title: λ/20 axial control in 2.5D polymerized structures fabricated with DLW lithography.
abstract: An astonishing λ/20 height control is accomplished in 2.5D photopolymerized structures by taking advantage of the induced expansion of the resin. Our nanofabrication method is a one-pot approach with two processing steps: (i) regular 2.5D photopolymerization of the resin monomer by using multiphoton direct laser writing (DLW) lithography and (ii) spatially-selective irradiation of the photopolymerized features before development resulting in a nanometer-controlled height increase of the structure. The UV-visible-NIR sub-wavelength axial feature size (~40 nm) of this method allows fabricating devices with applications in multiple technological fields such as nanoelectronics and photonics.
authors.forename: Gustavo
authors.initials: G
authors.lastname: de Miguel
authors.forename: Martí
authors.initials: M
authors.lastname: Duocastella
authors.forename: Giuseppe
authors.initials: G
authors.lastname: Vicidomini
authors.forename: Alberto
authors.initials: A
authors.lastname: Diaspro