Large-Area Nano-patterning and Fabrication of Vertical Transistor Array by Non-close-packed Polystyrene Spheres.
We demonstrated a large-area nanopatterning technique with the help of a non-close-packed PS sphere layer over a large-area substrate. The non-close-packed PS sphere layer is fabricated by blade coating method. It was demonstrated that non-close-packed PS spheres can be achieved within an area of 18 cm × 25 cm on a rigid glass substrate and within an area of 10 cm × 10 cm on a flexible substrate. We also demonstrated that the blade-coated non-close-packed PS sphere layer was suitable for the mass production of vertical organic transistors over a large area.
Yen-Ming
YM
Chen
Yu-Yen
YY
Lai
Department of Physics and Center for Nanotechnology, Chung Yuan Christian University , Chung-Li 32023, Taiwan.
Yu-Chiang
YC
Chao
Hsiao-Wen
HW
Zan
Hsin-Fei
HF
Meng
Sheng-Fu
SF
Horng
Che-Hao
CH
Chang
large-area nanopattering; nanosphere lithography; organic transistors; polymer transistors; vertical transistors