title: Resonating Behaviour of Nanomachined Holed Microcantilevers.
abstract: The nanofabrication of a nanomachined holed structure localized on the free end of a microcantilever is here presented, as a new tool to design micro-resonators with enhanced mass sensitivity. The proposed method allows both for the reduction of the sensor oscillating mass and the increment of the resonance frequency, without decreasing the active surface of the device. A theoretical analysis based on the Rayleigh method was developed to predict resonance frequency, effective mass, and effective stiffness of nanomachined holed microresonators. Analytical results were checked by Finite Element simulations, confirming an increase of the theoretical mass sensitivity up to 250%, without altering other figures of merit. The nanomachined holed resonators were vibrationally characterized, and their Q-factor resulted comparable with solid microcantilevers with same planar dimensions.
authors.affiliation: Applied Science and Technology Department, Politecnico di Torino, Torino 10129, Italy.
authors.forename: Giancarlo
authors.initials: G
authors.lastname: Canavese
authors.affiliation: Applied Science and Technology Department, Politecnico di Torino, Torino 10129, Italy.
authors.forename: Alessandro
authors.initials: A
authors.lastname: Ricci
authors.affiliation: S3 Center, Nanoscience Institute - CNR, Modena 41125, Italy.
authors.forename: Gian Carlo
authors.initials: GC
authors.lastname: Gazzadi
authors.affiliation: Applied Science and Technology Department, Politecnico di Torino, Torino 10129, Italy.
authors.forename: Ivan
authors.initials: I
authors.lastname: Ferrante
authors.affiliation: Mechanical and Aerospace Engineering Department, Politecnico di Torino, Torino 10129, Italy.
authors.forename: Andrea
authors.initials: A
authors.lastname: Mura
authors.affiliation: Applied Science and Technology Department, Politecnico di Torino, Torino 10129, Italy.|CNR-IMEM, Parco Area Delle Scienze, 37a, IT, 43124 Parma, Italy.
authors.forename: Simone Luigi
authors.initials: SL
authors.lastname: Marasso
authors.affiliation: Applied Science and Technology Department, Politecnico di Torino, Torino 10129, Italy.
authors.forename: Carlo
authors.initials: C
authors.lastname: Ricciardi