title: Simultaneous measurement of surface shape and optical thickness using wavelength tuning and a polynomial window function.
abstract: In this study, a 6N - 5 phase shifting algorithm comprising a polynomial window function and discrete Fourier transform is developed for the simultaneous measurement of the surface shape and optical thickness of a transparent plate with suppression of the coupling errors between the higher harmonics and phase shift error. The characteristics of the 6N - 5 algorithm were estimated by connection with the Fourier representation in the frequency domain. The phase error of the measurements performed using the 6N - 5 algorithm is discussed and compared with those of measurements obtained using other algorithms. Finally, the surface shape and optical thickness of a transparent plate were measured simultaneously using the 6N - 5 algorithm and a wavelength tuning interferometer.
authors.forename: Yangjin
authors.initials: Y
authors.lastname: Kim
authors.forename: Kenichi
authors.initials: K
authors.lastname: Hibino
authors.forename: Naohiko
authors.initials: N
authors.lastname: Sugita
authors.forename: Mamoru
authors.initials: M
authors.lastname: Mitsuishi