title: Low Temperature Reactive Sputtering of Thin Aluminum Nitride Films on Metallic Nanocomposites.
abstract: Piezoelectric aluminum nitride thin films were deposited on aluminum-molybdenum (AlMo) metallic nanocomposites using reactive DC sputtering at room temperature. The effect of sputtering parameters on film properties was assessed. A comparative study between AlN grown on AlMo and pure aluminum showed an equivalent (002) crystallographic texture. The piezoelectric coefficients were measured to be 0.5±0.1 C m(-2) and 0.9±0.1 C m(-2), for AlN deposited on Al/0.32Mo and pure Al, respectively. Films grown onto Al/0.32Mo however featured improved surface roughness. Roughness values were measured to be 1.3nm and 5.4 nm for AlN films grown on AlMo and on Al, respectively. In turn, the dielectric constant was measured to be 8.9±0.7 for AlN deposited on Al/0.32Mo seed layer, and 8.7±0.7 for AlN deposited on aluminum; thus, equivalent within experimental error. Compatibility of this room temperature process with the lift-off patterning of the deposited AlN is also reported.
authors.affiliation: Department of Electrical and Computer Engineering, University of Alberta, 9211-116th St, Edmonton, Alberta, T6G 2V4, Canada.
authors.forename: Khaled Sayed Elbadawi
authors.initials: KS
authors.lastname: Ramadan
authors.affiliation: Department of Electrical and Computer Engineering, University of Alberta, 9211-116th St, Edmonton, Alberta, T6G 2V4, Canada.
authors.forename: Stephane
authors.initials: S
authors.lastname: Evoy
mesh_terms: D000535:Aluminum / Q000737:chemistry; D017607:Aluminum Compounds / Q000737:chemistry*; D003080:Cold Temperature; D053768:Metal Nanoparticles / Q000737:chemistry* / Q000648:ultrastructure; D018625:Microscopy, Atomic Force; D008855:Microscopy, Electron, Scanning; D008982:Molybdenum / Q000737:chemistry; D053761:Nanocomposites / Q000737:chemistry* / Q000648:ultrastructure; D013499:Surface Properties; D014961:X-Ray Diffraction
chemical_list: D017607:Aluminum Compounds; C052045:aluminum nitride; D008982:Molybdenum; D000535:Aluminum