title: Athermal silicon ring resonators clad with titanium dioxide for 1.3µm wavelength operation.
abstract: We investigate the athermal characteristics of silicon waveguides clad with TiO(2) designed for 1.3 µm wavelength operation. Using CMOS-compatible fabrication processes, we realize and experimentally demonstrate silicon photonic ring resonators with resonant wavelengths that vary by less than 6 pm/°C at 1.3 µm. The measured ring resonance wavelengths across the 20-50°C temperature range show nearly complete cancellation of the first-order thermo-optical effects and exhibit second-order thermo-optical effects expected from the combination of TiO(2) and Si.
authors.forename: Shaoqi
authors.initials: S
authors.lastname: Feng
authors.forename: Kuanping
authors.initials: K
authors.lastname: Shang
authors.forename: Jock T
authors.initials: JT
authors.lastname: Bovington
authors.forename: Rui
authors.initials: R
authors.lastname: Wu
authors.forename: Binbin
authors.initials: B
authors.lastname: Guan
authors.forename: Kwang-Ting
authors.initials: KT
authors.lastname: Cheng
authors.forename: John E
authors.initials: JE
authors.lastname: Bowers
authors.forename: S J Ben
authors.initials: SJ
authors.lastname: Yoo