title: Active Damping of a Piezoelectric Tube Scanner using Self-Sensing Piezo Actuation.
abstract: In most Atomic Force Microscopes (AFM), a piezoelectric tube scanner is used to position the sample underneath the measurement probe. Oscillations stemming from the weakly damped resonances of the tube scanner are a major source of image distortion, putting a limitation on the achievable imaging speed. This paper demonstrates active damping of these oscillations in multiple scanning axes without the need for additional position sensors. By connecting the tube scanner in a capacitive bridge circuit the scanner oscillations can be measured in both scanning axes, using the same piezo material as an actuator and sensor simultaneously. In order to compensate for circuit imbalance caused by hysteresis in the piezo element, an adaptive balancing circuit is used. The obtained measurement signal is used for feedback control, reducing the resonance peaks in both scanning axes by 18 dB and the cross-coupling at those frequencies by 30 dB. Experimental results demonstrate a significant reduction in scanner oscillations when applying the typical triangular scanning signals, as well as a strong reduction in coupling induced oscillations. Recorded AFM images show a considerable reduction in image distortion due to the proposed control method, enabling artifact free AFM imaging at a speed of 122 lines per second with a standard piezoelectric tube scanner.
authors.affiliation: Delft Center for Systems and Control, Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628CD, Delft, The Netherlands.
authors.forename: S
authors.initials: S
authors.lastname: Kuiper
authors.affiliation: Delft Center for Systems and Control, Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628CD, Delft, The Netherlands. ; Automation and Control Institute, Vienna University of Technology, Gusshausstrasse 27-29, 1040 Vienna, Austria.
authors.forename: G
authors.initials: G
authors.lastname: Schitter
keywords: Atomic Force Microscopy; Piezoelectric actuators; self-sensing actuation