title: An integrated temperature-compensated flexible shear-stress sensor microarray with concentrated leading-wire.
abstract: Flexible shear stress sensor is quite important for characterizing curved surface flows. In this work, a novel integrated shear stress sensor microarray is designed with twenty parallel channels, which share the concentrated leading-wire to transmit the ground signal. Electrical pads in rows are easily connected to the circuits with two separate Wheatstone bridges and constant-temperature-difference mode operation is provided for the hot-wires. Temperature crosstalk between adjacent hot-wires is prevented well and the effectiveness of the temperature compensated circuits is verified. Relatively large output response is obtained as the shear stress varies and the sensitivity of the sensors is measured about 0.086 V(2)/Pa(1/3) with nonlinearity lower than 1%, revealing high performance characteristic of the sensors.
authors.affiliation: National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Key Laboratory for Thin Film and Micro Fabrication of the Ministry of Education and Shanghai Key Lab of Navigation and Location-based Services, Department of Micro-Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China.
authors.forename: Jian
authors.initials: J
authors.lastname: Tang
authors.affiliation: National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Key Laboratory for Thin Film and Micro Fabrication of the Ministry of Education and Shanghai Key Lab of Navigation and Location-based Services, Department of Micro-Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China.
authors.forename: Wu
authors.initials: W
authors.lastname: Liu
authors.affiliation: National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Key Laboratory for Thin Film and Micro Fabrication of the Ministry of Education and Shanghai Key Lab of Navigation and Location-based Services, Department of Micro-Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China.
authors.forename: Weiping
authors.initials: W
authors.lastname: Zhang
authors.affiliation: National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Key Laboratory for Thin Film and Micro Fabrication of the Ministry of Education and Shanghai Key Lab of Navigation and Location-based Services, Department of Micro-Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China.
authors.forename: Yongming
authors.initials: Y
authors.lastname: Sun
authors.affiliation: National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Key Laboratory for Thin Film and Micro Fabrication of the Ministry of Education and Shanghai Key Lab of Navigation and Location-based Services, Department of Micro-Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China.
authors.forename: Honghai
authors.initials: H
authors.lastname: Chen