title: Stimulated Emission Depletion Lithography with Mercapto-Functional Polymers.
abstract: Surface reactive nanostructures were fabricated using stimulated emission depletion (STED) lithography. The functionalization of the nanostructures was realized by copolymerization of a bifunctional metal oxo cluster in the presence of a triacrylate monomer. Ligands of the cluster surface cross-link to the monomer during the lithographic process, whereas unreacted mercapto functionalized ligands are transferred to the polymer and remain reactive after polymer formation of the surface of the nanostructure. The depletion efficiency in dependence of the cluster loading was investigated and full depletion of the STED effect was observed with a cluster loading exceeding 4 wt %. A feature size by λ/11 was achieved by using a donut-shaped depletion beam. The reactivity of the mercapto groups on the surface of the nanostructure was tested by incubation with mercapto-reactive fluorophores.
authors.affiliation: Institute of Applied Physics, Johannes Kepler University Linz , Altenberger Straße 69, 4040 Linz, Austria.
authors.forename: Bianca
authors.initials: B
authors.lastname: Buchegger
authors.affiliation: Institute of Materials Chemistry, TU Wien , Getreidemarkt 9, 1060 Vienna, Austria.
authors.forename: Johannes
authors.initials: J
authors.lastname: Kreutzer
authors.affiliation: Institute of Applied Physics, TU Wien , Getreidemarkt 9, 1060 Vienna, Austria.|Upper Austria University of Applied Sciences, Campus Linz , Garnisonstraße 21, 4020 Linz, Austria.
authors.forename: Birgit
authors.initials: B
authors.lastname: Plochberger
authors.affiliation: Institute of Applied Physics, Johannes Kepler University Linz , Altenberger Straße 69, 4040 Linz, Austria.
authors.forename: Richard
authors.initials: R
authors.lastname: Wollhofen
authors.affiliation: Institute of Applied Physics, Johannes Kepler University Linz , Altenberger Straße 69, 4040 Linz, Austria.
authors.forename: Dmitry
authors.initials: D
authors.lastname: Sivun
authors.affiliation: Institute of Applied Physics, Johannes Kepler University Linz , Altenberger Straße 69, 4040 Linz, Austria.|Upper Austria University of Applied Sciences, Campus Linz , Garnisonstraße 21, 4020 Linz, Austria.
authors.forename: Jaroslaw
authors.initials: J
authors.lastname: Jacak
authors.affiliation: Institute of Applied Physics, TU Wien , Getreidemarkt 9, 1060 Vienna, Austria.
authors.forename: Gerhard J
authors.initials: GJ
authors.lastname: Schütz
authors.affiliation: Institute of Materials Chemistry, TU Wien , Getreidemarkt 9, 1060 Vienna, Austria.
authors.forename: Ulrich
authors.initials: U
authors.lastname: Schubert
authors.affiliation: Institute of Applied Physics, Johannes Kepler University Linz , Altenberger Straße 69, 4040 Linz, Austria.
authors.forename: Thomas A
authors.initials: TA
authors.lastname: Klar
keywords: STED lithography; functional polymers; thiol polymers; zirconium oxo cluster polymerization
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