title: Electrothermal MEMS fiber scanner for optical endomicroscopy.
abstract: We report a novel MEMS fiber scanner with an electrothermal silicon microactuator and a directly mounted optical fiber. The microactuator comprises double hot arm and cold arm structures with a linking bridge and an optical fiber is aligned along a silicon fiber groove. The unique feature induces separation of resonant scanning frequencies of a single optical fiber in lateral and vertical directions, which realizes Lissajous scanning during the resonant motion. The footprint dimension of microactuator is 1.28 x 7 x 0.44 mm3. The resonant scanning frequencies of a 20 mm long optical fiber are 239.4 Hz and 218.4 Hz in lateral and vertical directions, respectively. The full scanned area indicates 451 μm x 558 μm under a 16 Vpp pulse train. This novel laser scanner can provide many opportunities for laser scanning endomicroscopic applications.
authors.forename: Yeong-Hyeon
authors.initials: YH
authors.lastname: Seo
authors.forename: Kyungmin
authors.initials: K
authors.lastname: Hwang
authors.forename: Hyeon-Cheol
authors.initials: HC
authors.lastname: Park
authors.forename: Ki-Hun
authors.initials: KH
authors.lastname: Jeong