title: Piezoresistive effect in p-type 3C-SiC at high temperatures characterized using Joule heating.
abstract: Cubic silicon carbide is a promising material for Micro Electro Mechanical Systems (MEMS) applications in harsh environ-ments and bioapplications thanks to its large band gap, chemical inertness, excellent corrosion tolerance and capability of growth on a Si substrate. This paper reports the piezoresistive effect of p-type single crystalline 3C-SiC characterized at high temperatures, using an in situ measurement method. The experimental results show that the highly doped p-type 3C-SiC possesses a relatively stable gauge factor of approximately 25 to 28 at temperatures varying from 300 K to 573 K. The in situ method proposed in this study also demonstrated that, the combination of the piezoresistive and thermoresistive effects can increase the gauge factor of p-type 3C-SiC to approximately 20% at 573 K. The increase in gauge factor based on the combination of these phenomena could enhance the sensitivity of SiC based MEMS mechanical sensors.
authors.affiliation: Queensland Micro and Nanotechnology Centre, Griffith University, Queensland, 4111, Australia.
authors.forename: Hoang-Phuong
authors.initials: HP
authors.lastname: Phan
authors.affiliation: Queensland Micro and Nanotechnology Centre, Griffith University, Queensland, 4111, Australia.
authors.forename: Toan
authors.initials: T
authors.lastname: Dinh
authors.affiliation: Department of Mechanical Engineering, University of Hyogo, Hyogo, 671-2201, Japan.
authors.forename: Takahiro
authors.initials: T
authors.lastname: Kozeki
authors.affiliation: Queensland Micro and Nanotechnology Centre, Griffith University, Queensland, 4111, Australia.
authors.forename: Afzaal
authors.initials: A
authors.lastname: Qamar
authors.affiliation: Department of Mechanical Engineering, University of Hyogo, Hyogo, 671-2201, Japan.
authors.forename: Takahiro
authors.initials: T
authors.lastname: Namazu
authors.affiliation: Queensland Micro and Nanotechnology Centre, Griffith University, Queensland, 4111, Australia.
authors.forename: Sima
authors.initials: S
authors.lastname: Dimitrijev
authors.affiliation: Queensland Micro and Nanotechnology Centre, Griffith University, Queensland, 4111, Australia.
authors.forename: Nam-Trung
authors.initials: NT
authors.lastname: Nguyen
authors.affiliation: Queensland Micro and Nanotechnology Centre, Griffith University, Queensland, 4111, Australia.|School of Engineering, Griffith University, Queensland, 4215, Australia.
authors.forename: Dzung Viet
authors.initials: DV
authors.lastname: Dao