title: Large-scale arrays of single- and few-layer MoS2 nanomechanical resonators.
abstract: We report the fabrication of large-scale arrays of suspended molybdenum disulfide (MoS2) atomic layers, as two-dimensional (2D) MoS2 nanomechanical resonators. We employ a water-assisted lift-off process to release chemical vapor deposited (CVD) MoS2 atomic layers from a donor substrate, followed by an all-dry transfer onto microtrench arrays. The resultant large arrays of suspended single- and few-layer MoS2 drumhead resonators (0.5-2 μm in diameter) offer fundamental resonances (f0) in the very high frequency (VHF) band (up to ∼120 MHz) and excellent figures-of-merit up to f0 × Q ≈ 3 × 10(10) Hz. A stretched circular diaphragm model allows us to estimate low pre-tension levels of typically ∼15 mN m(-1) in these devices. Compared to previous approaches, our transfer process features high yield and uniformity with minimal liquid and chemical exposure (only involving DI water), resulting in high-quality MoS2 crystals and exceptional device performance and homogeneity; and our process is readily applicable to other 2D materials.
authors.affiliation: Department of Electrical Engineering and Computer Science, Case School of Engineering, Case Western Reserve University, 10900 Euclid Avenue, Cleveland, OH 44106, USA. philip.feng@case.edu.
authors.forename: Hao
authors.initials: H
authors.lastname: Jia
authors.affiliation: Department of Electrical Engineering and Computer Science, Case School of Engineering, Case Western Reserve University, 10900 Euclid Avenue, Cleveland, OH 44106, USA. philip.feng@case.edu.
authors.forename: Rui
authors.initials: R
authors.lastname: Yang
authors.affiliation: Department of Chemistry and Material Science & Engineering Program, University of California, Riverside, 900 University Avenue, Riverside, CA 92521, USA.
authors.forename: Ariana E
authors.initials: AE
authors.lastname: Nguyen
authors.affiliation: Department of Chemistry and Material Science & Engineering Program, University of California, Riverside, 900 University Avenue, Riverside, CA 92521, USA.
authors.forename: Sahar Naghibi
authors.initials: SN
authors.lastname: Alvillar
authors.affiliation: Department of Chemistry and Material Science & Engineering Program, University of California, Riverside, 900 University Avenue, Riverside, CA 92521, USA.
authors.forename: Thomas
authors.initials: T
authors.lastname: Empante
authors.affiliation: Department of Chemistry and Material Science & Engineering Program, University of California, Riverside, 900 University Avenue, Riverside, CA 92521, USA.
authors.forename: Ludwig
authors.initials: L
authors.lastname: Bartels
authors.affiliation: Department of Electrical Engineering and Computer Science, Case School of Engineering, Case Western Reserve University, 10900 Euclid Avenue, Cleveland, OH 44106, USA. philip.feng@case.edu.
authors.forename: Philip X-L
authors.initials: PX
authors.lastname: Feng