title: Development of Wien filter for small ion gun of surface analysis.
abstract: The gas cluster ion beam (GCIB) and liquid metal ion beam have been studied in the context of ion beam usage for analytical equipment in applications such as X-ray photoelectron spectroscopy and secondary ion mass spectroscopy (SIMS). In particular, small ion sources are used for the secondary ion generation and ion etching. To set the context to this study, the SIMS project has been launched to develop ion-gun based analytical equipment for the Korea Basic Science Institute. The objective of the first stage of the project is the generation of argon beams with a GCIB system [A. Kirkpatrick, Nucl. Instrum. Methods Phys. Res., Sect. B 206, 830-837 (2003)] that consists of a nozzle, skimmer, ionizer, acceleration tube, separation system, transport system, and target. The Wien filter directs the selected cluster beam to the target system by exploiting the velocity difference of the generated particles from GCIB. In this paper, we present the theoretical modeling and three-dimensional electromagnetic analysis of the Wien filter, which can separate Ar(+) 2500 clusters from Ar(+) 2400 to Ar(+) 2600 clusters with a 1-mm collimator.
authors.affiliation: Department of Physics, Kyungpook National University, Daegu 702-701, South Korea.
authors.forename: Jungbae
authors.initials: J
authors.lastname: Bahng
authors.affiliation: Busan Center, Korea Basic Science Institute, Busan 609-735, South Korea.
authors.forename: Jonggi
authors.initials: J
authors.lastname: Hong
authors.affiliation: Busan Center, Korea Basic Science Institute, Busan 609-735, South Korea.
authors.forename: Myoung Choul
authors.initials: MC
authors.lastname: Choi
authors.affiliation: Busan Center, Korea Basic Science Institute, Busan 609-735, South Korea.
authors.forename: Mi-Sook
authors.initials: MS
authors.lastname: Won
authors.affiliation: Busan Center, Korea Basic Science Institute, Busan 609-735, South Korea.
authors.forename: Byoung-Seob
authors.initials: BS
authors.lastname: Lee