title: Ultra-High-Density Arrays of Defect-Free AlN Nanorods: A "Space-Filling" Approach.
abstract: Nanostructured semiconductors have a clear potential for improved optoelectronic devices, such as high-efficiency light-emitting diodes (LEDs). However, most arrays of semiconductor nanorods suffer from having relatively low densities (or "fill factors") and a high degree of nonuniformity, especially when produced by self-organized growth. Ideally an array of nanorods for an optoelectronic emitter should have a fill factor close to 100%, with uniform rod diameter and height. In this article we present a "space-filling" approach for forming defect-free arrays of AlN nanorods, whereby the separation between each rod can be controlled to 5 nm due to a self-limiting process. These arrays of pyramidal-topped AlN nanorods formed over wafer-scale areas by metal organic chemical vapor deposition provide a defect-free semipolar top surface, for potential optoelectronic device applications with the highest reported fill factor at 98%.
authors.affiliation: Tyndall National Institute , Dyke Parade, T12 R5CP Cork City, Ireland.|AMBER@CRANN, Trinity College Dublin , D02 PN40 Dublin City, Ireland.
authors.forename: Michele
authors.initials: M
authors.lastname: Conroy
authors.affiliation: Tyndall National Institute , Dyke Parade, T12 R5CP Cork City, Ireland.
authors.forename: Vitaly Z
authors.initials: VZ
authors.lastname: Zubialevich
authors.affiliation: Tyndall National Institute , Dyke Parade, T12 R5CP Cork City, Ireland.
authors.forename: Haoning
authors.initials: H
authors.lastname: Li
authors.affiliation: Tyndall National Institute , Dyke Parade, T12 R5CP Cork City, Ireland.
authors.forename: Nikolay
authors.initials: N
authors.lastname: Petkov
authors.affiliation: Tyndall National Institute , Dyke Parade, T12 R5CP Cork City, Ireland.
authors.forename: Sally
authors.initials: S
authors.lastname: O'Donoghue
authors.affiliation: Tyndall National Institute , Dyke Parade, T12 R5CP Cork City, Ireland.|AMBER@CRANN, Trinity College Dublin , D02 PN40 Dublin City, Ireland.
authors.forename: Justin D
authors.initials: JD
authors.lastname: Holmes
authors.affiliation: Tyndall National Institute , Dyke Parade, T12 R5CP Cork City, Ireland.
authors.forename: Peter J
authors.initials: PJ
authors.lastname: Parbrook
keywords: III-nitrides; aluminum nitride; growth mechanism; nanorods; nanowires