title: Vertical-Injection AlGaInP LEDs with n-AlGaInP Nanopillars Fabricated by Self-Assembled ITO-Based Nanodots.
abstract: The light output power of AlGaInP-based vertical-injection light-emitting diodes (VI-LEDs) can be enhanced significantly using n-AlGaInP nanopillars. n-AlGaInP nanopillars, ~200 nm in diameter, were produced using SiO2 nanopillars as an etching mask, which were fabricated from self-assembled tin-doped indium oxide (ITO)-based nanodots formed by the wet etching of as-deposited ITO films. The AlGaInP-based VI-LEDs with the n-AlGaInP nanopillars provided 25 % light output power enhancement compared to VI-LEDs with a surface-roughened n-AlGaInP because of the reduced total internal reflection by the nanopillars at the n-AlGaInP/air interface with a large refractive index difference of 1.9.
authors.affiliation: Department of Printed Electronics Engineering, Sunchon National University, Jeonnam, 540-742, South Korea.|LED Device Research Center, Korea Photonics Technology Institute, Gwangju, 500-779, South Korea.
authors.forename: Ho-Soung
authors.initials: HS
authors.lastname: Ryu
authors.affiliation: Department of Printed Electronics Engineering, Sunchon National University, Jeonnam, 540-742, South Korea.
authors.forename: Min Joo
authors.initials: MJ
authors.lastname: Park
authors.affiliation: Department of Printed Electronics Engineering, Sunchon National University, Jeonnam, 540-742, South Korea.
authors.forename: Seung Kyu
authors.initials: SK
authors.lastname: Oh
authors.affiliation: LED Device Research Center, Korea Photonics Technology Institute, Gwangju, 500-779, South Korea.
authors.forename: Hwa-Sub
authors.initials: HS
authors.lastname: Oh
authors.affiliation: LED Device Research Center, Korea Photonics Technology Institute, Gwangju, 500-779, South Korea.
authors.forename: Jong-Hyeob
authors.initials: JH
authors.lastname: Baek
authors.affiliation: Department of Printed Electronics Engineering, Sunchon National University, Jeonnam, 540-742, South Korea. jskwak@sunchon.ac.kr.
authors.forename: Joon Seop
authors.initials: JS
authors.lastname: Kwak
keywords: AlGaInP; Light-emitting diodes; Nanodots; Nanopillars