title: High Stability Induced by the TiN/Ti Interlayer in Three-Dimensional Si/Ge Nanorod Arrays as Anode in Micro Lithium Ion Battery.
abstract: Three-dimensional (3D) Si/Ge-based micro/nano batteries are promising lab-on-chip power supply sources because of the good process compatibility with integrated circuits and Micro/Nano-Electro-Mechanical System technologies. In this work, the effective interlayer of TiN/Ti thin films were introduced to coat around the 3D Si nanorod (NR) arrays before the amorphous Ge layer deposition as anode in micro/nano lithium ion batteries, thus the superior cycling stability was realized by reason for the restriction of Si activation in this unique 3D matchlike Si/TiN/Ti/Ge NR array electrode. Moreover, the volume expansion properties after the repeated lithium-ion insertion/extraction were experimentally investigated to evidence the superior stability of this unique multilayered Si composite electrode. The demonstration of this wafer-scale, cost-effective, and Si-compatible fabrication for anodes in Li-ion micro/nano batteries provides new routes to configurate more efficient 3D energy storage systems for micro/nano smart semiconductor devices.
authors.affiliation: Collaborative Innovation Center for Optoelectronic Semiconductors and Efficient Devices, Department of Physics/Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University , Xiamen, Fujian, 361005 China.|Department of Mechanical Engineering, University of California , Berkeley, California 94720, United States.
authors.forename: Chuang
authors.initials: C
authors.lastname: Yue
authors.affiliation: Collaborative Innovation Center for Optoelectronic Semiconductors and Efficient Devices, Department of Physics/Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University , Xiamen, Fujian, 361005 China.
authors.forename: Yingjian
authors.initials: Y
authors.lastname: Yu
authors.affiliation: State Key Lab of Physical Chemistry of Solid Surfaces, and Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University , Xiamen, 361005 China.
authors.forename: Zhenguo
authors.initials: Z
authors.lastname: Wu
authors.affiliation: Collaborative Innovation Center for Optoelectronic Semiconductors and Efficient Devices, Department of Physics/Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University , Xiamen, Fujian, 361005 China.
authors.forename: Shibo
authors.initials: S
authors.lastname: Sun
authors.affiliation: Collaborative Innovation Center for Optoelectronic Semiconductors and Efficient Devices, Department of Physics/Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University , Xiamen, Fujian, 361005 China.
authors.forename: Xu
authors.initials: X
authors.lastname: He
authors.affiliation: State Key Lab of Physical Chemistry of Solid Surfaces, and Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University , Xiamen, 361005 China.
authors.forename: Juntao
authors.initials: J
authors.lastname: Li
authors.affiliation: State Key Laboratory for Manufacturing Systems Engineering Xi'an Jiaotong University , Xi'an, Shaanxi, 710049 P.R. China.
authors.forename: Libo
authors.initials: L
authors.lastname: Zhao
authors.affiliation: Collaborative Innovation Center for Optoelectronic Semiconductors and Efficient Devices, Department of Physics/Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University , Xiamen, Fujian, 361005 China.
authors.forename: Suntao
authors.initials: S
authors.lastname: Wu
authors.affiliation: Collaborative Innovation Center for Optoelectronic Semiconductors and Efficient Devices, Department of Physics/Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University , Xiamen, Fujian, 361005 China.|State Key Laboratory for Manufacturing Systems Engineering Xi'an Jiaotong University , Xi'an, Shaanxi, 710049 P.R. China.|Department of Mechanical Engineering, University of California , Berkeley, California 94720, United States.
authors.forename: Jing
authors.initials: J
authors.lastname: Li
authors.affiliation: Collaborative Innovation Center for Optoelectronic Semiconductors and Efficient Devices, Department of Physics/Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University , Xiamen, Fujian, 361005 China.
authors.forename: Junyong
authors.initials: J
authors.lastname: Kang
authors.affiliation: Department of Mechanical Engineering, University of California , Berkeley, California 94720, United States.
authors.forename: Liwei
authors.initials: L
authors.lastname: Lin
keywords: 3D STTG anodes; Li-ion micro battery; TiN/Ti interlayer; activation; stable cycling