title: Mechanical Coupling Error Suppression Technology for an Improved Decoupled Dual-Mass Micro-Gyroscope.
abstract: This paper presents technology for the suppression of the mechanical coupling errors for an improved decoupled dual-mass micro-gyroscope (DDMG). The improved micro-gyroscope structure decreases the moment arm of the drive decoupled torque, which benefits the suppression of the non-ideal decoupled error. Quadrature correction electrodes are added to eliminate the residual quadrature error. The structure principle and the quadrature error suppression means of the DDMG are described in detail. ANSYS software is used to simulate the micro-gyroscope structure to verify the mechanical coupling error suppression effect. Compared with the former structure, simulation results demonstrate that the rotational displacements of the sense frame in the improved structure are substantially suppressed in the drive mode. The improved DDMG structure chip is fabricated by the deep dry silicon on glass (DDSOG) process. The feedback control circuits with quadrature control loops are designed to suppress the residual mechanical coupling error. Finally, the system performance of the DDMG prototype is tested. Compared with the former DDMG, the quadrature error in the improved dual-mass micro-gyroscope is decreased 9.66-fold, and the offset error is decreased 6.36-fold. Compared with the open loop sense, the feedback control circuits with quadrature control loop decrease the bias drift by 20.59-fold and the scale factor non-linearity by 2.81-fold in the ±400°/s range.
authors.affiliation: School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China. 101011019@seu.edu.cn.|Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China. 101011019@seu.edu.cn.
authors.forename: Bo
authors.initials: B
authors.lastname: Yang
authors.affiliation: School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China. wangxingjun2000@126.com.|Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China. wangxingjun2000@126.com.
authors.forename: Xingjun
authors.initials: X
authors.lastname: Wang
authors.affiliation: School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China. dengyunpeng008@gmail.com.|Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China. dengyunpeng008@gmail.com.
authors.forename: Yunpeng
authors.initials: Y
authors.lastname: Deng
authors.affiliation: School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China. di92hu@outlook.com.|Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China. di92hu@outlook.com.
authors.forename: Di
authors.initials: D
authors.lastname: Hu
keywords: decoupled dual-mass micro-gyroscope; mechanical coupling error; quadrature error correction; suppression technology