title: Planar Position Sensor Based on Mono Sensing Electrode and Hybrid-Frequency Excitation.
abstract: A new way of measuring planar position for micrometric and sub-micrometric applications is presented with a mono sensing electrode and hybrid-frequency excitation. The sensing theory and operation principle are described and summarized, and a printed circuit board (PCB) sensor prototype is built and tested. It is shown by the experimental results that a very simple structure and geometric relationship are achieved. Meanwhile, displacement sensitivity on an order of 1.50 mV per micron and measurement repeatability better than 0.002 mm are easily fulfilled for a square zone of 256 mm², making it a valuable alternative measurement device candidate for flexible and low-cost planar position detection.
authors.affiliation: College of Engineering, ZheJiang Normal University, Jinhua 321004, China. yhx@zjnu.cn.
authors.forename: Hongxiang
authors.initials: H
authors.lastname: Yu
authors.affiliation: College of Engineering, ZheJiang Normal University, Jinhua 321004, China. zjnuzy@zjnu.cn.
authors.forename: Yu
authors.initials: Y
authors.lastname: Zhang
authors.affiliation: College of Engineering, ZheJiang Normal University, Jinhua 321004, China. shenmengfeng@163.com.
authors.forename: Mengfeng
authors.initials: M
authors.lastname: Shen
authors.affiliation: College of Engineering, ZheJiang Normal University, Jinhua 321004, China. tz_zhl@163.com.
authors.forename: Hongli
authors.initials: H
authors.lastname: Zhang
authors.affiliation: College of Engineering, ZheJiang Normal University, Jinhua 321004, China. gz@zjnu.cn.
authors.forename: Zhao
authors.initials: Z
authors.lastname: Gao
authors.affiliation: College of Engineering, ZheJiang Normal University, Jinhua 321004, China. zsdwdy@zjnu.cn.
authors.forename: Dongyun
authors.initials: D
authors.lastname: Wang
keywords: capacitive sensor; hybrid-frequency; mono-electrode; planar position