title: Atomic layer deposition on 2D transition metal chalcogenides: layer dependent reactivity and seeding with organic ad-layers.
abstract: This commmunication presents a study of atomic layer deposition of Al2O3 on transition metal dichalcogenide (TMD) two-dimensional films which is crucial for use of these promising materials for electronic applications. Deposition of Al2O3 on pristine chemical vapour deposited MoS2 and WS2 crystals is demonstrated. This deposition is dependent on the number of TMD layers as there is no deposition on pristine monolayers. In addition, we show that it is possible to reliably seed the deposition, even on the monolayer, using non-covalent functionalisation with perylene derivatives as anchor unit.
authors.affiliation: School of Chemistry, Trinity College Dublin, Dublin, Ireland. duesberg@tcd.ie and CRANN & AMBER Institutes, Trinity College, Dublin, Ireland.
authors.forename: Christian
authors.initials: C
authors.lastname: Wirtz
authors.affiliation: CRANN & AMBER Institutes, Trinity College, Dublin, Ireland.
authors.forename: Toby
authors.initials: T
authors.lastname: Hallam
authors.affiliation: School of Chemistry, Trinity College Dublin, Dublin, Ireland. duesberg@tcd.ie and CRANN & AMBER Institutes, Trinity College, Dublin, Ireland.
authors.forename: Conor Patrick
authors.initials: CP
authors.lastname: Cullen
authors.affiliation: School of Chemistry, Trinity College Dublin, Dublin, Ireland. duesberg@tcd.ie and CRANN & AMBER Institutes, Trinity College, Dublin, Ireland.
authors.forename: Nina C
authors.initials: NC
authors.lastname: Berner
authors.affiliation: School of Chemistry, Trinity College Dublin, Dublin, Ireland. duesberg@tcd.ie and CRANN & AMBER Institutes, Trinity College, Dublin, Ireland.
authors.forename: Maria
authors.initials: M
authors.lastname: O'Brien
authors.affiliation: Department of Chemistry and Pharmacy, Organische Chemie II, Friedrich-Alexander Universität Erlangen-Nürnberg, Henkestrasse 42, 91054 Erlangen, Germany.
authors.forename: Mario
authors.initials: M
authors.lastname: Marcia
authors.affiliation: Department of Chemistry and Pharmacy, Organische Chemie II, Friedrich-Alexander Universität Erlangen-Nürnberg, Henkestrasse 42, 91054 Erlangen, Germany.
authors.forename: Andreas
authors.initials: A
authors.lastname: Hirsch
authors.affiliation: School of Chemistry, Trinity College Dublin, Dublin, Ireland. duesberg@tcd.ie and CRANN & AMBER Institutes, Trinity College, Dublin, Ireland.
authors.forename: Georg S
authors.initials: GS
authors.lastname: Duesberg
mesh_terms: D000537:Aluminum Oxide / Q000737:chemistry; D018011:Chalcogens / Q000737:chemistry*; D009930:Organic Chemicals / Q000737:chemistry*; D013499:Surface Properties; D028561:Transition Elements / Q000737:chemistry*
chemical_list: D018011:Chalcogens; D009930:Organic Chemicals; D028561:Transition Elements; D000537:Aluminum Oxide