title: Design and control of multi-actuated atomic force microscope for large-range and high-speed imaging.
abstract: This paper presents the design and control of a high-speed and large-range atomic force microscopy (AFM). A multi-actuation scheme is proposed where several nano-positioners cooperate to achieve the range and speed requirements. A simple data-based control design methodology is presented to effectively operate the AFM scanner components. The proposed controllers compensate for the coupled dynamics and divide the positioning responsibilities between the scanner components. As a result, the multi-actuated scanner behavior is equivalent to that of a single X-Y-Z positioner with large range and high speed. The scanner of the designed AFM is composed of five nano-positioners, features 6 μm out-of-plane and 120 μm lateral ranges and is capable of high-speed operation. The presented AFM has a modular design with laser spot size of 3.5 μm suitable for small cantilever, an optical view of the sample and probe, a conveniently large waterproof sample stage and a 20 MHz data throughput for high resolution image acquisition at high imaging speeds. This AFM is used to visualize etching of calcite in a solution of sulfuric acid. Layer-by-layer dissolution and pit formation along the crystalline lines in a low pH environment is observed in real time.
authors.affiliation: Department of Mechanical Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA 02139, USA.
authors.forename: I
authors.initials: I
authors.lastname: Soltani Bozchalooi
authors.affiliation: Department of Mechanical Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA 02139, USA.
authors.forename: A
authors.initials: A
authors.lastname: Careaga Houck
authors.affiliation: Department of Mechanical Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA 02139, USA; Department of Chemistry, College of Science, University of Dammam, Dammam, Saudi Arabia.
authors.forename: J M
authors.initials: JM
authors.lastname: AlGhamdi
authors.affiliation: Department of Mechanical Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA 02139, USA.
authors.forename: K
authors.initials: K
authors.lastname: Youcef-Toumi
keywords: Data-based control design; High-speed AFM; Large-range AFM; Multi-actuated AFM; Optical beam deflection