title: High contrast 3D imaging of surfaces near the wavelength limit using tabletop EUV ptychography.
abstract: Scanning electron microscopy and atomic force microscopy are well-established techniques for imaging surfaces with nanometer resolution. Here we demonstrate a complementary and powerful approach based on tabletop extreme-ultraviolet ptychography that enables quantitative full field imaging with higher contrast than other techniques, and with compositional and topographical information. Using a high numerical aperture reflection-mode microscope illuminated by a tabletop 30 nm high harmonic source, we retrieve high quality, high contrast, full field images with 40 nm by 80 nm lateral resolution (≈1.3 λ), with a total exposure time of less than 1 min. Finally, quantitative phase information enables surface profilometry with ultra-high, 6 Å axial resolution. In the future, this work will enable dynamic imaging of functioning nanosystems with unprecedented combined spatial (<10 nm) and temporal (<10 fs) resolution, in thick opaque samples, with elemental, chemical and magnetic sensitivity.
authors.affiliation: JILA, University of Colorado, 440 UCB, Boulder, CO 80309-0440, USA. Electronic address: Bosheng.Zhang@colorado.edu.
authors.forename: Bosheng
authors.initials: B
authors.lastname: Zhang
authors.affiliation: JILA, University of Colorado, 440 UCB, Boulder, CO 80309-0440, USA.
authors.forename: Dennis F
authors.initials: DF
authors.lastname: Gardner
authors.affiliation: JILA, University of Colorado, 440 UCB, Boulder, CO 80309-0440, USA.
authors.forename: Matthew D
authors.initials: MD
authors.lastname: Seaberg
authors.affiliation: JILA, University of Colorado, 440 UCB, Boulder, CO 80309-0440, USA.
authors.forename: Elisabeth R
authors.initials: ER
authors.lastname: Shanblatt
authors.affiliation: JILA, University of Colorado, 440 UCB, Boulder, CO 80309-0440, USA.
authors.forename: Henry C
authors.initials: HC
authors.lastname: Kapteyn
authors.affiliation: JILA, University of Colorado, 440 UCB, Boulder, CO 80309-0440, USA.
authors.forename: Margaret M
authors.initials: MM
authors.lastname: Murnane
authors.affiliation: JILA, University of Colorado, 440 UCB, Boulder, CO 80309-0440, USA.
authors.forename: Daniel E
authors.initials: DE
authors.lastname: Adams
keywords: Coherent diffraction imaging; High harmonic generation; Reflection mode; Surface profilometry; X-ray microscopy