title: Information transfer of 25.5 nm-1 in a 1-MV field-emission transmission electron microscope.
abstract: Information transfer of a 1-MV field-emission transmission electron microscope (TEM) was improved by reducing mechanical vibrations and improving the stability of an acceleration voltage. The resulting mechanical stability was estimated from lattice fringes with an obtained spacing of 19.6 pm under achromatic conditions. This value corresponds to a vibration amplitude of <19.6 pm. The stability of the acceleration voltage was improved by reducing thermal noises in the power supply. As a result, 39.2-pm-spacing linear lattice fringes were obtained under chromatic conditions. This indicates that 25.5 nm(-1) information transfer was accomplished in the 1 MV field-emission TEM.
authors.affiliation: Research and Development Group, Hitachi, Ltd., Hatoyama, Saitama 350-0395, Japan tetsuya.akashi.sq@hitachi.com.
authors.forename: Tetsuya
authors.initials: T
authors.lastname: Akashi
authors.affiliation: Research and Development Group, Hitachi, Ltd., Hatoyama, Saitama 350-0395, Japan.
authors.forename: Yoshio
authors.initials: Y
authors.lastname: Takahashi
authors.affiliation: Research and Development Group, Hitachi, Ltd., Hatoyama, Saitama 350-0395, Japan.
authors.forename: Toshio
authors.initials: T
authors.lastname: Onai
authors.affiliation: Research and Development Group, Hitachi, Ltd., Hatoyama, Saitama 350-0395, Japan.
authors.forename: Hiroto
authors.initials: H
authors.lastname: Kasai
authors.affiliation: Research and Development Group, Hitachi, Ltd., Hatoyama, Saitama 350-0395, Japan.
authors.forename: Hiroyuki
authors.initials: H
authors.lastname: Shinada
authors.affiliation: Research and Development Group, Hitachi, Ltd., Hatoyama, Saitama 350-0395, Japan.
authors.forename: Nobuyuki
authors.initials: N
authors.lastname: Osakabe
authors.affiliation: Research and Development Group, Hitachi, Ltd., Hatoyama, Saitama 350-0395, Japan.
authors.forename: Akira
authors.initials: A
authors.lastname: Tonomura
keywords: chromatic aberration; field-emission TEM; information limit; information transfer; lattice fringe; mechanical stability