title: Nonlinear-Based MEMS Sensors and Active Switches for Gas Detection.
abstract: The objective of this paper is to demonstrate the integration of a MOF thin film on electrostatically actuated microstructures to realize a switch triggered by gas and a sensing algorithm based on amplitude tracking. The devices are based on the nonlinear response of micromachined clamped-clamped beams. The microbeams are coated with a metal-organic framework (MOF), namely HKUST-1, to achieve high sensitivity. The softening and hardening nonlinear behaviors of the microbeams are exploited to demonstrate the ideas. For gas sensing, an amplitude-based tracking algorithm is developed to quantify the captured quantity of gas. Then, a MEMS switch triggered by gas using the nonlinear response of the microbeam is demonstrated. Noise analysis is conducted, which shows that the switch has high stability against thermal noise. The proposed switch is promising for delivering binary sensing information, and also can be used directly to activate useful functionalities, such as alarming.
authors.affiliation: Physical Sciences and Engineering Division, King Abdullah University of Science and Technology, Thuwal 23955-9600, Saudi Arabia. adam.bouchaala@kaust.edu.sa.
authors.forename: Adam
authors.initials: A
authors.lastname: Bouchaala
authors.affiliation: Physical Sciences and Engineering Division, King Abdullah University of Science and Technology, Thuwal 23955-9600, Saudi Arabia. nizar.jaber@kaust.edu.sa.
authors.forename: Nizar
authors.initials: N
authors.lastname: Jaber
authors.affiliation: Physical Sciences and Engineering Division, King Abdullah University of Science and Technology, Thuwal 23955-9600, Saudi Arabia. omar.yassine@kaust.edu.sa.
authors.forename: Omar
authors.initials: O
authors.lastname: Yassine
authors.affiliation: Physical Sciences and Engineering Division, King Abdullah University of Science and Technology, Thuwal 23955-9600, Saudi Arabia. Osama.Shekhah@kaust.edu.sa.
authors.forename: Osama
authors.initials: O
authors.lastname: Shekhah
authors.affiliation: Physical Sciences and Engineering Division, King Abdullah University of Science and Technology, Thuwal 23955-9600, Saudi Arabia. valeriya.chernikova@kaust.edu.sa.
authors.forename: Valeriya
authors.initials: V
authors.lastname: Chernikova
authors.affiliation: Physical Sciences and Engineering Division, King Abdullah University of Science and Technology, Thuwal 23955-9600, Saudi Arabia. mohamed.eddaoudi@kaust.edu.sa.
authors.forename: Mohamed
authors.initials: M
authors.lastname: Eddaoudi
authors.affiliation: Physical Sciences and Engineering Division, King Abdullah University of Science and Technology, Thuwal 23955-9600, Saudi Arabia. Mohammad.younis@kaust.edu.sa.
authors.forename: Mohammad I
authors.initials: MI
authors.lastname: Younis
keywords: active switch; gas sensor; metal-organic framework; microbeam; microcontroller; nonlinear dynamics