title: Period-chirped gratings fabricated by laser interference lithography with a concave Lloyd's mirror.
abstract: We developed a laser interference lithography (LIL) system for fabrication of period-chirped gratings, which would be useful for sophisticated optical components. Despite its simplicity, the developed LIL system, based on a Lloyd's mirror interferometer with a cylindrically concave mirror, can generate chirped gratings, yet over a large area at high throughput owing to the nature of LIL. We have derived exact theoretical equations needed for system design, built the LIL system, and subsequently realized period-chirped gratings. A fabricated sample whose center period is Λ≈600  nm exhibits a continuous period variation of ΔΛ=92  nm across 17 mm width.
authors.forename: Hanbit
authors.initials: H
authors.lastname: Kim
authors.forename: Hyunho
authors.initials: H
authors.lastname: Jung
authors.forename: Dong-Hyun
authors.initials: DH
authors.lastname: Lee
authors.forename: Kyu Back
authors.initials: KB
authors.lastname: Lee
authors.forename: Heonsu
authors.initials: H
authors.lastname: Jeon
mesh_terms: D007368:Interferometry / Q000379:methods*; D007834:Lasers; D008855:Microscopy, Electron, Scanning; D055620:Optical Phenomena; D010781:Photography; D011327:Printing / Q000379:methods*