title: Superlattice-based thin-film thermoelectric modules with high cooling fluxes.
abstract: In present-day high-performance electronic components, the generated heat loads result in unacceptably high junction temperatures and reduced component lifetimes. Thermoelectric modules can, in principle, enhance heat removal and reduce the temperatures of such electronic devices. However, state-of-the-art bulk thermoelectric modules have a maximum cooling flux qmax of only about 10 W cm(-2), while state-of-the art commercial thin-film modules have a qmax <100 W cm(-2). Such flux values are insufficient for thermal management of modern high-power devices. Here we show that cooling fluxes of 258 W cm(-2) can be achieved in thin-film Bi2Te3-based superlattice thermoelectric modules. These devices utilize a p-type Sb2Te3/Bi2Te3 superlattice and n-type δ-doped Bi2Te3-xSex, both of which are grown heteroepitaxially using metalorganic chemical vapour deposition. We anticipate that the demonstration of these high-cooling-flux modules will have far-reaching impacts in diverse applications, such as advanced computer processors, radio-frequency power devices, quantum cascade lasers and DNA micro-arrays.
authors.affiliation: RTI International, Electronics and Applied Physics Division, Research Triangle Park, North Carolina 27709, USA.
authors.forename: Gary
authors.identifier: http://orcid.org/0000-0002-0612-8211
authors.initials: G
authors.lastname: Bulman
authors.affiliation: RTI International, Electronics and Applied Physics Division, Research Triangle Park, North Carolina 27709, USA.
authors.forename: Phil
authors.initials: P
authors.lastname: Barletta
authors.affiliation: RTI International, Electronics and Applied Physics Division, Research Triangle Park, North Carolina 27709, USA.
authors.forename: Jay
authors.initials: J
authors.lastname: Lewis
authors.affiliation: RTI International, Electronics and Applied Physics Division, Research Triangle Park, North Carolina 27709, USA.
authors.forename: Nicholas
authors.initials: N
authors.lastname: Baldasaro
authors.affiliation: Department of Mechanical Engineering, University of Maryland, College Park, Maryland 20742, USA.
authors.forename: Michael
authors.initials: M
authors.lastname: Manno
authors.affiliation: Department of Mechanical Engineering, University of Maryland, College Park, Maryland 20742, USA.
authors.forename: Avram
authors.initials: A
authors.lastname: Bar-Cohen
authors.affiliation: Department of Mechanical Engineering, University of Maryland, College Park, Maryland 20742, USA.
authors.forename: Bao
authors.initials: B
authors.lastname: Yang