title: Erratum to: Optical properties and bandgap evolution of ALD HfSiOxfilms.
authors.affiliation: Institute of Advanced Nanodevices, School of Microelectronics, Fudan University, No. 220 Handan Road, Shanghai, 200433, China.
authors.forename: Wen
authors.initials: W
authors.lastname: Yang
authors.affiliation: Semiconductor Physics, Technische Universität Chemnitz, Reichenhainer Straße 70, Chemnitz, D-09107, Germany.
authors.forename: Michael
authors.initials: M
authors.lastname: Fronk
authors.affiliation: Institute of Advanced Nanodevices, School of Microelectronics, Fudan University, No. 220 Handan Road, Shanghai, 200433, China.
authors.forename: Yang
authors.initials: Y
authors.lastname: Geng
authors.affiliation: Institute of Advanced Nanodevices, School of Microelectronics, Fudan University, No. 220 Handan Road, Shanghai, 200433, China. linchen@fudan.edu.cn.
authors.forename: Lin
authors.initials: L
authors.lastname: Chen
authors.affiliation: Institute of Advanced Nanodevices, School of Microelectronics, Fudan University, No. 220 Handan Road, Shanghai, 200433, China. qqsun@fudan.edu.cn.
authors.forename: Qing-Qing
authors.initials: QQ
authors.lastname: Sun
authors.affiliation: Semiconductor Physics, Technische Universität Chemnitz, Reichenhainer Straße 70, Chemnitz, D-09107, Germany.
authors.forename: Ovidiu D
authors.initials: OD
authors.lastname: Gordan
authors.affiliation: Institute of Advanced Nanodevices, School of Microelectronics, Fudan University, No. 220 Handan Road, Shanghai, 200433, China.
authors.forename: Peng
authors.initials: P
authors.lastname: Zhou
authors.affiliation: Semiconductor Physics, Technische Universität Chemnitz, Reichenhainer Straße 70, Chemnitz, D-09107, Germany.
authors.forename: Dietrich R T
authors.initials: DR
authors.lastname: Zahn
authors.affiliation: Institute of Advanced Nanodevices, School of Microelectronics, Fudan University, No. 220 Handan Road, Shanghai, 200433, China.
authors.forename: David Wei
authors.initials: DW
authors.lastname: Zhang