title: Three-Dimensional Flexible Complementary Metal-Oxide-Semiconductor Logic Circuits Based On Two-Layer Stacks of Single-Walled Carbon Nanotube Networks.
abstract: We have proposed and fabricated stable and repeatable, flexible, single-walled carbon nanotube (SWCNT) thin film transistor (TFT) complementary metal-oxide-semiconductor (CMOS) integrated circuits based on a three-dimensional (3D) structure. Two layers of SWCNT-TFT devices were stacked, where one layer served as n-type devices and the other one served as p-type devices. On the basis of this method, it is able to save at least half of the area required to construct an inverter and make large-scale and high-density integrated CMOS circuits easier to design and manufacture. The 3D flexible CMOS inverter gain can be as high as 40, and the total noise margin is more than 95%. Moreover, the input and output voltage of the inverter are exactly matched for cascading. 3D flexible CMOS NOR, NAND logic gates, and 15-stage ring oscillators were fabricated on PI substrates with high performance as well. Stable electrical properties of these circuits can be obtained with bending radii as small as 3.16 mm, which shows that such a 3D structure is a reliable architecture and suitable for carbon nanotube electrical applications in complex flexible and wearable electronic devices.
authors.affiliation: State Key Laboratory of Low-Dimensional Quantum Physics, Department of Physics and Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University , Beijing 100084, China.|Collaborative Innovation Center of Quantum Matter , Beijing 100084, China.
authors.forename: Yudan
authors.initials: Y
authors.lastname: Zhao
authors.affiliation: State Key Laboratory of Low-Dimensional Quantum Physics, Department of Physics and Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University , Beijing 100084, China.|Collaborative Innovation Center of Quantum Matter , Beijing 100084, China.
authors.forename: Qunqing
authors.initials: Q
authors.lastname: Li
authors.affiliation: State Key Laboratory of Low-Dimensional Quantum Physics, Department of Physics and Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University , Beijing 100084, China.|Collaborative Innovation Center of Quantum Matter , Beijing 100084, China.
authors.forename: Xiaoyang
authors.initials: X
authors.lastname: Xiao
authors.affiliation: State Key Laboratory of Low-Dimensional Quantum Physics, Department of Physics and Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University , Beijing 100084, China.|Collaborative Innovation Center of Quantum Matter , Beijing 100084, China.
authors.forename: Guanhong
authors.initials: G
authors.lastname: Li
authors.affiliation: State Key Laboratory of Low-Dimensional Quantum Physics, Department of Physics and Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University , Beijing 100084, China.|Collaborative Innovation Center of Quantum Matter , Beijing 100084, China.
authors.forename: Yuanhao
authors.initials: Y
authors.lastname: Jin
authors.affiliation: State Key Laboratory of Low-Dimensional Quantum Physics, Department of Physics and Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University , Beijing 100084, China.|Collaborative Innovation Center of Quantum Matter , Beijing 100084, China.
authors.forename: Kaili
authors.initials: K
authors.lastname: Jiang
authors.affiliation: State Key Laboratory of Low-Dimensional Quantum Physics, Department of Physics and Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University , Beijing 100084, China.|Collaborative Innovation Center of Quantum Matter , Beijing 100084, China.
authors.forename: Jiaping
authors.initials: J
authors.lastname: Wang
authors.affiliation: State Key Laboratory of Low-Dimensional Quantum Physics, Department of Physics and Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University , Beijing 100084, China.|Collaborative Innovation Center of Quantum Matter , Beijing 100084, China.
authors.forename: Shoushan
authors.initials: S
authors.lastname: Fan
keywords: 3D structure; CMOS; SWCNT; flexible; logic device; wearable