title: Low-loss passive waveguides in a generic InP foundry process via local diffusion of zinc.
abstract: Generic InP foundry processes allow monolithic integration of active and passive elements into a common p-n doped layerstack. The passive loss can be greatly reduced by restricting the p-dopant to active regions. We report on a localized Zn-diffusion process based on MOVPE, which allows to reduce waveguide loss from 2 dB/cm to below 0.4 dB/cm. We confirm this value by fabrication of a 73 mm long spiral ring resonator, with a record quality factor of 1.2 million and an extinction ratio of 9.7 dB.
authors.forename: Domenico
authors.initials: D
authors.lastname: D'Agostino
authors.forename: Giuseppe
authors.initials: G
authors.lastname: Carnicella
authors.forename: Caterina
authors.initials: C
authors.lastname: Ciminelli
authors.forename: Peter
authors.initials: P
authors.lastname: Thijs
authors.forename: Petrus J
authors.initials: PJ
authors.lastname: Veldhoven
authors.forename: Huub
authors.initials: H
authors.lastname: Ambrosius
authors.forename: Meint
authors.initials: M
authors.lastname: Smit