Simulation-Guided 3D Nanomanufacturing via Focused Electron Beam Induced Deposition.
Focused electron beam induced deposition (FEBID) is one of the few techniques that enables direct-write synthesis of free-standing 3D nanostructures. While the fabrication of simple architectures such as vertical or curving nanowires has been achieved by simple trial and error, processing complex 3D structures is not tractable with this approach. In part, this is due to the dynamic interplay between electron-solid interactions and the transient spatial distribution of absorbed precursor molecules on the solid surface. Here, we demonstrate the ability to controllably deposit 3D lattice structures at the micro/nanoscale, which have received recent interest owing to superior mechanical and optical properties. A hybrid Monte Carlo-continuum simulation is briefly overviewed, and subsequently FEBID experiments and simulations are directly compared. Finally, a 3D computer-aided design (CAD) program is introduced, which generates the beam parameters necessary for FEBID by both simulation and experiment. Using this approach, we demonstrate the fabrication of various 3D lattice structures using Pt-, Au-, and W-based precursors.
Nanofabrication Research Laboratory, Center for Nanophase Materials Sciences, Oak Ridge National Laboratory , Oak Ridge, Tennessee 37831, United States.|Materials Science and Engineering Department, The University of Tennessee , Knoxville, Tennessee 37996, United States.
Jason D
JD
Fowlkes
Graz Centre for Electron Microscopy , Steyrergasse 17, 8010 Graz, Austria.
Robert
R
Winkler
Materials Science and Engineering Department, The University of Tennessee , Knoxville, Tennessee 37996, United States.
Brett B
BB
Lewis
Materials Science and Engineering Department, The University of Tennessee , Knoxville, Tennessee 37996, United States.
Michael G
MG
Stanford
Graz Centre for Electron Microscopy , Steyrergasse 17, 8010 Graz, Austria.|Institute for Electron Microscopy and Nanoanalysis, Graz University of Technology , Steyrergasse 17, 8010 Graz, Austria.
Harald
H
Plank
Nanofabrication Research Laboratory, Center for Nanophase Materials Sciences, Oak Ridge National Laboratory , Oak Ridge, Tennessee 37831, United States.|Materials Science and Engineering Department, The University of Tennessee , Knoxville, Tennessee 37996, United States.
Philip D
PD
Rack
3D nanoprinting; direct-write; focused electron beam induced deposition; nanofabrication