title: Elemental Distribution in Multilayer Systems by Laser-Assisted Atom Probe Tomography with Various Analysis Directions.
abstract: Elemental distributions in a magnetic multilayer system with the structure Si substrate/Ta/NiFe/Ru/CoFeB/Ru/NiFe were studied using atom probe tomography (APT) along different analysis directions. The distributions of Ru and B atoms, which require a high evaporation field, were strongly influenced by the APT analysis direction. In particular, B in the CoFeB layer appeared near the interface with the lower Ru layer when the analysis was anti-parallel to the film growth direction, while B atoms were observed at the other side of the CoFeB layer when the analysis was parallel to the film growth direction. Moreover, when the analysis was perpendicular to the film growth direction, a homogenous distribution of B atoms was found within the CoFeB layer. Owing to this B behavior, the underlying Ru layer was affected in both of these analysis directions. In APT measurements of such a multilayer system composed of a stack of different evaporation field materials, evaluation of the elemental distribution around interfaces should be performed from more than one analysis direction.
authors.affiliation: 1TDK Corporation,543 Otai,Saku-shi,Nagano 385-8555,Japan.
authors.forename: Masaki
authors.initials: M
authors.lastname: Kubota
authors.affiliation: 2The Oarai Center,Institute for Materials Research,Tohoku University,Oarai,Ibaraki 311-1313,Japan.
authors.forename: Hisashi
authors.initials: H
authors.lastname: Takamizawa
authors.affiliation: 2The Oarai Center,Institute for Materials Research,Tohoku University,Oarai,Ibaraki 311-1313,Japan.
authors.forename: Yasuo
authors.initials: Y
authors.lastname: Shimizu
authors.affiliation: 2The Oarai Center,Institute for Materials Research,Tohoku University,Oarai,Ibaraki 311-1313,Japan.
authors.forename: Yasuko
authors.initials: Y
authors.lastname: Nozawa
authors.affiliation: 2The Oarai Center,Institute for Materials Research,Tohoku University,Oarai,Ibaraki 311-1313,Japan.
authors.forename: Naoki
authors.initials: N
authors.lastname: Ebisawa
authors.affiliation: 2The Oarai Center,Institute for Materials Research,Tohoku University,Oarai,Ibaraki 311-1313,Japan.
authors.forename: Takeshi
authors.initials: T
authors.lastname: Toyama
authors.affiliation: 1TDK Corporation,543 Otai,Saku-shi,Nagano 385-8555,Japan.
authors.forename: Yoichi
authors.initials: Y
authors.lastname: Ishida
authors.affiliation: 1TDK Corporation,543 Otai,Saku-shi,Nagano 385-8555,Japan.
authors.forename: Katsuaki
authors.initials: K
authors.lastname: Yanagiuchi
authors.affiliation: 2The Oarai Center,Institute for Materials Research,Tohoku University,Oarai,Ibaraki 311-1313,Japan.
authors.forename: Koji
authors.initials: K
authors.lastname: Inoue
authors.affiliation: 2The Oarai Center,Institute for Materials Research,Tohoku University,Oarai,Ibaraki 311-1313,Japan.
authors.forename: Yasuyoshi
authors.initials: Y
authors.lastname: Nagai
keywords: artifact; atom probe tomography; field evaporation; magnetic multilayers