title: Rapid Electron Beam Writing of Topologically Complex 3D Nanostructures Using Liquid Phase Precursor.
abstract: Advancement of focused electron beam-induced deposition (FEBID) as a versatile direct-write additive nanoscale fabrication technique has been inhibited by poor throughput, limited choice of precursors, and restrictions on possible 3D topologies. Here, we demonstrate FEBID using nanoelectrospray liquid precursor injection to grow carbon and pure metal nanostructures via direct decomposition and electrochemical reduction of the relevant precursors, achieving growth rates 10(5) times greater than those observed in standard gas-phase FEBID. Initiating growth at the free surface of a liquid pool enables fabrication of complex 3D carbon nanostructures with strong adhesion to the substrate. Deposition of silver microstructures at similar growth rates is also demonstrated as a promising avenue for future development of the technique.
authors.affiliation: George W. Woodruff School of Mechanical Engineering and ‡Parker H. Petit Institute for Bioengineering and Bioscience, Georgia Institute of Technology , Atlanta, Georgia 30332, United States.
authors.forename: Jeffrey S
authors.initials: JS
authors.lastname: Fisher
authors.affiliation: George W. Woodruff School of Mechanical Engineering and ‡Parker H. Petit Institute for Bioengineering and Bioscience, Georgia Institute of Technology , Atlanta, Georgia 30332, United States.
authors.forename: Peter A
authors.initials: PA
authors.lastname: Kottke
authors.affiliation: George W. Woodruff School of Mechanical Engineering and ‡Parker H. Petit Institute for Bioengineering and Bioscience, Georgia Institute of Technology , Atlanta, Georgia 30332, United States.
authors.forename: Songkil
authors.initials: S
authors.lastname: Kim
authors.affiliation: George W. Woodruff School of Mechanical Engineering and ‡Parker H. Petit Institute for Bioengineering and Bioscience, Georgia Institute of Technology , Atlanta, Georgia 30332, United States.
authors.forename: Andrei G
authors.initials: AG
authors.lastname: Fedorov
keywords: 3D nanostructures; Direct-write nanofabrication; amorphous carbon; electrospray; liquid phase-focused electron beam-induced deposition (LP-FEBID); silver deposition