title: High Sensitivity pH Sensor Based on Porous Silicon (PSi) Extended Gate Field-Effect Transistor.
abstract: In this study, porous silicon (PSi) was prepared and tested as an extended gate field-effect transistor (EGFET) for pH sensing. The prepared PSi has pore sizes in the range of 500 to 750 nm with a depth of approximately 42 µm. The results of testing PSi for hydrogen ion sensing in different pH buffer solutions reveal that the PSi has a sensitivity value of 66 mV/pH that is considered a super Nernstian value. The sensor considers stability to be in the pH range of 2 to 12. The hysteresis values of the prepared PSi sensor were approximately 8.2 and 10.5 mV in the low and high pH loop, respectively. The result of this study reveals a promising application of PSi in the field for detecting hydrogen ions in different solutions.
authors.affiliation: School of Applied Physics, Faculty of Science and Technology, Universiti Kebangsaan Malaysia (UKM), 43600 Bangi, Selangor, Malaysia. naif@ukm.edu.my.
authors.forename: Naif H
authors.initials: NH
authors.lastname: Al-Hardan
authors.affiliation: School of Applied Physics, Faculty of Science and Technology, Universiti Kebangsaan Malaysia (UKM), 43600 Bangi, Selangor, Malaysia. azmi@ukm.edu.my.
authors.forename: Muhammad Azmi
authors.initials: MA
authors.lastname: Abdul Hamid
authors.affiliation: School of Physics, Universiti Sains Malaysia (USM), 11800 Penang, Pulau Pinang, Malaysia. naser@usm.my.
authors.forename: Naser M
authors.initials: NM
authors.lastname: Ahmed
authors.affiliation: Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia (UKM), 43600 Bangi, Selangor, Malaysia. azmn@ukm.edu.my.
authors.forename: Azman
authors.initials: A
authors.lastname: Jalar
authors.affiliation: School of Applied Physics, Faculty of Science and Technology, Universiti Kebangsaan Malaysia (UKM), 43600 Bangi, Selangor, Malaysia. linda@ukm.edu.my.
authors.forename: Roslinda
authors.initials: R
authors.lastname: Shamsudin
authors.affiliation: School of Applied Physics, Faculty of Science and Technology, Universiti Kebangsaan Malaysia (UKM), 43600 Bangi, Selangor, Malaysia. insan@ukm.edu.my.
authors.forename: Norinsan Kamil
authors.initials: NK
authors.lastname: Othman
authors.affiliation: School of Applied Physics, Faculty of Science and Technology, Universiti Kebangsaan Malaysia (UKM), 43600 Bangi, Selangor, Malaysia. karkeng.iamkklim@gmail.com.
authors.forename: Lim
authors.initials: L
authors.lastname: Kar Keng
authors.affiliation: Low Dimensional Materials Research Centre, Department of Physics, Faculty of Science, University of Malaya, 50603 Kuala Lumpur, Malaysia. w.s.chiu@um.edu.my.
authors.forename: Weesiong
authors.initials: W
authors.lastname: Chiu
authors.affiliation: School of Electrical and Electronic Engineering-Universiti Sains Malaysia (USM), 14300 Nibong Tebal, Pulau Pinang, Malaysia. comeon500@yahoo.com.
authors.forename: Hamzah N
authors.initials: HN
authors.lastname: Al-Rawi
keywords: ionic conductivity; macroporous materials; pH sensitivity