Monolithic integration of a silicon nanowire field-effect transistors array on a complementary metal-oxide semiconductor chip for biochemical sensor applications.
We present a monolithic complementary metal-oxide semiconductor (CMOS)-based sensor system comprising an array of silicon nanowire field-effect transistors (FETs) and the signal-conditioning circuitry on the same chip. The silicon nanowires were fabricated by chemical vapor deposition methods and then transferred to the CMOS chip, where Ti/Pd/Ti contacts had been patterned via e-beam lithography. The on-chip circuitry measures the current flowing through each nanowire FET upon applying a constant source-drain voltage. The analog signal is digitized on chip and then transmitted to a receiving unit. The system has been successfully fabricated and tested by acquiring I-V curves of the bare nanowire-based FETs. Furthermore, the sensing capabilities of the complete system have been demonstrated by recording current changes upon nanowire exposure to solutions of different pHs, as well as by detecting different concentrations of Troponin T biomarkers (cTnT) through antibody-functionalized nanowire FETs.
ETH Zurich , Bio Engineering Laboratory, Department of Biosystems Science and Engineering, Mattenstrasse 26, CH-4058 Basel, Switzerland.
Paolo
P
Livi
School of Chemistry, Tel Aviv University , Tel Aviv, Israel 69978.
Moria
M
Kwiat
ETH Zurich , Bio Engineering Laboratory, Department of Biosystems Science and Engineering, Mattenstrasse 26, CH-4058 Basel, Switzerland.
Amir
A
Shadmani
School of Chemistry, Tel Aviv University , Tel Aviv, Israel 69978.
Alexander
A
Pevzner
Molecular Pharmacy, Pharmazentrum, University of Basel , Basel, Switzerland.
Giulio
G
Navarra
ETH Zurich , Bio Engineering Laboratory, Department of Biosystems Science and Engineering, Mattenstrasse 26, CH-4058 Basel, Switzerland.
Jörg
J
Rothe
ETH Zurich , Bio Engineering Laboratory, Department of Biosystems Science and Engineering, Mattenstrasse 26, CH-4058 Basel, Switzerland.
Alexander
A
Stettler
ETH Zurich , Bio Engineering Laboratory, Department of Biosystems Science and Engineering, Mattenstrasse 26, CH-4058 Basel, Switzerland.
Yihui
Y
Chen
School of Chemistry, Tel Aviv University , Tel Aviv, Israel 69978.
Fernando
F
Patolsky
ETH Zurich , Bio Engineering Laboratory, Department of Biosystems Science and Engineering, Mattenstrasse 26, CH-4058 Basel, Switzerland.
Andreas
A
Hierlemann
D055910:Antibodies, Immobilized / Q000737:chemistry; D015374:Biosensing Techniques / Q000295:instrumentation*; D004867:Equipment Design; D006801:Humans; D006863:Hydrogen-Ion Concentration; D056656:Lab-On-A-Chip Devices; D008670:Metals / Q000737:chemistry; D053770:Nanowires / Q000737:chemistry* / Q000648:ultrastructure; D010087:Oxides / Q000737:chemistry; D012666:Semiconductors; D012825:Silicon / Q000737:chemistry*; D014173:Transistors, Electronic; D020107:Troponin T / Q000032:analysis*
D055910:Antibodies, Immobilized; D008670:Metals; D010087:Oxides; D020107:Troponin T; D012825:Silicon