title: Active layers of high-performance lead zirconate titanate at temperatures compatible with silicon nano- and microeletronic [corrected] devices.
abstract: Applications of ferroelectric materials in modern microelectronics will be greatly encouraged if the thermal incompatibility between inorganic ferroelectrics and semiconductor devices is overcome. Here, solution-processable layers of the most commercial ferroelectric compound--morphotrophic phase boundary lead zirconate titanate, namely Pb(Zr0.52Ti0.48)O3 (PZT)--are grown on silicon substrates at temperatures well below the standard CMOS process of semiconductor technology. The method, potentially transferable to a broader range of Zr:Ti ratios, is based on the addition of crystalline nanoseeds to photosensitive solutions of PZT resulting in perovskite crystallization from only 350 °C after the enhanced decomposition of metal precursors in the films by UV irradiation. A remanent polarization of 10.0 μC cm(-2) is obtained for these films that is in the order of the switching charge densities demanded for FeRAM devices. Also, a dielectric constant of ~90 is measured at zero voltage which exceeds that of current single-oxide candidates for capacitance applications. The multifunctionality of the films is additionally demonstrated by their pyroelectric and piezoelectric performance. The potential integration of PZT layers at such low fabrication temperatures may redefine the concept design of classical microelectronic devices, besides allowing inorganic ferroelectrics to enter the scene of the emerging large-area, flexible electronics.
authors.affiliation: Instituto de Ciencia de Materiales de Madrid (ICMM), Consejo Superior de Investigaciones Científicas (CSIC), Sor Juana Inés de la Cruz 3, Cantoblanco, Madrid 28049, Spain.
authors.forename: Iñigo
authors.initials: I
authors.lastname: Bretos
authors.affiliation: Instituto de Ciencia de Materiales de Madrid (ICMM), Consejo Superior de Investigaciones Científicas (CSIC), Sor Juana Inés de la Cruz 3, Cantoblanco, Madrid 28049, Spain.
authors.forename: Ricardo
authors.initials: R
authors.lastname: Jiménez
authors.affiliation: Department of Materials and Ceramic Engineering &CICECO, University of Aveiro, Aveiro 3810-193, Portugal.
authors.forename: Monika
authors.initials: M
authors.lastname: Tomczyk
authors.affiliation: Departamento de Química Inorgánica, Cristalografía y Mineralogía, Facultad de Ciencias, Universidad de Málaga, Málaga 29071, Spain.
authors.forename: Enrique
authors.initials: E
authors.lastname: Rodríguez-Castellón
authors.affiliation: Department of Materials and Ceramic Engineering &CICECO, University of Aveiro, Aveiro 3810-193, Portugal.
authors.forename: Paula M
authors.initials: PM
authors.lastname: Vilarinho
authors.affiliation: Instituto de Ciencia de Materiales de Madrid (ICMM), Consejo Superior de Investigaciones Científicas (CSIC), Sor Juana Inés de la Cruz 3, Cantoblanco, Madrid 28049, Spain.
authors.forename: M Lourdes
authors.initials: ML
authors.lastname: Calzada
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