title: Physics-electrical hybrid model for real time impedance matching and remote plasma characterization in RF plasma sources.
abstract: Plasma characterization and impedance matching are an integral part of any radio frequency (RF) based plasma source. In long pulse operation, particularly in high power operation where plasma load may vary due to different reasons (e.g. pressure and power), online tuning of impedance matching circuit and remote plasma density estimation are very useful. In some cases, due to remote interfaces, radio activation and, due to maintenance issues, power probes are not allowed to be incorporated in the ion source design for plasma characterization. Therefore, for characterization and impedance matching, more remote schemes are envisaged. Two such schemes by the same authors are suggested in these regards, which are based on air core transformer model of inductive coupled plasma (ICP) [M. Bandyopadhyay et al., Nucl. Fusion 55, 033017 (2015); D. Sudhir et al., Rev. Sci. Instrum. 85, 013510 (2014)]. However, the influence of the RF field interaction with the plasma to determine its impedance, a physics code HELIC [D. Arnush, Phys. Plasmas 7, 3042 (2000)] is coupled with the transformer model. This model can be useful for both types of RF sources, i.e., ICP and helicon sources.
authors.affiliation: ITER-India, Institute for Plasma Research, A-29 GIDC, Sec-25, Gandhinagar, 382016 Gujarat, India.
authors.forename: Dass
authors.initials: D
authors.lastname: Sudhir
authors.affiliation: ITER-India, Institute for Plasma Research, A-29 GIDC, Sec-25, Gandhinagar, 382016 Gujarat, India.
authors.forename: M
authors.initials: M
authors.lastname: Bandyopadhyay
authors.affiliation: ITER-India, Institute for Plasma Research, A-29 GIDC, Sec-25, Gandhinagar, 382016 Gujarat, India.
authors.forename: A
authors.initials: A
authors.lastname: Chakraborty