title: X-Ray Absorption Correction for Quantitative Scanning Transmission Electron Microscopic Energy-Dispersive X-Ray Spectroscopy of Spherical Nanoparticles.
abstract: A new method to perform X-ray absorption correction for spherical particles in quantitative energy-dispersive X-ray spectroscopy in the scanning transmission electron microscope is presented. An absorption correction factor is derived and simulated data is presented encompassing a range of X-ray absorption conditions. Theoretical calculations are compared with experimental data of X-ray counts from Au nanoparticles to verify the derived methodology. The effect of detector elevation angle is considered and a comparison with thin-film absorption correction is included.
authors.affiliation: 1School of Materials,University of Manchester,Manchester M13 9PL,UK.
authors.forename: Thomas
authors.initials: T
authors.lastname: Slater
authors.affiliation: 1School of Materials,University of Manchester,Manchester M13 9PL,UK.
authors.forename: Yiqiang
authors.initials: Y
authors.lastname: Chen
authors.affiliation: 2School of Computer Science,University of Manchester,Manchester M13 9PL,UK.
authors.forename: Gregory
authors.initials: G
authors.lastname: Auton
authors.affiliation: 1School of Materials,University of Manchester,Manchester M13 9PL,UK.
authors.forename: Nestor
authors.initials: N
authors.lastname: Zaluzec
authors.affiliation: 1School of Materials,University of Manchester,Manchester M13 9PL,UK.
authors.forename: Sarah
authors.initials: S
authors.lastname: Haigh
keywords: STEM; XEDS; absorption correction; nanoparticles; quantification