title: Optimization of surface acoustic wave-based rate sensors.
abstract: The optimization of an surface acoustic wave (SAW)-based rate sensor incorporating metallic dot arrays was performed by using the approach of partial-wave analysis in layered media. The optimal sensor chip designs, including the material choice of piezoelectric crystals and metallic dots, dot thickness, and sensor operation frequency were determined theoretically. The theoretical predictions were confirmed experimentally by using the developed SAW sensor composed of differential delay line-oscillators and a metallic dot array deposited along the acoustic wave propagation path of the SAW delay lines. A significant improvement in sensor sensitivity was achieved in the case of 128° YX LiNbO₃, and a thicker Au dot array, and low operation frequency were used to structure the sensor.
authors.affiliation: Zhejiang University of Media and Communications, 998 Xueyuan Street Higher Education Zone Xia Sha, Zhejiang 310018, China. xufangqian2006@163.com.
authors.forename: Fangqian
authors.initials: F
authors.lastname: Xu
authors.affiliation: State Key Laboratory of Acoustics, Institute of Acoustics, Chinese Academy of Sciences, No. 21, BeiSiHuan West Road, Beijing 100190, China. wangwenwq@mail.ioa.ac.cn.
authors.forename: Wen
authors.initials: W
authors.lastname: Wang
authors.affiliation: State Key Laboratory of Acoustics, Institute of Acoustics, Chinese Academy of Sciences, No. 21, BeiSiHuan West Road, Beijing 100190, China. shaoxiuting10@mails.ucas.ac.cn.
authors.forename: Xiuting
authors.initials: X
authors.lastname: Shao
authors.affiliation: State Key Laboratory of Acoustics, Institute of Acoustics, Chinese Academy of Sciences, No. 21, BeiSiHuan West Road, Beijing 100190, China. liuxinlu1987@foxmail.com.
authors.forename: Xinlu
authors.initials: X
authors.lastname: Liu
authors.affiliation: State Key Laboratory of Acoustics, Institute of Acoustics, Chinese Academy of Sciences, No. 21, BeiSiHuan West Road, Beijing 100190, China. liangyong@mail.ioa.ac.cn.
authors.forename: Yong
authors.initials: Y
authors.lastname: Liang
keywords: Coriolis force; SAW rate sensor; delay line-oscillator; metallic dot array; partial-wave analysis