title: Wide-field broadband extreme ultraviolet transmission ptychography using a high-harmonic source.
abstract: High-harmonic generation (HHG) provides a laboratory-scale source of coherent radiation ideally suited to lensless coherent diffractive imaging (CDI) in the EUV and x-ray spectral region. Here we demonstrate transmission extreme ultraviolet (EUV) ptychography, a scanning variant of CDI, using radiation at a wavelength around 29 nm from an HHG source. Image resolution is diffraction-limited at 54 nm and fields of view up to ∼100  μm are demonstrated. These results demonstrate the potential for wide-field, high-resolution, laboratory-scale EUV imaging using HHG-based sources with potential application in biological imaging or EUV lithography pellicle inspection.
authors.forename: Peter D
authors.initials: PD
authors.lastname: Baksh
authors.forename: Michal
authors.initials: M
authors.lastname: Odstrčil
authors.forename: Hyun-Su
authors.initials: HS
authors.lastname: Kim
authors.forename: Stuart A
authors.initials: SA
authors.lastname: Boden
authors.forename: Jeremy G
authors.initials: JG
authors.lastname: Frey
authors.forename: William S
authors.initials: WS
authors.lastname: Brocklesby