title: Optimization Of PVDF-TrFE Processing Conditions For The Fabrication Of Organic MEMS Resonators.
abstract: This paper reports a systematic optimization of processing conditions of PVDF-TrFE piezoelectric thin films, used as integrated transducers in organic MEMS resonators. Indeed, despite data on electromechanical properties of PVDF found in the literature, optimized processing conditions that lead to these properties remain only partially described. In this work, a rigorous optimization of parameters enabling state-of-the-art piezoelectric properties of PVDF-TrFE thin films has been performed via the evaluation of the actuation performance of MEMS resonators. Conditions such as annealing duration, poling field and poling duration have been optimized and repeatability of the process has been demonstrated.
authors.affiliation: Univ. Bordeaux, IMS, UMR 5218, F-33405 Talence, France.|CNRS, IMS, UMR 5218, F-33405 Talence, France.|Bordeaux INP, IMS, UMR 5218, F-33405 Talence, France.
authors.forename: Pierre-Henri
authors.initials: PH
authors.lastname: Ducrot
authors.affiliation: Univ. Bordeaux, IMS, UMR 5218, F-33405 Talence, France.|CNRS, IMS, UMR 5218, F-33405 Talence, France.|Bordeaux INP, IMS, UMR 5218, F-33405 Talence, France.
authors.forename: Isabelle
authors.initials: I
authors.lastname: Dufour
authors.affiliation: Univ. Bordeaux, IMS, UMR 5218, F-33405 Talence, France.|CNRS, IMS, UMR 5218, F-33405 Talence, France.|Bordeaux INP, IMS, UMR 5218, F-33405 Talence, France.
authors.forename: Cédric
authors.initials: C
authors.lastname: Ayela