title: Electrothermally-Actuated Micromirrors with Bimorph Actuators--Bending-Type and Torsion-Type.
abstract: Three different electrothermally-actuated MEMS micromirrors with Cr/Au-Si bimorph actuators are proposed. The devices are fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. (Durham, NC, USA). A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors. Electrothermal actuation has achieved a large angular movement in the micromirrors. Application of an external electric current 0.04 A to the bending-type, restricted-torsion-type, and free-torsion-type mirrors achieved rotation angles of 1.69°, 3.28°, and 3.64°, respectively.
authors.affiliation: Graduate Institute of Photonics and Optoelectronics and the Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan. d98941019@ntu.edu.tw.
authors.forename: Cheng-Hua
authors.initials: CH
authors.lastname: Tsai
authors.affiliation: Graduate Institute of Photonics and Optoelectronics and the Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan. d98941019@ntu.edu.tw.
authors.forename: Chun-Wei
authors.initials: CW
authors.lastname: Tsai
authors.affiliation: Graduate Institute of Photonics and Optoelectronics and the Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan. ckjamesbond@gmail.com.
authors.forename: Hsu-Tang
authors.initials: HT
authors.lastname: Chang
authors.affiliation: Graduate Institute of Photonics and Optoelectronics and the Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan. r01941068@ntu.edu.tw.
authors.forename: Shih-Hsiang
authors.initials: SH
authors.lastname: Liu
authors.affiliation: Graduate Institute of Photonics and Optoelectronics and the Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan. juichetsai@ntu.edu.tw.
authors.forename: Jui-Che
authors.initials: JC
authors.lastname: Tsai
mesh_terms: D004867:Equipment Design; D006358:Hot Temperature; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D012825:Silicon
chemical_list: D012825:Silicon
keywords: electrothermal effects; microelectromechanical devices; silicon on insulator