title: Underwater Imaging Using a 1 × 16 CMUT Linear Array.
abstract: A 1 × 16 capacitive micro-machined ultrasonic transducer linear array was designed, fabricated, and tested for underwater imaging in the low frequency range. The linear array was fabricated using Si-SOI bonding techniques. Underwater transmission performance was tested in a water tank, and the array has a resonant frequency of 700 kHz, with pressure amplitude 182 dB (μPa·m/V) at 1 m. The -3 dB main beam width of the designed dense linear array is approximately 5 degrees. Synthetic aperture focusing technique was applied to improve the resolution of reconstructed images, with promising results. Thus, the proposed array was shown to be suitable for underwater imaging applications.
authors.affiliation: Key Laboratory of Instrumentation Science &amp; Dynamic Measurement, North University of China, Ministry of Education, Taiyuan 030051, China. fly_zr@126.com.|Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China. fly_zr@126.com.
authors.forename: Rui
authors.initials: R
authors.lastname: Zhang
authors.affiliation: Key Laboratory of Instrumentation Science &amp; Dynamic Measurement, North University of China, Ministry of Education, Taiyuan 030051, China. wdzhang@nuc.edu.cn.|Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China. wdzhang@nuc.edu.cn.
authors.forename: Wendong
authors.initials: W
authors.lastname: Zhang
authors.affiliation: Key Laboratory of Instrumentation Science &amp; Dynamic Measurement, North University of China, Ministry of Education, Taiyuan 030051, China. changde_henuc@163.com.|Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China. changde_henuc@163.com.
authors.forename: Changde
authors.initials: C
authors.lastname: He
authors.affiliation: School of Computer Science, North China University of Technology, Beijing 100144, China. zhangym@ncut.edu.cn.
authors.forename: Yongmei
authors.initials: Y
authors.lastname: Zhang
authors.affiliation: Key Laboratory of Instrumentation Science &amp; Dynamic Measurement, North University of China, Ministry of Education, Taiyuan 030051, China. nucsong@163.com.|Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China. nucsong@163.com.
authors.forename: Jinlong
authors.initials: J
authors.lastname: Song
authors.affiliation: Key Laboratory of Instrumentation Science &amp; Dynamic Measurement, North University of China, Ministry of Education, Taiyuan 030051, China. xuechenyang@nuc.edu.cn.|Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China. xuechenyang@nuc.edu.cn.
authors.forename: Chenyang
authors.initials: C
authors.lastname: Xue
keywords: capacitive micro-machined ultrasonic transducer linear array; synthetic aperture focusing technique; transmission performance; underwater imaging