title: Large-scale Growth and Simultaneous Doping of Molybdenum Disulfide Nanosheets.
abstract: A facile method that uses chemical vapor deposition (CVD) for the simultaneous growth and doping of large-scale molybdenum disulfide (MoS2) nanosheets was developed. We employed metalloporphyrin as a seeding promoter layer for the uniform growth of MoS2 nanosheets. Here, a hybrid deposition system that combines thermal evaporation and atomic layer deposition (ALD) was utilized to prepare the promoter. The doping effect of the promoter was verified by X-ray photoelectron spectroscopy and Raman spectroscopy. In addition, the carrier density of the MoS2 nanosheets was manipulated by adjusting the thickness of the metalloporphyrin promoter layers, which allowed the electrical conductivity in MoS2 to be manipulated.
authors.affiliation: Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), Daejeon 305-600, Republic of Korea.|Nanomaterials Science and Engineering, University of Science and Technology, Daejeon 305-350, Republic of Korea.
authors.forename: Seong Jun
authors.initials: SJ
authors.lastname: Kim
authors.affiliation: Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), Daejeon 305-600, Republic of Korea.
authors.forename: Min-A
authors.initials: MA
authors.lastname: Kang
authors.affiliation: Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), Daejeon 305-600, Republic of Korea.
authors.forename: Sung Ho
authors.initials: SH
authors.lastname: Kim
authors.affiliation: Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), Daejeon 305-600, Republic of Korea.
authors.forename: Youngbum
authors.initials: Y
authors.lastname: Lee
authors.affiliation: Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), Daejeon 305-600, Republic of Korea.
authors.forename: Wooseok
authors.initials: W
authors.lastname: Song
authors.affiliation: Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), Daejeon 305-600, Republic of Korea.
authors.forename: Sung
authors.initials: S
authors.lastname: Myung
authors.affiliation: Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), Daejeon 305-600, Republic of Korea.
authors.forename: Sun Sook
authors.initials: SS
authors.lastname: Lee
authors.affiliation: Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), Daejeon 305-600, Republic of Korea.
authors.forename: Jongsun
authors.initials: J
authors.lastname: Lim
authors.affiliation: Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), Daejeon 305-600, Republic of Korea.|Chemical Convergence Materials, University of Science and Technology, Daejeon 305-350, Republic of Korea.
authors.forename: Ki-Seok
authors.initials: KS
authors.lastname: An