title: Coalescence of silver clusters by immersion in diluted HF solution.
abstract: The galvanic displacement deposition of silver on H-terminated Si (100) in the time scale of seconds is instantaneous and characterized by a cluster density of 10(11)-10(12) cm(-2). The amount of deposited Ag follows a t(1/2) dependence in agreement with a Cottrell diffusion limited mechanism. At the same time, during the deposition, the cluster density reduces by a factor 5. This behavior is in contrast with the assumption of immobile clusters. We show in the present work that coalescence and aggregation occur also in the samples immersed in the diluted hydrofluoric acid (HF) solution without the presence of Ag(+). Clusters agglomerate according to a process of dynamic coalescence, typical of colloids, followed by atomic redistribution at the contact regions with the generation of multiple internal twins and stacking-faults. The normalized size distributions in terms of r/rmean follow also the prediction of the Smoluchowski ripening mechanism. No variation of the cluster density occurs for samples immersed in pure H2O solution. The different behavior might be associated to the strong attraction of clusters to oxide-terminated Si surface in presence of water. The silver clusters are instead weakly bound to hydrophobic H-terminated Si in presence of HF. HF causes then the detachment of clusters and a random movement on the silicon surface with mobility of about 10(-13) cm(2)/s. Attractive interaction (probably van der Waals) among particles promotes coarsening.
authors.affiliation: CNR-IMM Institute for Microelectronics and Microsystems, I-95121 Catania, Italy.
authors.forename: R G
authors.initials: RG
authors.lastname: Milazzo
authors.affiliation: CNR-IMM Institute for Microelectronics and Microsystems, I-95121 Catania, Italy.
authors.forename: A M
authors.initials: AM
authors.lastname: Mio
authors.affiliation: CNR-IMM Institute for Microelectronics and Microsystems, I-95121 Catania, Italy.
authors.forename: G
authors.initials: G
authors.lastname: D'Arrigo
authors.affiliation: Department of Physics and Astronomy, Università di Catania, I-95123 Catania, Italy.
authors.forename: M G
authors.initials: MG
authors.lastname: Grimaldi
authors.affiliation: CNR-IMM Institute for Microelectronics and Microsystems, I-95121 Catania, Italy.
authors.forename: C
authors.initials: C
authors.lastname: Spinella
authors.affiliation: CNR-IMM Institute for Microelectronics and Microsystems, I-95121 Catania, Italy.
authors.forename: E
authors.initials: E
authors.lastname: Rimini