title: Prediction of the Strain Response of Poly-AlN/(100)Si Surface Acoustic Wave Resonator and Experimental Analysis.
abstract: The strain sensitivity of the Aluminum Nitride (AlN)/Silicon (Si) surface acoustic wave resonator (SAWR) is predicted based on a modeling method introduced in this work, and further compared with experimental results. The strain influence on both the period of the inter-digital transducer (IDT) and the sound velocity is taken into consideration when modeling the strain response. From the modeling results, AlN and Si have opposite responses to strain; hence, for the AlN/Si-based SAWR, both a positive and a negative strain coefficient factor can be achieved by changing the thickness of the AlN layer, which is confirmed by strain response testing based on a silicon cantilever structure with two AlN configurations (1 μm and 3 μm in thickness, respectively).
authors.affiliation: Department of Precision Instrument, Tsinghua University, Beijing 100084, China. chenshuo_tsinghua@126.com.|State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing 100084, China. chenshuo_tsinghua@126.com.
authors.forename: Shuo
authors.initials: S
authors.lastname: Chen
authors.affiliation: Department of Precision Instrument, Tsinghua University, Beijing 100084, China. yz-dpi@mail.tsinghua.edu.cn.|State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing 100084, China. yz-dpi@mail.tsinghua.edu.cn.
authors.forename: Zheng
authors.initials: Z
authors.lastname: You
keywords: aluminum nitride; strain coefficient factor; surface acoustic wave resonator