title: High-resolution fiber profilometer for hard-to-access areas.
abstract: A fiber-based profilometer is developed to measure hard-to-access areas. This system utilizes the low-coherence light interferometry technique to detect the internal surface profiles of some samples. A differentiation method is employed to enhance the lateral and vertical resolutions of the measured imaging results. The probe design parameters are optimized for a desired working distance and a small beam size. The performance of the profilometer system, especially its high-resolution property, is demonstrated.
authors.forename: Zhuang
authors.initials: Z
authors.lastname: Liu
authors.forename: Qize
authors.initials: Q
authors.lastname: Zhong
authors.forename: Xia
authors.initials: X
authors.lastname: Yu
authors.forename: Qi Jie
authors.initials: QJ
authors.lastname: Wang
authors.forename: Ying
authors.initials: Y
authors.lastname: Zhang