title: Direct growth of single-crystalline III-V semiconductors on amorphous substrates.
abstract: The III-V compound semiconductors exhibit superb electronic and optoelectronic properties. Traditionally, closely lattice-matched epitaxial substrates have been required for the growth of high-quality single-crystal III-V thin films and patterned microstructures. To remove this materials constraint, here we introduce a growth mode that enables direct writing of single-crystalline III-V's on amorphous substrates, thus further expanding their utility for various applications. The process utilizes templated liquid-phase crystal growth that results in user-tunable, patterned micro and nanostructures of single-crystalline III-V's of up to tens of micrometres in lateral dimensions. InP is chosen as a model material system owing to its technological importance. The patterned InP single crystals are configured as high-performance transistors and photodetectors directly on amorphous SiO2 growth substrates, with performance matching state-of-the-art epitaxially grown devices. The work presents an important advance towards universal integration of III-V's on application-specific substrates by direct growth.
authors.affiliation: Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA.|Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
authors.forename: Kevin
authors.initials: K
authors.lastname: Chen
authors.affiliation: Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA.|Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
authors.forename: Rehan
authors.initials: R
authors.lastname: Kapadia
authors.affiliation: Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.|Department of Chemical Engineering, University of California, Berkeley, California 94720, USA.
authors.forename: Audrey
authors.initials: A
authors.lastname: Harker
authors.affiliation: Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA.|Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
authors.forename: Sujay
authors.initials: S
authors.lastname: Desai
authors.affiliation: Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA.|Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
authors.forename: Jeong
authors.initials: J
authors.lastname: Seuk Kang
authors.affiliation: Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA.|Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
authors.forename: Steven
authors.initials: S
authors.lastname: Chuang
authors.affiliation: Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA.|Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
authors.forename: Mahmut
authors.initials: M
authors.lastname: Tosun
authors.affiliation: Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA.|Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
authors.forename: Carolin M
authors.initials: CM
authors.lastname: Sutter-Fella
authors.affiliation: Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA.|Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
authors.forename: Michael
authors.initials: M
authors.lastname: Tsang
authors.affiliation: Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA.|Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
authors.forename: Yuping
authors.initials: Y
authors.lastname: Zeng
authors.affiliation: Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA.|Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
authors.forename: Daisuke
authors.initials: D
authors.lastname: Kiriya
authors.affiliation: Department of Electrical Engineering, University of Southern California, Los Angeles, California 90089, USA.
authors.forename: Jubin
authors.initials: J
authors.lastname: Hazra
authors.affiliation: Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA.|Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
authors.forename: Surabhi Rao
authors.initials: SR
authors.lastname: Madhvapathy
authors.affiliation: Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA.|Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
authors.forename: Mark
authors.initials: M
authors.lastname: Hettick
authors.affiliation: Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan.
authors.forename: Yu-Ze
authors.initials: YZ
authors.lastname: Chen
authors.affiliation: Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.|Department of Materials Science and Engineering, University of California, Berkeley, California 94720, USA.
authors.forename: James
authors.initials: J
authors.lastname: Mastandrea
authors.affiliation: Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA.|Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
authors.forename: Matin
authors.initials: M
authors.lastname: Amani
authors.affiliation: Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, 94720 California, USA.
authors.forename: Stefano
authors.initials: S
authors.lastname: Cabrini
authors.affiliation: Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan.
authors.forename: Yu-Lun
authors.initials: YL
authors.lastname: Chueh
authors.affiliation: Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
authors.forename: Joel W
authors.initials: JW
authors.lastname: Ager Iii
authors.affiliation: Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.|Department of Materials Science and Engineering, University of California, Berkeley, California 94720, USA.
authors.forename: Daryl C
authors.initials: DC
authors.lastname: Chrzan
authors.affiliation: Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA.|Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
authors.forename: Ali
authors.initials: A
authors.lastname: Javey
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