title: Experimental dynamic trapping of electrostatically actuated bistable micro-beams.
abstract: We demonstrate dynamic snap-through from a primary to a secondary statically inaccessible stable configuration in single crystal silicon, curved, doubly clamped micromechanical beam structures. Nanoscale motion of the fabricated bistable micromechanical devices was transduced using a high speed camera. Our experimental and theoretical results collectively show, that the transition between the two stable states was solely achieved by a tailored time dependent electrostatic actuation. Fast imaging of micromechanical motion allowed for direct visualization of dynamic trapping at the statically inaccessible state. These results further suggest that our direct dynamic actuation transcends prevalent limitations in controlling geometrically non-linear microstructures, and may have applications extending to multi-stable, topologically optimized micromechanical logic and non-volatile memory architectures.
authors.affiliation: School of Mechanical Engineering, Faculty of Engineering, Tel-Aviv University, Ramat Aviv 6997801, Israel.
authors.forename: Lior
authors.initials: L
authors.lastname: Medina
authors.affiliation: Department of Civil Engineering, Faculty of Engineering, Ariel University, Ariel 44837, Israel.
authors.forename: Rivka
authors.initials: R
authors.lastname: Gilat
authors.affiliation: Center of Nanoscale Science and Technology, National Institute of Standards and Technology, Gaithersburg, MD, 20899, USA.
authors.forename: B Robert
authors.initials: BR
authors.lastname: Ilic
authors.affiliation: Faculty of Engineering, School of Mechanical Engineering, Tel-Aviv University, Ramat Aviv 6997801, Israel.
authors.forename: Slava
authors.initials: S
authors.lastname: Krylov
keywords: Curved micro-beam; Dynamic bistability; Dynamic snap-through; Dynamic trapping; High speed imaging; MEMS/NEMS; Pull-in; Tailored electrostatic actuation