title: High-Q lithium niobate microdisk resonators on a chip for efficient electro-optic modulation.
abstract: Lithium niobate (LN) microdisk resonators on a LN-silica-LN chip were fabricated using only conventional semiconductor fabrication processes. The quality factor of the LN resonator with a 39.6-μm radius and a 0.5-μm thickness is up to 1.19 × 10(6), which doubles the record of the quality factor 4.84 × 10(5) of LN resonators produced by microfabrication methods allowing batch production. Electro-optic modulation with an effective resonance-frequency tuning rate of 3.0 GHz/V was demonstrated in the fabricated LN microdisk resonator.
authors.forename: Jie
authors.initials: J
authors.lastname: Wang
authors.forename: Fang
authors.initials: F
authors.lastname: Bo
authors.forename: Shuai
authors.initials: S
authors.lastname: Wan
authors.forename: Wuxia
authors.initials: W
authors.lastname: Li
authors.forename: Feng
authors.initials: F
authors.lastname: Gao
authors.forename: Junjie
authors.initials: J
authors.lastname: Li
authors.forename: Guoquan
authors.initials: G
authors.lastname: Zhang
authors.forename: Jingjun
authors.initials: J
authors.lastname: Xu