Greenhouse Gas Molecule CO2 Detection Using a Capacitive Micromachined Ultrasound Transducer.
We manufactured and tested a capacitive micromachined ultrasound transducer (CMUT)-based sensor for CO2 detection at environmentally relevant concentrations using polyethylenimine as a CO2 binding material. The assembly of a sensing chip was 10 × 20 mm, and up to 5 gases can potentially be detected simultaneously using a masking technique and different sensing materials. The limit of detection was calculated to be 0.033 CO2 vol % while the limit of quantification was calculated to be 0.102%. The sensor exhibited a linear response between 0.06% and 0.30% CO2 while concentrations close to those in flue gas can also be measured using dilution with inert gas.
Department of Electrical Engineering, Kaunas University of Technology, Panevezys Institute , Daukanto 12, LT-35212 Paneveys, Lithuania.|Laboratory of Micro and Nano Technologies, Panevezys Mechatronics Center , Pilenu 30, LT-36239 Panevezys, Lithuania.
Dovydas
D
Barauskas
Department of Electrical Engineering, Kaunas University of Technology, Panevezys Institute , Daukanto 12, LT-35212 Paneveys, Lithuania.|Laboratory of Micro and Nano Technologies, Panevezys Mechatronics Center , Pilenu 30, LT-36239 Panevezys, Lithuania.
Donatas
D
Pelenis
Department of Electrical Engineering, Kaunas University of Technology, Panevezys Institute , Daukanto 12, LT-35212 Paneveys, Lithuania.|Laboratory of Micro and Nano Technologies, Panevezys Mechatronics Center , Pilenu 30, LT-36239 Panevezys, Lithuania.
Darius
D
Virzonis
National Energy Technology Laboratory, U.S. Department of Energy , 626 Cochrans Mill Road, Pittsburgh, Pennsylvania 15236, United States.
John P
JP
Baltrus
Department of Chemical and Biomolecular Engineering, Lehigh University , B336 Iacocca Hall, 111 Research Drive, Bethlehem, Pennsylvania 18015, United States.
Jonas
J
Baltrusaitis