title: UV-assisted room-temperature chemiresistive NO2sensor based on TiO2thin film.
abstract: TiO2thin film based, chemiresistive sensors for NO2gas which operate at room temperature under ultraviolet (UV) illumination have been demonstrated in this work. The rf-sputter deposited and post-annealed TiO2thin films have been characterized by atomic force microscopy, X-ray photoelectron spectroscopy, and X-ray diffraction to obtain surface morphology, chemical state, and crystal structure, respectively. UV-vis absorption spectroscopy and Tauc plots show the optical properties of the TiO2films. Under UV illumination, the NO2sensing performance of the TiO2 films shows a reversible change in resistance at room-temperature. The observed change in electrical resistivity can be explained by the modulation of surface-adsorbed oxygen. This work is the first demonstration of a facile TiO2sensor for NO2analyte that operates at room-temperature under UV illumination.
authors.affiliation: Materials Science and Engineering Division, Material Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA ; Department of Electrical and Computer Engineering, University of Maryland, College Park, MD 20742, USA.
authors.forename: Ting
authors.initials: T
authors.lastname: Xie
authors.affiliation: N5 Sensors Inc., Rockville, MD 20852, USA.
authors.forename: Nichole
authors.initials: N
authors.lastname: Sullivan
authors.affiliation: Materials Science and Engineering Division, Material Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA.
authors.forename: Kristen
authors.initials: K
authors.lastname: Steffens
authors.affiliation: Materials Science and Engineering Division, Material Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA ; N5 Sensors Inc., Rockville, MD 20852, USA.
authors.forename: Baomei
authors.initials: B
authors.lastname: Wen
authors.affiliation: Materials Science and Engineering Division, Material Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA ; Department of Electrical and Computer Engineering, University of Maryland, College Park, MD 20742, USA.
authors.forename: Guannan
authors.initials: G
authors.lastname: Liu
authors.affiliation: Materials Science and Engineering Division, Material Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA ; N5 Sensors Inc., Rockville, MD 20852, USA.
authors.forename: Ratan
authors.initials: R
authors.lastname: Debnath
authors.affiliation: Materials Science and Engineering Division, Material Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA.
authors.forename: Albert
authors.initials: A
authors.lastname: Davydov
authors.affiliation: Department of Electrical and Computer Engineering, University of Maryland, College Park, MD 20742, USA.
authors.forename: Romel
authors.initials: R
authors.lastname: Gomez
authors.affiliation: Materials Science and Engineering Division, Material Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA ; N5 Sensors Inc., Rockville, MD 20852, USA ; Institute for Research in Electronics and Applied Physics, University of Maryland, College Park, MD 20742, USA.
authors.forename: Abhishek
authors.initials: A
authors.lastname: Motayed