title: Automatic graphene transfer system for improved material quality and efficiency.
abstract: In most applications based on chemical vapor deposition (CVD) graphene, the transfer from the growth to the target substrate is a critical step for the final device performance. Manual procedures are time consuming and depend on handling skills, whereas existing automatic roll-to-roll methods work well for flexible substrates but tend to induce mechanical damage in rigid ones. A new system that automatically transfers CVD graphene to an arbitrary target substrate has been developed. The process is based on the all-fluidic manipulation of the graphene to avoid mechanical damage, strain and contamination, and on the combination of capillary action and electrostatic repulsion between the graphene and its container to ensure a centered sample on top of the target substrate. The improved carrier mobility and yield of the automatically transferred graphene, as compared to that manually transferred, is demonstrated by the optical and electrical characterization of field-effect transistors fabricated on both materials. In particular, 70% higher mobility values, with a 30% decrease in the unintentional doping and a 10% strain reduction are achieved. The system has been developed for lab-scale transfer and proved to be scalable for industrial applications.
authors: Instituto de Sistemas Optoelectrónicos y Microtecnología, Universidad Politécnica de Madrid, Madrid, 28040, Spain.|Dpto. de Ingeniería Electrónica, E.T.S.I de Telecomunicación, Universidad Politécnica de Madrid, Madrid, 28040, Spain.
authors: Alberto
authors: A
authors: Boscá
authors: Instituto de Sistemas Optoelectrónicos y Microtecnología, Universidad Politécnica de Madrid, Madrid, 28040, Spain.|Dpto. de Ingeniería Electrónica, E.T.S.I de Telecomunicación, Universidad Politécnica de Madrid, Madrid, 28040, Spain.|Campus de Excelencia Internacional, Campus Moncloa UCM-UPM, Madrid, 28040, Spain.
authors: Jorge
authors: J
authors: Pedrós
authors: Instituto de Sistemas Optoelectrónicos y Microtecnología, Universidad Politécnica de Madrid, Madrid, 28040, Spain.|Dpto. de Ciencia de Materiales, E.T.S.I de Caminos, Canales y Puertos, Universidad Politécnica de Madrid, Madrid, 28040, Spain.
authors: Javier
authors: J
authors: Martínez
authors: Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, Massachusetts, 02139, USA.
authors: Tomás
authors: T
authors: Palacios
authors: Instituto de Sistemas Optoelectrónicos y Microtecnología, Universidad Politécnica de Madrid, Madrid, 28040, Spain.|Dpto. de Ingeniería Electrónica, E.T.S.I de Telecomunicación, Universidad Politécnica de Madrid, Madrid, 28040, Spain.|Campus de Excelencia Internacional, Campus Moncloa UCM-UPM, Madrid, 28040, Spain.
authors: Fernando
authors: F
authors: Calle