title: Simulation of the enhancement factor from an individual 3D hemisphere-on-post field emitter by using finite elements method.
abstract: This paper presents a 3D computational framework for evaluating electrostatic properties of a single field emitter characterized by the hemisphere-on-post geometry. Numerical simulations employed the finite elements method by using Ansys-Maxwell software. Extensive parametric simulations were focused on the threshold distance from which the emitter field enhancement factor (γ) becomes independent from the anode-substrate gap (G). This investigation allowed demonstrating that the ratio between G and the emitter height (h) is a reliable reference for a broad range of emitter dimensions; furthermore, results permitted establishing G/h ≥ 2.2 as the threshold condition for setting the anode without affecting γ.
authors.affiliation: Plasma Laboratory, Department of Semiconductors, Instrumentation and Photonics, School of Electric and Computer Engineering, University of Campinas (UNICAMP), Cidade Universitária Zeferino Vaz, P.O.Box 6101, Barão Geraldo, Campinas, 13083-852 São Paulo, Brazil.
authors.forename: D S
authors.initials: DS
authors.lastname: Roveri
authors.affiliation: Plasma Laboratory, Department of Semiconductors, Instrumentation and Photonics, School of Electric and Computer Engineering, University of Campinas (UNICAMP), Cidade Universitária Zeferino Vaz, P.O.Box 6101, Barão Geraldo, Campinas, 13083-852 São Paulo, Brazil.
authors.forename: G M
authors.initials: GM
authors.lastname: Sant'Anna
authors.affiliation: Plasma Laboratory, Department of Semiconductors, Instrumentation and Photonics, School of Electric and Computer Engineering, University of Campinas (UNICAMP), Cidade Universitária Zeferino Vaz, P.O.Box 6101, Barão Geraldo, Campinas, 13083-852 São Paulo, Brazil.
authors.forename: H H
authors.initials: HH
authors.lastname: Bertan
authors.affiliation: ESSS-ANSYS, 423 Rocio St., ITC - International Trade Center, 10th Floor, Room 1001/1002, Vila Olímpia, 04552-000 São Paulo, Brazil.
authors.forename: J F
authors.initials: JF
authors.lastname: Mologni
authors.affiliation: Plasma Laboratory, Department of Semiconductors, Instrumentation and Photonics, School of Electric and Computer Engineering, University of Campinas (UNICAMP), Cidade Universitária Zeferino Vaz, P.O.Box 6101, Barão Geraldo, Campinas, 13083-852 São Paulo, Brazil.
authors.forename: M A R
authors.initials: MAR
authors.lastname: Alves
authors.affiliation: Plasma Laboratory, Department of Semiconductors, Instrumentation and Photonics, School of Electric and Computer Engineering, University of Campinas (UNICAMP), Cidade Universitária Zeferino Vaz, P.O.Box 6101, Barão Geraldo, Campinas, 13083-852 São Paulo, Brazil.
authors.forename: E S
authors.initials: ES
authors.lastname: Braga
keywords: 3D hemisphere-on-post; Anode positioning; Enhancement factor; Field emitter; Finite elements method