title: Gas-assisted electron-beam-induced nanopatterning of high-quality titanium oxide.
abstract: Electron-beam-induced deposition of titanium oxide nanopatterns is described. The precursor is titanium tetra-isopropoxide, delivered to the deposition point through a needle and mixed with oxygen at the same point via a flow through a separate needle. The depositions are free of residual carbon and have an EDX determined stoichiometry of TiO2.2. High resolution transmission electron microscopy and Raman spectroscopy studies reveal an amorphous structure of the fabricated titanium oxide. Ellipsometric characterization of the deposited material reveals a refractive index of 2.2-2.4 RIU in the spectral range of 500-1700 nm and a very low extinction coefficient (lower than 10(-6) in the range of 400-1700 nm), which is consistent with high quality titanium oxide. The electrical resistivity of the titanium oxide patterned with this new process is in the range of 10-40 GΩ cm and the measured breakdown field is in the range of 10-70 V μm(-1). The fabricated nanopatterns are important for a variety of applications, including field-effect transistors, memory devices, MEMS, waveguide structures, bio- and chemical sensors.
authors.affiliation: Department of Materials Science and Engineering, Royal Institute of Technology-KTH, Brinellvägen 23, SE-100 44, Stockholm, Sweden.
authors.forename: A V
authors.initials: AV
authors.lastname: Riazanova
authors.forename: B N
authors.initials: BN
authors.lastname: Costanzi
authors.forename: A I
authors.initials: AI
authors.lastname: Aristov
authors.forename: Y G M
authors.initials: YG
authors.lastname: Rikers
authors.forename: J J L
authors.initials: JJ
authors.lastname: Mulders
authors.forename: A V
authors.initials: AV
authors.lastname: Kabashin
authors.forename: E Dan
authors.initials: ED
authors.lastname: Dahlberg
authors.forename: L M
authors.initials: LM
authors.lastname: Belova