title: Simple method based on intensity measurements for characterization of aberrations from micro-optical components.
abstract: We report a simple method, based on intensity measurements, for the characterization of the wavefront and aberrations produced by micro-optical focusing elements. This method employs the setup presented earlier in [Opt. Express 22, 13202 (2014)] for measurements of the 3D point spread function, on which a basic phase-retrieval algorithm is applied. This combination allows for retrieval of the wavefront generated by the micro-optical element and, in addition, quantification of the optical aberrations through the wavefront decomposition with Zernike polynomials. The optical setup requires only an in-motion imaging system. The technique, adapted for the optimization of micro-optical component fabrication, is demonstrated by characterizing a planoconvex microlens.
authors.forename: Stephane
authors.initials: S
authors.lastname: Perrin
authors.forename: Maciej
authors.initials: M
authors.lastname: Baranski
authors.forename: Luc
authors.initials: L
authors.lastname: Froehly
authors.forename: Jorge
authors.initials: J
authors.lastname: Albero
authors.forename: Nicolas
authors.initials: N
authors.lastname: Passilly
authors.forename: Christophe
authors.initials: C
authors.lastname: Gorecki