title: Validation of Direct Analysis Real Time source/Time-of-Flight Mass Spectrometry for organophosphate quantitation on wafer surface.
abstract: Microelectronic wafers are exposed to airborne molecular contamination (AMC) during the fabrication process of microelectronic components. The organophosphate compounds belonging to the dopant group are one of the most harmful groups. Once adsorbed on the wafer surface these compounds hardly desorb and could diffuse in the bulk of the wafer and invert the wafer from p-type to n-type. The presence of these compounds on wafer surface could have electrical effect on the microelectronic components. For these reasons, it is of importance to control the amount of these compounds on the surface of the wafer. As a result, a fast quantitative and qualitative analytical method, nondestructive for the wafers, is needed to be able to adjust the process and avoid the loss of an important quantity of processed wafers due to the contamination by organophosphate compounds. Here we developed and validated an analytical method for the determination of organic compounds adsorbed on the surface of microelectronic wafers using the Direct Analysis in Real Time-Time of Flight-Mass Spectrometry (DART-ToF-MS) system. Specifically, the developed methodology concerns the organophosphate group.
authors.affiliation: Aix Marseille Université, Laboratoire de chimie de l'environnement, CNRS, FRE 3416, 3 Place Victor Hugo (case 29), 13331 Marseille, France; TERA Environnement, Actipôle Saint Charles, 131 Avenue de l'étoile, 13710 Fuveau, France. Electronic address: nathalie.hayeck@etu.univ-amu.fr.
authors.forename: Nathalie
authors.initials: N
authors.lastname: Hayeck
authors.affiliation: Aix Marseille Université, Laboratoire de chimie de l'environnement, CNRS, FRE 3416, 3 Place Victor Hugo (case 29), 13331 Marseille, France.
authors.forename: Sylvain
authors.initials: S
authors.lastname: Ravier
authors.affiliation: Aix Marseille Université, Laboratoire de chimie de l'environnement, CNRS, FRE 3416, 3 Place Victor Hugo (case 29), 13331 Marseille, France.
authors.forename: Rachel
authors.initials: R
authors.lastname: Gemayel
authors.affiliation: Aix Marseille Université, Laboratoire de chimie de l'environnement, CNRS, FRE 3416, 3 Place Victor Hugo (case 29), 13331 Marseille, France.
authors.forename: Sasho
authors.initials: S
authors.lastname: Gligorovski
authors.affiliation: TERA Environnement, Actipôle Saint Charles, 131 Avenue de l'étoile, 13710 Fuveau, France.
authors.forename: Irène
authors.initials: I
authors.lastname: Poulet
authors.affiliation: Lebanese University, Faculty of Science II, Chemistry and Biochemistry Department, Fanar, 90656 Jdeideth el-Matn, Lebanon.
authors.forename: Jacqueline
authors.initials: J
authors.lastname: Maalouly
authors.affiliation: Aix Marseille Université, Laboratoire de chimie de l'environnement, CNRS, FRE 3416, 3 Place Victor Hugo (case 29), 13331 Marseille, France.
authors.forename: Henri
authors.initials: H
authors.lastname: Wortham
keywords: DART–ToF-MS; Direct Analysis in Real Time; Organophosphate; Silicon wafers; Tris-(2-chloroethyl) phosphate; Tris-(2-chloroisopropyl) phosphate