title: Theory and New Applications of Ex Situ Lift Out.
abstract: The ex situ lift out (EXLO) adhesion forces are reviewed and new applications of EXLO for focused ion beam (FIB)-prepared specimens are described. EXLO is used to manipulate electron transparent specimens on microelectromechanical systems carrier devices designed for in situ electron microscope analysis. A new patented grid design without a support film is described for EXLO. This new slotted grid design provides a surface for holding the specimen in place and also allows for post lift out processing. Specimens may be easily manipulated into a backside orientation to reduce FIB curtaining artifacts with this slotted grid. Large EXLO specimens can be manipulated from Xe+ plasma FIB prepared specimens. Finally, applications of EXLO and manipulation of FIB specimens using a vacuum probe lift out method are shown. The vacuum probe provides more control for placing specimens on the new slotted grids and also allows for easy manipulation into a backside configuration.
authors.affiliation: 1EXpressLO LLC,5483 Lee St.,Unit 12,Lehigh Acres,FL 33971,USA.
authors.forename: Lucille A
authors.initials: LA
authors.lastname: Giannuzzi
authors.affiliation: 2Department of Materials Science and Engineering,Lehigh University,Bethlehem,PA 18015,USA.
authors.forename: Zhiyang
authors.initials: Z
authors.lastname: Yu
authors.affiliation: 2Department of Materials Science and Engineering,Lehigh University,Bethlehem,PA 18015,USA.
authors.forename: Denise
authors.initials: D
authors.lastname: Yin
authors.affiliation: 2Department of Materials Science and Engineering,Lehigh University,Bethlehem,PA 18015,USA.
authors.forename: Martin P
authors.initials: MP
authors.lastname: Harmer
authors.affiliation: 3DENSsolutions,Delftechpark 26,2628 XH Delft,The Netherlands.
authors.forename: Qiang
authors.initials: Q
authors.lastname: Xu
authors.affiliation: 4Oregon Physics, LLC,19075 NW Tanasbourne Dr.,Suite 150,Hillsboro,OR 97124,USA.
authors.forename: Noel S
authors.initials: NS
authors.lastname: Smith
authors.affiliation: 5Tescan USA, Inc.,765 Commonwealth Dr.,Suite 101,Warrendale,PA 15086,USA.
authors.forename: Lisa
authors.initials: L
authors.lastname: Chan
authors.affiliation: 5Tescan USA, Inc.,765 Commonwealth Dr.,Suite 101,Warrendale,PA 15086,USA.
authors.forename: Jon
authors.initials: J
authors.lastname: Hiller
authors.affiliation: 6Materials Research Institute, The Pennsylvania State University,Millennium Science Complex,University Park,PA 16802,USA.
authors.forename: Dustin
authors.initials: D
authors.lastname: Hess
authors.affiliation: 6Materials Research Institute, The Pennsylvania State University,Millennium Science Complex,University Park,PA 16802,USA.
authors.forename: Trevor
authors.initials: T
authors.lastname: Clark
keywords: FIB; Pick&Place; TEM; ex situ lift out; specimen preparation