title: High-bandwidth uni-traveling carrier waveguide photodetector on an InP-membrane-on-silicon platform.
abstract: A uni-traveling carrier photodetector (UTC-PD), heterogeneously integrated on silicon, is demonstrated. It is fabricated in an InP-based photonic membrane bonded on a silicon wafer, using a novel double-sided processing scheme. A very high 3 dB bandwidth of beyond 67 GHz is obtained, together with a responsivity of 0.7 A/W at 1.55 μm wavelength. In addition, open eye diagrams at 54 Gb/s are observed. These results promise high speed applications using a novel full-functionality photonic platform on silicon.
authors.forename: L
authors.initials: L
authors.lastname: Shen
authors.forename: Y
authors.initials: Y
authors.lastname: Jiao
authors.forename: W
authors.initials: W
authors.lastname: Yao
authors.forename: Z
authors.initials: Z
authors.lastname: Cao
authors.forename: J P
authors.initials: JP
authors.lastname: van Engelen
authors.forename: G
authors.initials: G
authors.lastname: Roelkens
authors.forename: M K
authors.initials: MK
authors.lastname: Smit
authors.forename: J J G M
authors.initials: JJ
authors.lastname: van der Tol