title: High-Temperature SAW Wireless Strain Sensor with Langasite.
abstract: Two Surface acoustic wave (SAW) resonators were fabricated on langasite substrates with Euler angle of (0°, 138.5°, 117°) and (0°, 138.5°, 27°). A dipole antenna was bonded to the prepared SAW resonator to form a wireless sensor. The characteristics of the SAW sensors were measured by wireless frequency domain interrogation methods from 20 °C to 600 °C. Different temperature behaviors of the sensors were observed. Strain sensing was achieved using a cantilever configuration. The sensors were measured under applied strain from 20 °C to 500 °C. The shift of the resonance frequency contributed merely by strain is extracted from the combined effects of temperature and strain. Both the strain factors of the two SAW sensors increase with rising ambient temperature, and the SAW sensor deposited on (0°, 138.5°, 117°) cut is more sensitive to applied strain. The measurement errors of the two sensors are also discussed. The relative errors of the two sensors are between 0.63% and 2.09%. Even at 500 °C, the hysteresis errors of the two sensors are less than 5%.
authors.affiliation: State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China. s89s89s@126.com.
authors.forename: Lin
authors.initials: L
authors.lastname: Shu
authors.affiliation: State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China. bpeng@uestc.edu.cn.
authors.forename: Bin
authors.initials: B
authors.lastname: Peng
authors.affiliation: China Gas Turbine Establishment, Jiangyou 621703, China. zbyang668@163.com.
authors.forename: Zhengbing
authors.initials: Z
authors.lastname: Yang
authors.affiliation: State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China. jokerrui1992@163.com.
authors.forename: Rui
authors.initials: R
authors.lastname: Wang
authors.affiliation: State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China. dengsenyang1990@163.com.
authors.forename: Senyang
authors.initials: S
authors.lastname: Deng
authors.affiliation: State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China. xzliu@uestc.edu.cn.
authors.forename: Xingzhao
authors.initials: X
authors.lastname: Liu
keywords: SAW wireless sensor; high temperature; langasite; strain