title: High-fidelity AFM scanning stage based on multilayer ceramic capacitors.
abstract: A kind of multilayer ceramic capacitors (MLCCs) has been verified to have good micro-actuating properties, thus making them good candidates for nano-positioning. In this paper, we successfully employed the MLCCs as lateral scanners for a tripod scanning stage. The MLCC-based lateral scanners display hysteresis under 1.5% and a nonlinearity less than 2% even with the simplest open-loop voltage drive. The developed scanning stage was integrated into a commercial AFM to evaluate its imaging performance. Experimental results showed that sample images with high fidelities were obtained. SCANNING 38:184-190, 2016. © 2015 Wiley Periodicals, Inc.
authors.affiliation: Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, Anhui, China.
authors.forename: Jian
authors.initials: J
authors.lastname: Chen
authors.affiliation: Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, Anhui, China.
authors.forename: Lian Sheng
authors.initials: LS
authors.lastname: Zhang
authors.affiliation: Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, Anhui, China.
authors.forename: Zhi Hua
authors.initials: ZH
authors.lastname: Feng
keywords: atomic force microscope; hysteresis; linearity; multilayer ceramic capacitor; tripod scanning stage