title: Ultra-Compact 100 × 100 μm² Footprint Hybrid Device with Spin-Valve Nanosensors.
abstract: Magnetic field mapping with micrometric spatial resolution and high sensitivity is a challenging application, and the technological solutions are usually based on large area devices integrating discrete magnetic flux guide elements. In this work we demonstrate a high performance hybrid device with improved field sensitivity levels and small footprint, consisting of a ultra-compact 2D design where nanometric spin valve sensors are inserted within the gap of thin-film magnetic flux concentrators. Pole-sensor distances down to 400 nm are demonstrated using nanofabrication techniques combined with an optimized liftoff process. These 100 × 100 μm2 pixel sensors can be integrated in modular devices for surface mapping without moving parts.
authors.affiliation: INESC-MN - Instituto de Engenharia de Sistemas e Computadores - Microsistemas e Nanotecnologias and IN - Institute of Nanoscience and Nanotechnology, Rua Alves Redol 9, Lisboa 1000-029, Portugal. dleitao@inesc-mn.pt.|Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, Lisboa 1000, Portugal. dleitao@inesc-mn.pt.
authors.forename: Diana C
authors.initials: DC
authors.lastname: Leitao
authors.affiliation: INESC-MN - Instituto de Engenharia de Sistemas e Computadores - Microsistemas e Nanotecnologias and IN - Institute of Nanoscience and Nanotechnology, Rua Alves Redol 9, Lisboa 1000-029, Portugal. paulo.coelho18@gmail.com.
authors.forename: Paulo
authors.initials: P
authors.lastname: Coelho
authors.affiliation: INL - International Iberian Nanotechnology Laboratory, Av. Mestre José Veiga, 4715 Braga, Portugal. jerome.borme@inl.int.
authors.forename: Jerome
authors.initials: J
authors.lastname: Borme
authors.affiliation: INESC-MN - Instituto de Engenharia de Sistemas e Computadores - Microsistemas e Nanotecnologias and IN - Institute of Nanoscience and Nanotechnology, Rua Alves Redol 9, Lisboa 1000-029, Portugal. sknudde@inesc-mn.pt.|Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, Lisboa 1000, Portugal. sknudde@inesc-mn.pt.
authors.forename: Simon
authors.initials: S
authors.lastname: Knudde
authors.affiliation: INESC-MN - Instituto de Engenharia de Sistemas e Computadores - Microsistemas e Nanotecnologias and IN - Institute of Nanoscience and Nanotechnology, Rua Alves Redol 9, Lisboa 1000-029, Portugal. scardoso@inesc-mn.pt.|Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, Lisboa 1000, Portugal. scardoso@inesc-mn.pt.
authors.forename: Susana
authors.initials: S
authors.lastname: Cardoso
authors.affiliation: INESC-MN - Instituto de Engenharia de Sistemas e Computadores - Microsistemas e Nanotecnologias and IN - Institute of Nanoscience and Nanotechnology, Rua Alves Redol 9, Lisboa 1000-029, Portugal. pfreitas@inesc-mn.pt.|INL - International Iberian Nanotechnology Laboratory, Av. Mestre José Veiga, 4715 Braga, Portugal. pfreitas@inesc-mn.pt.
authors.forename: Paulo P
authors.initials: PP
authors.lastname: Freitas
keywords: flux guides; nanosensors; spin valves