title: Note: High temperature pressure sensor for petroleum well based on silicon over insulator.
abstract: In order to meet the requirements in petroleum well, a novel structure of high temperature pressure sensor based on the silicon over insulator (SOI) technology is proposed in this paper. The SOI sensor chip is bonded with a glass ring by electrostatic bonding. By controlling the inner diameter of the glass ring, the size of the circle membrane is obtained precisely. And the detailed parameters of the structure are established through analysis. Then, the sensor is fabricated. The test results show that this type sensor has high sensitivity and accuracy. It is able to measure at the temperature up to 180 °C and the measuring range is 60 MPa. Moreover, the results we got are closer to the actual situation.
authors.affiliation: State Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, China.
authors.forename: Bian
authors.initials: B
authors.lastname: Tian
authors.affiliation: State Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, China.
authors.forename: Hanyue
authors.initials: H
authors.lastname: Liu
authors.affiliation: State Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, China.
authors.forename: Ning
authors.initials: N
authors.lastname: Yang
authors.affiliation: State Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, China.
authors.forename: Yulong
authors.initials: Y
authors.lastname: Zhao