title: Mass and Force Sensing of an Adsorbate on a Beam Resonator Sensor.
abstract: The mass sensing superiority of a micro-/nano-mechanical resonator sensor over conventional mass spectrometry has been, or at least is being firmly established. Because the sensing mechanism of a mechanical resonator sensor is the shifts of resonant frequencies, how to link the shifts of resonant frequencies with the material properties of an analyte formulates an inverse problem. Besides the analyte/adsorbate mass, many other factors, such as position and axial force, can also cause the shifts of resonant frequencies. The in situ measurement of the adsorbate position and axial force is extremely difficult if not impossible, especially when an adsorbate is as small as a molecule or an atom. Extra instruments are also required. In this study, an inverse problem of using three resonant frequencies to determine the mass, position and axial force is formulated and solved. The accuracy of the inverse problem solving method is demonstrated, and how the method can be used in the real application of a nanomechanical resonator is also discussed. Solving the inverse problem is helpful to the development and application of a mechanical resonator sensor for two reasons: reducing extra experimental equipment and achieving better mass sensing by considering more factors.
authors.affiliation: State Key Laboratory of Nonlinear Mechanics (LNM), Institute of Mechanics, Chinese Academy of Sciences, Beijing 100190, China. zhangyin@lnm.imech.ac.cn.
authors.forename: Yin
authors.initials: Y
authors.lastname: Zhang
authors.affiliation: State Key Laboratory of Nonlinear Mechanics (LNM), Institute of Mechanics, Chinese Academy of Sciences, Beijing 100190, China. yzhao@imech.ac.cn.
authors.forename: Ya-Pu
authors.initials: YP
authors.lastname: Zhao
mesh_terms: D055595:Mechanical Phenomena; D055617:Micro-Electrical-Mechanical Systems / Q000379:methods*; D036103:Nanotechnology / Q000379:methods*
keywords: beam; inverse problem; mechanical resonator sensor; resonant frequency