title: Designing optical metamaterial with hyperbolic dispersion based on an Al:ZnO/ZnO nano-layered structure using the atomic layer deposition technique.
abstract: Nano-layered Al:ZnO/ZnO hyperbolic dispersion metamaterial with a large number of layers was fabricated using the atomic layer deposition (ALD) technique. Experimental dielectric functions for Al:ZnO/ZnO structures are obtained by an ellipsometry technique in the visible and near-infrared spectral ranges. The theoretical modeling of the Al:ZnO/ZnO dielectric permittivity is done using effective medium approximation. A method for analysis of spectroscopic ellipsometry data is demonstrated to extract the optical permittivity for this highly anisotropic nano-layered metamaterial. The results of the ellipsometry analysis show that Al:ZnO/ZnO structures with a 1:9 ALD cycle ratio exhibit hyperbolic dispersion transition change near 1.8 μm wavelength.
authors.forename: Priscilla
authors.initials: P
authors.lastname: Kelly
authors.forename: Mingzhao
authors.initials: M
authors.lastname: Liu
authors.forename: Lyuba
authors.initials: L
authors.lastname: Kuznetsova