title: A flexible setup for angle-resolved X-ray fluorescence spectrometry with laboratory sources.
abstract: X-ray fluorescence (XRF) analysis is one of the standard tools for the analysis of stratified materials and is widely applied for the investigation of electronics and coatings. The composition and thickness of the layers can be determined quantitatively and non-destructively. Recent work showed that these capabilities can be extended towards retrieving stratigraphic information like concentration depth profiles using angle-resolved XRF (ARXRF). This paper introduces an experimental sample chamber which was developed as a multi-purpose tool enabling different measurement geometries suited for transmission measurements, conventional XRF, ARXRF, etc. The chamber was specifically designed for attaching all kinds of laboratory X-ray sources for the soft and hard X-ray ranges as well as various detection systems. In detail, a setup for ARXRF using an X-ray tube with a polycapillary X-ray lens as source is presented. For such a type of setup, both the spectral and lateral characterizations of the radiation field are crucial for quantitative ARXRF measurements. The characterization is validated with the help of a stratified validation sample.
authors.affiliation: Institute for Optics and Atomic Physics, Technische Universität Berlin, Hardenbergstraße 36, 10623 Berlin, Germany.
authors.forename: M
authors.initials: M
authors.lastname: Spanier
authors.affiliation: Institute for Optics and Atomic Physics, Technische Universität Berlin, Hardenbergstraße 36, 10623 Berlin, Germany.
authors.forename: C
authors.initials: C
authors.lastname: Herzog
authors.affiliation: Institute for Optics and Atomic Physics, Technische Universität Berlin, Hardenbergstraße 36, 10623 Berlin, Germany.
authors.forename: D
authors.initials: D
authors.lastname: Grötzsch
authors.affiliation: Institute for Optics and Atomic Physics, Technische Universität Berlin, Hardenbergstraße 36, 10623 Berlin, Germany.
authors.forename: F
authors.initials: F
authors.lastname: Kramer
authors.affiliation: Institute for Optics and Atomic Physics, Technische Universität Berlin, Hardenbergstraße 36, 10623 Berlin, Germany.
authors.forename: I
authors.initials: I
authors.lastname: Mantouvalou
authors.affiliation: Physikalisch-Technische Bundesanstalt, Abbestraße 2-12, 10587 Berlin, Germany.
authors.forename: J
authors.initials: J
authors.lastname: Lubeck
authors.affiliation: Physikalisch-Technische Bundesanstalt, Abbestraße 2-12, 10587 Berlin, Germany.
authors.forename: J
authors.initials: J
authors.lastname: Weser
authors.affiliation: Physikalisch-Technische Bundesanstalt, Abbestraße 2-12, 10587 Berlin, Germany.
authors.forename: C
authors.initials: C
authors.lastname: Streeck
authors.affiliation: Institute for Optics and Atomic Physics, Technische Universität Berlin, Hardenbergstraße 36, 10623 Berlin, Germany.
authors.forename: W
authors.initials: W
authors.lastname: Malzer
authors.affiliation: Physikalisch-Technische Bundesanstalt, Abbestraße 2-12, 10587 Berlin, Germany.
authors.forename: B
authors.initials: B
authors.lastname: Beckhoff
authors.affiliation: Institute for Optics and Atomic Physics, Technische Universität Berlin, Hardenbergstraße 36, 10623 Berlin, Germany.
authors.forename: B
authors.initials: B
authors.lastname: Kanngießer