Temperature-Dependent Nanofabrication on Silicon by Friction-Induced Selective Etching.
Friction-induced selective etching provides a convenient and practical way for fabricating protrusive nanostructures. A further understanding of this method is very important for establishing a controllable nanofabrication process. In this study, the effect of etching temperature on the formation of protrusive hillocks and surface properties of the etched silicon surface was investigated. It is found that the height of the hillock produced by selective etching increases with the etching temperature before the collapse of the hillock. The temperature-dependent selective etching rate can be fitted well by the Arrhenius equation. The etching at higher temperature can cause rougher silicon surface with a little lower elastic modulus and hardness. The contact angle of the etched silicon surface decreases with the etching temperature. It is also noted that no obvious contamination can be detected on silicon surface after etching at different temperatures. As a result, the optimized condition for the selective etching was addressed. The present study provides a new insight into the control and application of friction-induced selective nanofabrication.
Tribology Research Institute, Key Laboratory of Advanced Technologies of Materials (Ministry of Education), Southwest Jiaotong University, Chengdu, 610031, Sichuan Province, People's Republic of China.
Chenning
C
Jin
Tribology Research Institute, Key Laboratory of Advanced Technologies of Materials (Ministry of Education), Southwest Jiaotong University, Chengdu, 610031, Sichuan Province, People's Republic of China. bingjun@swjtu.edu.cn.|Department of Electronic and Electrical Engineering, University College London, Torrington Place, London, WC1E 7JE, UK. bingjun@swjtu.edu.cn.
Bingjun
B
Yu
Tribology Research Institute, Key Laboratory of Advanced Technologies of Materials (Ministry of Education), Southwest Jiaotong University, Chengdu, 610031, Sichuan Province, People's Republic of China.
Chen
C
Xiao
Tribology Research Institute, Key Laboratory of Advanced Technologies of Materials (Ministry of Education), Southwest Jiaotong University, Chengdu, 610031, Sichuan Province, People's Republic of China.
Lei
L
Chen
Tribology Research Institute, Key Laboratory of Advanced Technologies of Materials (Ministry of Education), Southwest Jiaotong University, Chengdu, 610031, Sichuan Province, People's Republic of China.
Linmao
L
Qian
AFM; Etching rate; Friction-induced selective etching; Nanofabrication; Silicon; Temperature