title: Synthesis of arbitrary pulse waveforms in QCL-seeded ns-pulse CO2laser for optimization of an LPP EUV source.
abstract: One of the unique features of the quantum-cascade-laser-seeded, nanosecond-pulse CO2laser, invented for the purpose of generation of extreme UV by laser-produced-plasma, is a robust synthesis of arbitrary pulse waveforms. In the present Letter we report on experimental results that are, to our best knowledge, the first demonstration of such functionality obtainable from nanosecond-pulse CO2laser technology. An online pulse duration adjustment within 10-40 ns was demonstrated, and a few exemplary pulse waveforms were synthesized, such as "tophat," "tailspike," and "leadspike" shapes. Such output characteristics may be useful to optimize the performance of LPP EUV source.
authors.forename: Krzysztof M
authors.initials: KM
authors.lastname: Nowak
authors.forename: Yoshiaki
authors.initials: Y
authors.lastname: Kurosawa
authors.forename: Takashi
authors.initials: T
authors.lastname: Suganuma
authors.forename: Yasufumi
authors.initials: Y
authors.lastname: Kawasuji
authors.forename: Hiroaki
authors.initials: H
authors.lastname: Nakarai
authors.forename: Takashi
authors.initials: T
authors.lastname: Saito
authors.forename: Junichi
authors.initials: J
authors.lastname: Fujimoto
authors.forename: Hakaru
authors.initials: H
authors.lastname: Mizoguchi