title: Controllable synthesis of molybdenum tungsten disulfide alloy for vertically composition-controlled multilayer.
abstract: The effective synthesis of two-dimensional transition metal dichalcogenides alloy is essential for successful application in electronic and optical devices based on a tunable band gap. Here we show a synthesis process for Mo1-xWxS2 alloy using sulfurization of super-cycle atomic layer deposition Mo1-xWxOy. Various spectroscopic and microscopic results indicate that the synthesized Mo1-xWxS2 alloys have complete mixing of Mo and W atoms and tunable band gap by systematically controlled composition and layer number. Based on this, we synthesize a vertically composition-controlled (VCC) Mo1-xWxS2 multilayer using five continuous super-cycles with different cycle ratios for each super-cycle. Angle-resolved X-ray photoemission spectroscopy, Raman and ultraviolet-visible spectrophotometer results reveal that a VCC Mo1-xWxS2 multilayer has different vertical composition and broadband light absorption with strong interlayer coupling within a VCC Mo1-xWxS2 multilayer. Further, we demonstrate that a VCC Mo1-xWxS2 multilayer photodetector generates three to four times greater photocurrent than MoS2- and WS2-based devices, owing to the broadband light absorption.
authors.affiliation: School of Electrical and Electronic Engineering, Yonsei University, Seoul 120-749, Korea.
authors.forename: Jeong-Gyu
authors.initials: JG
authors.lastname: Song
authors.affiliation: School of Materials Science and Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan 689-798, Korea.
authors.forename: Gyeong Hee
authors.initials: GH
authors.lastname: Ryu
authors.affiliation: Department of Materials Science and Engineering, Yonsei University, Seoul 120-749, Korea.
authors.forename: Su Jeong
authors.initials: SJ
authors.lastname: Lee
authors.affiliation: School of Electrical and Electronic Engineering, Yonsei University, Seoul 120-749, Korea.
authors.forename: Sangwan
authors.initials: S
authors.lastname: Sim
authors.affiliation: School of Electrical and Electronic Engineering, Yonsei University, Seoul 120-749, Korea.
authors.forename: Chang Wan
authors.initials: CW
authors.lastname: Lee
authors.affiliation: School of Electrical and Electronic Engineering, Yonsei University, Seoul 120-749, Korea.
authors.forename: Taejin
authors.initials: T
authors.lastname: Choi
authors.affiliation: School of Electrical and Electronic Engineering, Yonsei University, Seoul 120-749, Korea.
authors.forename: Hanearl
authors.initials: H
authors.lastname: Jung
authors.affiliation: School of Electrical and Electronic Engineering, Yonsei University, Seoul 120-749, Korea.
authors.forename: Youngjun
authors.initials: Y
authors.lastname: Kim
authors.affiliation: School of Materials Science and Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan 689-798, Korea.
authors.forename: Zonghoon
authors.initials: Z
authors.lastname: Lee
authors.affiliation: Department of Materials Science and Engineering, Yonsei University, Seoul 120-749, Korea.
authors.forename: Jae-Min
authors.initials: JM
authors.lastname: Myoung
authors.affiliation: Air Liquide Laboratories, Wadai 28, Tsukuba, Ibaraki 300-4247, Japan.
authors.forename: Christian
authors.initials: C
authors.lastname: Dussarrat
authors.affiliation: Air Liquide Laboratories Korea, Yonsei Engineering Research Park, 50 Yonsei-ro, Seodaemun-gu, Seoul 120-749, Korea.
authors.forename: Clement
authors.initials: C
authors.lastname: Lansalot-Matras
authors.affiliation: School of Electrical and Electronic Engineering, Yonsei University, Seoul 120-749, Korea.
authors.forename: Jusang
authors.initials: J
authors.lastname: Park
authors.affiliation: School of Electrical and Electronic Engineering, Yonsei University, Seoul 120-749, Korea.
authors.forename: Hyunyong
authors.initials: H
authors.lastname: Choi
authors.affiliation: School of Electrical and Electronic Engineering, Yonsei University, Seoul 120-749, Korea.
authors.forename: Hyungjun
authors.initials: H
authors.lastname: Kim