title: Sharp bends and Mach-Zehnder interferometer based on Ge-rich-SiGe waveguides on SiGe graded buffer.
abstract: The integration of germanium (Ge)-rich active devices in photonic integrated circuits is challenging due to the lattice mismatch between silicon (Si) and Ge. A new Ge-rich silicon-germanium (SiGe) waveguide on graded buffer was investigated as a platform for integrated photonic circuits. At a wavelength of 1550 nm, low loss bends with radii as low as 12 µm and Multimode Interferometer beam splitter based on Ge-rich SiGe waveguide on graded buffer were designed, fabricated and characterized. A Mach Zehnder interferometer exhibiting a contrast of more than 10 dB has been demonstrated.
authors.forename: Vladyslav
authors.initials: V
authors.lastname: Vakarin
authors.forename: Papichaya
authors.initials: P
authors.lastname: Chaisakul
authors.forename: Jacopo
authors.initials: J
authors.lastname: Frigerio
authors.forename: Andrea
authors.initials: A
authors.lastname: Ballabio
authors.forename: Xavier
authors.initials: X
authors.lastname: Le Roux
authors.forename: Jean-René
authors.initials: JR
authors.lastname: Coudevylle
authors.forename: David
authors.initials: D
authors.lastname: Bouville
authors.forename: Diego
authors.initials: D
authors.lastname: Perez-Galacho
authors.forename: Laurent
authors.initials: L
authors.lastname: Vivien
authors.forename: Giovanni
authors.initials: G
authors.lastname: Isella
authors.forename: Delphine
authors.initials: D
authors.lastname: Marris-Morini