title: High efficiency integration of three-dimensional functional microdevices inside a microfluidic chip by using femtosecond laser multifoci parallel microfabrication.
abstract: High efficiency fabrication and integration of three-dimension (3D) functional devices in Lab-on-a-chip systems are crucial for microfluidic applications. Here, a spatial light modulator (SLM)-based multifoci parallel femtosecond laser scanning technology was proposed to integrate microstructures inside a given 'Y' shape microchannel. The key novelty of our approach lies on rapidly integrating 3D microdevices inside a microchip for the first time, which significantly reduces the fabrication time. The high quality integration of various 2D-3D microstructures was ensured by quantitatively optimizing the experimental conditions including prebaking time, laser power and developing time. To verify the designable and versatile capability of this method for integrating functional 3D microdevices in microchannel, a series of microfilters with adjustable pore sizes from 12.2 μm to 6.7 μm were fabricated to demonstrate selective filtering of the polystyrene (PS) particles and cancer cells with different sizes. The filter can be cleaned by reversing the flow and reused for many times. This technology will advance the fabrication technique of 3D integrated microfluidic and optofluidic chips.
authors.affiliation: CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China.
authors.forename: Bing
authors.initials: B
authors.lastname: Xu
authors.affiliation: CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China.
authors.forename: Wen-Qiang
authors.initials: WQ
authors.lastname: Du
authors.affiliation: CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China.
authors.forename: Jia-Wen
authors.initials: JW
authors.lastname: Li
authors.affiliation: CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China.
authors.forename: Yan-Lei
authors.initials: YL
authors.lastname: Hu
authors.affiliation: CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China.
authors.forename: Liang
authors.initials: L
authors.lastname: Yang
authors.affiliation: CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China.
authors.forename: Chen-Chu
authors.initials: CC
authors.lastname: Zhang
authors.affiliation: CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China.
authors.forename: Guo-Qiang
authors.initials: GQ
authors.lastname: Li
authors.affiliation: CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China.
authors.forename: Zhao-Xin
authors.initials: ZX
authors.lastname: Lao
authors.affiliation: CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China.
authors.forename: Jin-Cheng
authors.initials: JC
authors.lastname: Ni
authors.affiliation: CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China.
authors.forename: Jia-Ru
authors.initials: JR
authors.lastname: Chu
authors.affiliation: CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China.
authors.forename: Dong
authors.initials: D
authors.lastname: Wu
authors.affiliation: School of Life Science, University of Science and Technology of China, Hefei, Anhui, 230027, China.
authors.forename: Su-Ling
authors.initials: SL
authors.lastname: Liu
authors.affiliation: Laser Technology Laboratory, RIKEN, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan.
authors.forename: Koji
authors.initials: K
authors.lastname: Sugioka
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