title: Top-down Approach for the Direct Synthesis, Patterning, and Operation of Artificial Micromuscles on Flexible Substrates.
abstract: Recent progress in the field of microsystems on flexible substrates raises the need for alternatives to the stiffness of classical actuation technologies. This paper reports a top-down process to microfabricate soft conducting polymer actuators on substrates on which they ultimately operate. The bending microactuators were fabricated by sequentially stacking layers using a layer polymerization by layer polymerization of conducting polymer electrodes and a solid polymer electrolyte. Standalone microbeams thinner than 10 μm were fabricated on SU-8 substrates associated with a bottom gold electrical contact. The operation of microactuators was demonstrated in air and at low voltage (±4 V).
authors.affiliation: LPPI, EA2528, Institut des Matériaux, Université de Cergy-Pontoise , 5 mail Gay Lussac, Neuville sur Oise, F-95031 Cergy Cedex, France.
authors.forename: Ali
authors.initials: A
authors.lastname: Maziz
authors.affiliation: LPPI, EA2528, Institut des Matériaux, Université de Cergy-Pontoise , 5 mail Gay Lussac, Neuville sur Oise, F-95031 Cergy Cedex, France.
authors.forename: Cédric
authors.initials: C
authors.lastname: Plesse
authors.affiliation: IEMN, UMR-8520, Université de Valenciennes , Le Mont Houy F-59313 Valenciennes cedex 9, France.
authors.forename: Caroline
authors.initials: C
authors.lastname: Soyer
authors.affiliation: IEMN, UMR-8520, Université de Valenciennes , Le Mont Houy F-59313 Valenciennes cedex 9, France.
authors.forename: Eric
authors.initials: E
authors.lastname: Cattan
authors.affiliation: LPPI, EA2528, Institut des Matériaux, Université de Cergy-Pontoise , 5 mail Gay Lussac, Neuville sur Oise, F-95031 Cergy Cedex, France.
authors.forename: Frédéric
authors.initials: F
authors.lastname: Vidal
mesh_terms: D019086:Bridged Bicyclo Compounds, Heterocyclic / Q000737:chemistry; D004553:Electric Conductivity; D055616:Microtechnology / Q000379:methods*; D011092:Polyethylene Glycols / Q000737:chemistry; D058105:Polymerization; D011108:Polymers / Q000138:chemical synthesis* / Q000737:chemistry; D012825:Silicon / Q000737:chemistry
chemical_list: D019086:Bridged Bicyclo Compounds, Heterocyclic; D011108:Polymers; C121383:poly(3,4-ethylene dioxythiophene); D011092:Polyethylene Glycols; C028210:monomethoxypolyethylene glycol; D012825:Silicon
keywords: conducting polymer; electrochemical microdevices; flexible substrate; microactuator; semi-IPN