title: Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging Applications.
abstract: A capacitive micromachined ultrasonic transducer structure for use in underwater imaging is designed, fabricated and tested in this paper. In this structure, a silicon dioxide insulation layer is inserted between the top electrodes and the vibration membrane to prevent ohmic contact. The capacitance-voltage (C-V) characteristic curve shows that the transducer offers suitable levels of hysteresis and repeatability performance. The -6 dB center frequency is 540 kHz and the transducer has a bandwidth of 840 kHz for a relative bandwidth of 155%. Underwater pressure of 143.43 Pa is achieved 1 m away from the capacitive micromachined ultrasonic transducer under 20 Vpp excitation. Two-dimensional underwater ultrasonic imaging, which is able to prove that a rectangular object is present underwater, is achieved. The results presented here indicate that our work will be highly beneficial for the establishment of an underwater ultrasonic imaging system.
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China. jinlong_song@126.com.|Key Laboratory of Science and Technology on Electronic Test & Measurement, North University of China, Taiyuan 030051, China. jinlong_song@126.com.
authors.forename: Jinlong
authors.initials: J
authors.lastname: Song
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China. xuechenyang@nuc.edu.cn.|Key Laboratory of Science and Technology on Electronic Test & Measurement, North University of China, Taiyuan 030051, China. xuechenyang@nuc.edu.cn.
authors.forename: Chenyang
authors.initials: C
authors.lastname: Xue
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China. hechangde@nuc.edu.cn.|Key Laboratory of Science and Technology on Electronic Test & Measurement, North University of China, Taiyuan 030051, China. hechangde@nuc.edu.cn.
authors.forename: Changde
authors.initials: C
authors.lastname: He
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China. fly_zr@126.com.|Key Laboratory of Science and Technology on Electronic Test & Measurement, North University of China, Taiyuan 030051, China. fly_zr@126.com.
authors.forename: Rui
authors.initials: R
authors.lastname: Zhang
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China. muxiaotengjy@163.com.|Key Laboratory of Science and Technology on Electronic Test & Measurement, North University of China, Taiyuan 030051, China. muxiaotengjy@163.com.
authors.forename: Linfeng
authors.initials: L
authors.lastname: Mu
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China. cjj0229@sina.com.|Key Laboratory of Science and Technology on Electronic Test & Measurement, North University of China, Taiyuan 030051, China. cjj0229@sina.com.
authors.forename: Juan
authors.initials: J
authors.lastname: Cui
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China. miaojing_apple@126.com.|Key Laboratory of Science and Technology on Electronic Test & Measurement, North University of China, Taiyuan 030051, China. miaojing_apple@126.com.
authors.forename: Jing
authors.initials: J
authors.lastname: Miao
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China. liuy_wlj@163.com.|Key Laboratory of Science and Technology on Electronic Test & Measurement, North University of China, Taiyuan 030051, China. liuy_wlj@163.com.
authors.forename: Yuan
authors.initials: Y
authors.lastname: Liu
authors.affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China. wdzhang@nuc.edu.cn.|Key Laboratory of Science and Technology on Electronic Test & Measurement, North University of China, Taiyuan 030051, China. wdzhang@nuc.edu.cn.
authors.forename: Wendong
authors.initials: W
authors.lastname: Zhang
keywords: C-V characteristic curve; CMUT; bandwidth; sound pressure; ultrasonic imaging