title: Calibration procedures for quantitative multiple wavelengths reflectance microscopy.
abstract: In order to characterize surface chemo-mechanical phenomena driving micro-electro-mechanical systems (MEMSs) behavior, it has been previously proposed to use reflected intensity fields obtained from a standard microscope for different illumination wavelengths. Wavelength-dependent and -independent reflectivity fields are obtained from these images, provided the relative reflectance sensitivities ratio can be identified. This contribution focuses on the necessary calibration procedures and mathematical methods allowing for a quantitative conversion from a mechanically induced reflectivity field to a surface rotation field, therefore paving the way for a quantitative mechanical analysis of MEMS under chemical loading.
authors.affiliation: Institut Langevin, ESPCI ParisTech/CNRS-UMR 7587, 1 rue Jussieu, 75238 Paris Cedex 05, France.
authors.forename: Yasmina
authors.initials: Y
authors.lastname: Fedala
authors.affiliation: PECSA, ESPCI ParisTech/CNRS-UMR 7195, 10 rue Vauquelin, 75231 Paris Cedex 05, France.
authors.forename: Sorin
authors.initials: S
authors.lastname: Munteanu
authors.affiliation: PECSA, ESPCI ParisTech/CNRS-UMR 7195, 10 rue Vauquelin, 75231 Paris Cedex 05, France.
authors.forename: Frédéric
authors.initials: F
authors.lastname: Kanoufi
authors.affiliation: Institut Langevin, ESPCI ParisTech/CNRS-UMR 7587, 1 rue Jussieu, 75238 Paris Cedex 05, France.
authors.forename: Gilles
authors.initials: G
authors.lastname: Tessier
authors.affiliation: Institut Langevin, ESPCI ParisTech/CNRS-UMR 7587, 1 rue Jussieu, 75238 Paris Cedex 05, France.
authors.forename: Jean Paul
authors.initials: JP
authors.lastname: Roger
authors.affiliation: FEMTO-ST Institute, CNRS-UMR 6174/UBFC/ENSMM/UTBM, 24 chemin de l'Épitaphe, F-25030 Besançon, France.
authors.forename: Chang
authors.initials: C
authors.lastname: Wu
authors.affiliation: FEMTO-ST Institute, CNRS-UMR 6174/UBFC/ENSMM/UTBM, 24 chemin de l'Épitaphe, F-25030 Besançon, France.
authors.forename: Fabien
authors.initials: F
authors.lastname: Amiot