title: Flexible Hall sensors based on graphene.
abstract: The excellent electronic and mechanical properties of graphene provide a perfect basis for high performance flexible electronic and sensor devices. Here, we present the fabrication and characterization of flexible graphene based Hall sensors. The Hall sensors are fabricated on 50 μm thick flexible Kapton foil using large scale graphene grown by chemical vapor deposition technique on copper foil. Voltage and current normalized sensitivities of up to 0.096 V VT(-1) and 79 V AT(-1) were measured, respectively. These values are comparable to the sensitivity of rigid silicon based Hall sensors and are the highest values reported so far for any flexible Hall sensor devices. The sensitivity of the Hall sensor shows no degradation after being bent to a minimum radius of 4 mm, which corresponds to a tensile strain of 0.6%, and after 1000 bending cycles to a radius of 5 mm.
authors.affiliation: Advanced Microelectronic Center Aachen (AMICA), AMO GmbH, Otto-Blumenthal-Straße 25, 52074 Aachen, Germany. wang@amo.de.
authors.forename: Zhenxing
authors.initials: Z
authors.lastname: Wang
authors.affiliation: Advanced Microelectronic Center Aachen (AMICA), AMO GmbH, Otto-Blumenthal-Straße 25, 52074 Aachen, Germany. wang@amo.de.
authors.forename: Mehrdad
authors.initials: M
authors.lastname: Shaygan
authors.affiliation: Advanced Microelectronic Center Aachen (AMICA), AMO GmbH, Otto-Blumenthal-Straße 25, 52074 Aachen, Germany. wang@amo.de.
authors.forename: Martin
authors.initials: M
authors.lastname: Otto
authors.affiliation: Advanced Microelectronic Center Aachen (AMICA), AMO GmbH, Otto-Blumenthal-Straße 25, 52074 Aachen, Germany. wang@amo.de.
authors.forename: Daniel
authors.initials: D
authors.lastname: Schall
authors.affiliation: Advanced Microelectronic Center Aachen (AMICA), AMO GmbH, Otto-Blumenthal-Straße 25, 52074 Aachen, Germany. wang@amo.de.
authors.forename: Daniel
authors.initials: D
authors.lastname: Neumaier