title: Nanomechanical humidity detection through porous alumina cantilevers.
abstract: We present here the behavior of the resonance frequency of porous anodic alumina cantilever arrays during water vapor adsorption and emphasize their possible use in the micromechanical sensing of humidity levels at least in the range of 10-22%. The sensitivity of porous anodic aluminium oxide cantilevers (Δf/Δm) and the humidity sensitivity equal about 56 Hz/pg and about 100 Hz/%, respectively. The approach presented here for the design of anodic alumina cantilever arrays by the combination of anodic oxidation and photolithography enables easy control over porosity, surface area, geometric and mechanical characteristics of the cantilever arrays for micromechanical sensing.
authors.affiliation: Lomonosov Moscow State University, 119992, Moscow, Russia ; Kurnakov Institute of General and Inorganic Chemistry of The Russian Academy of Science, 119991, Moscow, Russia.
authors.forename: Olga
authors.initials: O
authors.lastname: Boytsova
authors.affiliation: Lomonosov Moscow State University, 119992, Moscow, Russia.
authors.forename: Alexey
authors.initials: A
authors.lastname: Klimenko
authors.affiliation: Lomonosov Moscow State University, 119992, Moscow, Russia.
authors.forename: Vasiliy
authors.initials: V
authors.lastname: Lebedev
authors.affiliation: Lomonosov Moscow State University, 119992, Moscow, Russia.
authors.forename: Alexey
authors.initials: A
authors.lastname: Lukashin
authors.affiliation: Lomonosov Moscow State University, 119992, Moscow, Russia.
authors.forename: Andrey
authors.initials: A
authors.lastname: Eliseev
keywords: anodic aluminium oxide; atomic force microscopy (AFM); cantilever arrays; humidity; mechanical sensor; porous alumina