title: SEM and Raman analysis of graphene on SiC(0001).
abstract: Graphene grown by a sublimation technique was studied by Scanning Electron Microscopy (SEM) and micro-Raman spectroscopy. The measurement area of a sample was marked and investigated using both systems, as a result of which SEM images were directly compared with Raman maps. In this work we show that a correlative analysis of Energy Selective Backscattered electrons detector (EsB), In-Lens figures and Raman maps of shape and intensity of the 2D band is adequate to determine graphene layer thickness with the precision of SEM and reliability of Raman spectroscopy.
authors.affiliation: Institute of Electronic Materials Technology, 133 Wolczynska Str., 01-919 Warsaw, Poland. Electronic address: Kacper.grodecki@itme.edu.pl.
authors.forename: K
authors.initials: K
authors.lastname: Grodecki
authors.affiliation: Institute of Electronic Materials Technology, 133 Wolczynska Str., 01-919 Warsaw, Poland.
authors.forename: I
authors.initials: I
authors.lastname: Jozwik
authors.affiliation: Institute of Electronic Materials Technology, 133 Wolczynska Str., 01-919 Warsaw, Poland; Faculty of Physics, University of Warsaw, Pasteura 5, 02-093 Warsaw, Poland.
authors.forename: J M
authors.initials: JM
authors.lastname: Baranowski
authors.affiliation: Institute of Electronic Materials Technology, 133 Wolczynska Str., 01-919 Warsaw, Poland.
authors.forename: D
authors.initials: D
authors.lastname: Teklinska
authors.affiliation: Institute of Electronic Materials Technology, 133 Wolczynska Str., 01-919 Warsaw, Poland.
authors.forename: W
authors.initials: W
authors.lastname: Strupinski
mesh_terms: D006108:Graphite / Q000032:analysis*; D008855:Microscopy, Electron, Scanning / Q000379:methods*; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D013059:Spectrum Analysis, Raman / Q000379:methods*
chemical_list: D006108:Graphite
keywords: Epitaxial graphene; Raman spectroscopy; Scanning Electron Microscopy