title: Fabrication of multilayered nanofluidic membranes through silicon templates.
abstract: We present a new fabrication method for solid-state nanoporous membranes based on sacrificial template structures made of silicon. The process consists of creating membranes by evaporating thin-films on sacrificial templates which, after their selective removal, opens the nanopores and releases the free-standing membranes. This way it is possible to define the geometry of the pore by design and to build the membrane by stacking thin-films of various materials through evaporation. Such a membrane with controlled porosity, pore geometry, thickness and nano-channel composition provides new opportunities for selective chemical functionalization, gating, electrical sensing or electrical stimulation inside the nanopore.
authors.affiliation: EPFL STI IMT LMIS4, Station 17, CH-1015 Lausanne, Switzerland. stefano.varricchio@epfl.ch.
authors.forename: Stefano S G
authors.initials: SS
authors.lastname: Varricchio
authors.affiliation: Center of MicroNanoTechnology, EPFL, CH-1015 Lausanne, Switzerland.
authors.forename: Hibert
authors.initials: H
authors.lastname: Cyrille
authors.affiliation: EPFL STI IMT LMIS4, Station 17, CH-1015 Lausanne, Switzerland. stefano.varricchio@epfl.ch.
authors.forename: Bertsch
authors.initials: B
authors.lastname: Arnaud
authors.affiliation: EPFL STI IMT LMIS4, Station 17, CH-1015 Lausanne, Switzerland. stefano.varricchio@epfl.ch.
authors.forename: Renaud
authors.initials: R
authors.lastname: Philippe