title: Rapid 3D µ-printing of polymer optical whispering-gallery mode resonators.
abstract: A novel microfabrication method for rapid printing of polymer optical whispering-gallery mode (WGM) resonators is presented. A 3D micro-printing technology based on high-speed optical spatial modulator (SLM) and high-power UV light source is developed to fabricate suspended-disk WGM resonator array using SU-8 photoresist. The optical spectral responses of the fabricated polymer WGM resonators were measured with a biconically tapered optical fiber. Experimental results reveal that the demonstrated method is very flexible and time-saving for rapid fabrication of complex polymer WGM resonators.
authors.forename: Jushuai
authors.initials: J
authors.lastname: Wu
authors.forename: Xin
authors.initials: X
authors.lastname: Guo
authors.forename: A Ping
authors.initials: AP
authors.lastname: Zhang
authors.forename: Hwa-Yaw
authors.initials: HY
authors.lastname: Tam