title: Characterization of a piezo bendable X-ray mirror.
abstract: A full-scale piezo bendable mirror built as a prototype for an offset mirror at the European XFEL is characterized. The piezo ceramic elements are glued onto the mirror substrate, side-face on with respect to the reflecting surface. Using a nanometre optical component measuring machine and a large-aperture Fizeau interferometer, the mirror profile and influence functions were characterized, and further analysis was made to investigate the junction effect, hysteresis, twisting and reproducibility.
authors.affiliation: European XFEL, Hamburg, Germany.
authors.forename: Maurizio
authors.initials: M
authors.lastname: Vannoni
authors.affiliation: European XFEL, Hamburg, Germany.
authors.forename: Idoia
authors.initials: I
authors.lastname: Freijo Martín
authors.affiliation: Helmholtz-Zentrum Berlin-Institut für Nanometer Optic und Technologie, Berlin, Germany.
authors.forename: Frank
authors.initials: F
authors.lastname: Siewert
authors.affiliation: CINEL Strumenti Scientifici srl, Vigonza, Italy.
authors.forename: Riccardo
authors.initials: R
authors.lastname: Signorato
authors.affiliation: European XFEL, Hamburg, Germany.
authors.forename: Fan
authors.initials: F
authors.lastname: Yang
authors.affiliation: European XFEL, Hamburg, Germany.
authors.forename: Harald
authors.initials: H
authors.lastname: Sinn
keywords: X-ray optics; active optics; metrology; piezo bimorph mirror; response functions