title: Low-loss and high-Q Ta(2)O(5) based micro-ring resonator with inverse taper structure.
abstract: A low-loss and high-Q Ta(2)O(5) based micro-ring resonator is presented. The micro-ring resonator and channel waveguide with core area of the 700 by 400 nm(2) were fabricated on amorphous Ta(2)O(5) thin films prepared by reactive sputtering at 300°C and post annealing at 650°C for 3 hours. The Ta(2)O(5) micro-ring resonator with a diameter of 200 μm was coupled to the channel waveguide with a coupled Q up to 38,000 at a 0.9 μm coupling gap. By fitting the transmission spectrum of the resonator, the extracted loss coefficient inside the ring cavity and transmission coefficient of TE mode were 8.1dB/cm and 0.9923, leading to the estimated unloaded Q of higher than 44,000. In addition, based on the cut-back method, the propagation loss and the coupling loss of Ta(2)O(5) channel waveguide with an inverse taper were 1.5dB/cm and 3.2 dB, respectively. The proposed Ta(2)O(5) technology offers an unique alternative for fabricating high performance guided wave devices, and may well lead to novel applications in photonic integrated circuits.
authors.forename: Chung-Lun
authors.initials: CL
authors.lastname: Wu
authors.forename: Bo-Tsang
authors.initials: BT
authors.lastname: Chen
authors.forename: Yuan-Yao
authors.initials: YY
authors.lastname: Lin
authors.forename: Wei-Chen
authors.initials: WC
authors.lastname: Tien
authors.forename: Gong-Ru
authors.initials: GR
authors.lastname: Lin
authors.forename: Yi-Jen
authors.initials: YJ
authors.lastname: Chiu
authors.forename: Yung-Jr
authors.initials: YJ
authors.lastname: Hung
authors.forename: Ann-Kuo
authors.initials: AK
authors.lastname: Chu
authors.forename: Chao-Kuei
authors.initials: CK
authors.lastname: Lee