title: Development of particle characteristics diagnosis system for nanoparticle analysis in vacuum.
abstract: A particle characteristics diagnosis system (PCDS) was developed to measure nano-sized particle properties by a combination of particle beam mass spectrometry, scanning electron microscopy (SEM), and energy dispersive x-ray spectroscopy (EDS). It allows us to measure the size distributions of nano-sized particles in real time, and the shape and composition can be determined by in situ SEM imaging and EDS scanning. PCDS was calibrated by measuring the size-classified nano-sized NaCl particles generated using an aqueous solution of NaCl by an atomizer. After the calibration, the characteristics of nano-sized particles sampled from the exhaust line of the plasma-enhanced chemical vapor deposition process were determined using PCDS.
authors.affiliation: Vacuum Center, Korea Research Institute of Standards and Science, 267 Gajeong-ro, Daejeon, South Korea.
authors.forename: Dongbin
authors.initials: D
authors.lastname: Kim
authors.affiliation: Vacuum Center, Korea Research Institute of Standards and Science, 267 Gajeong-ro, Daejeon, South Korea.
authors.forename: Jihun
authors.initials: J
authors.lastname: Mun
authors.affiliation: Sungkyunkwan Advanced Institute of Nanotechnology, Sungkyunkwan University, 2066 Seobu-ro, Suwon, South Korea.
authors.forename: HyeongU
authors.initials: H
authors.lastname: Kim
authors.affiliation: Vacuum Center, Korea Research Institute of Standards and Science, 267 Gajeong-ro, Daejeon, South Korea.
authors.forename: Ju-Young
authors.initials: JY
authors.lastname: Yun
authors.affiliation: COXEM Co., Ltd., 533, Yongsan-dong, Daejeon, South Korea.
authors.forename: Yong-Ju
authors.initials: YJ
authors.lastname: Kim
authors.affiliation: Vacuum Center, Korea Research Institute of Standards and Science, 267 Gajeong-ro, Daejeon, South Korea.
authors.forename: TaeWan
authors.initials: T
authors.lastname: Kim
authors.affiliation: Sungkyunkwan University of Mechanical Engineering, 2066 Seobu-ro, Suwon, South Korea.
authors.forename: Taesung
authors.initials: T
authors.lastname: Kim
authors.affiliation: Vacuum Center, Korea Research Institute of Standards and Science, 267 Gajeong-ro, Daejeon, South Korea.
authors.forename: Sang-Woo
authors.initials: SW
authors.lastname: Kang