title: Direct Growth and Controlled Coalescence of Thick AlN Template on Micro-circle Patterned Si Substrate.
abstract: High-density micro-circle patterned Si substrates were successfully fabricated for the direct overgrowth of thick AlN templates by using NH3 pulsed-flow multilayer AlN growth and epitaxial lateral overgrowth techniques. The experimental results show that an 8-μm-thick AlN template was grown at a very high growth rate on the substrates. The AlN template had full widths at half maximum of 0.23° and 0.37° for the (002) and (102) reflection planes in X-ray diffraction rocking curves. Atomic force microscopy and transmission electron microscopy confirmed that the roughness of the surface was low (3.5 nm) and the dislocation density was very low (1.5 × 10(8) cm(-2) (screw), 3.7 × 10(8) (edge) cm(-2)).
authors.affiliation: Quantum Optodevice Laboratory, Institute of Physical and Chemical Research (RIKEN), 2-1 Hirosawa, Wako, Saitama 351-0198, Japan.
authors.forename: Binh Tinh
authors.initials: BT
authors.lastname: Tran
authors.affiliation: Quantum Optodevice Laboratory, Institute of Physical and Chemical Research (RIKEN), 2-1 Hirosawa, Wako, Saitama 351-0198, Japan.
authors.forename: Hideki
authors.initials: H
authors.lastname: Hirayama
authors.affiliation: Quantum Optodevice Laboratory, Institute of Physical and Chemical Research (RIKEN), 2-1 Hirosawa, Wako, Saitama 351-0198, Japan.
authors.forename: Noritoshi
authors.initials: N
authors.lastname: Maeda
authors.affiliation: Quantum Optodevice Laboratory, Institute of Physical and Chemical Research (RIKEN), 2-1 Hirosawa, Wako, Saitama 351-0198, Japan.
authors.forename: Masafumi
authors.initials: M
authors.lastname: Jo
authors.affiliation: Quantum Optodevice Laboratory, Institute of Physical and Chemical Research (RIKEN), 2-1 Hirosawa, Wako, Saitama 351-0198, Japan.
authors.forename: Shiro
authors.initials: S
authors.lastname: Toyoda
authors.affiliation: Quantum Optodevice Laboratory, Institute of Physical and Chemical Research (RIKEN), 2-1 Hirosawa, Wako, Saitama 351-0198, Japan.
authors.forename: Norihiko
authors.initials: N
authors.lastname: Kamata