title: Construction and characterization of a frequency-controlled, picometer-resolution, displacement encoder-actuator.
abstract: We have constructed an actuator/encoder whose generated displacement is controlled through the resonance frequency of a microwave cavity. A compact, 10-μm-range, digitally controlled actuator executing frequency-coded displacement with picometer resolution is described. We consider this approach particularly suitable for metrologic-precision scanning probe microscopy.
authors.affiliation: Department of Physics and Astronomy, University of California Los Angeles, Los Angeles, California 90095, USA.
authors.forename: John P
authors.initials: JP
authors.lastname: Koulakis
authors.affiliation: Los Angeles, California 90095, USA.
authors.forename: Michael
authors.initials: M
authors.lastname: Stein
authors.affiliation: Department of Physics and Astronomy, University of California Los Angeles, Los Angeles, California 90095, USA.
authors.forename: Károly
authors.initials: K
authors.lastname: Holczer