In situ electronic probing of semiconducting nanowires in an electron microscope.
For the development of electronic nanoscale structures, feedback on its electronic properties is crucial, but challenging. Here, we present a comparison of various in situ methods for electronically probing single, p-doped GaAs nanowires inside a scanning electron microscope. The methods used include (i) directly probing individual as-grown nanowires with a sharp nano-manipulator, (ii) contacting dispersed nanowires with two metal contacts and (iii) contacting dispersed nanowires with four metal contacts. For the last two cases, we compare the results obtained using conventional ex situ litho-graphy contacting techniques and by in situ, direct-write electron beam induced deposition of a metal (Pt). The comparison shows that 2-probe measurements gives consistent results also with contacts made by electron beam induced deposition, but that for 4-probe, stray deposition can be a problem for shorter nanowires. This comparative study demonstrates that the preferred in situ method depends on the required throughput and reliability.
Department of Physics, Norwegian University of Science and Technology (NTNU), Trondheim, Norway.
V T
VT
Fauske
Department of Physics, Norwegian University of Science and Technology (NTNU), Trondheim, Norway.
M B
MB
Erlbeck
Department of Electronics and Telecommunications, Norwegian University of Science and Technology (NTNU), Trondheim, Norway.
J
J
Huh
Department of Electronics and Telecommunications, Norwegian University of Science and Technology (NTNU), Trondheim, Norway.|Department of Electronics and Telecommunications, CrayoNano AS, Trondheim, Norway.
D C
DC
Kim
Department of Electronics and Telecommunications, CrayoNano AS, Trondheim, Norway.
A M
AM
Munshi
Department of Electronics and Telecommunications, CrayoNano AS, Trondheim, Norway.
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DL
Dheeraj
Department of Electronics and Telecommunications, Norwegian University of Science and Technology (NTNU), Trondheim, Norway.|Department of Electronics and Telecommunications, CrayoNano AS, Trondheim, Norway.
H
H
Weman
Department of Electronics and Telecommunications, Norwegian University of Science and Technology (NTNU), Trondheim, Norway.|Department of Electronics and Telecommunications, CrayoNano AS, Trondheim, Norway.
B O
BO
Fimland
Department of Physics, Norwegian University of Science and Technology (NTNU), Trondheim, Norway.
A T J
AT
Van Helvoort
Characterisation; GaAs; SEM; electron beam deposition; electronic; in situ; nanowire