Low Cost Digital Vibration Meter.
This report describes the development of a low cost, digital Micro Electro Mechanical System (MEMS) vibration meter that reports an approximation to the RMS acceleration of the vibration to which the vibration meter is subjected. The major mechanical element of this vibration meter is a cantilever beam, which is on the order of 500 µm in length, with a piezoresistor deposited at its base. Vibration of the device in the plane perpendicular to the cantilever beam causes it to bend, which produces a measurable change in the resistance of a piezoresistor. These changes in resistance along with a unique signal-processing scheme are used to determine an approximation to the RMS acceleration sensed by the device.
Building and Fire Research Laboratory National Institute of Standards and Technology, Gaithersburg, MD 20899-8631.
W Vance
WV
Payne
National Institute of Standards and Technology, Gaithersburg, MD 20899-8120.
Jon
J
Geist
approximate root mean square; cantilever accelerometer; micro electro mechanical system; vibration meter