title: Influences of an Aluminum Covering Layer on the Performance of Cross-Like Hall Devices.
abstract: This work studies the effects of an aluminum covering on the performance of cross-like Hall devices. Four different Hall sensor structures of various sizes were designed and fabricated. The sensitivity and offset of the Hall sensors, two key points impacting their performance, were characterized using a self-built measurement system. The work analyzes the influences of the aluminum covering on those two aspects of the performance. The aluminum layer covering mainly leads to an eddy-current effect in an unstable magnetic field and an additional depletion region above the active region. Those two points have influences on the sensitivity and the offset voltage, respectively. The analysis guides the designer whether to choose covering with an aluminum layer the active region of the Hall sensor as a method to reduce the flicker noise and to improve the stability of the Hall sensor. Because Hall devices, as a reference element, always suffer from a large dispersion, improving their stability is a crucial issue.
authors.affiliation: School of Electronic Science &amp; Engineering, Nanjing University, Nanjing 210093, China. lvfeieric@gmail.com.
authors.forename: Fei
authors.initials: F
authors.lastname: Lyu
authors.affiliation: Globalfoundries Singapore, Singapore 738406, Singapore. XinFu.LIU@globalfoundries.com.
authors.forename: Xinfu
authors.initials: X
authors.lastname: Liu
authors.affiliation: Globalfoundries Singapore, Singapore 738406, Singapore. YINJIE.DING@globalfoundries.com.
authors.forename: Yinjie
authors.initials: Y
authors.lastname: Ding
authors.affiliation: Globalfoundries Singapore, Singapore 738406, Singapore. EngHuat.TOH@globalfoundries.com.
authors.forename: Eng-Huat
authors.initials: EH
authors.lastname: Toh
authors.affiliation: School of Electronic Science &amp; Engineering, Nanjing University, Nanjing 210093, China. zhangzhenyan518@163.com.
authors.forename: Zhenyan
authors.initials: Z
authors.lastname: Zhang
authors.affiliation: Nanjing Foreign Language School, Nanjing 210008, China. panyifanhappy@163.com.
authors.forename: Yifan
authors.initials: Y
authors.lastname: Pan
authors.affiliation: School of Electronic Science &amp; Engineering, Nanjing University, Nanjing 210093, China. wzwcwz@foxmail.com.
authors.forename: Zhen
authors.initials: Z
authors.lastname: Wang
authors.affiliation: School of Electronic Science &amp; Engineering, Nanjing University, Nanjing 210093, China. lichengjie.520@163.com.
authors.forename: Chengjie
authors.initials: C
authors.lastname: Li
authors.affiliation: School of Electronic Science &amp; Engineering, Nanjing University, Nanjing 210093, China. lili@nju.edu.cn.
authors.forename: Li
authors.initials: L
authors.lastname: Li
authors.affiliation: School of Electronic Science &amp; Engineering, Nanjing University, Nanjing 210093, China. shajin@nju.edu.cn.
authors.forename: Jin
authors.initials: J
authors.lastname: Sha
authors.affiliation: School of Electronic Science &amp; Engineering, Nanjing University, Nanjing 210093, China. phb@nju.edu.cn.
authors.forename: Hongbing
authors.initials: H
authors.lastname: Pan
keywords: aluminum covering; cross-like Hall sensor; offset voltage; sensitivity