Buckled diamond-like carbon nanomechanical resonators.
We have developed capacitively-transduced nanomechanical resonators using sp(2)-rich diamond-like carbon (DLC) thin films as conducting membranes. The electrically conducting DLC films were grown by physical vapor deposition at a temperature of 500 °C. Characterizing the resonant response, we find a larger than expected frequency tuning that we attribute to the membrane being buckled upwards, away from the bottom electrode. The possibility of using buckled resonators to increase frequency tuning can be of advantage in rf applications such as tunable GHz filters and voltage-controlled oscillators.
Low Temperature Laboratory, Department of Applied Physics, Aalto University, P.O. Box 15100, FI-00076 AALTO, Finland. pertti.hakonen@aalto.fi.
Matti
M
Tomi
Andreas
A
Isacsson
Mika
M
Oksanen
Dmitry
D
Lyashenko
Jukka-Pekka
JP
Kaikkonen
Sanna
S
Tervakangas
Jukka
J
Kolehmainen
Pertti J
PJ
Hakonen