title: Enhanced Optical Transmission through MacEtch-Fabricated Buried Metal Gratings.
abstract: Metallic films with subwavelength apertures, integrated into a semiconductor by metal-assisted chemical etch (MacEtch), demonstrate enhanced transmission when compared to bare semiconductor surfaces. The resulting "buried" metallic structures are characterized spectroscopically and modeled using rigorous coupled wave analysis. These composite materials offer potential integration with optoelectronic devices, for simultaneous near-uniform electrical contact and strong optical coupling to free space.
authors.affiliation: Department of Electrical and Computer Engineering, Micro and Nanotechnology Laboratory, University of Illinois, Urbana, IL, 61801, USA.
authors.forename: Runyu
authors.initials: R
authors.lastname: Liu
authors.affiliation: Department of Electrical and Computer Engineering, Micro and Nanotechnology Laboratory, University of Illinois, Urbana, IL, 61801, USA.
authors.forename: Xiang
authors.initials: X
authors.lastname: Zhao
authors.affiliation: Department of Physics and Applied Physics, University of Massachusetts Lowell, One University Ave, Lowell, MA, 01854, USA.
authors.forename: Christopher
authors.initials: C
authors.lastname: Roberts
authors.affiliation: Department of Electrical and Computer Engineering, Micro and Nanotechnology Laboratory, University of Illinois, Urbana, IL, 61801, USA.
authors.forename: Lan
authors.initials: L
authors.lastname: Yu
authors.affiliation: Microsystems Engineering, Rochester Institute of Technology, Rochester, NY, 14623, USA.
authors.forename: Parsian K
authors.initials: PK
authors.lastname: Mohseni
authors.affiliation: Department of Electrical and Computer Engineering, Micro and Nanotechnology Laboratory, University of Illinois, Urbana, IL, 61801, USA.
authors.forename: Xiuling
authors.initials: X
authors.lastname: Li
authors.affiliation: Department of Physics and Applied Physics, University of Massachusetts Lowell, One University Ave, Lowell, MA, 01854, USA.
authors.forename: Viktor
authors.initials: V
authors.lastname: Podolskiy
authors.affiliation: Department of Electrical and Computer Engineering, Micro and Nanotechnology Laboratory, University of Illinois, Urbana, IL, 61801, USA.
authors.forename: Daniel
authors.initials: D
authors.lastname: Wasserman
keywords: antireflection coatings; optical transmission; plasmonics; semiconductors, metallic films