title: Integrated monolithic 3D MEMS scanner for switchable real time vertical/horizontal cross-sectional imaging.
abstract: We present an integrated monolithic, electrostatic 3D MEMS scanner with a compact chip size of 3.2 × 2.9 mm(2). Use of parametric excitation near resonance frequencies produced large optical deflection angles up to ± 27° and ± 28.5° in the X- and Y-axes and displacements up to 510 μm in the Z-axis with low drive voltages at atmospheric pressure. When packaged in a dual axes confocal endomicroscope, horizontal and vertical cross-sectional images can be collected seamlessly in tissue with a large field-of-view of >1 × 1 mm(2) and 1 × 0.41 mm(2), respectively, at 5 frames/sec.
authors.forename: Haijun
authors.initials: H
authors.lastname: Li
authors.forename: Xiyu
authors.initials: X
authors.lastname: Duan
authors.forename: Zhen
authors.initials: Z
authors.lastname: Qiu
authors.forename: Quan
authors.initials: Q
authors.lastname: Zhou
authors.forename: Katsuo
authors.initials: K
authors.lastname: Kurabayashi
authors.forename: Kenn R
authors.initials: KR
authors.lastname: Oldham
authors.forename: Thomas D
authors.initials: TD
authors.lastname: Wang
mesh_terms: D003106:Colon / Q000033:anatomy & histology; D003199:Computer Systems; D004867:Equipment Design; D020342:Finite Element Analysis; D005453:Fluorescence; D006801:Humans; D021621:Imaging, Three-Dimensional / Q000295:instrumentation*; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D008855:Microscopy, Electron, Scanning; D055672:Static Electricity