title: Universal evaluations and expressions of measuring uncertainty for rotating-element spectroscopic ellipsometers.
abstract: We obtain the universal evaluations and expressions of measuring uncertainty for all types of rotating-element spectroscopic ellipsometers. We introduce a general data-reduction process to represent the universal analytic functions of the combined standard uncertainties of the ellipsometric sample parameters. To solve the incompleteness of the analytic expressions, we formulate the estimated covariance for the Fourier coefficient means extracted from the radiant flux waveform using a new Fourier analysis. Our approach can be used for optimization of measurement conditions, instrumentation, simulation, standardization, laboratory accreditation, and metrology.
authors.forename: Yong Jai
authors.initials: YJ
authors.lastname: Cho
authors.forename: Won
authors.initials: W
authors.lastname: Chegal
authors.forename: Jeong Pyo
authors.initials: JP
authors.lastname: Lee
authors.forename: Hyun Mo
authors.initials: HM
authors.lastname: Cho