title: A Sensitivity Enhanced MWCNT/PDMS Tactile Sensor Using Micropillars and Low Energy Ar⁺ Ion Beam Treatment.
abstract: High sensitive flexible and wearable devices which can detect delicate touches have attracted considerable attentions from researchers for various promising applications. This research was aimed at enhancing the sensitivity of a MWCNT/PDMS piezoresistive tactile sensor through modification of its surface texture in the form of micropillars on MWCNT/PDMS film and subsequent low energy Ar⁺ ion beam treatment of the micropillars. The introduction of straight micropillars on the MWCNT/PDMS surface increased the sensitivity under gentle touch. Low energy ion beam treatment was performed to induce a stiff layer on the exposed surface of the micropillar structured MWCNT/PDMS film. The low energy ion bombardment stabilized the electrical properties of the MWCNT/PDMS surface and tuned the curvature of micropillars according to the treatment conditions. The straight micropillars which were treated by Ar⁺ ion with an incident angle of 0° demonstrated the enhanced sensitivity under normal pressure and the curved micropillars which were treated with Ar⁺ ion with an incident angle of 60° differentiated the direction of an applied shear pressure. The ion beam treatment on micropillar structured MWCNT/PDMS tactile sensors can thus be applied to reliable sensing under gentle touch with directional discrimination.
authors.affiliation: Department of Nature-Inspired Nano Convergence Systems, Korea Institute of Machinery and Materials, Daejeon 34103, Korea. azkarulhasan@kimm.re.kr.|Department of Nanobiotechnology, University of Science &amp; Technology, Daejeon 34113, Korea. azkarulhasan@kimm.re.kr.
authors.forename: Syed
authors.initials: S
authors.lastname: Azkar Ul Hasan
authors.affiliation: Department of Nature-Inspired Nano Convergence Systems, Korea Institute of Machinery and Materials, Daejeon 34103, Korea. yjung@kimm.re.kr.
authors.forename: Youngdo
authors.initials: Y
authors.lastname: Jung
authors.affiliation: Department of Nature-Inspired Nano Convergence Systems, Korea Institute of Machinery and Materials, Daejeon 34103, Korea. choucreme85@kimm.re.kr.
authors.forename: Seonggi
authors.initials: S
authors.lastname: Kim
authors.affiliation: Department of Nature-Inspired Nano Convergence Systems, Korea Institute of Machinery and Materials, Daejeon 34103, Korea. andend6@kimm.re.kr.
authors.forename: Cho-Long
authors.initials: CL
authors.lastname: Jung
authors.affiliation: Department of Nature-Inspired Nano Convergence Systems, Korea Institute of Machinery and Materials, Daejeon 34103, Korea. ssun@kimm.re.kr.
authors.forename: Sunjong
authors.initials: S
authors.lastname: Oh
authors.affiliation: Department of Nature-Inspired Nano Convergence Systems, Korea Institute of Machinery and Materials, Daejeon 34103, Korea. junhee_kim@kimm.re.kr.
authors.forename: Junhee
authors.initials: J
authors.lastname: Kim
authors.affiliation: Department of Nature-Inspired Nano Convergence Systems, Korea Institute of Machinery and Materials, Daejeon 34103, Korea. helim@kimm.re.kr.|Department of Nanobiotechnology, University of Science &amp; Technology, Daejeon 34113, Korea. helim@kimm.re.kr.
authors.forename: Hyuneui
authors.initials: H
authors.lastname: Lim
mesh_terms: D001128:Argon / Q000737:chemistry*; D004129:Dimethylpolysiloxanes / Q000737:chemistry*; D004867:Equipment Design; D055616:Microtechnology / Q000295:instrumentation*; D008954:Models, Biological; D037742:Nanotubes, Carbon / Q000737:chemistry*; D009757:Nylons / Q000737:chemistry*; D014110:Touch / Q000502:physiology*
chemical_list: D004129:Dimethylpolysiloxanes; D037742:Nanotubes, Carbon; D009757:Nylons; C085707:poly(dimethylsiloxane)-polyamide copolymer; D001128:Argon
keywords: MWCNT/PDMS; curved pillar; directional detection; ion beam treatment; micropillar; piezoresistive tactile sensor