Precise Nanoscale Surface Modification and Coating of Macroscale Objects: Open-Environment in Loco Atomic Layer Deposition on an Automobile.
The fundamental chemical reaction conditions that define atomic layer deposition (ALD) can be achieved in an open environment on a macroscale surface too large and complex for typical laboratory reactor-based ALD. We describe the concept of in loco ALD using conventional modulated reactant flow through a surface-mounted "ALD delivery head" to form a precise nanoscale Al2O3 film on the window of a parked automobile. Analysis confirms that the processes eliminated ambient water contamination and met other conditions that define ALD growth. Using this tool, we demonstrate open-ambient patterned deposition, metal corrosion protection, and polymer surface modification.
Department of Chemical and Biomolecular Engineering, North Carolina State University , Raleigh, North Carolina 27695, United States.
Moataz Bellah M
MB
Mousa
Department of Chemical and Biomolecular Engineering, North Carolina State University , Raleigh, North Carolina 27695, United States.
Christopher J
CJ
Oldham
Department of Chemical and Biomolecular Engineering, North Carolina State University , Raleigh, North Carolina 27695, United States.
Gregory N
GN
Parsons
ALD delivery head; atomic layer deposition; in loco; metal oxides; open-environment ALD