title: Development of high-order harmonic focusing system based on ellipsoidal mirror.
abstract: We have developed a focusing system for extreme ultraviolet light produced by high-order harmonic generation. An ellipsoidal mirror with a precise surface shape was fabricated and installed into the focusing system. A rigid mirror manipulator and a beam profiler were employed to perform precise and stable mirror alignment. As a demonstration of the focusing performance, high-order harmonics in the wavelength range of 13.5-19.5 nm were successfully focused into a 2.4 × 2.3 μm(2) spot.
authors.affiliation: Department of Precision Engineering, School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkuyo-ku, Tokyo 113-8656, Japan.
authors.forename: H
authors.initials: H
authors.lastname: Motoyama
authors.affiliation: Department of Chemistry, School of Science, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-0033, Japan.
authors.forename: T
authors.initials: T
authors.lastname: Sato
authors.affiliation: Department of Chemistry, School of Science, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-0033, Japan.
authors.forename: A
authors.initials: A
authors.lastname: Iwasaki
authors.affiliation: Department of Precision Engineering, School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkuyo-ku, Tokyo 113-8656, Japan.
authors.forename: Y
authors.initials: Y
authors.lastname: Takei
authors.affiliation: Department of Precision Engineering, School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkuyo-ku, Tokyo 113-8656, Japan.
authors.forename: T
authors.initials: T
authors.lastname: Kume
authors.affiliation: Department of Precision Engineering, School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkuyo-ku, Tokyo 113-8656, Japan.
authors.forename: S
authors.initials: S
authors.lastname: Egawa
authors.affiliation: Natsume Optical Corp., 3461 Kamichaya, Kanae, Iida, Nagano 395-0808, Japan.
authors.forename: K
authors.initials: K
authors.lastname: Hiraguri
authors.affiliation: Natsume Optical Corp., 3461 Kamichaya, Kanae, Iida, Nagano 395-0808, Japan.
authors.forename: H
authors.initials: H
authors.lastname: Hashizume
authors.affiliation: Department of Chemistry, School of Science, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-0033, Japan.
authors.forename: K
authors.initials: K
authors.lastname: Yamanouchi
authors.affiliation: Department of Precision Engineering, School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkuyo-ku, Tokyo 113-8656, Japan.
authors.forename: H
authors.initials: H
authors.lastname: Mimura