title: Development of a novel nanoindentation technique by utilizing a dual-probe AFM system.
abstract: A novel instrumentation approach to nanoindentation is described that exhibits improved resolution and depth sensing. The approach is based on a multi-probe scanning probe microscopy (SPM) tool that utilizes tuning-fork based probes for both indentation and depth sensing. Unlike nanoindentation experiments performed with conventional AFM systems using beam-bounce technology, this technique incorporates a second probe system with an ultra-high resolution for depth sensing. The additional second probe measures only the vertical movement of the straight indenter attached to a tuning-fork probe with a high spring constant and it can also be used for AFM scanning to obtain an accurate profiling. Nanoindentation results are demonstrated on silicon, fused silica, and Corning Eagle Glass. The results show that this new approach is viable in terms of accurately characterizing mechanical properties of materials through nanoindentation with high accuracy, and it opens doors to many other exciting applications in the field of nanomechanical characterization.
authors.affiliation: Microsystems Engineering, Rochester Institute of Technology, USA.
authors.forename: Eyup
authors.initials: E
authors.lastname: Cinar
authors.affiliation: Electrical and Microelectronic Engineering, Rochester Institute of Technology, USA.
authors.forename: Ferat
authors.initials: F
authors.lastname: Sahin
authors.affiliation: SurfaceChar LLC., Sharon, MA, USA.
authors.forename: Dalia
authors.initials: D
authors.lastname: Yablon
keywords: atomic force microscopy (AFM); mechanical characterization; nanoindentation