title: Focused particle beam-induced processing.
authors.affiliation: Goethe Universität, Physikalisches Institut, Max-von-Laue-Str. 1, D-60438 Frankfurt am Main, Germany.
authors.forename: Michael
authors.initials: M
authors.lastname: Huth
authors.affiliation: Universität Bielefeld, Fakultät für Physik, Universitätsstr. 25, D-33615 Bielefeld, Germany.
authors.forename: Armin
authors.initials: A
authors.lastname: Gölzhäuser