title: Athermal Azobenzene-Based Nanoimprint Lithography.
abstract: A novel nanoimprint lithography technique based on the photofluidization effect of azobenzene materials is presented. The tunable process allows for imprinting under ambient conditions without crosslinking reactions, so that shrinkage of the resist is avoided. Patterning of surfaces in the regime from micrometers down to 100 nm is demonstrated.
authors.affiliation: Macromolecular Chemistry I and Bayreuth, Institute of Macromolecular Research, University of Bayreuth, D-95440, Bayreuth, Germany.
authors.forename: Christian
authors.initials: C
authors.lastname: Probst
authors.affiliation: Institute of Physics and Bayreuth Institute of Macromolecular Research, University of Bayreuth, D-95440, Bayreuth, Germany.
authors.forename: Christoph
authors.initials: C
authors.lastname: Meichner
authors.affiliation: Macromolecular Chemistry I and Bayreuth, Institute of Macromolecular Research, University of Bayreuth, D-95440, Bayreuth, Germany.
authors.forename: Klaus
authors.initials: K
authors.lastname: Kreger
authors.affiliation: Institute of Physics and Bayreuth Institute of Macromolecular Research, University of Bayreuth, D-95440, Bayreuth, Germany.
authors.forename: Lothar
authors.initials: L
authors.lastname: Kador
authors.affiliation: Macromolecular Chemistry I and Bayreuth, Institute of Macromolecular Research, University of Bayreuth, D-95440, Bayreuth, Germany.
authors.forename: Christian
authors.initials: C
authors.lastname: Neuber
authors.affiliation: Macromolecular Chemistry I and Bayreuth, Institute of Macromolecular Research, University of Bayreuth, D-95440, Bayreuth, Germany.
authors.forename: Hans-Werner
authors.initials: HW
authors.lastname: Schmidt
mesh_terms: D001391:Azo Compounds / Q000737:chemistry*; D004129:Dimethylpolysiloxanes / Q000737:chemistry; D007536:Isomerism; D018625:Microscopy, Atomic Force; D008855:Microscopy, Electron, Scanning; D049329:Nanostructures / Q000737:chemistry; D036103:Nanotechnology; D014466:Ultraviolet Rays
chemical_list: D001391:Azo Compounds; D004129:Dimethylpolysiloxanes; C009850:azobenzene
keywords: athermal photofluidization; azobenzene; nanoimprint lithography; nanopatterning; soft lithography