title: A new EXAFS method for the local structure analysis of low-Z elements.
abstract: A unique analytical method is proposed for local structure analysis via extended X-ray absorption fine structure (EXAFS) spectroscopy. The measurement of electron energy distribution curves at various excitation photon energies using an electron energy analyzer is applied to determine a specific elemental Auger spectrum. To demonstrate the method, the N K-edge EXAFS spectra for a silicon nitride film were obtained via simultaneous measurement of the N KLL Auger and background spectra using dual-energy windows. The background spectrum was then used to remove the photoelectrons and secondary electron mixing in the energy distribution curves. The spectrum obtained following this subtraction procedure represents the `true' N K-edge EXAFS spectrum without the other absorptions that are observed in total electron yield N K-edge EXAFS spectra. The first nearest-neighbor distance (N-Si) derived from the extracted N K-edge EXAFS oscillation was in good agreement with the value derived from Si K-edge analysis. This result confirmed that the present method, referred to as differential electron yield (DEY)-EXAFS, is valid for deriving local surface structure information for low-Z elements.
authors.affiliation: Toyota Central R&D Laboratories, 41-1 Yokomichi, Nagakute, Aichi 480-1192, Japan.
authors.forename: Noritake
authors.initials: N
authors.lastname: Isomura
authors.affiliation: Aichi Synchrotron Radiation Center (AichiSR), 250-3 Minamiyamaguchi-cho, Seto, Aichi 489-0965, Japan.
authors.forename: Masao
authors.initials: M
authors.lastname: Kamada
authors.affiliation: Toyota Central R&D Laboratories, 41-1 Yokomichi, Nagakute, Aichi 480-1192, Japan.
authors.forename: Takamasa
authors.initials: T
authors.lastname: Nonaka
authors.affiliation: Aichi Synchrotron Radiation Center (AichiSR), 250-3 Minamiyamaguchi-cho, Seto, Aichi 489-0965, Japan.
authors.forename: Eiken
authors.initials: E
authors.lastname: Nakamura
authors.affiliation: Aichi Synchrotron Radiation Center (AichiSR), 250-3 Minamiyamaguchi-cho, Seto, Aichi 489-0965, Japan.
authors.forename: Takumi
authors.initials: T
authors.lastname: Takano
authors.affiliation: Aichi Synchrotron Radiation Center (AichiSR), 250-3 Minamiyamaguchi-cho, Seto, Aichi 489-0965, Japan.
authors.forename: Harue
authors.initials: H
authors.lastname: Sugiyama
authors.affiliation: Toyota Central R&D Laboratories, 41-1 Yokomichi, Nagakute, Aichi 480-1192, Japan.
authors.forename: Yasuji
authors.initials: Y
authors.lastname: Kimoto
keywords: Auger electrons; EXAFS; XAS; energy analyzer; silicon nitride