title: Large Area MEMS Based Ultrasound Device for Cancer Detection.
abstract: We present image results obtained using a prototype ultrasound array which demonstrates the fundamental architecture for a large area MEMS based ultrasound device for detection of breast cancer. The prototype array consists of a tiling of capacitive Micro-Machined Ultrasound Transducers (cMUTs) which have been flip-chip attached to a rigid organic substrate. The pitch on the cMUT elements is 185 um and the operating frequency is nominally 9 MHz. The spatial resolution of the new probe is comparable to production PZT probes, however the sensitivity is reduced by conditions that should be correctable. Simulated opposed-view image registration and Speed of Sound volume reconstruction results for ultrasound in the mammographic geometry are also presented.
authors.affiliation: GE Global Research, 1 Research Circle, Niskayuna, NY,12309,USA.
authors.forename: Robert
authors.initials: R
authors.lastname: Wodnicki
authors.affiliation: GE Global Research, 1 Research Circle, Niskayuna, NY,12309,USA.
authors.forename: Kai
authors.initials: K
authors.lastname: Thomenius
authors.affiliation: Radiology and Biomedical Engineering, University of Michigan, Ann Arbor, MI 48109, USA.
authors.forename: Fong Ming
authors.initials: FM
authors.lastname: Hooi
authors.affiliation: Radiology and Biomedical Engineering, University of Michigan, Ann Arbor, MI 48109, USA.
authors.forename: Sumedha P
authors.initials: SP
authors.lastname: Sinha
authors.affiliation: Radiology and Biomedical Engineering, University of Michigan, Ann Arbor, MI 48109, USA.
authors.forename: Paul L
authors.initials: PL
authors.lastname: Carson
authors.affiliation: Department of Electrical Engineering, Stanford University, Stanford, CA 94309, USA.
authors.forename: Der-Song
authors.initials: DS
authors.lastname: Lin
authors.affiliation: Department of Electrical Engineering, Stanford University, Stanford, CA 94309, USA.
authors.forename: Xuefeng
authors.initials: X
authors.lastname: Zhuang
authors.affiliation: Department of Electrical Engineering, Stanford University, Stanford, CA 94309, USA.
authors.forename: Pierre
authors.initials: P
authors.lastname: Khuri-Yakub
authors.affiliation: Chuck Woychik was with GE when this work was performed and is now with Tessera Inc., Microelectronics Technologies Group, San Jose, CA 95134, USA.
authors.forename: Charles
authors.initials: C
authors.lastname: Woychik
keywords: Breast Cancer; Interposer; Large Area Array; MEMS; Ultrasound; cMUT