title: Analysis of Hyperabrupt and Uniform Junctions in GaAs for the Application of Varactor Diode.
abstract: In this study, we present a GaAs varactor diode with a hyperabrupt junction for the enhancement of breakdown voltage and capacitance variation in a reverse bias state. The hyperabrupt doping profile in the n-type active layer is prepared in a controlled nonlinear manner, with the density of the dopants increasing towards the Schottky junction. The hyperabrupt GaAs varactor diode is fabricated and characterized for breakdown voltage and capacitance over the electric field, induced by an applied reverse bias voltage. A reduced value of the electric field is observed owing to the nonlinear behavior of the electric field at the hyperabrupt junction, although the device has a larger doping density at the Schottky junction. Furthermore, the capacitance ratio of the hyperabrupt junction diode is also improved. Variation in the device capacitance is affected by variation in the depletion region across the junction. Technology CAD is used to understand the experimental phenomena by considering the magnitude of charge density as a function of the doping profile. A higher breakdown voltage and greater capacitance modulation are shown in the hyperabrupt junction diode compared to the uniform junction diode.
authors.forename: Jun-Woo
authors.initials: JW
authors.lastname: Heo
authors.forename: Sejun
authors.initials: S
authors.lastname: Hong
authors.forename: Seok-Gyu
authors.initials: SG
authors.lastname: Choi
authors.forename: Hyun-Seok
authors.initials: HS
authors.lastname: Kim