title: Low loss ridge waveguides in lithium niobate thin films by optical grade diamond blade dicing.
abstract: We report on the fabrication and characterization of ridge waveguides in lithium niobate thin films by diamond blade dicing. The lithium niobate thin films with a thickness of 1 µm were fabricated by bonding a He-implanted lithium niobate wafer to a SiO(2)-coated lithium niobate wafer and crystal ion slicing. Propagation losses of 1.2 dB/cm for TE and 2.8 dB/cm for TM polarization were measured at 1550 nm for a 9.28 mm long and 2.1 µm wide waveguide using the Fabry-Perot method.
authors.forename: Martin F
authors.initials: MF
authors.lastname: Volk
authors.forename: Sergiy
authors.initials: S
authors.lastname: Suntsov
authors.forename: Christian E
authors.initials: CE
authors.lastname: Rüter
authors.forename: Detlef
authors.initials: D
authors.lastname: Kip