title: Direct-Write X-ray Nanopatterning: A Proof of Concept Josephson Device on Bi2Sr2CaCu2O8+δ Superconducting Oxide.
abstract: We describe the first use of a novel photoresist-free X-ray nanopatterning technique to fabricate an electronic device. We have produced a proof-of-concept device consisting of a few Josephson junctions by irradiating microcrystals of the Bi2Sr2CaCu2O8+δ (Bi-2212) superconducting oxide with a 17.6 keV synchrotron nanobeam. Fully functional devices have been obtained by locally turning the material into a nonsuperconducting state by means of hard X-ray exposure. Nano-XRD patterns reveal that the crystallinity is substantially preserved in the irradiated areas that there is no evidence of macroscopic crystal disruption. Indications are that O ions have been removed from the crystals, which could make this technique interesting also for other oxide materials. Direct-write X-ray nanopatterning represents a promising fabrication method exploiting material/material rather than vacuum/material interfaces, with the potential for nanometric resolution, improved mechanical stability, enhanced depth of patterning, and absence of chemical contamination with respect to traditional lithographic techniques.
authors.affiliation: Department of Physics, Interdepartmental Centre NIS, University of Torino , via Giuria 1, I-10125 Torino, Italy.
authors.forename: Marco
authors.initials: M
authors.lastname: Truccato
authors.affiliation: Department of Chemistry, Interdepartmental Centre NIS and INSTM Centro di Riferimento, University of Torino , via Giuria 7, I-10125 Torino, Italy.
authors.forename: Angelo
authors.initials: A
authors.lastname: Agostino
authors.affiliation: Department of Chemistry, Interdepartmental Centre NIS and INSTM Centro di Riferimento, University of Torino , via Giuria 7, I-10125 Torino, Italy.
authors.forename: Elisa
authors.initials: E
authors.lastname: Borfecchia
authors.affiliation: INRIM, National Institute for Metrological Research , Strada delle Cacce 91, I-10135 Torino, Italy.
authors.forename: Lorenzo
authors.initials: L
authors.lastname: Mino
authors.affiliation: Department of Physics, Interdepartmental Centre NIS, University of Torino , via Giuria 1, I-10125 Torino, Italy.
authors.forename: Eleonora
authors.initials: E
authors.lastname: Cara
authors.affiliation: Department of Physics, Interdepartmental Centre NIS, University of Torino , via Giuria 1, I-10125 Torino, Italy.
authors.forename: Alessandro
authors.initials: A
authors.lastname: Pagliero
authors.affiliation: Department of Physics, Interdepartmental Centre NIS, University of Torino , via Giuria 1, I-10125 Torino, Italy.
authors.forename: Nidhi
authors.initials: N
authors.lastname: Adhlakha
authors.affiliation: Department of Chemistry, Interdepartmental Centre NIS and INSTM Centro di Riferimento, University of Torino , via Giuria 7, I-10125 Torino, Italy.
authors.forename: Lise
authors.initials: L
authors.lastname: Pascale
authors.affiliation: Department of Chemistry, Interdepartmental Centre NIS and INSTM Centro di Riferimento, University of Torino , via Giuria 7, I-10125 Torino, Italy.
authors.forename: Lorenza
authors.initials: L
authors.lastname: Operti
authors.affiliation: INRIM, National Institute for Metrological Research , Strada delle Cacce 91, I-10135 Torino, Italy.
authors.forename: Emanuele
authors.initials: E
authors.lastname: Enrico
authors.affiliation: INRIM, National Institute for Metrological Research , Strada delle Cacce 91, I-10135 Torino, Italy.
authors.forename: Natascia
authors.initials: N
authors.lastname: De Leo
authors.affiliation: INRIM, National Institute for Metrological Research , Strada delle Cacce 91, I-10135 Torino, Italy.
authors.forename: Matteo
authors.initials: M
authors.lastname: Fretto
authors.affiliation: Experiments Division, European Synchrotron Radiation Facility , 71 Avenue des Martyrs, 38000 Grenoble, France.
authors.forename: Gema
authors.initials: G
authors.lastname: Martinez-Criado
authors.affiliation: Department of Chemistry, Interdepartmental Centre NIS and INSTM Centro di Riferimento, University of Torino , via Giuria 7, I-10125 Torino, Italy.|Southern Federal University , Zorge Street 5, 344090 Rostov-on-Don, Russia.
authors.forename: Carlo
authors.initials: C
authors.lastname: Lamberti
keywords: Bi-2212; X-ray nanoprobe; high-temperature superconductors (HTSC); intrinsic Josephson junctions; nanopatterning; synchrotron radiation