title: Highly Crystalline CVD-grown Multilayer MoSe2 Thin Film Transistor for Fast Photodetector.
abstract: Hexagonal molybdenum diselenide (MoSe2) multilayers were grown by chemical vapor deposition (CVD). A relatively high pressure (>760 Torr) was used during the CVD growth to achieve multilayers by creating multiple nuclei based on the two-dimensional crystal growth model. Our CVD-grown multilayer MoSe2 thin-film transistors (TFTs) show p-type-dominant ambipolar behaviors, which are attributed to the formation of Se vacancies generated at the decomposition temperature (650 °C) after the CVD growth for 10 min. Our MoSe2 TFT with a reasonably high field-effect mobility (10 cm(2)/V · s) exhibits a high photoresponsivity (93.7 A/W) and a fast photoresponse time (τ(rise) ~ 0.4 s) under the illumination of light, which demonstrates the practical feasibility of multilayer MoSe2 TFTs for photodetector applications.
authors.affiliation: Multi-Functional Nano/Bio Electronics Lab., Kyung Hee University, Gyeonggi, 446-701, Republic of Korea.
authors.forename: Chulseung
authors.initials: C
authors.lastname: Jung
authors.affiliation: Carbon Convergence Materials Research Center, Korea Institute of Science and Technology, Wanju-gun 565-905, Republic of Korea.
authors.forename: Seung Min
authors.initials: SM
authors.lastname: Kim
authors.affiliation: Multi-Functional Nano/Bio Electronics Lab., Kyung Hee University, Gyeonggi, 446-701, Republic of Korea.
authors.forename: Hyunseong
authors.initials: H
authors.lastname: Moon
authors.affiliation: Department of Electrical and Computer Engineering &Waterloo Institute for Nanotechnology (WIN), University of Waterloo, Waterloo, ON, N2L 3G1, Canada.
authors.forename: Gyuchull
authors.initials: G
authors.lastname: Han
authors.affiliation: Multi-Functional Nano/Bio Electronics Lab., Kyung Hee University, Gyeonggi, 446-701, Republic of Korea.
authors.forename: Junyeon
authors.initials: J
authors.lastname: Kwon
authors.affiliation: Multi-Functional Nano/Bio Electronics Lab., Kyung Hee University, Gyeonggi, 446-701, Republic of Korea.
authors.forename: Young Ki
authors.initials: YK
authors.lastname: Hong
authors.affiliation: Multi-Functional Nano/Bio Electronics Lab., Kyung Hee University, Gyeonggi, 446-701, Republic of Korea.
authors.forename: Inturu
authors.initials: I
authors.lastname: Omkaram
authors.affiliation: Department of Electrical and Computer Engineering &Waterloo Institute for Nanotechnology (WIN), University of Waterloo, Waterloo, ON, N2L 3G1, Canada.
authors.forename: Youngki
authors.initials: Y
authors.lastname: Yoon
authors.affiliation: Multi-Functional Nano/Bio Electronics Lab., Kyung Hee University, Gyeonggi, 446-701, Republic of Korea.
authors.forename: Sunkook
authors.initials: S
authors.lastname: Kim
authors.affiliation: Multi-Functional Nano/Bio Electronics Lab., Kyung Hee University, Gyeonggi, 446-701, Republic of Korea.
authors.forename: Jozeph
authors.initials: J
authors.lastname: Park