title: iCVD Cyclic Polysiloxane and Polysilazane as Nanoscale Thin-Film Electrolyte: Synthesis and Properties.
abstract: A group of crosslinked cyclic siloxane (Si-O) and silazane (Si-N) polymers are synthesized via solvent-free initiated chemical vapor deposition (iCVD). Notably, this is the first report of cyclic polysilazanes synthesized via the gas-phase iCVD method. The deposited nanoscale thin films are thermally stable and chemically inert. By iCVD, they can uniformly and conformally cover nonplanar surfaces having complex geometry. Although polysiloxanes are traditionally utilized as dielectric materials and insulators, our research shows these cyclic organosilicon polymers can conduct lithium ions (Li(+) ) at room temperature. The conformal coating and the room temperature ionic conductivity make these cyclic organosilicon polymers attractive for use as thin-film electrolytes in solid-state batteries. Also, their synthesis process and properties have been systemically studied and discussed.
authors.affiliation: Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA.
authors.forename: Nan
authors.initials: N
authors.lastname: Chen
authors.affiliation: Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA.
authors.forename: B
authors.initials: B
authors.lastname: Reeja-Jayan
authors.affiliation: Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA.
authors.forename: Andong
authors.initials: A
authors.lastname: Liu
authors.affiliation: Department of Materials Science and Engineering, University of California, Los Angeles, CA, 90095, USA.
authors.forename: Jonathan
authors.initials: J
authors.lastname: Lau
authors.affiliation: Department of Materials Science and Engineering, University of California, Los Angeles, CA, 90095, USA.
authors.forename: Bruce
authors.initials: B
authors.lastname: Dunn
authors.affiliation: Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA.
authors.forename: Karen K
authors.initials: KK
authors.lastname: Gleason
mesh_terms: D002414:Cations, Monovalent; D004553:Electric Conductivity; D011211:Electric Power Supplies; D008094:Lithium / Q000737:chemistry*; D008422:Materials Testing; D049329:Nanostructures / Q000737:chemistry*; D044367:Phase Transition; D058105:Polymerization; D011108:Polymers / Q000138:chemical synthesis*; D012833:Siloxanes / Q000138:chemical synthesis*; D013696:Temperature; D014835:Volatilization
chemical_list: D002414:Cations, Monovalent; D011108:Polymers; D012833:Siloxanes; D008094:Lithium
keywords: initiated chemical vapor deposition; lithium ion battery; polymer electrolyte; polysilazane; polysiloxane