title: Laser fabrication of crystalline silicon nanoresonators from an amorphous film for low-loss all-dielectric nanophotonics.
abstract: The concept of high refractive index subwavelength dielectric nanoresonators, supporting electric and magnetic optical resonance, is a promising platform for waveguiding, sensing, and nonlinear nanophotonic devices. However, high concentration of defects in the nanoresonators diminishes their resonant properties, which are crucially dependent on their internal losses. Therefore, it seems to be inevitable to use initially crystalline materials for fabrication of the nanoresonators. Here, we show that the fabrication of crystalline (low-loss) resonant silicon nanoparticles by femtosecond laser ablation of amorphous (high-loss) silicon thin films is possible. We apply two conceptually different approaches: recently proposed laser-induced transfer and a novel laser writing technique for large-scale fabrication of the crystalline nanoparticles. The crystallinity of the fabricated nanoparticles is proven by Raman spectroscopy and electron transmission microscopy, whereas optical resonant properties of the nanoparticles are studied using dark-field optical spectroscopy and full-wave electromagnetic simulations.
authors: ITMO University, St. Petersburg 197101, Russia. s.makarov@metalab.ifmo.ru.
authors: P A
authors: PA
authors: Dmitriev
authors: ITMO University, St. Petersburg 197101, Russia. s.makarov@metalab.ifmo.ru.
authors: S V
authors: SV
authors: Makarov
authors: ITMO University, St. Petersburg 197101, Russia. s.makarov@metalab.ifmo.ru.
authors: V A
authors: VA
authors: Milichko
authors: ITMO University, St. Petersburg 197101, Russia. s.makarov@metalab.ifmo.ru and St. Petersburg Academic University, St. Petersburg 194021, Russia.
authors: I S
authors: IS
authors: Mukhin
authors: St. Petersburg Academic University, St. Petersburg 194021, Russia.
authors: A S
authors: AS
authors: Gudovskikh
authors: Ioffe Physical-Technical Institute of the Russian Academy of Sciences, St. Petersburg 194021, Russia.
authors: A A
authors: AA
authors: Sitnikova
authors: ITMO University, St. Petersburg 197101, Russia. s.makarov@metalab.ifmo.ru and Ioffe Physical-Technical Institute of the Russian Academy of Sciences, St. Petersburg 194021, Russia.
authors: A K
authors: AK
authors: Samusev
authors: ITMO University, St. Petersburg 197101, Russia. s.makarov@metalab.ifmo.ru.
authors: A E
authors: AE
authors: Krasnok
authors: ITMO University, St. Petersburg 197101, Russia. s.makarov@metalab.ifmo.ru.
authors: P A
authors: PA
authors: Belov