title: GAGG:ce single crystalline films: New perspective scintillators for electron detection in SEM.
abstract: Single crystal scintillators are frequently used for electron detection in scanning electron microscopy (SEM). We report gadolinium aluminum gallium garnet (GAGG:Ce) single crystalline films as a new perspective scintillators for the SEM. For the first time, the epitaxial garnet films were used in a practical application: the GAGG:Ce scintillator was incorporated into a SEM scintillation electron detector and it showed improved image quality. In order to prove the GAGG:Ce quality accurately, the scintillation properties were examined using electron beam excitation and compared with frequently used scintillators in the SEM. The results demonstrate excellent emission efficiency of the GAGG:Ce single crystalline films together with their very fast scintillation decay useful for demanding SEM applications.
authors: Institute of Scientific Instruments of the CAS, Kralovopolska 147, 61264 Brno, Czech Republic. Electronic address: bok@isibrno.cz.
authors: Jan
authors: J
authors: Bok
authors: Institute of Scientific Instruments of the CAS, Kralovopolska 147, 61264 Brno, Czech Republic.
authors: Ondřej
authors: O
authors: Lalinský
authors: Charles University, Faculty of Mathematics and Physics, Ke Karlovu 5, 12116 Prague, Czech Republic.
authors: Martin
authors: M
authors: Hanuš
authors: Charles University, Faculty of Mathematics and Physics, Ke Karlovu 5, 12116 Prague, Czech Republic.
authors: Zuzana
authors: Z
authors: Onderišinová
authors: Dept. of Physical Electronics, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic.
authors: Jakub
authors: J
authors: Kelar
authors: Charles University, Faculty of Mathematics and Physics, Ke Karlovu 5, 12116 Prague, Czech Republic.
authors: Miroslav
authors: M
authors: Kučera
keywords: Electron detection; Epitaxial film; GAGG:Ce; Multicomponent garnet; SEM; Scintillator