Porous Silicon Structures as Optical Gas Sensors.
We present a short review of recent progress in the field of optical gas sensors based on porous silicon (PSi) and PSi composites, which are separate from PSi optochemical and biological sensors for a liquid medium. Different periodical and nonperiodical PSi photonic structures (bares, modified by functional groups or infiltrated with sensory polymers) are described for gas sensing with an emphasis on the device specificity, sensitivity and stability to the environment. Special attention is paid to multiparametric sensing and sensor array platforms as effective trends for the improvement of analyte classification and quantification. Mechanisms of gas physical and chemical sorption inside PSi mesopores and pores of PSi functional composites are discussed.
Emitech, Inc., Fall River, MA 02720, USA. ilevitsky@emitechinc.com.
Igor A
IA
Levitsky
D015374:Biosensing Techniques / Q000295:instrumentation*; D005740:Gases / Q000032:analysis*; D055095:Optics and Photonics / Q000295:instrumentation*; D016062:Porosity; D012825:Silicon / Q000737:chemistry*
D005740:Gases; D012825:Silicon
gas sensors; multiparametric; optical; porous silicon; sensor arrays