title: Advancing FIB assisted 3D EBSD using a static sample setup.
abstract: A new setup for automatic 3D EBSD data collection in static mode has been developed using a conventional FIB-SEM system. This setup requires no stage or sample movements between the FIB milling and EBSD mapping. Its capabilities were tested experimentally on a coherent twin boundary of an INCONEL sample. Our result demonstrates that this static setup holds many advantages in terms of data throughput and quality as compared with other ones requiring stage/sample movements. The most important advantages are the better slice alignment and an improved orientation precision in 3D space, both being prerequisite for a reliable grain boundary characterization.
authors.affiliation: Laboratoire d'Etude des Microstructures et de Mécanique des Matériaux, LEM3, CNRS ISGMP, Université de Lorraine, F-57045 Metz Cedex 01, France; Laboratory of Excellence on Design of Alloy Metals for low-mAss Structures ('LabEx DAMAS'), Université de Lorraine, F-57045 Metz Cedex 01, France.
authors.forename: Julien
authors.initials: J
authors.lastname: Guyon
authors.affiliation: Laboratoire d'Etude des Microstructures et de Mécanique des Matériaux, LEM3, CNRS ISGMP, Université de Lorraine, F-57045 Metz Cedex 01, France; Laboratory of Excellence on Design of Alloy Metals for low-mAss Structures ('LabEx DAMAS'), Université de Lorraine, F-57045 Metz Cedex 01, France. Electronic address: nathalie.gey@univ-lorraine.fr.
authors.forename: Nathalie
authors.initials: N
authors.lastname: Gey
authors.affiliation: Bruker Nano GmbH, Am Studio 2D, 12489 Berlin, Germany.
authors.forename: Daniel
authors.initials: D
authors.lastname: Goran
authors.affiliation: Carl Zeiss Microscopy GmbH, Carl-Zeiss Street 56, 73447 Oberkochen, Germany.
authors.forename: Smail
authors.initials: S
authors.lastname: Chalal
authors.affiliation: Carl Zeiss Microscopy GmbH, Carl-Zeiss Street 56, 73447 Oberkochen, Germany.
authors.forename: Fabián
authors.initials: F
authors.lastname: Pérez-Willard
keywords: 3D EBSD; FIB–SEM; Grain boundary; Static setup; Tomography