title: Synthesis and evaluation of κ(2)-β-diketonate and β-ketoesterate tungsten(vi) oxo-alkoxide complexes as precursors for chemical vapor deposition of WOx thin films.
abstract: Reactions of [WO(OR)4]x (x = 1, 2) complexes with bidentate ligands (LH = acacH, tbacH, dpmH, tbpaH) afforded complexes : [WO(OCH3)3(acac) (); WO(OCH2CH3)3(acac) (); WO(OCH(CH3)2)3(acac) (); WO(OCH3)3(tbac) (); WO(OCH2CH3)3(tbac) (); WO(OCH(CH3)2)3(tbac) (); WO(OCH2CH3)3(dpm) (); WO(OCH(CH3)2)3(dpm) (); WO(OCH2C(CH3)3)3(acac) (); WO(OCH2C(CH3)3)3(tbac) (); WO(OCH2C(CH3)3)3(dpm) (); WO(OCH2C(CH3)3)3(tbpa) (); WO(OC(CH3)3)3(tbac) ()]. The synthesis is facilitated by the lability of the bridging ligands of the [WO(OR)4]2 complexes in solution, which provides a pathway for exchange of L with an alkoxide ligand. Thermogravimetric analysis and the conditions for sublimation or distillation of demonstrate that they have sufficient vapor pressure and thermal stability for volatilization in a conventional Chemical Vapor Deposition (CVD) reactor. High solubility in hydrocarbon and ether solvents establishes that the complexes are also potential candidates for Aerosol-Assisted Chemical Vapor Deposition (AACVD). AACVD from on ITO or bare glass resulted in growth of continuous, dense and amorphous thin films of substoichiometric WOx between 250-350 °C and nanorods of W18O49 above 350 °C.
authors.affiliation: Department of Chemistry, University of Florida, Gainesville, FL, 32611-7200 USA. lmwhite@chem.ufl.edu.
authors.forename: Richard O
authors.initials: RO
authors.lastname: Bonsu
authors.affiliation: Department of Chemistry, University of Florida, Gainesville, FL, 32611-7200 USA. lmwhite@chem.ufl.edu.
authors.forename: Duane C
authors.initials: DC
authors.lastname: Bock
authors.affiliation: Department of Chemical Engineering, University of Florida, Gainesville, FL, 32611-6005 USA.
authors.forename: Hankook
authors.initials: H
authors.lastname: Kim
authors.affiliation: Arkema Inc., 900 First Ave., King of Prussia, PA, 19406 USA.
authors.forename: Roman Y
authors.initials: RY
authors.lastname: Korotkov
authors.affiliation: Department of Chemistry, University of Florida, Gainesville, FL, 32611-7200 USA. lmwhite@chem.ufl.edu.
authors.forename: Khalil A
authors.initials: KA
authors.lastname: Abboud
authors.affiliation: Department of Chemical Engineering, University of Florida, Gainesville, FL, 32611-6005 USA.
authors.forename: Timothy J
authors.initials: TJ
authors.lastname: Anderson
authors.affiliation: Department of Chemistry, University of Florida, Gainesville, FL, 32611-7200 USA. lmwhite@chem.ufl.edu.
authors.forename: Lisa
authors.initials: L
authors.lastname: McElwee-White