title: Graphene Squeeze-Film Pressure Sensors.
abstract: The operating principle of squeeze-film pressure sensors is based on the pressure dependence of a membrane's resonance frequency, caused by the compression of the surrounding gas which changes the resonator stiffness. To realize such sensors, not only strong and flexible membranes are required, but also minimization of the membrane's mass is essential to maximize responsivity. Here, we demonstrate the use of a few-layer graphene membrane as a squeeze-film pressure sensor. A clear pressure dependence of the membrane's resonant frequency is observed, with a frequency shift of 4 MHz between 8 and 1000 mbar. The sensor shows a reproducible response and no hysteresis. The measured responsivity of the device is 9000 Hz/mbar, which is a factor 45 higher than state-of-the-art MEMS-based squeeze-film pressure sensors while using a 25 times smaller membrane area.
authors.affiliation: Kavli Institute of Nanoscience, Delft University of Technology , Lorentzweg 1, 2628CJ, Delft, The Netherlands.
authors.forename: Robin J
authors.initials: RJ
authors.lastname: Dolleman
authors.affiliation: Kavli Institute of Nanoscience, Delft University of Technology , Lorentzweg 1, 2628CJ, Delft, The Netherlands.
authors.forename: Dejan
authors.initials: D
authors.lastname: Davidovikj
authors.affiliation: Kavli Institute of Nanoscience, Delft University of Technology , Lorentzweg 1, 2628CJ, Delft, The Netherlands.
authors.forename: Santiago J
authors.initials: SJ
authors.lastname: Cartamil-Bueno
authors.affiliation: Kavli Institute of Nanoscience, Delft University of Technology , Lorentzweg 1, 2628CJ, Delft, The Netherlands.
authors.forename: Herre S J
authors.initials: HS
authors.lastname: van der Zant
authors.affiliation: Kavli Institute of Nanoscience, Delft University of Technology , Lorentzweg 1, 2628CJ, Delft, The Netherlands.
authors.forename: Peter G
authors.initials: PG
authors.lastname: Steeneken
keywords: Graphene; MEMS; nanoelectromechanical systems (NEMS); pressure sensor; squeeze-film effect