title: A Wireless Passive LC Resonant Sensor Based on LTCC under High-Temperature/Pressure Environments.
abstract: In this work, a wireless passive LC resonant sensor based on DuPont 951 ceramic is proposed and tested in a developed high-temperature/pressure complex environment. The test results show that the measured resonant frequency varies approximately linearly with the applied pressure; simultaneously, high temperature causes pressure signal drift and changes the response sensitivity. Through the theoretical analysis of the sensor structure model, it is found that the increase in the dielectric constant and the decrease in the Young's modulus of DuPont 951 ceramic are the main causes that affect the pressure signal in high-temperature measurement. Through calculations, the Young's modulus of DuPont 951 ceramic is found to decrease rapidly from 120 GPa to 65 GPa within 400 °C. Therefore, the LC resonant pressure sensor needs a temperature compensation structure to eliminate the impact of temperature on pressure measurement. Finally, a temperature compensation structure is proposed and fabricated, and the pressure response after temperature compensation illustrates that temperature drift is significantly reduced compared with that without the temperature compensation structure, which verifies the feasibility the proposed temperature compensation structure.
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. qinli@nuc.edu.cn.|Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, China. qinli@nuc.edu.cn.
authors.forename: Li
authors.initials: L
authors.lastname: Qin
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. sdd19900313@163.com.|Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, China. sdd19900313@163.com.
authors.forename: Dandan
authors.initials: D
authors.lastname: Shen
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. 18334792310@163.com.|Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, China. 18334792310@163.com.
authors.forename: Tanyong
authors.initials: T
authors.lastname: Wei
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. tanqiulin@nuc.edu.cn.|Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, China. tanqiulin@nuc.edu.cn.|State Key Laboratory of Transducer Technology, Department of Precision Instrument and Mechanology, Tsinghua University, Beijing 10084, China. tanqiulin@nuc.edu.cn.
authors.forename: Qiulin
authors.initials: Q
authors.lastname: Tan
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. 18935157540@163.com.|Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, China. 18935157540@163.com.
authors.forename: Tao
authors.initials: T
authors.lastname: Luo
authors.affiliation: State Key Laboratory of Transducer Technology, Department of Precision Instrument and Mechanology, Tsinghua University, Beijing 10084, China. zhouzy@tsinghua.edu.cn.
authors.forename: Zhaoying
authors.initials: Z
authors.lastname: Zhou
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. xiongjijun@nuc.edu.cn.|Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, China. xiongjijun@nuc.edu.cn.
authors.forename: Jijun
authors.initials: J
authors.lastname: Xiong
keywords: DuPont 951 ceramic; LC resonant sensor; Young’s modulus; compensation structure; dielectric constant