title: Measurement of optical thickness variation of BK7 plate by wavelength tuning interferometry.
abstract: This paper presents the derivation of a 17-sample phase-shifting algorithm that can compensate the miscalibration and first-order nonlinearity of phase shift error, coupling error, and bias modulation of the intensity and satisfy the fringe contrast maximum condition. The phase error of measurements performed using the 17-sample algorithm is discussed and compared with those of measurements obtained using other algorithms. Finally, the optical thickness variation of a BK7 optically transparent plate obtained using a wavelength tuning Fizeau interferometer and the 17-sample algorithm are presented. The experimental results indicate that the optical thickness variation measurement accuracy for the BK7 plate was 3 nm.
authors.forename: Yangjin
authors.initials: Y
authors.lastname: Kim
authors.forename: Kenichi
authors.initials: K
authors.lastname: Hibino
authors.forename: Naohiko
authors.initials: N
authors.lastname: Sugita
authors.forename: Mamoru
authors.initials: M
authors.lastname: Mitsuishi