title: Pulse-driven micro gas sensor fitted with clustered Pd/SnO2 nanoparticles.
abstract: Real-time monitoring of specific gas concentrations with a compact and portable gas sensing device is required to sense potential health risk and danger from toxic gases. For such purposes, we developed an ultrasmall gas sensor device, where a micro sensing film was deposited on a micro heater integrated with electrodes fabricated by the microelectromechanical system (MEMS) technology. The developed device was operated in a pulse-heating mode to significantly reduce the heater power consumption and make the device battery-driven and portable. Using clustered Pd/SnO2 nanoparticles, we succeeded in introducing mesopores ranging from 10 to 30 nm in the micro gas sensing film (area: ϕ 150 μm) to detect large volatile organic compounds (VOCs). The micro sensor showed quick, stable, and high sensor responses to toluene at ppm (parts per million) concentrations at 300 °C even by operating the micro heater in a pulse-heating mode where switch-on and -off cycles were repeated at one-second intervals. The high performance of the micro sensor should result from the creation of efficient diffusion paths decorated with Pd sensitizers by using the clustered Pd/SnO2 nanoparticles. Hence we demonstrate that our pulse-driven micro sensor using nanostructured oxide materials holds promise as a battery-operable, portable gas sensing device.
authors.affiliation: †Department of Energy and Material Sciences, Faculty of Engineering Science, Kyushu University, Kasuga, Fukuoka 816-8580, Japan.
authors.forename: Koichi
authors.initials: K
authors.lastname: Suematsu
authors.affiliation: ‡Department of Molecular and Material Science, Interdisciplinary Graduate School of Engineering Science, Kyushu University, Kasuga, Fukuoka 816-8580, Japan.
authors.forename: Yuka
authors.initials: Y
authors.lastname: Shin
authors.affiliation: ‡Department of Molecular and Material Science, Interdisciplinary Graduate School of Engineering Science, Kyushu University, Kasuga, Fukuoka 816-8580, Japan.
authors.forename: Nan
authors.initials: N
authors.lastname: Ma
authors.affiliation: ‡Department of Molecular and Material Science, Interdisciplinary Graduate School of Engineering Science, Kyushu University, Kasuga, Fukuoka 816-8580, Japan.
authors.forename: Tokiharu
authors.initials: T
authors.lastname: Oyama
authors.affiliation: ‡Department of Molecular and Material Science, Interdisciplinary Graduate School of Engineering Science, Kyushu University, Kasuga, Fukuoka 816-8580, Japan.
authors.forename: Miyuki
authors.initials: M
authors.lastname: Sasaki
authors.affiliation: †Department of Energy and Material Sciences, Faculty of Engineering Science, Kyushu University, Kasuga, Fukuoka 816-8580, Japan.
authors.forename: Masayoshi
authors.initials: M
authors.lastname: Yuasa
authors.affiliation: §Department of Applied Chemistry and Biochemistry, Kumamoto University, Kumamoto 860-8555, Japan.
authors.forename: Tetsuya
authors.initials: T
authors.lastname: Kida
authors.affiliation: †Department of Energy and Material Sciences, Faculty of Engineering Science, Kyushu University, Kasuga, Fukuoka 816-8580, Japan.
authors.forename: Kengo
authors.initials: K
authors.lastname: Shimanoe
mesh_terms: D055664:Electrochemical Techniques / Q000295:instrumentation / Q000379:methods*; D004566:Electrodes; D005740:Gases / Q000032:analysis*; D007854:Lead / Q000737:chemistry*; D053768:Metal Nanoparticles / Q000737:chemistry* / Q000648:ultrastructure; D055617:Micro-Electrical-Mechanical Systems; D016062:Porosity; D017971:Tin Compounds / Q000737:chemistry*; D014050:Toluene / Q000032:analysis; D055549:Volatile Organic Compounds / Q000032:analysis
chemical_list: D005740:Gases; D017971:Tin Compounds; D055549:Volatile Organic Compounds; D007854:Lead; D014050:Toluene; C045358:stannic oxide