title: Scalable Sub-micron Patterning of Organic Materials Toward High Density Soft Electronics.
abstract: The success of silicon based high density integrated circuits ignited explosive expansion of microelectronics. Although the inorganic semiconductors have shown superior carrier mobilities for conventional high speed switching devices, the emergence of unconventional applications, such as flexible electronics, highly sensitive photosensors, large area sensor array, and tailored optoelectronics, brought intensive research on next generation electronic materials. The rationally designed multifunctional soft electronic materials, organic and carbon-based semiconductors, are demonstrated with low-cost solution process, exceptional mechanical stability, and on-demand optoelectronic properties. Unfortunately, the industrial implementation of the soft electronic materials has been hindered due to lack of scalable fine-patterning methods. In this report, we demonstrated facile general route for high throughput sub-micron patterning of soft materials, using spatially selective deep-ultraviolet irradiation. For organic and carbon-based materials, the highly energetic photons (e.g. deep-ultraviolet rays) enable direct photo-conversion from conducting/semiconducting to insulating state through molecular dissociation and disordering with spatial resolution down to a sub-μm-scale. The successful demonstration of organic semiconductor circuitry promise our result proliferate industrial adoption of soft materials for next generation electronics.
authors.affiliation: School of Electrical and Electronic Engineering, Chung-Ang University, Seoul, Korea.|Department of Applied Materials Engineering, Hanbat National University, Daejeon, Korea.
authors.forename: Jaekyun
authors.initials: J
authors.lastname: Kim
authors.affiliation: Department of Chemistry, Chung-Ang University, Seoul, Korea.
authors.forename: Myung-Gil
authors.initials: MG
authors.lastname: Kim
authors.affiliation: School of Electrical and Electronic Engineering, Chung-Ang University, Seoul, Korea.
authors.forename: Jaehyun
authors.initials: J
authors.lastname: Kim
authors.affiliation: School of Electrical and Electronic Engineering, Chung-Ang University, Seoul, Korea.
authors.forename: Sangho
authors.initials: S
authors.lastname: Jo
authors.affiliation: School of Electrical and Electronic Engineering, Chung-Ang University, Seoul, Korea.
authors.forename: Jingu
authors.initials: J
authors.lastname: Kang
authors.affiliation: School of Electrical and Electronic Engineering, Chung-Ang University, Seoul, Korea.
authors.forename: Jeong-Wan
authors.initials: JW
authors.lastname: Jo
authors.affiliation: School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon, Korea.|SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon, Korea.
authors.forename: Woobin
authors.initials: W
authors.lastname: Lee
authors.affiliation: Department of Chemistry, Chung-Ang University, Seoul, Korea.
authors.forename: Chahwan
authors.initials: C
authors.lastname: Hwang
authors.affiliation: Civil Engineering Program, Department of Mechanical Engineering, Stony Brook University, NY, USA.
authors.forename: Juhyuk
authors.initials: J
authors.lastname: Moon
authors.affiliation: Photon Sciences Directorate, Brookhaven National Laboratory, Upton, NY, USA.
authors.forename: Lin
authors.initials: L
authors.lastname: Yang
authors.affiliation: Department of Chemistry Gyeongsang National University and Research Institute of Nature Science (RINS), Jinju, Korea.
authors.forename: Yun-Hi
authors.initials: YH
authors.lastname: Kim
authors.affiliation: Department of Energy and Materials Engineering, Dongguk University, Seoul, Korea.
authors.forename: Yong-Young
authors.initials: YY
authors.lastname: Noh
authors.affiliation: Department of Organic and Nano Engineering, Hangyang University, Seoul, Korea.
authors.forename: Jae Yun
authors.initials: JY
authors.lastname: Jaung
authors.affiliation: School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon, Korea.|SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon, Korea.
authors.forename: Yong-Hoon
authors.initials: YH
authors.lastname: Kim
authors.affiliation: School of Electrical and Electronic Engineering, Chung-Ang University, Seoul, Korea.
authors.forename: Sung Kyu
authors.initials: SK
authors.lastname: Park
mesh_terms: D002244:Carbon; D004581:Electronics; D009930:Organic Chemicals; D010777:Photochemistry; D011108:Polymers; D012666:Semiconductors
chemical_list: D009930:Organic Chemicals; D011108:Polymers; D002244:Carbon