title: Three-Axis Vector Nano Superconducting Quantum Interference Device.
abstract: We present the design, realization, and performance of a three-axis vector nano superconducting quantum interference device (nanoSQUID). It consists of three mutually orthogonal SQUID nanoloops that allow distinguishing the three components of the vector magnetic moment of individual nanoparticles placed at a specific position. The device is based on Nb/HfTi/Nb Josephson junctions and exhibits line widths of ∼250 nm and inner loop areas of 600 × 90 and 500 × 500 nm(2). Operation at temperature T = 4.2 K under external magnetic fields perpendicular to the substrate plane up to ∼50 mT is demonstrated. The experimental flux noise below [Formula: see text] in the white noise limit and the reduced dimensions lead to a total calculated spin sensitivity of [Formula: see text] and [Formula: see text] for the in-plane and out-of-plane components of the vector magnetic moment, respectively. The potential of the device for studying three-dimensional properties of individual nanomagnets is discussed.
authors.affiliation: Physikalisches Institut-Experimentalphysik II and Center for Quantum Science (CQ) in LISA+, Universität Tübingen , Auf der Morgenstelle 14, D-72076 Tübingen, Germany.
authors.forename: María José
authors.initials: MJ
authors.lastname: Martínez-Pérez
authors.affiliation: Physikalisches Institut-Experimentalphysik II and Center for Quantum Science (CQ) in LISA+, Universität Tübingen , Auf der Morgenstelle 14, D-72076 Tübingen, Germany.
authors.forename: Diego
authors.initials: D
authors.lastname: Gella
authors.affiliation: Physikalisches Institut-Experimentalphysik II and Center for Quantum Science (CQ) in LISA+, Universität Tübingen , Auf der Morgenstelle 14, D-72076 Tübingen, Germany.
authors.forename: Benedikt
authors.initials: B
authors.lastname: Müller
authors.affiliation: Fachbereich Quantenelektronik, Physikalisch-Technische Bundesanstalt , Bundesallee 100, D-38116 Braunschweig, Germany.
authors.forename: Viacheslav
authors.initials: V
authors.lastname: Morosh
authors.affiliation: Physikalisches Institut-Experimentalphysik II and Center for Quantum Science (CQ) in LISA+, Universität Tübingen , Auf der Morgenstelle 14, D-72076 Tübingen, Germany.
authors.forename: Roman
authors.initials: R
authors.lastname: Wölbing
authors.affiliation: Laboratorio de Microscopías Avanzadas (LMA), Instituto de Nanociencia de Aragón (INA), Universidad de Zaragoza , E-50018 Zaragoza, Spain.
authors.forename: Javier
authors.initials: J
authors.lastname: Sesé
authors.affiliation: Fachbereich Quantenelektronik, Physikalisch-Technische Bundesanstalt , Bundesallee 100, D-38116 Braunschweig, Germany.
authors.forename: Oliver
authors.initials: O
authors.lastname: Kieler
authors.affiliation: Physikalisches Institut-Experimentalphysik II and Center for Quantum Science (CQ) in LISA+, Universität Tübingen , Auf der Morgenstelle 14, D-72076 Tübingen, Germany.
authors.forename: Reinhold
authors.initials: R
authors.lastname: Kleiner
authors.affiliation: Physikalisches Institut-Experimentalphysik II and Center for Quantum Science (CQ) in LISA+, Universität Tübingen , Auf der Morgenstelle 14, D-72076 Tübingen, Germany.
authors.forename: Dieter
authors.initials: D
authors.lastname: Koelle
keywords: magnetic particle detection; nanoSQUID; nanofabrication; superconductivity; three-axis magnetometry