which are efficient for various nanowires.
authors.affiliation: School of Physics, The University of Sydney, New South Wales 2006, Australia.
authors.forename: Jiangtao
authors.initials: J
authors.lastname: Qu
authors.affiliation: Australian Centre for Microscopy & Microanalysis. The University of Sydney, New South Wales 2006, Australia.
authors.forename: Derek
authors.initials: D
authors.lastname: Wong
authors.affiliation: School of Physics, The University of Sydney, New South Wales 2006, Australia.
authors.forename: Sichao
authors.initials: S
authors.lastname: Du
authors.affiliation: Australian Centre for Microscopy & Microanalysis. The University of Sydney, New South Wales 2006, Australia.
authors.forename: Limei
authors.initials: L
authors.lastname: Yang
authors.affiliation: Australian Centre for Microscopy & Microanalysis. The University of Sydney, New South Wales 2006, Australia; School of Aerospace, Mechanical and Mechatronic Engineering. The University of Sydney, New South Wales 2006, Australia.
authors.forename: Simon
authors.initials: S
authors.lastname: Ringer
authors.affiliation: School of Physics, The University of Sydney, New South Wales 2006, Australia. Electronic address: rongkun.zheng@sydney.edu.au.
authors.forename: Rongkun
authors.initials: R
authors.lastname: Zheng
keywords: Atom Probe Tomography; Focus Ion Beam; Nanowires; Specimen preparation