title: A New Strategy of Lithography Based on Phase Separation of Polymer Blends.
abstract: Herein, we propose a new strategy of maskless lithographic approach to fabricate micro/nano-porous structures by phase separation of polystyrene (PS)/Polyethylene glycol (PEG) immiscible polymer blend. Its simple process only involves a spin coating of polymer blend followed by a development with deionized water rinse to remove PEG moiety, which provides an extremely facile, low-cost, easily accessible nanofabrication method to obtain the porous structures with wafer-scale. By controlling the weight ratio of PS/PEG polymer blend, its concentration and the spin-coating speed, the structural parameters of the porous nanostructure could be effectively tuned. These micro/nano porous structures could be converted into versatile functional nanostructures in combination with follow-up conventional chemical and physical nanofabrication techniques. As demonstrations of perceived potential applications using our developed phase separation lithography, we fabricate wafer-scale pure dielectric (silicon)-based two-dimensional nanostructures with high broadband absorption on silicon wafers due to their great light trapping ability, which could be expected for promising applications in the fields of photovoltaic devices and thermal emitters with very good performances, and Ag nanodot arrays which possess a surface enhanced Raman scattering (SERS) enhancement factor up to 1.64 × 10(8) with high uniformity across over an entire wafer.
authors.affiliation: Department of Materials Science and Engineering, College of Engineering and Applied Sciences, Nanjing University, Nanjing, 210093, China.|National Laboratory of Solid State Microstructures, Nanjing, 210093, China.
authors.forename: Xu
authors.initials: X
authors.lastname: Guo
authors.affiliation: Department of Physics, Nanjing University, Nanjing, 210093, China.|National Laboratory of Solid State Microstructures, Nanjing, 210093, China.
authors.forename: Long
authors.initials: L
authors.lastname: Liu
authors.affiliation: National Laboratory of Solid State Microstructures, Nanjing, 210093, China.|Jiangsu Provincial Key Laboratory of Advanced Photonic and Electronic Materials, School of Electronic Science and Engineering, Nanjing University, Nanjing, 210093, China.
authors.forename: Zhe
authors.initials: Z
authors.lastname: Zhuang
authors.affiliation: Department of Polymer Science &Engineering and Key Laboratory of High Performance Polymer Materials &Technology of MOE, School of Chemistry &Chemical Engineering, Nanjing University, Nanjing, 210093, China.
authors.forename: Xin
authors.initials: X
authors.lastname: Chen
authors.affiliation: Department of Materials Science and Engineering, College of Engineering and Applied Sciences, Nanjing University, Nanjing, 210093, China.|National Laboratory of Solid State Microstructures, Nanjing, 210093, China.
authors.forename: Mengyang
authors.initials: M
authors.lastname: Ni
authors.affiliation: Department of Materials Science and Engineering, College of Engineering and Applied Sciences, Nanjing University, Nanjing, 210093, China.|National Laboratory of Solid State Microstructures, Nanjing, 210093, China.
authors.forename: Yang
authors.initials: Y
authors.lastname: Li
authors.affiliation: Department of Materials Science and Engineering, College of Engineering and Applied Sciences, Nanjing University, Nanjing, 210093, China.|National Laboratory of Solid State Microstructures, Nanjing, 210093, China.
authors.forename: Yushuang
authors.initials: Y
authors.lastname: Cui
authors.affiliation: Department of Physics, Nanjing University, Nanjing, 210093, China.|National Laboratory of Solid State Microstructures, Nanjing, 210093, China.|Collaborative Innovation Center of Advanced Microstructures, Nanjing, 210093, China.
authors.forename: Peng
authors.initials: P
authors.lastname: Zhan
authors.affiliation: Department of Materials Science and Engineering, College of Engineering and Applied Sciences, Nanjing University, Nanjing, 210093, China.|National Laboratory of Solid State Microstructures, Nanjing, 210093, China.
authors.forename: Changsheng
authors.initials: C
authors.lastname: Yuan
authors.affiliation: Department of Materials Science and Engineering, College of Engineering and Applied Sciences, Nanjing University, Nanjing, 210093, China.|National Laboratory of Solid State Microstructures, Nanjing, 210093, China.|Collaborative Innovation Center of Advanced Microstructures, Nanjing, 210093, China.
authors.forename: Haixiong
authors.initials: H
authors.lastname: Ge
authors.affiliation: Department of Physics, Nanjing University, Nanjing, 210093, China.|National Laboratory of Solid State Microstructures, Nanjing, 210093, China.|Collaborative Innovation Center of Advanced Microstructures, Nanjing, 210093, China.
authors.forename: Zhenlin
authors.initials: Z
authors.lastname: Wang
authors.affiliation: Department of Materials Science and Engineering, College of Engineering and Applied Sciences, Nanjing University, Nanjing, 210093, China.|National Laboratory of Solid State Microstructures, Nanjing, 210093, China.|Collaborative Innovation Center of Advanced Microstructures, Nanjing, 210093, China.
authors.forename: Yanfeng
authors.initials: Y
authors.lastname: Chen