title: Surface excitations in the modelling of electron transport for electron-beam-induced deposition experiments.
abstract: The aim of the present overview article is to raise awareness of an essential aspect that is usually not accounted for in the modelling of electron transport for focused-electron-beam-induced deposition (FEBID) of nanostructures: Surface excitations are on the one hand responsible for a sizeable fraction of the intensity in reflection-electron-energy-loss spectra for primary electron energies of up to a few kiloelectronvolts and, on the other hand, they play a key role in the emission of secondary electrons from solids, regardless of the primary energy. In this overview work we present a general perspective of recent works on the subject of surface excitations and on low-energy electron transport, highlighting the most relevant aspects for the modelling of electron transport in FEBID simulations.
authors.affiliation: Institut für Theoretische Physik, Goethe-Universität Frankfurt, Max-von-Laue-Straße 1, 60438 Frankfurt am Main, Germany.
authors.forename: Francesc
authors.initials: F
authors.lastname: Salvat-Pujol
authors.affiliation: Institut für Theoretische Physik, Goethe-Universität Frankfurt, Max-von-Laue-Straße 1, 60438 Frankfurt am Main, Germany.
authors.forename: Roser
authors.initials: R
authors.lastname: Valentí
authors.affiliation: Institut für Angewandte Physik, Technische Universität Wien, Wiedner Hauptstraße 8-10/134, 1040 Wien, Austria.
authors.forename: Wolfgang S
authors.initials: WS
authors.lastname: Werner
keywords: Monte Carlo simulation of electron transport; focused-electron-beam-induced deposition (FEBID); secondary-electron emission; surface excitations