title: High-Temperature Dielectric Properties of Aluminum Nitride Ceramic for Wireless Passive Sensing Applications.
abstract: The accurate characterization of the temperature-dependent permittivity of aluminum nitride (AlN) ceramic is quite critical to the application of wireless passive sensors for harsh environments. Since the change of the temperature-dependent permittivity will vary the ceramic-based capacitance, which can be converted into the change of the resonant frequency, an LC resonator, based on AlN ceramic, is prepared by the thick film technology. The dielectric properties of AlN ceramic are measured by the wireless coupling method, and discussed within the temperature range of 12 °C (room temperature) to 600 °C. The results show that the extracted relative permittivity of ceramic at room temperature is 2.3% higher than the nominal value of 9, and increases from 9.21 to 10.79, and the quality factor Q is decreased from 29.77 at room temperature to 3.61 at 600 °C within the temperature range.
authors.affiliation: Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China. Liuj@nuc.edu.cn.|Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China. Liuj@nuc.edu.cn.
authors.forename: Jun
authors.initials: J
authors.lastname: Liu
authors.affiliation: Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China. yuanyukun_ever@163.com.|Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China. yuanyukun_ever@163.com.
authors.forename: Yukun
authors.initials: Y
authors.lastname: Yuan
authors.affiliation: Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China. rz381567720@163.com.
authors.forename: Zhong
authors.initials: Z
authors.lastname: Ren
authors.affiliation: Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China. tanqiulin@nuc.edu.cn.|Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China. tanqiulin@nuc.edu.cn.
authors.forename: Qiulin
authors.initials: Q
authors.lastname: Tan
authors.affiliation: Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China. xiongjijun@nuc.edu.cn.|Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China. xiongjijun@nuc.edu.cn.
authors.forename: Jijun
authors.initials: J
authors.lastname: Xiong
keywords: LC resonator; aluminum nitride ceramic; dielectric properties; high temperature; quality factor; wireless passive