title: Crack-Defined Electronic Nanogaps.
abstract: Achieving near-atomic-scale electronic nanogaps in a reliable and scalable manner will facilitate fundamental advances in molecular detection, plasmonics, and nanoelectronics. Here, a method is shown for realizing crack-defined nanogaps separating TiN electrodes, allowing parallel and scalable fabrication of arrays of sub-10 nm electronic nanogaps featuring individually defined gap widths.
authors.affiliation: Department of Micro and Nanosystems, School of Electrical Engineering, KTH Royal Institute of Technology, SE-10044, Stockholm, Sweden.
authors.forename: Valentin
authors.initials: V
authors.lastname: Dubois
authors.affiliation: Department of Micro and Nanosystems, School of Electrical Engineering, KTH Royal Institute of Technology, SE-10044, Stockholm, Sweden.
authors.forename: Frank
authors.initials: F
authors.lastname: Niklaus
authors.affiliation: Department of Micro and Nanosystems, School of Electrical Engineering, KTH Royal Institute of Technology, SE-10044, Stockholm, Sweden.
authors.forename: Göran
authors.initials: G
authors.lastname: Stemme
keywords: arrays; crack junctions; electronic transport; nanogaps; tunnel junctions