title: High-performance, mechanically flexible, and vertically integrated 3D carbon nanotube and InGaZnO complementary circuits with a temperature sensor.
abstract: A vertically integrated inorganic-based flexible complementary metal-oxide-semiconductor (CMOS) inverter with a temperature sensor with a high inverter gain of ≈50 and a low power consumption of <7 nW mm(-1) is demonstrated using a layer-by-layer assembly process. In addition, the negligible influence of the mechanical flexibility on the performance of the CMOS inverter and the temperature dependence of the CMOS inverter characteristics are discussed.
authors.affiliation: Department of Physics and Electronics, Osaka Prefecture University, 1-1 Gakuen-cho, Naka-ku, Sakai, Osaka, 599-8531, Japan.
authors.forename: Wataru
authors.initials: W
authors.lastname: Honda
authors.affiliation: Department of Physics and Electronics, Osaka Prefecture University, 1-1 Gakuen-cho, Naka-ku, Sakai, Osaka, 599-8531, Japan.
authors.forename: Shingo
authors.initials: S
authors.lastname: Harada
authors.affiliation: Department of Physics and Electronics, Osaka Prefecture University, 1-1 Gakuen-cho, Naka-ku, Sakai, Osaka, 599-8531, Japan.
authors.forename: Shohei
authors.initials: S
authors.lastname: Ishida
authors.affiliation: Department of Physics and Electronics, Osaka Prefecture University, 1-1 Gakuen-cho, Naka-ku, Sakai, Osaka, 599-8531, Japan.
authors.forename: Takayuki
authors.initials: T
authors.lastname: Arie
authors.affiliation: Department of Physics and Electronics, Osaka Prefecture University, 1-1 Gakuen-cho, Naka-ku, Sakai, Osaka, 599-8531, Japan.
authors.forename: Seiji
authors.initials: S
authors.lastname: Akita
authors.affiliation: Department of Physics and Electronics, Osaka Prefecture University, 1-1 Gakuen-cho, Naka-ku, Sakai, Osaka, 599-8531, Japan.
authors.forename: Kuniharu
authors.initials: K
authors.lastname: Takei
keywords: 3D flexible complementary metal-oxide-semiconductors; InGaZnO; carbon nanotubes; temperature sensors; vertical integrations