title: Modification Pathways for Copoly(2-oxazoline)s Enabling Their Application as Antireflective Coatings in Photolithography.
abstract: Chromophore-functionalized copoly(2-oxazoline)s are successfully evaluated as bottom antireflective coatings (BARCs) in high-resolution photolithography. With respect to UV light sources used in photolithographic production routines, anthracene is chosen as a chromophore. For application as polymer in BARCs, the copolymer poly(2-ethyl-2-oxazolin)45 -stat-poly(2-dec-9'-enyl-2-oxazolin)20 -stat-poly(2-(3'-(1"-(anthracen-9-ylmethyl)-1",2",3"-triazol-4-yl)propyl)-2-oxazolin)35 can be synthesized by the Huisgen cycloaddition click reaction of the copolymer poly(2-ethyl-2-oxazolin)45 -stat-poly(2-dec-9'-enyl-2-oxazolin)20 -stat-poly(2-pent-4'-inyl-2-oxazolin)35 and the corresponding azide-functionalized anthracenes. These copolymers can be crosslinked by the thermally induced thiol-ene reaction involving the unsaturated C=C bonds of the poly(2-dec-9'-enyl-2-oxazoline) repetition units and a multifunctional thiol as crosslinker. Tests of this BARC in a clean room under production conditions reveal a significant decrease of the swing-curve of a chemically amplified positive photoresist by more than 50%, hence significantly increasing the resolution of the photoresist.
authors.affiliation: Polymer Competence Center Leoben GmbH PCCL, Roseggerstrasse 12, 8700, Leoben, Austria.|Institute for Chemistry and Technology of Materials, Graz University of Technology, NAWI Graz, Stremayrgasse 9/V, 8010, Graz, Austria.
authors.forename: Martin
authors.initials: M
authors.lastname: Fimberger
authors.affiliation: Infineon Technologies Austria AG, Siemensstraße 2, 9500, Villach, Austria.
authors.forename: Andreas
authors.initials: A
authors.lastname: Behrendt
authors.affiliation: Institute for Surface Technologies and Photonics, Joanneum Research, Franz-Pichler-Strasse 30, 8160, Weiz, Austria.
authors.forename: Georg
authors.initials: G
authors.lastname: Jakopic
authors.affiliation: Institute for Chemistry and Technology of Materials, Graz University of Technology, NAWI Graz, Stremayrgasse 9/V, 8010, Graz, Austria.
authors.forename: Franz
authors.initials: F
authors.lastname: Stelzer
authors.affiliation: Department of Chemistry, Istanbul Technical University, Maslak, TR-34469, Istanbul, Turkey.
authors.forename: Volkan
authors.initials: V
authors.lastname: Kumbaraci
authors.affiliation: Polymer Competence Center Leoben GmbH PCCL, Roseggerstrasse 12, 8700, Leoben, Austria.
authors.forename: Frank
authors.initials: F
authors.lastname: Wiesbrock
mesh_terms: D000873:Anthracenes / Q000737:chemistry; D002850:Chromatography, Gel; D008962:Models, Theoretical; D055620:Optical Phenomena; D010080:Oxazoles / Q000737:chemistry*; D011108:Polymers / Q000737:chemistry*; D011327:Printing; D012031:Refractometry
chemical_list: D000873:Anthracenes; D010080:Oxazoles; D011108:Polymers; C034020:anthracene
keywords: absorption coefficient; photolithography; poly(2-oxazoline)s; ring-opening polymerization