title: [Optical Properties Investigation of p-Type ZnO Film Based on Doping by Diffusion].
abstract: The main purpose of this paper is to investigate the optical properties of p-type ZnO film based on P doping. ZnO film was grown by Atomic layer deposition (ALD) on InP subsrate in this experiment, and phosphorus diffused into ZnO lattice by annealing treatment at different temperature (500, 700 ⁰C). The optical properties of samples were investigated by photoluminescence (PL) spectroscopy, which indicated that the annealing temperature is the important factor influencing the phosphorus diffusion doping. The low-temperature PL spectra of the sample which annealed at 700 ⁰C for 1 h exhibited acceptor related emission peaks located at 3.351, 3.311, 3.246 and 3.177 eV, which were attributed to A ⁰X, FA, DAP and DA-1LO, respectively. The acceptor binding energy is estimated to be about 122 meV, which is agreed with the theoretic values in phosphorus-doped ZnO films. In this paper, through thermal diffusion method to realize the p-type doped ZnO thin films, it solved the main problems which limited the development of ZnO based optoelectronic devices, and has an important significance for the development of the ZnO semiconductor materials and ZnO based photoelectric device.
authors.forename: Fang
authors.initials: F
authors.lastname: Chen
authors.forename: Dan
authors.initials: D
authors.lastname: Fang
authors.forename: Shuang-peng
authors.initials: SP
authors.lastname: Wang
authors.forename: Xuan
authors.initials: X
authors.lastname: Fang
authors.forename: Ji-long
authors.initials: JL
authors.lastname: Tang
authors.forename: Hai-feng
authors.initials: HF
authors.lastname: Zhao
authors.forename: Fang
authors.initials: F
authors.lastname: Fang
authors.forename: Xue-ying
authors.initials: XY
authors.lastname: Chu
authors.forename: Jin-hua
authors.initials: JH
authors.lastname: Li
authors.forename: Fei
authors.initials: F
authors.lastname: Wang
authors.forename: Xiao-hua
authors.initials: XH
authors.lastname: Wang
authors.forename: Guo-jun
authors.initials: GJ
authors.lastname: Liu
authors.forename: Xiao-hui
authors.initials: XH
authors.lastname: Ma
authors.forename: Zhi-peng
authors.initials: ZP
authors.lastname: Wei