title: An improved preparation method for cross-sectional TEM specimens of films deposited on metallic substrates.
abstract: Cross-sectional TEM analysis is one of the most important techniques to characterize microstructures of films. However, the complex process, low efficiency, and low success rate of specimen preparation limit its application. This paper analyzed the main causes of low success rate and proposed an improved method for specimen preparation of films deposited on metallic substrates. This method consisting of twin-jet electropolishing and one-sided rocking ion milling is high in efficiency and success rate.
authors.affiliation: State Key Laboratory of Metal Matrix Composites, Shanghai Jiao Tong University, Shanghai, 200240, People's Republic of China.
authors.forename: Bingyang
authors.initials: B
authors.lastname: Ma
authors.affiliation: State Key Laboratory of Metal Matrix Composites, Shanghai Jiao Tong University, Shanghai, 200240, People's Republic of China.
authors.forename: Kaicheng
authors.initials: K
authors.lastname: Shi
authors.affiliation: State Key Laboratory of Metal Matrix Composites, Shanghai Jiao Tong University, Shanghai, 200240, People's Republic of China.|School of Mechanical Engineering, Shanghai Dianji University, Shanghai, 200240, People's Republic of China.
authors.forename: Hailong
authors.initials: H
authors.lastname: Shang
authors.affiliation: State Key Laboratory of Metal Matrix Composites, Shanghai Jiao Tong University, Shanghai, 200240, People's Republic of China.
authors.forename: Anming
authors.initials: A
authors.lastname: Zhang
authors.affiliation: School of Mechanical Engineering, Shanghai Dianji University, Shanghai, 200240, People's Republic of China.
authors.forename: Rongbin
authors.initials: R
authors.lastname: Li
authors.affiliation: State Key Laboratory of Metal Matrix Composites, Shanghai Jiao Tong University, Shanghai, 200240, People's Republic of China.
authors.forename: Geyang
authors.initials: G
authors.lastname: Li
keywords: TEM; cross-sectional specimen; specimen preparation; thin film