An Insertable Passive LC Pressure Sensor Based on an Alumina Ceramic for In Situ Pressure Sensing in High-Temperature Environments.
Pressure measurements in high-temperature applications, including compressors, turbines, and others, have become increasingly critical. This paper proposes an implantable passive LC pressure sensor based on an alumina ceramic material for in situ pressure sensing in high-temperature environments. The inductance and capacitance elements of the sensor were designed independently and separated by a thermally insulating material, which is conducive to reducing the influence of the temperature on the inductance element and improving the quality factor of the sensor. In addition, the sensor was fabricated using thick film integrated technology from high-temperature materials that ensure stable operation of the sensor in high-temperature environments. Experimental results showed that the sensor accurately monitored pressures from 0 bar to 2 bar at temperatures up to 800 °C. The sensitivity, linearity, repeatability error, and hysteretic error of the sensor were 0.225 MHz/bar, 95.3%, 5.5%, and 6.2%, respectively.
Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. xiongjijun@nuc.edu.cn.|Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051. xiongjijun@nuc.edu.cn.
Jijun
J
Xiong
Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. flanklichen@163.com.|Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051. flanklichen@163.com.
Chen
C
Li
Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051. pgjia@nuc.edu.cn.
Pinggang
P
Jia
Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051. chenxiaoyong@nuc.edu.cn.
Xiaoyong
X
Chen
Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. wdzhang@nuc.edu.cn.
Wendong
W
Zhang
Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. liuj@nuc.edu.cn.
Jun
J
Liu
Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051. xuechenyang@nuc.edu.cn.
Chenyang
C
Xue
Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. tanqiulinnuc@163.com.|Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051. tanqiulinnuc@163.com.
Qiulin
Q
Tan
Alumina ceramic; High-temperature application; Pressure measurement; passive LC pressure sensor