title: Spontaneous Patterning of High-Resolution Electronics via Parallel Vacuum Ultraviolet.
abstract: A spontaneous patterning technique via parallel vacuum ultraviolet is developed for fabricating large-scale, complex electronic circuits with 1 μm resolution. The prepared organic thin-film transistors exhibit a low contact resistance of 1.5 kΩ cm, and high mobilities of 0.3 and 1.5 cm(2) V(-1) s(-1) in the devices with channel lengths of 1 and 5 μm, respectively.
authors.affiliation: World Premier International Center for Materials Nanoarchitectonics (WPI-MANA), National Institute for Materials Science (NIMS), Tsukuba, Ibaraki, 305-0044, Japan.
authors.forename: Xuying
authors.initials: X
authors.lastname: Liu
authors.affiliation: Colloidal Ink. Co., Ltd, Sojya-shi, Okayama, 719-1121, Japan.
authors.forename: Masayuki
authors.initials: M
authors.lastname: Kanehara
authors.affiliation: State Key Laboratory of Optoelectronic Materials and Technologies, Guangdong Province Key Laboratory of Display Material and Technology and School of Electronics and Information Technology, Sun Yat-sen University, Guangzhou, 510275, P. R. China.
authors.forename: Chuan
authors.initials: C
authors.lastname: Liu
authors.affiliation: World Premier International Center for Materials Nanoarchitectonics (WPI-MANA), National Institute for Materials Science (NIMS), Tsukuba, Ibaraki, 305-0044, Japan.
authors.forename: Kenji
authors.initials: K
authors.lastname: Sakamoto
authors.affiliation: World Premier International Center for Materials Nanoarchitectonics (WPI-MANA), National Institute for Materials Science (NIMS), Tsukuba, Ibaraki, 305-0044, Japan.
authors.forename: Takeshi
authors.initials: T
authors.lastname: Yasuda
authors.affiliation: The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, 277-8561, Chiba, Japan.
authors.forename: Jun
authors.initials: J
authors.lastname: Takeya
authors.affiliation: World Premier International Center for Materials Nanoarchitectonics (WPI-MANA), National Institute for Materials Science (NIMS), Tsukuba, Ibaraki, 305-0044, Japan.|The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, 277-8561, Chiba, Japan.
authors.forename: Takeo
authors.initials: T
authors.lastname: Minari
keywords: Au nanoparticle ink; organic thin-film transistors; parallel vacuum ultraviolet; patterning