title: Influence of the Cation Ratio on Optical and Electrical Properties of Amorphous Zinc-Tin-Oxide Thin Films Grown by Pulsed Laser Deposition.
abstract: Continuous composition spread (CCS) methods allow fast and economic exploration of composition dependent properties of multielement compounds. Here, a CCS method was applied for room temperature pulsed laser deposition (PLD) of amorphous zinc-tin-oxide to gain detailed insight into the influence of the zinc-to-tin cation ratio on optical and electrical properties of this ternary compound. Our CCS approach for a large-area offset PLD process utilizes a segmented target and thus makes target exchange or movable masks in the PLD chamber obsolete. Cation concentrations of 0.08-0.82 Zn/(Zn + Sn) were achieved across single 50 × 50 mm(2) glass substrates. The electrical conductivity increases for increasing tin content, and the absorption edge shifts to lower energies. The free carrier concentration can be tuned from 10(20) to 10(16) cm(-3) by variation of the cation ratio from 0.1 to 0.5 Zn/(Zn + Sn).
authors.affiliation: Universität Leipzig Institut für Experimentelle Physik II , Linnéstraße 5, 04103 Leipzig, Germany.
authors.forename: Sofie
authors.initials: S
authors.lastname: Bitter
authors.affiliation: Universität Leipzig Institut für Experimentelle Physik II , Linnéstraße 5, 04103 Leipzig, Germany.
authors.forename: Peter
authors.initials: P
authors.lastname: Schlupp
authors.affiliation: Universität Leipzig Institut für Experimentelle Physik II , Linnéstraße 5, 04103 Leipzig, Germany.
authors.forename: Michael
authors.initials: M
authors.lastname: Bonholzer
authors.affiliation: Universität Leipzig Institut für Experimentelle Physik II , Linnéstraße 5, 04103 Leipzig, Germany.
authors.forename: Holger
authors.initials: H
authors.lastname: von Wenckstern
authors.affiliation: Universität Leipzig Institut für Experimentelle Physik II , Linnéstraße 5, 04103 Leipzig, Germany.
authors.forename: Marius
authors.initials: M
authors.lastname: Grundmann
mesh_terms: D002412:Cations / Q000737:chemistry; D020650:Combinatorial Chemistry Techniques; D004553:Electric Conductivity; D007834:Lasers; D055620:Optical Phenomena; D010087:Oxides / Q000737:chemistry*; D013696:Temperature; D014001:Tin / Q000737:chemistry*; D015032:Zinc / Q000737:chemistry*
chemical_list: D002412:Cations; D010087:Oxides; D014001:Tin; D015032:Zinc
keywords: amorphous oxide semiconductors; continuous composition spread; electrical properties; pulsed laser deposition; zinc-tin-oxide