title: Anodic Oxidation in Aluminum Electrode by Using Hydrated Amorphous Aluminum Oxide Film as Solid Electrolyte under High Electric Field.
abstract: Dense and nonporous amorphous aluminum oxide (AmAO) film was deposited onto platinized silicon substrate by sol-gel and spin coating technology. The evaporated aluminum film was deposited onto the AmAO film as top electrode. The hydrated AmAO film was utilized as a solid electrolyte for anodic oxidation of the aluminum electrode (Al) film under high electric field. The hydrated AmAO film was a high efficiency electrolyte, where a 45 nm thick Al film was anodized completely on a 210 nm thick hydrated AmAO film. The current-voltage (I-V) characteristics and breakdown phenomena of a dry and hydrated 210 nm thick AmAO film with a 150 nm thick Al electrode pad were studied in this work. Breakdown voltage of the dry and hydrated 210 nm thick AmAO film were 85 ± 3 V (405 ± 14 MV m(-1)) and 160 ± 5 V (762 ± 24 MV m(-1)), respectively. The breakdown voltage of the hydrated AmAO film increased about twice, owing to the self-healing behavior (anodic oxidation reaction). As an intuitive phenomenon of the self-healing behavior, priority anodic oxidation phenomena was observed in a 210 nm thick hydrated AmAO film with a 65 nm thick Al electrode pad. The results suggested that self-healing behavior (anodic oxidation reaction) was occurring nearby the defect regions of the films during I-V test. It was an effective electrical self-healing method, which would be able to extend to many other simple and complex oxide dielectrics and various composite structures.
authors.affiliation: Functional Materials Research Laboratory, School of Materials Science and Engineering, Tongji University , 4800 Cao-an Hwy., Shanghai 201804, China.
authors.forename: Manwen
authors.initials: M
authors.lastname: Yao
authors.affiliation: Functional Materials Research Laboratory, School of Materials Science and Engineering, Tongji University , 4800 Cao-an Hwy., Shanghai 201804, China.
authors.forename: Jianwen
authors.initials: J
authors.lastname: Chen
authors.affiliation: Functional Materials Research Laboratory, School of Materials Science and Engineering, Tongji University , 4800 Cao-an Hwy., Shanghai 201804, China.
authors.forename: Zhen
authors.initials: Z
authors.lastname: Su
authors.affiliation: Functional Materials Research Laboratory, School of Materials Science and Engineering, Tongji University , 4800 Cao-an Hwy., Shanghai 201804, China.
authors.forename: Yong
authors.initials: Y
authors.lastname: Peng
authors.affiliation: Functional Materials Research Laboratory, School of Materials Science and Engineering, Tongji University , 4800 Cao-an Hwy., Shanghai 201804, China.
authors.forename: Pei
authors.initials: P
authors.lastname: Zou
authors.affiliation: Functional Materials Research Laboratory, School of Materials Science and Engineering, Tongji University , 4800 Cao-an Hwy., Shanghai 201804, China.
authors.forename: Xi
authors.initials: X
authors.lastname: Yao
keywords: amorphous aluminum oxide film; anodic oxidation; hydrated alumina; self-healing; solid electrolyte