title: A MEMS-based heating holder for the direct imaging of simultaneous in-situ heating and biasing experiments in scanning/transmission electron microscopes.
abstract: The introduction of scanning/transmission electron microscopes (S/TEM) with sub-Angstrom resolution as well as fast and sensitive detection solutions support direct observation of dynamic phenomena in-situ at the atomic scale. Thereby, in-situ specimen holders play a crucial role: accurate control of the applied in-situ stimulus on the nanostructure combined with the overall system stability to assure atomic resolution are paramount for a successful in-situ S/TEM experiment. For those reasons, MEMS-based TEM sample holders are becoming one of the preferred choices, also enabling a high precision in measurements of the in-situ parameter for more reproducible data. A newly developed MEMS-based microheater is presented in combination with the new NanoEx™-i/v TEM sample holder. The concept is built on a four-point probe temperature measurement approach allowing active, accurate local temperature control as well as calorimetry. In this paper, it is shown that it provides high temperature stability up to 1,300°C with a peak temperature of 1,500°C (also working accurately in gaseous environments), high temperature measurement accuracy (<4%) and uniform temperature distribution over the heated specimen area (<1%), enabling not only in-situ S/TEM imaging experiments, but also elemental mapping at elevated temperatures using energy-dispersive X-ray spectroscopy (EDS). Moreover, it has the unique capability to enable simultaneous heating and biasing experiments.
authors.affiliation: FEI Company, Achtseweg Noord 5, Eindhoven, 5651GG, The Netherlands.
authors.forename: Luigi
authors.initials: L
authors.lastname: Mele
authors.affiliation: FEI Company, Achtseweg Noord 5, Eindhoven, 5651GG, The Netherlands.
authors.forename: Stan
authors.initials: S
authors.lastname: Konings
authors.affiliation: FEI Company, Achtseweg Noord 5, Eindhoven, 5651GG, The Netherlands.
authors.forename: Pleun
authors.initials: P
authors.lastname: Dona
authors.affiliation: FEI Company, Achtseweg Noord 5, Eindhoven, 5651GG, The Netherlands.
authors.forename: Francis
authors.initials: F
authors.lastname: Evertz
authors.affiliation: FEI Company, Achtseweg Noord 5, Eindhoven, 5651GG, The Netherlands.
authors.forename: Christoph
authors.initials: C
authors.lastname: Mitterbauer
authors.affiliation: FEI Company, Achtseweg Noord 5, Eindhoven, 5651GG, The Netherlands.
authors.forename: Pybe
authors.initials: P
authors.lastname: Faber
authors.affiliation: FEI Company, Achtseweg Noord 5, Eindhoven, 5651GG, The Netherlands.
authors.forename: Ruud
authors.initials: R
authors.lastname: Schampers
authors.affiliation: FEI Company, Achtseweg Noord 5, Eindhoven, 5651GG, The Netherlands.
authors.forename: Joerg R
authors.initials: JR
authors.lastname: Jinschek
keywords: MEMS; TEM; biasing; heating; in-situ; microheater