title: Preparation of Silicon Nanowire Field-effect Transistor for Chemical and Biosensing Applications.
abstract: Surveillance using biomarkers is critical for the early detection, rapid intervention, and reduction in the incidence of diseases. In this study, we describe the preparation of polycrystalline silicon nanowire field-effect transistors (pSNWFETs) that serve as biosensing devices for biomarker detection. A protocol for chemical and biomolecular sensing by using pSNWFETs is presented. The pSNWFET device was demonstrated to be a promising transducer for real-time, label-free, and ultra-high-sensitivity biosensing applications. The source/drain channel conductivity of a pSNWFET is sensitive to changes in the environment around its silicon nanowire (SNW) surface. Thus, by immobilizing probes on the SNW surface, the pSNWFET can be used to detect various biotargets ranging from small molecules (dopamine) to macromolecules (DNA and proteins). Immobilizing a bioprobe on the SNW surface, which is a multistep procedure, is vital for determining the specificity of the biosensor. It is essential that every step of the immobilization procedure is correctly performed. We verified surface modifications by directly observing the shift in the electric properties of the pSNWFET following each modification step. Additionally, X-ray photoelectron spectroscopy was used to examine the surface composition following each modification. Finally, we demonstrated DNA sensing on the pSNWFET. This protocol provides step-by-step procedures for verifying bioprobe immobilization and subsequent DNA biosensing application.
authors.affiliation: Institute of Molecular Medicine and Bioengineering, National Chiao Tung University.
authors.forename: Jennifer Yun-Shin
authors.initials: JY
authors.lastname: Wu
authors.affiliation: Department of Biological Science and Technology, National Chiao Tung University.
authors.forename: Chih-Heng
authors.initials: CH
authors.lastname: Lin
authors.affiliation: Institute of Molecular Medicine and Bioengineering, National Chiao Tung University.
authors.forename: Mei-Huei
authors.initials: MH
authors.lastname: Feng
authors.affiliation: Department of Biological Science and Technology, National Chiao Tung University.
authors.forename: Chien-Hung
authors.initials: CH
authors.lastname: Chen
authors.affiliation: Institute of Molecular Medicine and Bioengineering, National Chiao Tung University.
authors.forename: Ping-Chia
authors.initials: PC
authors.lastname: Su
authors.affiliation: Department of Biological Science and Technology, National Chiao Tung University.
authors.forename: Po-Wen
authors.initials: PW
authors.lastname: Yang
authors.affiliation: Department of Biological Science and Technology, National Chiao Tung University.
authors.forename: Jian-Ming
authors.initials: JM
authors.lastname: Zheng
authors.affiliation: Department of Biological Science and Technology, National Chiao Tung University.
authors.forename: Chang-Wei
authors.initials: CW
authors.lastname: Fu
authors.affiliation: Institute of Molecular Medicine and Bioengineering, National Chiao Tung University; Department of Biological Science and Technology, National Chiao Tung University; ysyang@faculty.nctu.edu.tw.
authors.forename: Yuh-Shyong
authors.initials: YS
authors.lastname: Yang
mesh_terms: D015374:Biosensing Techniques / Q000295:instrumentation* / Q000379:methods; D004247:DNA / Q000032:analysis / Q000737:chemistry; D015342:DNA Probes / Q000737:chemistry; D006801:Humans; D053770:Nanowires / Q000737:chemistry*; D056951:Photoelectron Spectroscopy; D011506:Proteins / Q000032:analysis / Q000737:chemistry; D012825:Silicon / Q000737:chemistry*; D014173:Transistors, Electronic
chemical_list: D015342:DNA Probes; D011506:Proteins; D004247:DNA; D012825:Silicon