title: Liquid Glass: A Facile Soft Replication Method for Structuring Glass.
abstract: Liquid glass is a photocurable amorphous silica nanocomposite that can be structured using soft replication molds and turned into glass via thermal debinding and sintering. Simple polymer bonding techniques allow the fabrication of complex microsystems in glass like microfluidic chips. Liquid glass is a step toward prototyping of glass microstructures at low cost without requiring cleanroom facilities or hazardous chemicals.
authors.affiliation: Karlsruhe Institute of Technology (KIT), Institute of Microstructure Technology (IMT), Hermann-von-Helmholtz-Platz 1, Eggenstein-Leopoldshafen, 76344, Germany.
authors.forename: Frederik
authors.initials: F
authors.lastname: Kotz
authors.affiliation: Karlsruhe Institute of Technology (KIT), Institute for Applied Materials (IAM), Hermann-von-Helmholtz-Platz 1, Eggenstein-Leopoldshafen, 76344, Germany.
authors.forename: Klaus
authors.initials: K
authors.lastname: Plewa
authors.affiliation: Karlsruhe Institute of Technology (KIT), Institute for Applied Materials (IAM), Hermann-von-Helmholtz-Platz 1, Eggenstein-Leopoldshafen, 76344, Germany.
authors.forename: Werner
authors.initials: W
authors.lastname: Bauer
authors.affiliation: Karlsruhe Institute of Technology (KIT), Institute of Microstructure Technology (IMT), Hermann-von-Helmholtz-Platz 1, Eggenstein-Leopoldshafen, 76344, Germany.|Karlsruhe Institute of Technology (KIT), Institute for Applied Materials (IAM), Hermann-von-Helmholtz-Platz 1, Eggenstein-Leopoldshafen, 76344, Germany.
authors.forename: Norbert
authors.initials: N
authors.lastname: Schneider
authors.affiliation: Karlsruhe Institute of Technology (KIT), Institute of Microstructure Technology (IMT), Hermann-von-Helmholtz-Platz 1, Eggenstein-Leopoldshafen, 76344, Germany.
authors.forename: Nico
authors.initials: N
authors.lastname: Keller
authors.affiliation: Karlsruhe Institute of Technology (KIT), Institute of Microstructure Technology (IMT), Hermann-von-Helmholtz-Platz 1, Eggenstein-Leopoldshafen, 76344, Germany.
authors.forename: Tobias
authors.initials: T
authors.lastname: Nargang
authors.affiliation: Karlsruhe Institute of Technology (KIT), Institute of Microstructure Technology (IMT), Hermann-von-Helmholtz-Platz 1, Eggenstein-Leopoldshafen, 76344, Germany.
authors.forename: Dorothea
authors.initials: D
authors.lastname: Helmer
authors.affiliation: Karlsruhe Institute of Technology (KIT), Institute of Microstructure Technology (IMT), Hermann-von-Helmholtz-Platz 1, Eggenstein-Leopoldshafen, 76344, Germany.
authors.forename: Kai
authors.initials: K
authors.lastname: Sachsenheimer
authors.affiliation: Karlsruhe Institute of Technology (KIT), Institute of Microstructure Technology (IMT), Hermann-von-Helmholtz-Platz 1, Eggenstein-Leopoldshafen, 76344, Germany.
authors.forename: Michael
authors.initials: M
authors.lastname: Schäfer
authors.affiliation: Karlsruhe Institute of Technology (KIT), Institute of Microstructure Technology (IMT), Hermann-von-Helmholtz-Platz 1, Eggenstein-Leopoldshafen, 76344, Germany.
authors.forename: Matthias
authors.initials: M
authors.lastname: Worgull
authors.affiliation: Karlsruhe Institute of Technology (KIT), Institute for Applied Materials (IAM), Hermann-von-Helmholtz-Platz 1, Eggenstein-Leopoldshafen, 76344, Germany.
authors.forename: Christian
authors.initials: C
authors.lastname: Greiner
authors.affiliation: Karlsruhe Institute of Technology (KIT), Institute of Microstructure Technology (IMT), Hermann-von-Helmholtz-Platz 1, Eggenstein-Leopoldshafen, 76344, Germany.
authors.forename: Christiane
authors.initials: C
authors.lastname: Richter
authors.affiliation: Karlsruhe Institute of Technology (KIT), Institute of Microstructure Technology (IMT), Hermann-von-Helmholtz-Platz 1, Eggenstein-Leopoldshafen, 76344, Germany.
authors.forename: Bastian E
authors.initials: BE
authors.lastname: Rapp
keywords: glass microfluidics; microfabrication; rapid prototyping; silica nanocomposites; soft replication