title: Fully etched apodized grating coupler on the SOI platform with -0.58 dB coupling efficiency.
abstract: We design and fabricate an ultrahigh coupling efficiency (CE) fully etched apodized grating coupler on the silicon-on-insulator (SOI) platform using subwavelength photonic crystals and bonded aluminum mirror. Fabrication error sensitivity and coupling angle dependence are experimentally investigated. A record ultrahigh CE of -0.58 dB with a 3 dB bandwidth of 71 nm and low back reflection are demonstrated.
authors.forename: Yunhong
authors.initials: Y
authors.lastname: Ding
authors.forename: Christophe
authors.initials: C
authors.lastname: Peucheret
authors.forename: Haiyan
authors.initials: H
authors.lastname: Ou
authors.forename: Kresten
authors.initials: K
authors.lastname: Yvind