title: Miniature hemispherical shell resonator with large-scale effective electrodes based on piezoelectric drive mechanism.
abstract: Miniature resonators with three-dimensional curved surface are mostly driven by electrostatic capacitive. However, it is quite difficult to fabricate a curved surface electrostatic resonator with large-scale effective electrodes. This paper presents the first miniature hemispherical shell resonator with large-scale effective electrodes based on piezoelectric drive mechanism. The vibrating body and electrodes of the piezoelectric resonator are easily integrated without micro-scale or nano-scale narrow capacitive gap. Vibration experiment and finite element analysis both reveal that there exist seven significant vibration modes between 10 kHz and 100 kHz. Mode shape validation is also carried out by measuring the vibration velocity of upper perimeter and lateral perimeter with laser doppler vibrometer. Special vibration characteristics of each vibration mode are described in detail, based on which the resonator may be used for many specific applications. Compared with common electrostatic resonators, even smaller drive voltage applied to the piezoelectric resonator may produce larger vibration displacement at atmosphere. According to the experiment results, the resonator may provide a new way of realizing high performance three-dimensional miniature devices for communication and inertial navigation applications.
authors.affiliation: National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Key Laboratory for Thin Film and Micro Fabrication of the Ministry of Education and Shanghai Key Lab of Navigation and Location-Based Services, Department of Micro-Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China.
authors.forename: Jian
authors.initials: J
authors.lastname: Tang
authors.affiliation: National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Key Laboratory for Thin Film and Micro Fabrication of the Ministry of Education and Shanghai Key Lab of Navigation and Location-Based Services, Department of Micro-Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China.
authors.forename: Weiping
authors.initials: W
authors.lastname: Zhang
authors.affiliation: National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Key Laboratory for Thin Film and Micro Fabrication of the Ministry of Education and Shanghai Key Lab of Navigation and Location-Based Services, Department of Micro-Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China.
authors.forename: Yuxiang
authors.initials: Y
authors.lastname: Cheng
authors.affiliation: National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Key Laboratory for Thin Film and Micro Fabrication of the Ministry of Education and Shanghai Key Lab of Navigation and Location-Based Services, Department of Micro-Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China.
authors.forename: Wu
authors.initials: W
authors.lastname: Liu
authors.affiliation: National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Key Laboratory for Thin Film and Micro Fabrication of the Ministry of Education and Shanghai Key Lab of Navigation and Location-Based Services, Department of Micro-Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China.
authors.forename: Yinghai
authors.initials: Y
authors.lastname: Wang
authors.affiliation: National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Key Laboratory for Thin Film and Micro Fabrication of the Ministry of Education and Shanghai Key Lab of Navigation and Location-Based Services, Department of Micro-Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China.
authors.forename: Dianjun
authors.initials: D
authors.lastname: Sun