title: Electromagnetic biaxial microscanner with mechanical amplification at resonance.
abstract: We present the design, fabrication, and measurement results of an electromagnetic biaxial microscanner with mechanical amplification mechanism. A gimbaled scanner with two distinct single-crystal silicon layer thicknesses and integrated copper coils has been fabricated with combination of surface and bulk micromachining processes. A magnet assembly consisting of an array of permanent magnets and a pole piece has been placed under the substrate to provide high strength lateral magnetic field oriented 45° to two perpendicular scanning axes. Micromirror has been supported by additional gimbal to implement a mechanical amplification. A 1.2mm-diameter mirror with aluminum reflective surface has been actuated at 60Hz for vertical scan and at 21kHz for horizontal scan. Maximum scan angle of 36.12° at 21.19kHz and 17.62° at 60Hz have been obtained for horizontal and vertical scans, respectively.
authors.forename: Ah Ran
authors.initials: AR
authors.lastname: Cho
authors.forename: Aleum
authors.initials: A
authors.lastname: Han
authors.forename: Suna
authors.initials: S
authors.lastname: Ju
authors.forename: Haesoo
authors.initials: H
authors.lastname: Jeong
authors.forename: Jae-Hyoung
authors.initials: JH
authors.lastname: Park
authors.forename: Inhoi
authors.initials: I
authors.lastname: Kim
authors.forename: Jong-Uk
authors.initials: JU
authors.lastname: Bu
authors.forename: Chang-Hyeon
authors.initials: CH
authors.lastname: Ji