title: Vertically Conductive Single-Crystal SiC-Based Bragg Reflector Grown on Si Wafer.
abstract: Single-crystal silicon carbide (SiC) thin-films on silicon (Si) were used for the fabrication and characterization of electrically conductive distributed Bragg reflectors (DBRs) on 100 mm Si wafers. The DBRs, each composed of 3 alternating layers of SiC and Al(Ga)N grown on Si substrates, show high wafer uniformity with a typical maximum reflectance of 54% in the blue spectrum and a stopband (at 80% maximum reflectance) as large as 100 nm. Furthermore, high vertical electrical conduction is also demonstrated resulting to a density of current exceeding 70 A/cm(2) above 1.5 V. Such SiC/III-N DBRs with high thermal and electrical conductivities could be used as pseudo-substrate to enhance the efficiency of SiC-based and GaN-based optoelectronic devices on large Si wafers.
authors.affiliation: Griffith University, Queensland Micro and Nanotechnology Centre, Brisbane, 4111, Australia.
authors.forename: David
authors.initials: D
authors.lastname: Massoubre
authors.affiliation: Griffith University, Queensland Micro and Nanotechnology Centre, Brisbane, 4111, Australia.
authors.forename: Li
authors.initials: L
authors.lastname: Wang
authors.affiliation: Griffith University, Queensland Micro and Nanotechnology Centre, Brisbane, 4111, Australia.
authors.forename: Leonie
authors.initials: L
authors.lastname: Hold
authors.affiliation: Bluglass Ltd., Sydney, 2128, Australia.
authors.forename: Alanna
authors.initials: A
authors.lastname: Fernandes
authors.affiliation: Griffith University, Queensland Micro and Nanotechnology Centre, Brisbane, 4111, Australia.
authors.forename: Jessica
authors.initials: J
authors.lastname: Chai
authors.affiliation: Griffith University, Queensland Micro and Nanotechnology Centre, Brisbane, 4111, Australia.
authors.forename: Sima
authors.initials: S
authors.lastname: Dimitrijev
authors.affiliation: Griffith University, Queensland Micro and Nanotechnology Centre, Brisbane, 4111, Australia.
authors.forename: Alan
authors.initials: A
authors.lastname: Iacopi