title: Bio-Inspired Stretchable Absolute Pressure Sensor Network.
abstract: A bio-inspired absolute pressure sensor network has been developed. Absolute pressure sensors, distributed on multiple silicon islands, are connected as a network by stretchable polyimide wires. This sensor network, made on a 4'' wafer, has 77 nodes and can be mounted on various curved surfaces to cover an area up to 0.64 m × 0.64 m, which is 100 times larger than its original size. Due to Micro Electro-Mechanical system (MEMS) surface micromachining technology, ultrathin sensing nodes can be realized with thicknesses of less than 100 µm. Additionally, good linearity and high sensitivity (~14 mV/V/bar) have been achieved. Since the MEMS sensor process has also been well integrated with a flexible polymer substrate process, the entire sensor network can be fabricated in a time-efficient and cost-effective manner. Moreover, an accurate pressure contour can be obtained from the sensor network. Therefore, this absolute pressure sensor network holds significant promise for smart vehicle applications, especially for unmanned aerial vehicles.
authors.affiliation: Department of Electrical Engineering, Stanford University, 350 Serra Mall, Stanford, CA 94305, USA. yueguo@stanford.edu.
authors.forename: Yue
authors.initials: Y
authors.lastname: Guo
authors.affiliation: Department of Materials Science and Engineering, Stanford University, 476 Lomita Mall, Stanford, CA 94305, USA. liyuhung@stanford.edu.
authors.forename: Yu-Hung
authors.initials: YH
authors.lastname: Li
authors.affiliation: Department of Mechanical Engineering, Stanford University, 440 Escondido Mall, Stanford, CA 94305, USA. zguo@stanford.edu.
authors.forename: Zhiqiang
authors.initials: Z
authors.lastname: Guo
authors.affiliation: Department of Electrical Engineering, Stanford University, 350 Serra Mall, Stanford, CA 94305, USA. kyunglok.kim@gmail.com.
authors.forename: Kyunglok
authors.initials: K
authors.lastname: Kim
authors.affiliation: Department of Aeronautics and Astronautics, Stanford University, 496 Lomita Mall, Stanford, CA 94305, USA. fkchang@stanford.edu.
authors.forename: Fu-Kuo
authors.initials: FK
authors.lastname: Chang
authors.affiliation: Department of Electrical Engineering, Stanford University, 350 Serra Mall, Stanford, CA 94305, USA. sxwang@stanford.edu.|Department of Materials Science and Engineering, Stanford University, 476 Lomita Mall, Stanford, CA 94305, USA. sxwang@stanford.edu.
authors.forename: Shan X
authors.initials: SX
authors.lastname: Wang
mesh_terms: D040761:Biomimetic Materials; D004867:Equipment Design; D006801:Humans; D008422:Materials Testing; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D011108:Polymers / Q000737:chemistry; D011312:Pressure; D012825:Silicon / Q000737:chemistry; D017768:Skin, Artificial
chemical_list: D011108:Polymers; D012825:Silicon
keywords: MEMS; absolute pressure sensor; smart skin; stretchable network