title: Lead-Free Piezoelectric Diaphragm Biosensors Based on Micro-Machining Technology and Chemical Solution Deposition.
abstract: In this paper, we present a new approach to the fabrication of integrated silicon-based piezoelectric diaphragm-type biosensors by using sodium potassium niobate-silver niobate (0.82KNN-0.18AN) composite lead-free thin film as the piezoelectric layer. The piezoelectric diaphragms were designed and fabricated by micro-machining technology and chemical solution deposition. The fabricated device was very sensitive to the mass changes caused by various targets attached on the surface of diaphragm. The measured mass sensitivity value was about 931 Hz/μg. Its good performance shows that the piezoelectric diaphragm biosensor can be used as a cost-effective platform for nucleic acid testing.
authors.affiliation: Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education &amp; International Center for Dielectric Research, Xi'an Jiaotong University, Xi'an 710049, China. leemoon56@stu.xjtu.edu.cn.
authors.forename: Xiaomeng
authors.initials: X
authors.lastname: Li
authors.affiliation: Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education &amp; International Center for Dielectric Research, Xi'an Jiaotong University, Xi'an 710049, China. xqwu@mail.xjtu.edu.cn.
authors.forename: Xiaoqing
authors.initials: X
authors.lastname: Wu
authors.affiliation: Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education &amp; International Center for Dielectric Research, Xi'an Jiaotong University, Xi'an 710049, China. spxjy@mail.xjtu.edu.cn.
authors.forename: Peng
authors.initials: P
authors.lastname: Shi
authors.affiliation: Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education &amp; International Center for Dielectric Research, Xi'an Jiaotong University, Xi'an 710049, China. zye@sfu.ca.|Department of Chemistry and 4D LABS, Simon Fraser University, Burnaby, BC V5A 1S6, Canada. zye@sfu.ca.
authors.forename: Zuo-Guang
authors.initials: ZG
authors.lastname: Ye
mesh_terms: D015374:Biosensing Techniques / Q000295:instrumentation*; D004566:Electrodes; D004867:Equipment Design; D008670:Metals / Q000737:chemistry*; D055616:Microtechnology / Q000379:methods*; D013499:Surface Properties
chemical_list: D008670:Metals
keywords: chemical solution deposition; lead-free; piezoelectric diaphragm biosensor