title: One-dimensional ion-beam figuring for grazing-incidence reflective optics.
abstract: One-dimensional ion-beam figuring (1D-IBF) can improve grazing-incidence reflective optics, such as Kirkpatrick-Baez mirrors. 1D-IBF requires only one motion degree of freedom, which reduces equipment complexity, resulting in compact and low-cost IBF instrumentation. Furthermore, 1D-IBF is easy to integrate into a single vacuum system with other fabrication processes, such as a thin-film deposition. The NSLS-II Optical Metrology and Fabrication Group has recently integrated the 1D-IBF function into an existing thin-film deposition system by adding an RF ion source to the system. Using a rectangular grid, a 1D removal function needed to perform 1D-IBF has been produced. In this paper, demonstration experiments of the 1D-IBF process are presented on one spherical and two plane samples. The final residual errors on both plane samples are less than 1 nm r.m.s. The surface error on the spherical sample has been successfully reduced by a factor of 12. The results show that the 1D-IBF method is an effective method to process high-precision 1D synchrotron optics.
authors.affiliation: College of Mechatronic Engineering and Automation, National University of Defense Technology, 109 Deya Road, Changsha, Hunan 410073, People's Republic of China.
authors.forename: Lin
authors.initials: L
authors.lastname: Zhou
authors.affiliation: NSLS-II, Brookhaven National Laboratory, PO Box 5000, Upton, NY 11973, USA.
authors.forename: Mourad
authors.initials: M
authors.lastname: Idir
authors.affiliation: NSLS-II, Brookhaven National Laboratory, PO Box 5000, Upton, NY 11973, USA.
authors.forename: Nathalie
authors.initials: N
authors.lastname: Bouet
authors.affiliation: NSLS-II, Brookhaven National Laboratory, PO Box 5000, Upton, NY 11973, USA.
authors.forename: Konstantine
authors.initials: K
authors.lastname: Kaznatcheev
authors.affiliation: NSLS-II, Brookhaven National Laboratory, PO Box 5000, Upton, NY 11973, USA.
authors.forename: Lei
authors.initials: L
authors.lastname: Huang
authors.affiliation: NSLS-II, Brookhaven National Laboratory, PO Box 5000, Upton, NY 11973, USA.
authors.forename: Matthew
authors.initials: M
authors.lastname: Vescovi
authors.affiliation: College of Mechatronic Engineering and Automation, National University of Defense Technology, 109 Deya Road, Changsha, Hunan 410073, People's Republic of China.
authors.forename: Yifan
authors.initials: Y
authors.lastname: Dai
authors.affiliation: College of Mechatronic Engineering and Automation, National University of Defense Technology, 109 Deya Road, Changsha, Hunan 410073, People's Republic of China.
authors.forename: Shengyi
authors.initials: S
authors.lastname: Li
keywords: ion beam figuring; one-dimensional; synchrotron optics