title: Note: Thermally stable thin-film filters for high-power extreme-ultraviolet applications.
abstract: We investigated several types of thin-film filters for high intensity work in the extreme-ultraviolet (EUV) spectral range. In our application, with a peak EUV intensity of 2.7 W cm(-2), Ni-mesh-backed Zr filters have a typical lifetime of 20 h, at which point they suffer from pinholes and a 50% loss of transmission. Initial trials with Si filters on Ni meshes resulted in rupture of the filters in less than an hour. A simple thermal calculation showed that the temperature rise in those filters to be about 634 K. A similar calculation indicated that using a finer mesh with thicker wires and made of Cu reduces the temperature increase to about 60 K. We have exposed a Si filter backed by such a mesh for more than 60 h with little loss of transmission and no leaks.
authors.affiliation: Sensor Science Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899-8411, USA.
authors.forename: C
authors.initials: C
authors.lastname: Tarrio
authors.affiliation: Sensor Science Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899-8411, USA.
authors.forename: R F
authors.initials: RF
authors.lastname: Berg
authors.affiliation: Sensor Science Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899-8411, USA.
authors.forename: T B
authors.initials: TB
authors.lastname: Lucatorto
authors.affiliation: Luxel Corporation, Friday Harbor, Washington 98250, USA.
authors.forename: B
authors.initials: B
authors.lastname: Lairson
authors.affiliation: Luxel Corporation, Friday Harbor, Washington 98250, USA.
authors.forename: H
authors.initials: H
authors.lastname: Lopez
authors.affiliation: Luxel Corporation, Friday Harbor, Washington 98250, USA.
authors.forename: T
authors.initials: T
authors.lastname: Ayers