title: Low Power Resistive Oxygen Sensor Based on Sonochemical SrTi0.6Fe0.4O2.8 (STFO40).
abstract: The current paper reports on a sonochemical synthesis method for manufacturing nanostructured (typical grain size of 50 nm) SrTi0.6Fe0.4O2.8 (Sono-STFO40) powder. This powder is characterized using X ray-diffraction (XRD), Mössbauer spectroscopy and Scanning Electron Microscopy (SEM), and results are compared with commercially available SrTi0.4Fe0.6O2.8 (STFO60) powder. In order to manufacture resistive oxygen sensors, both Sono-STFO40 and STFO60 are deposited, by dip-pen nanolithography (DPN) method, on an SOI (Silicon-on-Insulator) micro-hotplate, employing a tungsten heater embedded within a dielectric membrane. Oxygen detection tests are performed in both dry (RH = 0%) and humid (RH = 60%) nitrogen atmosphere, varying oxygen concentrations between 1% and 16% (v/v), at a constant heater temperature of 650 °C. The oxygen sensor, based on the Sono-STFO40 sensing layer, shows good sensitivity, low power consumption (80 mW), and short response time (25 s). These performance are comparable to those exhibited by state-of-the-art O2 sensors based on STFO60, thus proving Sono-STFO40 to be a material suitable for oxygen detection in harsh environments.
authors.affiliation: Honeywell Romania SRL, Sensors and Wireless Laboratory Bucharest (SWLB), Bucharest 020339, Romania. alisa.stratulat@honeywell.com.
authors.forename: Alisa
authors.initials: A
authors.lastname: Stratulat
authors.affiliation: Honeywell Romania SRL, Sensors and Wireless Laboratory Bucharest (SWLB), Bucharest 020339, Romania. bogdan.serban@honeywell.com.
authors.forename: Bogdan-Catalin
authors.initials: BC
authors.lastname: Serban
authors.affiliation: Centre for Advanced Photonics and Electronics (CAPE), University of Cambridge, Cambridge CB3 0FA, UK. ad597@cam.ac.uk.
authors.forename: Andrea
authors.initials: A
authors.lastname: de Luca
authors.affiliation: Honeywell Romania SRL, Sensors and Wireless Laboratory Bucharest (SWLB), Bucharest 020339, Romania. viorel.avramescu@honeywell.com.
authors.forename: Viorel
authors.initials: V
authors.lastname: Avramescu
authors.affiliation: Honeywell Romania SRL, Sensors and Wireless Laboratory Bucharest (SWLB), Bucharest 020339, Romania. cornel.cobianu@honeywell.com.
authors.forename: Cornel
authors.initials: C
authors.lastname: Cobianu
authors.affiliation: Honeywell Romania SRL, Sensors and Wireless Laboratory Bucharest (SWLB), Bucharest 020339, Romania. mihai.brezeanu@honeywell.com.
authors.forename: Mihai
authors.initials: M
authors.lastname: Brezeanu
authors.affiliation: Honeywell Romania SRL, Sensors and Wireless Laboratory Bucharest (SWLB), Bucharest 020339, Romania. octavian.buiu@honeywell.com.
authors.forename: Octavian
authors.initials: O
authors.lastname: Buiu
authors.affiliation: National Institute of Materials Physics, Bucharest-Magurele, P.O. Box. MG-7, Magurele 77125, Romania. diamand@infim.ro.
authors.forename: Lucian
authors.initials: L
authors.lastname: Diamandescu
authors.affiliation: National Institute of Materials Physics, Bucharest-Magurele, P.O. Box. MG-7, Magurele 77125, Romania. mfeder@infim.ro.
authors.forename: Marcel
authors.initials: M
authors.lastname: Feder
authors.affiliation: Cambridge CMOS Sensors Ltd., Cambridge CB4 0DL, UK. zeeshan.ali@ccmoss.com.
authors.forename: Syed Zeeshan
authors.initials: SZ
authors.lastname: Ali
authors.affiliation: Centre for Advanced Photonics and Electronics (CAPE), University of Cambridge, Cambridge CB3 0FA, UK. fu@eng.cam.ac.uk.|Cambridge CMOS Sensors Ltd., Cambridge CB4 0DL, UK. fu@eng.cam.ac.uk.
authors.forename: Florin
authors.initials: F
authors.lastname: Udrea
keywords: CMOS-compatible; STFO; dip-pen nanolithography; harsh environment; oxygen sensing; silicon-on-Insulator; sonochemistry