title: MgZnO/ZnO heterostructures with electron mobility exceeding 1 × 10(6) cm(2)/Vs.
abstract: The inherently complex chemical and crystallographic nature of oxide materials has suppressed the purities achievable in laboratory environments, obscuring the rich physical degrees of freedom these systems host. In this manuscript we provide a systematic approach to defect identification and management in oxide molecular beam epitaxy grown MgZnO/ZnO heterostructures which host two-dimensional electron systems. We achieve samples displaying electron mobilities in excess of 1 × 10(6) cm(2)/Vs. This data set for the MgZnO/ZnO system firmly establishes that the crystalline quality has become comparable to traditional semiconductor materials.
authors.affiliation: Department of Applied Physics and Quantum-Phase Electronics Center (QPEC), The University of Tokyo, Tokyo 113-8656, Japan.|Department of Advanced Materials Science, The University of Tokyo, Kashiwa 277-8561, Japan.|Max Planck Institute for Solid State Research, 70569 Stuttgart, Germany.
authors.forename: Joseph
authors.initials: J
authors.lastname: Falson
authors.affiliation: Department of Applied Physics and Quantum-Phase Electronics Center (QPEC), The University of Tokyo, Tokyo 113-8656, Japan.
authors.forename: Yusuke
authors.initials: Y
authors.lastname: Kozuka
authors.affiliation: Department of Applied Physics and Quantum-Phase Electronics Center (QPEC), The University of Tokyo, Tokyo 113-8656, Japan.
authors.forename: Masaki
authors.initials: M
authors.lastname: Uchida
authors.affiliation: Max Planck Institute for Solid State Research, 70569 Stuttgart, Germany.
authors.forename: Jurgen H
authors.initials: JH
authors.lastname: Smet
authors.affiliation: Department of Advanced Materials Science, The University of Tokyo, Kashiwa 277-8561, Japan.|RIKEN Center for Emergent Matter Science (CEMS), Wako 351-0198, Japan.
authors.forename: Taka-Hisa
authors.initials: TH
authors.lastname: Arima
authors.affiliation: Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan.|PRESTO, Japan Science and Technology Agency (JST), Tokyo 102-0075, Japan.
authors.forename: Atsushi
authors.initials: A
authors.lastname: Tsukazaki
authors.affiliation: Department of Applied Physics and Quantum-Phase Electronics Center (QPEC), The University of Tokyo, Tokyo 113-8656, Japan.|RIKEN Center for Emergent Matter Science (CEMS), Wako 351-0198, Japan.
authors.forename: Masashi
authors.initials: M
authors.lastname: Kawasaki