title: Implications of the Differential Toxicological Effects of III-V Ionic and Particulate Materials for Hazard Assessment of Semiconductor Slurries.
abstract: Because of tunable band gaps, high carrier mobility, and low-energy consumption rates, III-V materials are attractive for use in semiconductor wafers. However, these wafers require chemical mechanical planarization (CMP) for polishing, which leads to the generation of large quantities of hazardous waste including particulate and ionic III-V debris. Although the toxic effects of micron-sized III-V materials have been studied in vivo, no comprehensive assessment has been undertaken to elucidate the hazardous effects of submicron particulates and released III-V ionic components. Since III-V materials may contribute disproportionately to the hazard of CMP slurries, we obtained GaP, InP, GaAs, and InAs as micron- (0.2-3 μm) and nanoscale (<100 nm) particles for comparative studies of their cytotoxic potential in macrophage (THP-1) and lung epithelial (BEAS-2B) cell lines. We found that nanosized III-V arsenides, including GaAs and InAs, could induce significantly more cytotoxicity over a 24-72 h observation period. In contrast, GaP and InP particulates of all sizes as well as ionic GaCl3 and InCl3 were substantially less hazardous. The principal mechanism of III-V arsenide nanoparticle toxicity is dissolution and shedding of toxic As(III) and, to a lesser extent, As(V) ions. GaAs dissolves in the cell culture medium as well as in acidifying intracellular compartments, while InAs dissolves (more slowly) inside cells. Chelation of released As by 2,3-dimercapto-1-propanesulfonic acid interfered in GaAs toxicity. Collectively, these results demonstrate that III-V arsenides, GaAs and InAs nanoparticles, contribute in a major way to the toxicity of III-V materials that could appear in slurries. This finding is of importance for considering how to deal with the hazard potential of CMP slurries.
authors.affiliation: Center for Environmental Implications of Nanotechnology, California NanoSystems Institute, University of California Los Angeles , 570 Westwood Plaza, Los Angeles, California 90095, United States.
authors.forename: Wen
authors.initials: W
authors.lastname: Jiang
authors.affiliation: Center for Environmental Implications of Nanotechnology, California NanoSystems Institute, University of California Los Angeles , 570 Westwood Plaza, Los Angeles, California 90095, United States.
authors.forename: Sijie
authors.initials: S
authors.lastname: Lin
authors.affiliation: Center for Environmental Implications of Nanotechnology, California NanoSystems Institute, University of California Los Angeles , 570 Westwood Plaza, Los Angeles, California 90095, United States.
authors.forename: Chong Hyun
authors.initials: CH
authors.lastname: Chang
authors.affiliation: Center for Environmental Implications of Nanotechnology, California NanoSystems Institute, University of California Los Angeles , 570 Westwood Plaza, Los Angeles, California 90095, United States.
authors.forename: Zhaoxia
authors.initials: Z
authors.lastname: Ji
authors.affiliation: Center for Environmental Implications of Nanotechnology, California NanoSystems Institute, University of California Los Angeles , 570 Westwood Plaza, Los Angeles, California 90095, United States.
authors.forename: Bingbing
authors.initials: B
authors.lastname: Sun
authors.affiliation: Center for Environmental Implications of Nanotechnology, California NanoSystems Institute, University of California Los Angeles , 570 Westwood Plaza, Los Angeles, California 90095, United States.
authors.forename: Xiang
authors.initials: X
authors.lastname: Wang
authors.affiliation: Center for Environmental Implications of Nanotechnology, California NanoSystems Institute, University of California Los Angeles , 570 Westwood Plaza, Los Angeles, California 90095, United States.
authors.forename: Ruibin
authors.initials: R
authors.lastname: Li
authors.affiliation: Center for Environmental Implications of Nanotechnology, California NanoSystems Institute, University of California Los Angeles , 570 Westwood Plaza, Los Angeles, California 90095, United States.
authors.forename: Nanetta
authors.initials: N
authors.lastname: Pon
authors.affiliation: Center for Environmental Implications of Nanotechnology, California NanoSystems Institute, University of California Los Angeles , 570 Westwood Plaza, Los Angeles, California 90095, United States.|Division of NanoMedicine, Department of Medicine, University of California Los Angeles , 10833 Le Conte Avenue, Los Angeles, California 90095, United States.
authors.forename: Tian
authors.initials: T
authors.lastname: Xia
authors.affiliation: Center for Environmental Implications of Nanotechnology, California NanoSystems Institute, University of California Los Angeles , 570 Westwood Plaza, Los Angeles, California 90095, United States.|Division of NanoMedicine, Department of Medicine, University of California Los Angeles , 10833 Le Conte Avenue, Los Angeles, California 90095, United States.
authors.forename: André E
authors.initials: AE
authors.lastname: Nel
mesh_terms: D001152:Arsenicals / Q000737:chemistry*; D002460:Cell Line; D002470:Cell Survival / Q000187:drug effects*; D005708:Gallium / Q000633:toxicity*; D006801:Humans; D053768:Metal Nanoparticles / Q000633:toxicity*; D010316:Particle Size; D012666:Semiconductors; D018675:Toxicity Tests
chemical_list: D001152:Arsenicals; D005708:Gallium
keywords: III−V materials; cytotoxicity; dissolution; nanoparticle; semiconductor; size