title: Ultralow-Loss CMOS Copper Plasmonic Waveguides.
abstract: Surface plasmon polaritons can give a unique opportunity to manipulate light at a scale well below the diffraction limit reducing the size of optical components down to that of nanoelectronic circuits. At the same time, plasmonics is mostly based on noble metals, which are not compatible with microelectronics manufacturing technologies. This prevents plasmonic components from integration with both silicon photonics and silicon microelectronics. Here, we demonstrate ultralow-loss copper plasmonic waveguides fabricated in a simple complementary metal-oxide semiconductor (CMOS) compatible process, which can outperform gold plasmonic waveguides simultaneously providing long (>40 μm) propagation length and deep subwavelength (∼λ(2)/50, where λ is the free-space wavelength) mode confinement in the telecommunication spectral range. These results create the backbone for the development of a CMOS plasmonic platform and its integration in future electronic chips.
authors.affiliation: Laboratory of Nanooptics and Plasmonics, Moscow Institute of Physics and Technology , 9 Institutsky Lane, Dolgoprudny 141700, Russian Federation.
authors.forename: Dmitry Yu
authors.initials: DY
authors.lastname: Fedyanin
authors.affiliation: Laboratory of Nanooptics and Plasmonics, Moscow Institute of Physics and Technology , 9 Institutsky Lane, Dolgoprudny 141700, Russian Federation.
authors.forename: Dmitry I
authors.initials: DI
authors.lastname: Yakubovsky
authors.affiliation: Laboratory of Nanooptics and Plasmonics, Moscow Institute of Physics and Technology , 9 Institutsky Lane, Dolgoprudny 141700, Russian Federation.
authors.forename: Roman V
authors.initials: RV
authors.lastname: Kirtaev
authors.affiliation: Laboratory of Nanooptics and Plasmonics, Moscow Institute of Physics and Technology , 9 Institutsky Lane, Dolgoprudny 141700, Russian Federation.|Centre for Nano Optics, University of Southern Denmark , Campusvej 55, Odense M DK-5230, Denmark.
authors.forename: Valentyn S
authors.initials: VS
authors.lastname: Volkov
keywords: CMOS plasmonics; Copper plasmonics; hybrid plasmonic waveguide; near-field optical microscopy; plasmonic nanocircuitry