A laboratory 8 keV transmission full-field x-ray microscope with a polycapillary as condenser for bright and dark field imaging.
This article introduces a laboratory setup of a transmission full-field x-ray microscope at 8 keV photon energy. The microscope operates in bright and dark field imaging mode with a maximum field of view of 50 μm. Since the illumination geometry determines whether the sample is illuminated homogeneously and moreover, if different imaging methods can be applied, the condenser optic is one of the most significant parts. With a new type of x-ray condenser, a polycapillary optic, we realized bright field imaging and for the first time dark field imaging at 8 keV photon energy in a laboratory setup. A detector limited spatial resolution of 210 nm is measured on x-ray images of Siemens star test patterns.
Institute for X-Optics, University of Applied Sciences Koblenz, RheinAhrCampus Remagen, Joseph-Rovan-Allee 2, D-53424 Remagen, Germany.
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S
Baumbach
Institute for Optics and Atomic Physics, Technical University of Berlin, Hardenbergstrasse 36, D-10623 Berlin, Germany.
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B
Kanngießer
Institute for Optics and Atomic Physics, Technical University of Berlin, Hardenbergstrasse 36, D-10623 Berlin, Germany.
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W
Malzer
Max-Born-Institute, Max-Born-Strasse 2A, D-12489 Berlin, Germany.
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H
Stiel
Institute for X-Optics, University of Applied Sciences Koblenz, RheinAhrCampus Remagen, Joseph-Rovan-Allee 2, D-53424 Remagen, Germany.
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T
Wilhein