title: Piezoelectric Size Effects in a Zinc Oxide Micropillar.
abstract: In this work, the dependence of piezoelectric coefficients (PE) on the size of artificial fabricated ZnO micropillars on Si substrate is investigated. ZnO full film is grown with c-axis orientation and an average grain size of 20 nm at a substrate temperature of 500 °C by pulsed laser ablation. The micropillars with the size range of 1.5 to 7 μm are formed by top-down semiconductor device processing. The PE, characterized by piezoelectric force microscopy (PFM), is found to increase from 18.2 to 46.9 pm/V, when the ZnO pillar size is reduced from 7 to 1.5 μm. The strong PE dependence on ZnO pillar size can be explained by local changes in polarization and reduction of unit cell volume with respect to bulk values. These results have strong implications in the field of energy harvesting, as piezoelectric voltage output scales with the piezoelectric coefficient.
authors.affiliation: State Key Laboratory of Material-Oriented Chemical Engineering and School of Chemical Engineering, Nanjing Tech University, Nanjing, Jiangsu, 210009, People's Republic of China. wojiaolitaogeee@163.com.
authors.forename: Tao
authors.initials: T
authors.lastname: Li
authors.affiliation: State Key Laboratory of Material-Oriented Chemical Engineering and School of Chemical Engineering, Nanjing Tech University, Nanjing, Jiangsu, 210009, People's Republic of China. 1206070912@qq.com.
authors.forename: Yu Tong
authors.initials: YT
authors.lastname: Li
authors.affiliation: State Key Laboratory of Material-Oriented Chemical Engineering and School of Chemical Engineering, Nanjing Tech University, Nanjing, Jiangsu, 210009, People's Republic of China. qinweiweixiah@163.com.
authors.forename: Wei Wei
authors.initials: WW
authors.lastname: Qin
authors.affiliation: State Key Laboratory of Material-Oriented Chemical Engineering and School of Chemical Engineering, Nanjing Tech University, Nanjing, Jiangsu, 210009, People's Republic of China. 8888zhangpingping@163.com.
authors.forename: Ping Ping
authors.initials: PP
authors.lastname: Zhang
authors.affiliation: State Key Laboratory of Material-Oriented Chemical Engineering and School of Chemical Engineering, Nanjing Tech University, Nanjing, Jiangsu, 210009, People's Republic of China. chenxq@njtech.edu.cn.
authors.forename: Xiao Qiang
authors.initials: XQ
authors.lastname: Chen
authors.affiliation: State Key Laboratory of Material-Oriented Chemical Engineering and School of Chemical Engineering, Nanjing Tech University, Nanjing, Jiangsu, 210009, People's Republic of China. xuefeng.hu@njtech.edu.cn.
authors.forename: Xue Feng
authors.initials: XF
authors.lastname: Hu
authors.affiliation: State Key Laboratory of Material-Oriented Chemical Engineering and School of Chemical Engineering, Nanjing Tech University, Nanjing, Jiangsu, 210009, People's Republic of China. zhangw@njtech.edu.cn.
authors.forename: Wei
authors.identifier: http://orcid.org/0000-0003-4310-3045
authors.initials: W
authors.lastname: Zhang
keywords: Nanogenerator; Piezoelectric; Pulsed laser ablation; ZnO micropillars