title: X-ray metrology and performance of a 45-cm long x-ray deformable mirror.
abstract: We describe experiments with a 45-cm long x-ray deformable mirror (XDM) that have been conducted in End Station 2, Beamline 5.3.1 at the Advanced Light Source. A detailed description of the hardware implementation is provided. We explain our one-dimensional Fresnel propagation code that correctly handles grazing incidence and includes a model of the XDM. This code is used to simulate and verify experimental results. Initial long trace profiler metrology of the XDM at 7.5 keV is presented. The ability to measure a large (150-nm amplitude) height change on the XDM is demonstrated. The results agree well with the simulated experiment at an error level of 1 μrad RMS. Direct imaging of the x-ray beam also shows the expected change in intensity profile at the detector.
authors.affiliation: Lawrence Livermore National Laboratory, 7000 East Avenue, Livermore, California 94550, USA.
authors.forename: Lisa A
authors.initials: LA
authors.lastname: Poyneer
authors.affiliation: Lawrence Livermore National Laboratory, 7000 East Avenue, Livermore, California 94550, USA.
authors.forename: Nicolai F
authors.initials: NF
authors.lastname: Brejnholt
authors.affiliation: Lawrence Livermore National Laboratory, 7000 East Avenue, Livermore, California 94550, USA.
authors.forename: Randall
authors.initials: R
authors.lastname: Hill
authors.affiliation: Lawrence Livermore National Laboratory, 7000 East Avenue, Livermore, California 94550, USA.
authors.forename: Jessie
authors.initials: J
authors.lastname: Jackson
authors.affiliation: Lawrence Livermore National Laboratory, 7000 East Avenue, Livermore, California 94550, USA.
authors.forename: Lisle
authors.initials: L
authors.lastname: Hagler
authors.affiliation: Advanced Light Source, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA.
authors.forename: Richard
authors.initials: R
authors.lastname: Celestre
authors.affiliation: Advanced Light Source, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA.
authors.forename: Jun
authors.initials: J
authors.lastname: Feng