title: Engineering interface-type resistive switching in BiFeO3 thin film switches by Ti implantation of bottom electrodes.
abstract: BiFeO3 based MIM structures with Ti-implanted Pt bottom electrodes and Au top electrodes have been fabricated on Sapphire substrates. The resulting metal-insulator-metal (MIM) structures show bipolar resistive switching without an electroforming process. It is evidenced that during the BiFeO3 thin film growth Ti diffuses into the BiFeO3 layer. The diffused Ti effectively traps and releases oxygen vacancies and consequently stabilizes the resistive switching in BiFeO3 MIM structures. Therefore, using Ti implantation of the bottom electrode, the retention performance can be greatly improved with increasing Ti fluence. For the used raster-scanned Ti implantation the lateral Ti distribution is not homogeneous enough and endurance slightly degrades with Ti fluence. The local resistive switching investigated by current sensing atomic force microscopy suggests the capability of down-scaling the resistive switching cell to one BiFeO3 grain size by local Ti implantation of the bottom electrode.
authors.affiliation: State Key Laboratory of Functional Material for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 20050, P. R. China.|Material Systems for Nanoelectronics, Technische Universität Chemnitz, Chemnitz 09126, Germany.
authors.forename: Tiangui
authors.initials: T
authors.lastname: You
authors.affiliation: State Key Laboratory of Functional Material for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 20050, P. R. China.
authors.forename: Xin
authors.initials: X
authors.lastname: Ou
authors.affiliation: IHP, Im Technologiepark 25, Frankfurt (Oder) 15236, Germany.
authors.forename: Gang
authors.initials: G
authors.lastname: Niu
authors.affiliation: IHP, Im Technologiepark 25, Frankfurt (Oder) 15236, Germany.
authors.forename: Florian
authors.initials: F
authors.lastname: Bärwolf
authors.affiliation: Material Systems for Nanoelectronics, Technische Universität Chemnitz, Chemnitz 09126, Germany.|Institute for Integrative Nanosciences, IFW Dresden, Dresden 01069, Germany.
authors.forename: Guodong
authors.initials: G
authors.lastname: Li
authors.affiliation: Material Systems for Nanoelectronics, Technische Universität Chemnitz, Chemnitz 09126, Germany.
authors.forename: Nan
authors.initials: N
authors.lastname: Du
authors.affiliation: Material Systems for Nanoelectronics, Technische Universität Chemnitz, Chemnitz 09126, Germany.
authors.forename: Danilo
authors.initials: D
authors.lastname: Bürger
authors.affiliation: Material Systems for Nanoelectronics, Technische Universität Chemnitz, Chemnitz 09126, Germany.|HZDR Innovation GmbH, Dresden 01328, Germany.
authors.forename: Ilona
authors.initials: I
authors.lastname: Skorupa
authors.affiliation: State Key Laboratory of Functional Material for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 20050, P. R. China.
authors.forename: Qi
authors.initials: Q
authors.lastname: Jia
authors.affiliation: State Key Laboratory of Functional Material for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 20050, P. R. China.
authors.forename: Wenjie
authors.initials: W
authors.lastname: Yu
authors.affiliation: State Key Laboratory of Functional Material for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 20050, P. R. China.
authors.forename: Xi
authors.initials: X
authors.lastname: Wang
authors.affiliation: Material Systems for Nanoelectronics, Technische Universität Chemnitz, Chemnitz 09126, Germany.|Institute for Integrative Nanosciences, IFW Dresden, Dresden 01069, Germany.
authors.forename: Oliver G
authors.initials: OG
authors.lastname: Schmidt
authors.affiliation: Material Systems for Nanoelectronics, Technische Universität Chemnitz, Chemnitz 09126, Germany.
authors.forename: Heidemarie
authors.initials: H
authors.lastname: Schmidt