title: Atomic-Level Sculpting of Crystalline Oxides: Toward Bulk Nanofabrication with Single Atomic Plane Precision.
abstract: The atomic-level sculpting of 3D crystalline oxide nanostructures from metastable amorphous films in a scanning transmission electron microscope (STEM) is demonstrated. Strontium titanate nanostructures grow epitaxially from the crystalline substrate following the beam path. This method can be used for fabricating crystalline structures as small as 1-2 nm and the process can be observed in situ with atomic resolution. The fabrication of arbitrary shape structures via control of the position and scan speed of the electron beam is further demonstrated. Combined with broad availability of the atomic resolved electron microscopy platforms, these observations suggest the feasibility of large scale implementation of bulk atomic-level fabrication as a new enabling tool of nanoscience and technology, providing a bottom-up, atomic-level complement to 3D printing.
authors.affiliation: Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA.|The Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA.
authors.forename: Stephen
authors.initials: S
authors.lastname: Jesse
authors.affiliation: The Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA.|Materials Sciences and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA.
authors.forename: Qian
authors.initials: Q
authors.lastname: He
authors.affiliation: Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA.|Materials Sciences and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA.
authors.forename: Andrew R
authors.initials: AR
authors.lastname: Lupini
authors.affiliation: Materials Sciences and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA.
authors.forename: Donovan N
authors.initials: DN
authors.lastname: Leonard
authors.affiliation: Department of Physics and Astronomy, Vanderbilt University, Nashville, TN, 37235, USA.
authors.forename: Mark P
authors.initials: MP
authors.lastname: Oxley
authors.affiliation: Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA.|Department of Physics and Astronomy, Vanderbilt University, Nashville, TN, 37235, USA.
authors.forename: Oleg
authors.initials: O
authors.lastname: Ovchinnikov
authors.affiliation: Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA.|The Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA.
authors.forename: Raymond R
authors.initials: RR
authors.lastname: Unocic
authors.affiliation: Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA.|The Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA.
authors.forename: Alexander
authors.initials: A
authors.lastname: Tselev
authors.affiliation: The Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA.|Computer Science and Mathematics Division, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA.
authors.forename: Miguel
authors.initials: M
authors.lastname: Fuentes-Cabrera
authors.affiliation: Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA.|The Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA.|Computer Science and Mathematics Division, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA.
authors.forename: Bobby G
authors.initials: BG
authors.lastname: Sumpter
authors.affiliation: Department of Materials Science and Engineering, National University of Singapore, Singapore, 117575, Singapore.
authors.forename: Stephen J
authors.initials: SJ
authors.lastname: Pennycook
authors.affiliation: Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA.|The Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA.
authors.forename: Sergei V
authors.initials: SV
authors.lastname: Kalinin
authors.affiliation: Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA.|The Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA.|Materials Sciences and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA.
authors.forename: Albina Y
authors.initials: AY
authors.lastname: Borisevich
keywords: atomic-level sculpting; complex oxides; electron beam; epitaxy; microscopy; patterning