title: A one-dimensional ion beam figuring system for x-ray mirror fabrication.
abstract: We report on the development of a one-dimensional Ion Beam Figuring (IBF) system for x-ray mirror polishing. Ion beam figuring provides a highly deterministic method for the final precision figuring of optical components with advantages over conventional methods. The system is based on a state of the art sputtering deposition system outfitted with a gridded radio frequency inductive coupled plasma ion beam source equipped with ion optics and dedicated slit developed specifically for this application. The production of an IBF system able to produce an elongated removal function rather than circular is presented in this paper, where we describe in detail the technical aspect and present the first obtained results.
authors.affiliation: NSLS-II, Brookhaven National Laboratory, P.O. Box 5000, Upton, New York 11973, USA.
authors.forename: Mourad
authors.initials: M
authors.lastname: Idir
authors.affiliation: NSLS-II, Brookhaven National Laboratory, P.O. Box 5000, Upton, New York 11973, USA.
authors.forename: Lei
authors.initials: L
authors.lastname: Huang
authors.affiliation: NSLS-II, Brookhaven National Laboratory, P.O. Box 5000, Upton, New York 11973, USA.
authors.forename: Nathalie
authors.initials: N
authors.lastname: Bouet
authors.affiliation: NSLS-II, Brookhaven National Laboratory, P.O. Box 5000, Upton, New York 11973, USA.
authors.forename: Konstantine
authors.initials: K
authors.lastname: Kaznatcheev
authors.affiliation: NSLS-II, Brookhaven National Laboratory, P.O. Box 5000, Upton, New York 11973, USA.
authors.forename: Matthew
authors.initials: M
authors.lastname: Vescovi
authors.affiliation: NSLS-II, Brookhaven National Laboratory, P.O. Box 5000, Upton, New York 11973, USA.
authors.forename: Ken
authors.initials: K
authors.lastname: Lauer
authors.affiliation: Advanced Photon Source, Argonne National Laboratory, Argonne, Illinois 60439, USA.
authors.forename: Ray
authors.initials: R
authors.lastname: Conley
authors.affiliation: Kaufman & Robinson, Inc., 1330 Blue Spruce Drive, Fort Collins, Colorado 80524, USA.
authors.forename: Kent
authors.initials: K
authors.lastname: Rennie
authors.affiliation: Kaufman & Robinson, Inc., 1330 Blue Spruce Drive, Fort Collins, Colorado 80524, USA.
authors.forename: Jim
authors.initials: J
authors.lastname: Kahn
authors.affiliation: Kaufman & Robinson, Inc., 1330 Blue Spruce Drive, Fort Collins, Colorado 80524, USA.
authors.forename: Richard
authors.initials: R
authors.lastname: Nethery
authors.affiliation: College of Mechatronics and Automation, National University of Defense Technology, 109 Deya Road, Changsha, Hunan 410073, China.
authors.forename: Lin
authors.initials: L
authors.lastname: Zhou