title: Reflection zone plate wavelength-dispersive spectrometer for ultra-light elements measurements.
abstract: We have developed an electron beam excitation ultra-soft X-ray add-on device for a scanning electron microscope with a reflective zone plate mulichannel spectrometer in order to analyse ultra-light elements such as Li and B. This spectrometer has high (λ/Δλ~100) resolving power in the energy range of 45 eV - 1120 eV. Metallic Li samples were examined and fluorescence spectra successfully measured. Energy resolution of 0.49 eV was measured in the ultra-low energy range using the Al L(2,3) line at 71 eV. High sensitivity of Boron detection was demonstrated on a B(4)C sample with layer thicknesses of 1-50 nm, detecting an amount of metallic Boron as small as ~0.57 fg.
authors.forename: Aljoša
authors.initials: A
authors.lastname: Hafner
authors.forename: Lars
authors.initials: L
authors.lastname: Anklamm
authors.forename: Anatoly
authors.initials: A
authors.lastname: Firsov
authors.forename: Alexander
authors.initials: A
authors.lastname: Firsov
authors.forename: Heike
authors.initials: H
authors.lastname: Löchel
authors.forename: Andrey
authors.initials: A
authors.lastname: Sokolov
authors.forename: Renat
authors.initials: R
authors.lastname: Gubzhokov
authors.forename: Alexei
authors.initials: A
authors.lastname: Erko