title: Compact permanent magnet H⁺ ECR ion source with pulse gas valve.
abstract: Compact H(+) ECR ion source using permanent magnets is under development. Switching the hydrogen gas flow in pulse operations can reduce the gas loads to vacuum evacuation systems. A specially designed piezo gas valve chops the gas flow quickly. A 6 GHz ECR ion source equipped with the piezo gas valve is tested. The gas flow was measured by a fast ion gauge and a few ms response time is obtained.
authors.affiliation: Institute for Chemical Research, Kyoto University, Uji, Kyoto 611-0011, Japan.
authors.forename: Y
authors.initials: Y
authors.lastname: Iwashita
authors.affiliation: Institute for Chemical Research, Kyoto University, Uji, Kyoto 611-0011, Japan.
authors.forename: H
authors.initials: H
authors.lastname: Tongu
authors.affiliation: Institute for Chemical Research, Kyoto University, Uji, Kyoto 611-0011, Japan.
authors.forename: Y
authors.initials: Y
authors.lastname: Fuwa
authors.affiliation: Japan Atomic Research Agency, Naka, Ibaraki 311-0193, Japan.
authors.forename: M
authors.initials: M
authors.lastname: Ichikawa