A non-resonant fiber scanner based on an electrothermally-actuated MEMS stage.
Scanning fiber tips provides the most convenient way for forward-viewing fiber-optic microendoscopy. In this paper, a distal fiber scanning method based on a large-displacement MEMS actuator is presented. A single-mode fiber is glued on the micro-platform of an electrothermal MEMS stage to realize large range non-resonantscanning. The micro-platform has a large piston scan range of up to 800 µm at only 6V. The tip deflection of the fiber can be further amplified by placing the MEMS stage at a proper location along the fiber. A quasi-static model of the fiber-MEMS assembly has been developed and validated experimentally. The frequency response has also been studied and measured. A fiber tip deflection of up to 1650 µm for the 45 mm-long movable fiber portion has been achieved when the MEMS electrothermal stage was placed 25 mm away from the free end. The electrothermally-actuated MEMS stage shows a great potential for forward viewing fiber scanning and optical applications.
Dept. of Electrical & Computer Engineering, University of Florida, Gainesville, FL 32611.
Xiaoyang
X
Zhang
Dept. of Electrical & Computer Engineering, University of Florida, Gainesville, FL 32611.
Can
C
Duan
Dept. of Electrical & Computer Engineering, University of Florida, Gainesville, FL 32611.
Lin
L
Liu
Dept. of Biomedical Engineering, Johns Hopkins University, Baltimore, MD 21205.
Xingde
X
Li
Dept. of Electrical & Computer Engineering, University of Florida, Gainesville, FL 32611.
Huikai
H
Xie
Distal fiber scanning; MEMS stage; electrothermal actuation; fiber scanner; large range; micro-platform; microactuator