title: High-frequency and high-quality silicon carbide optomechanical microresonators.
abstract: Silicon carbide (SiC) exhibits excellent material properties attractive for broad applications. We demonstrate the first SiC optomechanical microresonators that integrate high mechanical frequency, high mechanical quality, and high optical quality into a single device. The radial-breathing mechanical mode has a mechanical frequency up to 1.69 GHz with a mechanical Q around 5500 in atmosphere, which corresponds to a fm · Qm product as high as 9.47 × 10(12) Hz. The strong optomechanical coupling allows us to efficiently excite and probe the coherent mechanical oscillation by optical waves. The demonstrated devices, in combination with the superior thermal property, chemical inertness, and defect characteristics of SiC, show great potential for applications in metrology, sensing, and quantum photonics, particularly in harsh environments that are challenging for other device platforms.
authors.affiliation: Department of Physics and Astronomy, University of Rochester, Rochester, NY 14627, USA.
authors.forename: Xiyuan
authors.initials: X
authors.lastname: Lu
authors.affiliation: Department of Electrical and Computer Engineering, University of Rochester, Rochester, NY 14627, USA.
authors.forename: Jonathan Y
authors.initials: JY
authors.lastname: Lee
authors.affiliation: Department of Electrical and Computer Engineering, University of Rochester, Rochester, NY 14627, USA.|Institute of Optics, University of Rochester, Rochester, NY 14627, USA.
authors.forename: Qiang
authors.initials: Q
authors.lastname: Lin