title: Nanoscale Nitrogen Doping in Silicon by Self-Assembled Monolayers.
abstract: This Report presents a nitrogen-doping method by chemically forming self-assembled monolayers on silicon. Van der Pauw technique, secondary-ion mass spectroscopy and low temperature Hall effect measurements are employed to characterize the nitrogen dopants. The experimental data show that the diffusion coefficient of nitrogen dopants is 3.66 × 10(-15) cm(2) s(-1), 2 orders magnitude lower than that of phosphorus dopants in silicon. It is found that less than 1% of nitrogen dopants exhibit electrical activity. The analysis of Hall effect data at low temperatures indicates that the donor energy level for nitrogen dopants is located at 189 meV below the conduction band, consistent with the literature value.
authors.affiliation: University of Michigan - Shanghai Jiao Tong University Joint Institute.
authors.forename: Bin
authors.initials: B
authors.lastname: Guan
authors.affiliation: University of Michigan - Shanghai Jiao Tong University Joint Institute.
authors.forename: Hamidreza
authors.initials: H
authors.lastname: Siampour
authors.affiliation: University of Michigan - Shanghai Jiao Tong University Joint Institute.
authors.forename: Zhao
authors.initials: Z
authors.lastname: Fan
authors.affiliation: Key Laboratory of Artificial Structures and Quantum Control (Ministry of Education), Department of Physics and Astronomy.
authors.forename: Shun
authors.initials: S
authors.lastname: Wang
authors.affiliation: School of Materials Science and Engineering, Shanghai Jiao Tong University, Shanghai, 200040, China.
authors.forename: Xiang Yang
authors.initials: XY
authors.lastname: Kong
authors.affiliation: Institut Matériaux Microélectronique Nanosciences de Provence, UMR 6242 CNRS, Université Aix-Marseille, 13397 Marseille Cedex 20, France.
authors.forename: Abdelmadjid
authors.initials: A
authors.lastname: Mesli
authors.affiliation: Faculty of Medicine, Shanghai Jiao Tong University, Shanghai, 200040, China.
authors.forename: Jian
authors.initials: J
authors.lastname: Zhang
authors.affiliation: University of Michigan - Shanghai Jiao Tong University Joint Institute.
authors.forename: Yaping
authors.initials: Y
authors.lastname: Dan