title: Solution Layer Deposition: A Technique for the Growth of Ultra-Pure Manganese Oxides on Silica at Room Temperature.
abstract: With the ever increasing miniaturization in microelectronic devices, new deposition techniques are required to form high-purity metal oxide layers. Herein, we report a liquid route to specifically produce thin and conformal amorphous manganese oxide layers on silicon substrate, which can be transformed into a manganese silicate layer. The undesired insertion of carbon into the functional layers is avoided through a solution metal-organic chemistry approach named Solution Layer Deposition (SLD). The growth of a pure manganese oxide film by SLD takes place through the decoordination of ligands from a metal-organic complex in mild conditions, and coordination of the resulting metal atoms on a silica surface. The mechanism of this chemical liquid route has been elucidated by solid-state (29) Si MAS NMR, XPS, SIMS, and HRTEM.
authors.affiliation: CNRS, LCC (Laboratoire de Chimie de Coordination), 205 Route de Narbonne BP 44099, 31077, Toulouse Cedex 4, France.|Université de Toulouse, UPS, INPT, 31077, Toulouse Cedex 4, France.|STMicroelectronics SAS, 10 impasse Thales de Millet, 37070, Tours, France.
authors.forename: Jérémy
authors.initials: J
authors.lastname: Cure
authors.affiliation: CNRS, LCC (Laboratoire de Chimie de Coordination), 205 Route de Narbonne BP 44099, 31077, Toulouse Cedex 4, France.|Université de Toulouse, UPS, INPT, 31077, Toulouse Cedex 4, France.|STMicroelectronics SAS, 10 impasse Thales de Millet, 37070, Tours, France.
authors.forename: Kilian
authors.initials: K
authors.lastname: Piettre
authors.affiliation: CNRS, LCC (Laboratoire de Chimie de Coordination), 205 Route de Narbonne BP 44099, 31077, Toulouse Cedex 4, France. yannick.coppel@lcc-toulouse.fr.|Université de Toulouse, UPS, INPT, 31077, Toulouse Cedex 4, France. yannick.coppel@lcc-toulouse.fr.
authors.forename: Yannick
authors.initials: Y
authors.lastname: Coppel
authors.affiliation: PROMES-CNRS, 7 rue du four solaire, 66120, Font-Romeu-Odeillo, France.
authors.forename: Eric
authors.initials: E
authors.lastname: Beche
authors.affiliation: CIRIMAT-ENSIACET, 4 allée Emile Monso BP44362, 31030, Toulouse Cedex 4, France.
authors.forename: Jérôme
authors.initials: J
authors.lastname: Esvan
authors.affiliation: CNRS, LCC (Laboratoire de Chimie de Coordination), 205 Route de Narbonne BP 44099, 31077, Toulouse Cedex 4, France.|Université de Toulouse, UPS, INPT, 31077, Toulouse Cedex 4, France.
authors.forename: Vincent
authors.initials: V
authors.lastname: Collière
authors.affiliation: LPCNO, INSA-UPS-CNRS, 135 avenue de Rangueil, 31077, Toulouse Cedex 4, France.
authors.forename: Bruno
authors.initials: B
authors.lastname: Chaudret
authors.affiliation: CNRS, LCC (Laboratoire de Chimie de Coordination), 205 Route de Narbonne BP 44099, 31077, Toulouse Cedex 4, France. pierre.fau@lcc-toulouse.fr.|Université de Toulouse, UPS, INPT, 31077, Toulouse Cedex 4, France. pierre.fau@lcc-toulouse.fr.
authors.forename: Pierre
authors.initials: P
authors.lastname: Fau
keywords: contamination-free; magic angle spinning NMR; manganese amidinate; metal oxide layers; solution deposition