title: Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon.
abstract: Thin films of lithium niobate are wafer bonded onto silicon substrates and rib-loaded with a chalcogenide glass, Ge(23)Sb(7)S(70), to demonstrate strongly confined single-mode submicron waveguides, microring modulators, and Mach-Zehnder modulators in the telecom C band. The 200 μm radii microring modulators present 1.2 dB/cm waveguide propagation loss, 1.2 × 10(5) quality factor, 0.4 GHz/V tuning rate, and 13 dB extinction ratio. The 6 mm long Mach-Zehnder modulators have a half-wave voltage-length product of 3.8 V.cm and an extinction ratio of 15 dB. The demonstrated work is a key step towards enabling wafer scale dense on-chip integration of high performance lithium niobate electro-optical devices on silicon for short reach optical interconnects and higher order advanced modulation schemes.
authors.forename: Ashutosh
authors.initials: A
authors.lastname: Rao
authors.forename: Aniket
authors.initials: A
authors.lastname: Patil
authors.forename: Jeff
authors.initials: J
authors.lastname: Chiles
authors.forename: Marcin
authors.initials: M
authors.lastname: Malinowski
authors.forename: Spencer
authors.initials: S
authors.lastname: Novak
authors.forename: Kathleen
authors.initials: K
authors.lastname: Richardson
authors.forename: Payam
authors.initials: P
authors.lastname: Rabiei
authors.forename: Sasan
authors.initials: S
authors.lastname: Fathpour