title: Liquid-Phase Beam Pen Lithography.
abstract: Beam pen lithography (BPL) in the liquid phase is evaluated. The effect of tip-substrate gap and aperture size on patterning performance is systematically investigated. As a proof-of-concept experiment, nanoarrays of nucleotides are synthesized using BPL in an organic medium, pointing toward the potential of using liquid phase BPL to perform localized photochemical reactions that require a liquid medium.
authors.affiliation: Department of Chemistry and International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, IL, 60208, USA.
authors.forename: Shu
authors.initials: S
authors.lastname: He
authors.affiliation: Department of Chemistry and International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, IL, 60208, USA.
authors.forename: Zhuang
authors.initials: Z
authors.lastname: Xie
authors.affiliation: Department of Chemistry and International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, IL, 60208, USA.
authors.forename: Daniel J
authors.initials: DJ
authors.lastname: Park
authors.affiliation: Department of Materials Science and Engineering, Northwestern University, 2220 Campus Drive, Evanston, IL, 60208, USA.
authors.forename: Xing
authors.initials: X
authors.lastname: Liao
authors.affiliation: Department of Chemistry and International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, IL, 60208, USA.
authors.forename: Keith A
authors.initials: KA
authors.lastname: Brown
authors.affiliation: Department of Materials Science and Engineering, Northwestern University, 2220 Campus Drive, Evanston, IL, 60208, USA.
authors.forename: Peng-Cheng
authors.initials: PC
authors.lastname: Chen
authors.affiliation: Department of Materials Science and Engineering, Northwestern University, 2220 Campus Drive, Evanston, IL, 60208, USA.
authors.forename: Yu
authors.initials: Y
authors.lastname: Zhou
authors.affiliation: Department of Chemistry and International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, IL, 60208, USA.
authors.forename: George C
authors.initials: GC
authors.lastname: Schatz
authors.affiliation: Department of Chemistry and International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, IL, 60208, USA.|Department of Materials Science and Engineering, Northwestern University, 2220 Campus Drive, Evanston, IL, 60208, USA.
authors.forename: Chad A
authors.initials: CA
authors.lastname: Mirkin
keywords: beam pen lithography; lithography; nucleotide nanoarrays; photochemistry; photolithography; scanning probe lithography