title: Optimization and Experimentation of Dual-Mass MEMS Gyroscope Quadrature Error Correction Methods.
abstract: This paper focuses on an optimal quadrature error correction method for the dual-mass MEMS gyroscope, in order to reduce the long term bias drift. It is known that the coupling stiffness and demodulation error are important elements causing bias drift. The coupling stiffness in dual-mass structures is analyzed. The experiment proves that the left and right masses' quadrature errors are different, and the quadrature correction system should be arranged independently. The process leading to quadrature error is proposed, and the Charge Injecting Correction (CIC), Quadrature Force Correction (QFC) and Coupling Stiffness Correction (CSC) methods are introduced. The correction objects of these three methods are the quadrature error signal, force and the coupling stiffness, respectively. The three methods are investigated through control theory analysis, model simulation and circuit experiments, and the results support the theoretical analysis. The bias stability results based on CIC, QFC and CSC are 48 °/h, 9.9 °/h and 3.7 °/h, respectively, and this value is 38 °/h before quadrature error correction. The CSC method is proved to be the better method for quadrature correction, and it improves the Angle Random Walking (ARW) value, increasing it from 0.66 °/√h to 0.21 °/√h. The CSC system general test results show that it works well across the full temperature range, and the bias stabilities of the six groups' output data are 3.8 °/h, 3.6 °/h, 3.4 °/h, 3.1 °/h, 3.0 °/h and 4.2 °/h, respectively, which proves the system has excellent repeatability.
authors.affiliation: Key Laboratory of Instrumentation Science &amp; Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. caohuiliang@nuc.edu.cn.|Science and Technology on Electronic Test &amp; Measurement Laboratory, North University of China, Tai Yuan 030051, China. caohuiliang@nuc.edu.cn.|School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China. caohuiliang@nuc.edu.cn.
authors.forename: Huiliang
authors.initials: H
authors.lastname: Cao
authors.affiliation: School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China. hsli@seu.edu.cn.
authors.forename: Hongsheng
authors.initials: H
authors.lastname: Li
authors.affiliation: Key Laboratory of Instrumentation Science &amp; Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. kouzhiwei@imut.edu.cn.|Science and Technology on Electronic Test &amp; Measurement Laboratory, North University of China, Tai Yuan 030051, China. kouzhiwei@imut.edu.cn.
authors.forename: Zhiwei
authors.initials: Z
authors.lastname: Kou
authors.affiliation: Key Laboratory of Instrumentation Science &amp; Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. shiyunbo@nuc.edu.cn.|Science and Technology on Electronic Test &amp; Measurement Laboratory, North University of China, Tai Yuan 030051, China. shiyunbo@nuc.edu.cn.
authors.forename: Yunbo
authors.initials: Y
authors.lastname: Shi
authors.affiliation: Key Laboratory of Instrumentation Science &amp; Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. tangjun16@126.com.|Science and Technology on Electronic Test &amp; Measurement Laboratory, North University of China, Tai Yuan 030051, China. tangjun16@126.com.
authors.forename: Jun
authors.initials: J
authors.lastname: Tang
authors.affiliation: Key Laboratory of Instrumentation Science &amp; Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. mzmncit@163.com.|Science and Technology on Electronic Test &amp; Measurement Laboratory, North University of China, Tai Yuan 030051, China. mzmncit@163.com.
authors.forename: Zongmin
authors.initials: Z
authors.lastname: Ma
authors.affiliation: Key Laboratory of Instrumentation Science &amp; Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. shenchong@nuc.edu.cn.|Science and Technology on Electronic Test &amp; Measurement Laboratory, North University of China, Tai Yuan 030051, China. shenchong@nuc.edu.cn.
authors.forename: Chong
authors.initials: C
authors.lastname: Shen
authors.affiliation: Key Laboratory of Instrumentation Science &amp; Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. liuj@nuc.edu.cn.|Science and Technology on Electronic Test &amp; Measurement Laboratory, North University of China, Tai Yuan 030051, China. liuj@nuc.edu.cn.
authors.forename: Jun
authors.initials: J
authors.lastname: Liu
keywords: dual-mass MEMS gyroscope; model simulation; quadrature error correction; system stability