title: Application of white light Fresnel diffractometry to film thickness measurement.
abstract: In this work we present the theoretical background and experimental procedure to measure the thickness of thin films by analyzing Fresnel diffraction patterns obtained from polychromatic illumination of phase-step samples. As examples of this technique, we measured the thicknesses of thin aluminum layers on glass substrates using three different broad-spectrum light sources. The results are in excellent agreement with independent interferometric measurements within less than 5% relative uncertainties.
authors.forename: Khosrow
authors.initials: K
authors.lastname: Hassani
authors.forename: Mehdi
authors.initials: M
authors.lastname: Ashrafganjoie
authors.forename: Mohammad Taghi
authors.initials: MT
authors.lastname: Tavassoly