Simple Thermal-Efficiency Model for CMOS-Microhotplate Design.
Simple, semi-empirical, first-order, analytic approximations to the current, voltage, and power as a function of microhotplate temperature are derived. To lowest order, the voltage is independent of, and the power and current are inversely proportional to, the length of the microhotplate heater legs. A first-order design strategy based on this result is described.
National Institute of Standards and Technology, Gaithersburg, MD 20899.
Jon
J
Geist
National Institute of Standards and Technology, Gaithersburg, MD 20899.
M Yaqub
MY
Afridi
National Institute of Standards and Technology, Gaithersburg, MD 20899.
Ankush
A
Varma
National Institute of Standards and Technology, Gaithersburg, MD 20899.
Allen R
AR
Hefner
CMOS; MEMS; low-voltage; microhotplate; model; sub-micron