title: Integration of nanostructured planar diffractive lenses dedicated to near infrared detection for CMOS image sensors.
abstract: This paper deals with the integration of metallic and dielectric nanostructured planar lenses into a pixel from a silicon based CMOS image sensor, for a monochromatic application at 1.064 μm. The first is a Plasmonic Lens, based on the phase delay through nanoslits, which has been found to be hardly compatible with current CMOS technology and exhibits a notable metallic absorption. The second is a dielectric Phase-Fresnel Lens integrated at the top of a pixel, it exhibits an Optical Efficiency (OE) improved by a few percent and an angle of view of 50°. The third one is a metallic diffractive lens integrated inside a pixel, which shows a better OE and an angle of view of 24°. The last two lenses exhibit a compatibility with a spectral band close to 1.064 μm.
authors.forename: Thomas
authors.initials: T
authors.lastname: Lopez
authors.forename: Sébastien
authors.initials: S
authors.lastname: Massenot
authors.forename: Magali
authors.initials: M
authors.lastname: Estribeau
authors.forename: Pierre
authors.initials: P
authors.lastname: Magnan
authors.forename: Fabrice
authors.initials: F
authors.lastname: Pardo
authors.forename: Jean-Luc
authors.initials: JL
authors.lastname: Pelouard