title: Direct evidence on Ta-Metal Phases Igniting Resistive Switching in TaO(x) Thin Film.
abstract: A Ta/TaOx/Pt stacked capacitor-like device for resistive switching was fabricated and examined. The tested device demonstrated stable resistive switching characteristics including uniform distribution of resistive switching operational parameters, highly promising endurance, and retention properties. To reveal the resistive switching mechanism of the device, micro structure analysis using high-resolution transmission electron microscope (HR-TEM) was performed. From the observation results, two different phases of Ta-metal clusters of cubic α-Ta and tetragonal β-Ta were founded in the amorphous TaOx mother-matrix after the device was switched from high resistance state (HRS) to low resistance state (LRS) by externally applied voltage bias. The observed Ta metal clusters unveiled the origin of the electric conduction paths in the TaOx thin film at the LRS.
authors.affiliation: Future Convergence Research Division, Interface Control Research Center, Korea Institute Science &Technology (KIST), Seoul 136-791, Republic of Korea.
authors.forename: Min
authors.initials: M
authors.lastname: Kyu Yang
authors.affiliation: Future Convergence Research Division, Interface Control Research Center, Korea Institute Science &Technology (KIST), Seoul 136-791, Republic of Korea.
authors.forename: Hyunsu
authors.initials: H
authors.lastname: Ju
authors.affiliation: Department of Materials Science and Engineering, Seoul National University, Seoul 151-744, Korea.
authors.forename: Gun
authors.initials: G
authors.lastname: Hwan Kim
authors.affiliation: Future Convergence Research Division, Interface Control Research Center, Korea Institute Science &Technology (KIST), Seoul 136-791, Republic of Korea.
authors.forename: Jeon-Kook
authors.initials: JK
authors.lastname: Lee
authors.affiliation: Department of Car Mechatronics, Sahmyook Univ., Seoul 139-800, Republic of Korea.
authors.forename: Han-Cheol
authors.initials: HC
authors.lastname: Ryu