title: Low-Temperature Synthesis of Large-Scale Molybdenum Disulfide Thin Films Directly on a Plastic Substrate Using Plasma-Enhanced Chemical Vapor Deposition.
abstract: By plasma-enhanced chemical vapor deposition, a molybdenum disulfide (MoS2 ) thin film is synthesized directly on a wafer-scale plastic substrate at below 300 °C. The carrier mobility of the films is 3.74 cm(2) V(-1) s(-1) . Also, humidity is successfully detected with MoS2 -based sensors fabricated on the flexible substrate, which reveals its potential for flexible sensing devices.
authors.affiliation: SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, 2066 Seobu-ro, Jangan-gu, Suwon, Gyeonggi-do, 440-746, South Korea.
authors.forename: Chisung
authors.initials: C
authors.lastname: Ahn
authors.affiliation: School of Mechanical Engineering, Sungkyunkwan University, 2066 Seobu-ro, Jangan-gu, Suwon, Gyeonggi-do, 440-746, South Korea.
authors.forename: Jinhwan
authors.initials: J
authors.lastname: Lee
authors.affiliation: SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, 2066 Seobu-ro, Jangan-gu, Suwon, Gyeonggi-do, 440-746, South Korea.
authors.forename: Hyeong-U
authors.initials: HU
authors.lastname: Kim
authors.affiliation: SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, 2066 Seobu-ro, Jangan-gu, Suwon, Gyeonggi-do, 440-746, South Korea.
authors.forename: Hunyoung
authors.initials: H
authors.lastname: Bark
authors.affiliation: SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, 2066 Seobu-ro, Jangan-gu, Suwon, Gyeonggi-do, 440-746, South Korea.
authors.forename: Minhwan
authors.initials: M
authors.lastname: Jeon
authors.affiliation: School of Materials Science and Engineering, Ulsan National Institute of Science and Technology (UNIST), 50 UNIST-gil, Eonyang-eup, Ulsan, 689-798, South Korea.
authors.forename: Gyeong Hee
authors.initials: GH
authors.lastname: Ryu
authors.affiliation: School of Materials Science and Engineering, Ulsan National Institute of Science and Technology (UNIST), 50 UNIST-gil, Eonyang-eup, Ulsan, 689-798, South Korea.
authors.forename: Zonghoon
authors.initials: Z
authors.lastname: Lee
authors.affiliation: SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, 2066 Seobu-ro, Jangan-gu, Suwon, Gyeonggi-do, 440-746, South Korea.|School of Advanced Materials Science & Engineering, Sungkyunkwan University, 2066 Seobu-ro, Jangan-gu, Suwon, Gyeonggi-do, 440-746, South Korea.
authors.forename: Geun Young
authors.initials: GY
authors.lastname: Yeom
authors.affiliation: Semiconductor R&D Center, Samsung Electronics, 1 Samsungjeonja-ro, Hwaseong, Gyeonggi-do, 445-701, South Korea.
authors.forename: Kwangsu
authors.initials: K
authors.lastname: Kim
authors.affiliation: SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, 2066 Seobu-ro, Jangan-gu, Suwon, Gyeonggi-do, 440-746, South Korea.
authors.forename: Jaehyuck
authors.initials: J
authors.lastname: Jung
authors.affiliation: School of Mechanical Engineering, Sungkyunkwan University, 2066 Seobu-ro, Jangan-gu, Suwon, Gyeonggi-do, 440-746, South Korea.
authors.forename: Youngseok
authors.initials: Y
authors.lastname: Kim
authors.affiliation: SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, 2066 Seobu-ro, Jangan-gu, Suwon, Gyeonggi-do, 440-746, South Korea.|School of Mechanical Engineering, Sungkyunkwan University, 2066 Seobu-ro, Jangan-gu, Suwon, Gyeonggi-do, 440-746, South Korea.
authors.forename: Changgu
authors.initials: C
authors.lastname: Lee
authors.affiliation: SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, 2066 Seobu-ro, Jangan-gu, Suwon, Gyeonggi-do, 440-746, South Korea.|School of Mechanical Engineering, Sungkyunkwan University, 2066 Seobu-ro, Jangan-gu, Suwon, Gyeonggi-do, 440-746, South Korea.
authors.forename: Taesung
authors.initials: T
authors.lastname: Kim
keywords: flexible sensor; low temperature; molybdenum disulfide (MoS2); plasma-enhanced chemical vapor deposition (PECVD); plastic substrate