title: Contributed Review: Application of voice coil motors in high-precision positioning stages with large travel ranges.
abstract: Recent interest in high-precision positioning stages with large travel ranges has sparked renewed attention to the development of voice coil motors (VCMs). Due to their large output force, VCMs can actuate more complicated flexure structures, eliminate rail friction, and improve positioning speed. The VCM structure is both compact and flexible; hence, it is convenient to design VCMs for a variety of stage structures. Furthermore, VCMs combined with other actuators are able to achieve large travel ranges with high precision. In this paper, we summarize the principles and control methods of a typical VCM, and we analyze its properties, including thrust force, acceleration, and response time. We then present recent research on high-precision VCM positioning stages with large travel ranges.
authors.affiliation: Key Laboratory of Micro-nano Measurement-Manipulation and Physics (Ministry of Education) and School of Physics and Nuclear Energy Engineering, Beihang University, Beijing 100191, China.
authors.forename: Guanqiao
authors.initials: G
authors.lastname: Shan
authors.affiliation: Key Laboratory of Micro-nano Measurement-Manipulation and Physics (Ministry of Education) and School of Physics and Nuclear Energy Engineering, Beihang University, Beijing 100191, China.
authors.forename: Yingzi
authors.initials: Y
authors.lastname: Li
authors.affiliation: Key Laboratory of Micro-nano Measurement-Manipulation and Physics (Ministry of Education) and School of Physics and Nuclear Energy Engineering, Beihang University, Beijing 100191, China.
authors.forename: Liwen
authors.initials: L
authors.lastname: Zhang
authors.affiliation: Key Laboratory of Micro-nano Measurement-Manipulation and Physics (Ministry of Education) and School of Physics and Nuclear Energy Engineering, Beihang University, Beijing 100191, China.
authors.forename: Zhenyu
authors.initials: Z
authors.lastname: Wang
authors.affiliation: Key Laboratory of Micro-nano Measurement-Manipulation and Physics (Ministry of Education) and School of Physics and Nuclear Energy Engineering, Beihang University, Beijing 100191, China.
authors.forename: Yingxu
authors.initials: Y
authors.lastname: Zhang
authors.affiliation: Key Laboratory of Micro-nano Measurement-Manipulation and Physics (Ministry of Education) and School of Physics and Nuclear Energy Engineering, Beihang University, Beijing 100191, China.
authors.forename: Jianqiang
authors.initials: J
authors.lastname: Qian