title: Superconducting Coplanar Waveguide Filters for Submillimeter Wave On-Chip Filterbank Spectrometers.
abstract: We show the first experimental results which prove that superconducting NbTiN coplanar-waveguide resonators can achieve a loadedQfactor in excess of 800 in the 350 GHz band. These resonators can be used as narrow band pass filters for on-chip filter bank spectrometers for astronomy. Moreover, the low-loss coplanar waveguide technology provides an interesting alternative to microstrip lines for constructing large scale submillimeter wave electronics in general.
authors.affiliation: Department of Microelectronics, Faculty of Electrical Engineering, Mathematics and Computer Science, Delft University of Technology, Mekelweg 4, 2628 CD Delft, The Netherlands ; Kavli Institute of Nanoscience, Faculty of Applied Sciences, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands.
authors.forename: A
authors.initials: A
authors.lastname: Endo
authors.affiliation: SRON Netherlands Institute for Space Research, Landleven 12, 9747 AD Groningen, The Netherlands.
authors.forename: S J C
authors.initials: SJ
authors.lastname: Yates
authors.affiliation: SRON Netherlands Institute for Space Research, Sorbonnelaan 2, 3584 CA Utrecht, The Netherlands.
authors.forename: J
authors.initials: J
authors.lastname: Bueno
authors.affiliation: Department of Microelectronics, Faculty of Electrical Engineering, Mathematics and Computer Science, Delft University of Technology, Mekelweg 4, 2628 CD Delft, The Netherlands.
authors.forename: D J
authors.initials: DJ
authors.lastname: Thoen
authors.affiliation: SRON Netherlands Institute for Space Research, Sorbonnelaan 2, 3584 CA Utrecht, The Netherlands.
authors.forename: V
authors.initials: V
authors.lastname: Murugesan
authors.affiliation: SRON Netherlands Institute for Space Research, Landleven 12, 9747 AD Groningen, The Netherlands ; Kapteyn Astronomical Institute, University of Groningen, P.O. Box 800, 9700 AV Groningen, The Netherlands.
authors.forename: A M
authors.initials: AM
authors.lastname: Baryshev
authors.affiliation: Kavli Institute of Nanoscience, Faculty of Applied Sciences, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands ; Physics Department, Moscow State Pedagogical University, 119991 Moscow, Russia.
authors.forename: T M
authors.initials: TM
authors.lastname: Klapwijk
authors.affiliation: Leiden Observatory, Leiden University, PO Box 9513, 2300 RA Leiden, The Netherlands.
authors.forename: P P
authors.initials: PP
authors.lastname: van der Werf
authors.affiliation: Department of Microelectronics, Faculty of Electrical Engineering, Mathematics and Computer Science, Delft University of Technology, Mekelweg 4, 2628 CD Delft, The Netherlands ; SRON Netherlands Institute for Space Research, Sorbonnelaan 2, 3584 CA Utrecht, The Netherlands.
authors.forename: J J A
authors.initials: JJ
authors.lastname: Baselmans
keywords: Astronomical instrumentation; Filters; Microwave kinetic inductance detectors; Spectroscopy; Submillimeter wave