title: Arbitrary and Parallel Nanofabrication of 3D Metal Structures with Polymer Brush Resists.
abstract: 3D polymer brushes are reported for the first time as ideal resists for the alignment-free nanofabrication of complex 3D metal structures with sub-100 nm lateral resolution and sub-10 nm vertical resolution. Since 3D polymer brushes can be serially fabricated in parallel, this method is effective to generate arbitrary 3D metal structures over a large area at a high throughput.
authors.affiliation: Advanced Research Centre for Fashion and Textiles, The Hong Kong Polytechnic University Shenzhen Research Institute, Shenzhen, 518000, China.|Nanotechnology Center Institute of Textiles and Clothing, The Hong Kong Polytechnic University, Hong Kong, China.
authors.forename: Chaojian
authors.initials: C
authors.lastname: Chen
authors.affiliation: Advanced Research Centre for Fashion and Textiles, The Hong Kong Polytechnic University Shenzhen Research Institute, Shenzhen, 518000, China.|Nanotechnology Center Institute of Textiles and Clothing, The Hong Kong Polytechnic University, Hong Kong, China.
authors.forename: Zhuang
authors.initials: Z
authors.lastname: Xie
authors.affiliation: Advanced Research Centre for Fashion and Textiles, The Hong Kong Polytechnic University Shenzhen Research Institute, Shenzhen, 518000, China.|Nanotechnology Center Institute of Textiles and Clothing, The Hong Kong Polytechnic University, Hong Kong, China.
authors.forename: Xiaoling
authors.initials: X
authors.lastname: Wei
authors.affiliation: Advanced Research Centre for Fashion and Textiles, The Hong Kong Polytechnic University Shenzhen Research Institute, Shenzhen, 518000, China.|Nanotechnology Center Institute of Textiles and Clothing, The Hong Kong Polytechnic University, Hong Kong, China.
authors.forename: Zijian
authors.initials: Z
authors.lastname: Zheng
keywords: 3D patterns; metal structures; nanofabrication; polymer brushes; scanning probe lithography