Suppression of Cross Contamination in Multi-Layer Thin Film Prepared by Using Rotating Hexagonal Sputtering Cathode.
In this study, single- and multi-layered thin films were prepared on a glass substrate using a newly developed rotating hexagonal sputtering cathode in a single chamber. The rotatinghexagonal sputtering cathode can install up to six different sputtering targets or six single targets in a cathode. Using the rotating hexagonal cathode, we prepared a single-layered AZO film and a multi-layer film to evaluate the performance of hexagonal gun. Cross-contamination, which is often observed in multi-layer thin film preparation, was suppressed to nearly zero by controlling process parameters and revising hardware. Energy-saving effects of five-layered glass were also verified by measuring the temperature.
Se Yeon
SY
Park
Bum Ho
BH
Choi
Jong Ho
JH
Lee