title: Characterization study on machining PMMA thin-film using AFM tip-based dynamic plowing lithography.
abstract: This paper presents a reliable nanolithography technique, namely dynamic plowing lithography (DPL) based on a commercial atomic force microscope (AFM). The poly(methyl methacrylate) (PMMA) solution spinning on a silicon substrate is utilized to be scratched directly with an oscillating tip at its resonance frequency. The films with different thickness are obtained by adjusting the concentration of solution and post baked time. A new silicon tip is employed to conduct DPL on PMMA film surface. The geometry of nano-line structure scratched on the film with high adhesion force is shown with a transition process, including total protuberance, protuberance with groove and groove with pile-up. The scratching direction has less influence on the scratched depth of groove, while the shape of pile-up is varied with directions. The depth of groove on thin films is increasing with the drive amplitude until the value of the depth reaches to the threshold value. Moreover, owing to smaller elastic modulus, the film with relatively large thickness could be modified by the tip more easily using this DPL method. SCANNING 38:612-618, 2016. © 2016 Wiley Periodicals, Inc.
authors.affiliation: Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin, Heilongjiang, P. R. China.|Center for Precision Engineering, Harbin Institute of Technology, Harbin, Heilongjiang, P. R. China.
authors.forename: Yongda
authors.initials: Y
authors.lastname: Yan
authors.affiliation: Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin, Heilongjiang, P. R. China.|Center for Precision Engineering, Harbin Institute of Technology, Harbin, Heilongjiang, P. R. China.
authors.forename: Yang
authors.initials: Y
authors.lastname: He
authors.affiliation: Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin, Heilongjiang, P. R. China.|Center for Precision Engineering, Harbin Institute of Technology, Harbin, Heilongjiang, P. R. China.
authors.forename: Yanquan
authors.initials: Y
authors.lastname: Geng
authors.affiliation: Center for Precision Engineering, Harbin Institute of Technology, Harbin, Heilongjiang, P. R. China.
authors.forename: Zhenjiang
authors.initials: Z
authors.lastname: Hu
authors.affiliation: Center for Precision Engineering, Harbin Institute of Technology, Harbin, Heilongjiang, P. R. China.
authors.forename: Xuesen
authors.initials: X
authors.lastname: Zhao
keywords: atomic force microscope; dynamic plowing lithography; poly(methyl methacrylate) (PMMA) film