Electron collisions with atoms, ions, molecules, and surfaces: Fundamental science empowering advances in technology.
Electron collisions with atoms, ions, molecules, and surfaces are critically important to the understanding and modeling of low-temperature plasmas (LTPs), and so in the development of technologies based on LTPs. Recent progress in obtaining experimental benchmark data and the development of highly sophisticated computational methods is highlighted. With the cesium-based diode-pumped alkali laser and remote plasma etching of Si3N4 as examples, we demonstrate how accurate and comprehensive datasets for electron collisions enable complex modeling of plasma-using technologies that empower our high-technology-based society.
Department of Physics and Astronomy, Drake University, Des Moines, IA 50311; klaus.bartschat@drake.edu.
Klaus
K
Bartschat
Electrical Engineering and Computer Science Department, University of Michigan, Ann Arbor, MI 48109-2122.
Mark J
MJ
Kushner
ab initio; close coupling; electron scattering; kinetic modeling; plasmas