title: A Unique Self-Sensing, Self-Actuating AFM Probe at Higher Eigenmodes.
abstract: With its unique structure, the Akiyama probe is a type of tuning fork atomic force microscope probe. The long, soft cantilever makes it possible to measure soft samples in tapping mode. In this article, some characteristics of the probe at its second eigenmode are revealed by use of finite element analysis (FEA) and experiments in a standard atmosphere. Although the signal-to-noise ratio in this environment is not good enough, the 2 nm resolution and 0.09 Hz/nm sensitivity prove that the Akiyama probe can be used at its second eigenmode under FM non-contact mode or low amplitude FM tapping mode, which means that it is easy to change the measuring method from normal tapping to small amplitude tapping or non-contact mode with the same probe and equipment.
authors.affiliation: State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China. bertwu@tju.edu.cn.
authors.forename: Zhichao
authors.initials: Z
authors.lastname: Wu
authors.affiliation: State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China. guotong@tju.edu.cn.
authors.forename: Tong
authors.initials: T
authors.lastname: Guo
authors.affiliation: State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China. sam1909@163.com.
authors.forename: Ran
authors.initials: R
authors.lastname: Tao
authors.affiliation: State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China. liuleihua@tju.edu.cn.
authors.forename: Leihua
authors.initials: L
authors.lastname: Liu
authors.affiliation: State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China. chenjinping@tju.edu.cn.
authors.forename: Jinping
authors.initials: J
authors.lastname: Chen
authors.affiliation: State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China. xingfu@tju.edu.cn.
authors.forename: Xing
authors.initials: X
authors.lastname: Fu
authors.affiliation: State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China. xthu@tju.edu.cn.
authors.forename: Xiaotang
authors.initials: X
authors.lastname: Hu
keywords: AFM; finite element analysis; higher eigenmode; non-contact; quartz tuning fork