title: Angularly-selective transmission imaging in a scanning electron microscope.
abstract: This work presents recent advances in transmission scanning electron microscopy (t-SEM) imaging control capabilities. A modular aperture system and a cantilever-style sample holder that enable comprehensive angular selectivity of forward-scattered electrons are described. When combined with a commercially available solid-state transmission detector having only basic bright-field and dark-field imaging capabilities, the advances described here enable numerous transmission imaging modes. Several examples are provided that demonstrate how contrast arising from diffraction to mass-thickness can be obtained. Unanticipated image contrast at some imaging conditions is also observed and addressed.
authors.affiliation: National Institute of Standards and Technology, Applied Chemicals and Materials Division, 325 Broadway, Boulder, CO 80305, United States. Electronic address: jason.holm@nist.gov.
authors.forename: Jason
authors.initials: J
authors.lastname: Holm
authors.affiliation: National Institute of Standards and Technology, Applied Chemicals and Materials Division, 325 Broadway, Boulder, CO 80305, United States.
authors.forename: Robert R
authors.initials: RR
authors.lastname: Keller
keywords: Aperture; Camera length; HAADF; High-angle annular dark-field; SEM; STEM-in-SEM; Scanning electron microscopy; Transmission detector; Transmission scanning electron microscopy; t-SEM