Nanoscale arrays of antimony telluride single crystals by selective chemical vapor deposition.
Arrays of individual single nanocrystals of Sb2Te3 have been formed using selective chemical vapor deposition (CVD) from a single source precursor. Crystals are self-assembled reproducibly in confined spaces of 100 nm diameter with pitch down to 500 nm. The distribution of crystallite sizes across the arrays is very narrow (standard deviation of 15%) and is affected by both the hole diameter and the array pitch. The preferred growth of the crystals in the <1 1 0> orientation along the diagonal of the square holes strongly indicates that the diffusion of adatoms results in a near thermodynamic equilibrium growth mechanism of the nuclei. A clear relationship between electrical resistivity and selectivity is established across a range of metal selenides and tellurides, showing that conductive materials result in more selective growth and suggesting that electron donation is of critical importance for selective deposition.
Electronics and Computer Science, University of Southampton, SO17 1BJ UK.
Ruomeng
R
Huang
Chemistry, University of Southampton, SO17 1BJ UK.
Sophie L
SL
Benjamin
Chemistry, University of Southampton, SO17 1BJ UK.|School of Natural Sciences, Mahindra École Centrale, India.
Chitra
C
Gurnani
Electronics and Computer Science, University of Southampton, SO17 1BJ UK.
Yudong
Y
Wang
Chemistry, University of Southampton, SO17 1BJ UK.
Andrew L
AL
Hector
Chemistry, University of Southampton, SO17 1BJ UK.
William
W
Levason
Chemistry, University of Southampton, SO17 1BJ UK.
Gillian
G
Reid
Electronics and Computer Science, University of Southampton, SO17 1BJ UK.
C H Kees
CH
De Groot