title: Fabrication of poly-crystalline Si-based Mie resonators via amorphous Si on SiO2 dewetting.
abstract: We report the fabrication of Si-based dielectric Mie resonators via a low cost process based on solid-state dewetting of ultra-thin amorphous Si on SiO2. We investigate the dewetting dynamics of a few nanometer sized layers annealed at high temperature to form submicrometric Si-particles. Morphological and structural characterization reveal the polycrystalline nature of the semiconductor matrix as well as rather irregular morphologies of the dewetted islands. Optical dark field imaging and spectroscopy measurements of the single islands reveal pronounced resonant scattering at visible frequencies. The linewidth of the low-order modes can be ∼20 nm in full width at half maximum, leading to a quality factor Q exceeding 25. These values reach the state-of-the-art ones obtained for monocrystalline Mie resonators. The simplicity of the dewetting process and its cost-effectiveness opens the route to exploiting it over large scales for applications in silicon-based photonics.
authors.affiliation: CNRS, Aix-Marseille Université, Centrale Marseille, IM2NP, UMR 7334, Campus de St. Jérôme, 13397 Marseille, France. marco.abbarchi@im2np.fr and Laboratoire de Micro-Optoélectroniques et Nanostructures, Faculté des Sciences de Monastir, Université de Monastir, Monastir 5019, Tunisia.
authors.forename: Meher
authors.initials: M
authors.lastname: Naffouti
authors.affiliation: CNRS, Aix-Marseille Université, Centrale Marseille, IM2NP, UMR 7334, Campus de St. Jérôme, 13397 Marseille, France. marco.abbarchi@im2np.fr.
authors.forename: Thomas
authors.initials: T
authors.lastname: David
authors.affiliation: CNRS, Aix-Marseille Université, Centrale Marseille, IM2NP, UMR 7334, Campus de St. Jérôme, 13397 Marseille, France. marco.abbarchi@im2np.fr.
authors.forename: Abdelmalek
authors.initials: A
authors.lastname: Benkouider
authors.affiliation: CNRS, Aix-Marseille Université, Centrale Marseille, IM2NP, UMR 7334, Campus de St. Jérôme, 13397 Marseille, France. marco.abbarchi@im2np.fr.
authors.forename: Luc
authors.initials: L
authors.lastname: Favre
authors.affiliation: CNRS, Aix-Marseille Université, Centrale Marseille, IM2NP, UMR 7334, Campus de St. Jérôme, 13397 Marseille, France. marco.abbarchi@im2np.fr.
authors.forename: Antoine
authors.initials: A
authors.lastname: Ronda
authors.affiliation: CNRS, Aix-Marseille Université, Centrale Marseille, IM2NP, UMR 7334, Campus de St. Jérôme, 13397 Marseille, France. marco.abbarchi@im2np.fr.
authors.forename: Isabelle
authors.initials: I
authors.lastname: Berbezier
authors.affiliation: ESPCI ParisTech, PSL Research University, CNRS, 1 rue Jussieu, F-75005 Paris, France.
authors.forename: Sebastien
authors.initials: S
authors.lastname: Bidault
authors.affiliation: CNRS, Aix-Marseille Université, Centrale Marseille, Institut Fresnel, UMR 7249, Campus de St. Jérôme, 13397 Marseille, France.
authors.forename: Nicolas
authors.initials: N
authors.lastname: Bonod
authors.affiliation: CNRS, Aix-Marseille Université, Centrale Marseille, IM2NP, UMR 7334, Campus de St. Jérôme, 13397 Marseille, France. marco.abbarchi@im2np.fr.
authors.forename: Marco
authors.initials: M
authors.lastname: Abbarchi