title: Distributed electrode Mach-Zehnder modulator with double-pass phase shifters and integrated inductors.
abstract: A novel high-speed Mach-Zehnder modulator (MZM) fully integrated into a 90 nm CMOS process is presented. The MZM features 'double-pass' optical phase shifter segments, and the first use of integrated inductors in a 'velocity-matched' distributed-electrode configuration.
authors.forename: D M
authors.initials: DM
authors.lastname: Gill
authors.forename: W M J
authors.initials: WM
authors.lastname: Green
authors.forename: C
authors.initials: C
authors.lastname: Xiong
authors.forename: A
authors.initials: A
authors.lastname: Rylyakov
authors.forename: C
authors.initials: C
authors.lastname: Schow
authors.forename: J
authors.initials: J
authors.lastname: Proesel
authors.forename: J C
authors.initials: JC
authors.lastname: Rosenberg
authors.forename: T
authors.initials: T
authors.lastname: Barwicz
authors.forename: M
authors.initials: M
authors.lastname: Khater
authors.forename: S
authors.initials: S
authors.lastname: Assefa
authors.forename: S M
authors.initials: SM
authors.lastname: Shank
authors.forename: C
authors.initials: C
authors.lastname: Reinholm
authors.forename: E
authors.initials: E
authors.lastname: Kiewra
authors.forename: S
authors.initials: S
authors.lastname: Kamlapurkar
authors.forename: Y A
authors.initials: YA
authors.lastname: Vlasov