title: A Self-Aligned High-Mobility Graphene Transistor: Decoupling the Channel with Fluorographene to Reduce Scattering.
abstract: The conduction channel of a graphene field-effect transistor (FET) is decoupled from the parasitic charge impurities of the underlying substrate. Fluorographene as a passivation layer is fabricated between the oxide substrate and channel, and a self-aligned gate-terminated FET is also fabricated. This approach significantly reduces the scattering and, as a result, the mobility increases ten fold.
authors.affiliation: Department of Electronic Engineering, Chang Gung University, Kwei-Shan, Tao-Yuan, 333, Taiwan.
authors.forename: Kuan-I
authors.initials: KI
authors.lastname: Ho
authors.affiliation: GeePs, CNRS UMR8507, CentraleSupelec, Univ Paris-Sud, Sorbonne Universités-UPMC Univ Paris 06, 11 Rue Joliot-Curie, Plateau de Moulon, Gif-sur-Yvette, 91192, CEDEX, France.
authors.forename: Mohamed
authors.initials: M
authors.lastname: Boutchich
authors.affiliation: Graduate Institute of Energy Engineering, National Central University, Jhongli City, Taoyuan County, 32001, Taiwan.
authors.forename: Ching-Yuan
authors.initials: CY
authors.lastname: Su
authors.affiliation: Department of Electronic Engineering, Polytechnic of Turin, Corso Duca degli Abruzzi 24, 10129, Torino, Italy.
authors.forename: Rosalia
authors.initials: R
authors.lastname: Moreddu
authors.affiliation: Grenoble INP-Phelma, Université Grenoble Alpes, 3 Parvis Louis Néel, BP 257, 38016, Grenoble, CEDEX 01, France.
authors.forename: Eugene Sebastian Raj
authors.initials: ES
authors.lastname: Marianathan
authors.affiliation: IMEP-LAHC, Grenoble INP, Minatec, BP 257, 38016, Grenoble, France.
authors.forename: Laurent
authors.initials: L
authors.lastname: Montes
authors.affiliation: Department of Electronic Engineering, Chang Gung University, Kwei-Shan, Tao-Yuan, 333, Taiwan.
authors.forename: Chao-Sung
authors.initials: CS
authors.lastname: Lai
keywords: field-effect transistors; fluorographene; graphene; scattering; self-aligned