title: Large Scale Laser Crystallization of Solution-based Alumina-doped Zinc Oxide (AZO) Nanoinks for Highly Transparent Conductive Electrode.
abstract: A new method combining aqueous solution printing with UV Laser crystallization (UVLC) and post annealing is developed to deposit highly transparent and conductive Aluminum doped Zinc Oxide (AZO) films. This technique is able to rapidly produce large area AZO films with better structural and optoelectronic properties than most high vacuum deposition, suggesting a potential large-scale manufacturing technique. The optoelectronic performance improvement attributes to UVLC and forming gas annealing (FMG) induced grain boundary density decrease and electron traps passivation at grain boundaries. The physical model and computational simulation developed in this work could be applied to thermal treatment of many other metal oxide films.
authors.affiliation: Birck Nanotechnology Center and School of Industrial Engineering, Purdue University, West Lafayette, IN 47906.
authors.forename: Qiong
authors.initials: Q
authors.lastname: Nian
authors.affiliation: Greentech Solutions Inc., Hanson, MA 02341.
authors.forename: Michael
authors.initials: M
authors.lastname: Callahan
authors.affiliation: Birck Nanotechnology Center and School of Industrial Engineering, Purdue University, West Lafayette, IN 47906.
authors.forename: Mojib
authors.initials: M
authors.lastname: Saei
authors.affiliation: Semiconductor Research Center, Wright State University, Dayton, OH 45435.
authors.forename: David
authors.initials: D
authors.lastname: Look
authors.affiliation: CNSE College of Nanoscale Science and Engineering, University of Albany, Albany, NY 12203.
authors.forename: Harry
authors.initials: H
authors.lastname: Efstathiadis
authors.affiliation: Greentech Solutions Inc., Hanson, MA 02341.
authors.forename: John
authors.initials: J
authors.lastname: Bailey
authors.affiliation: Birck Nanotechnology Center and School of Industrial Engineering, Purdue University, West Lafayette, IN 47906.
authors.forename: Gary J
authors.initials: GJ
authors.lastname: Cheng