title: Lateral Temperature-Gradient Method for High-Throughput Characterization of Material Processing by Millisecond Laser Annealing.
abstract: A high-throughput method for characterizing the temperature dependence of material properties following microsecond to millisecond thermal annealing, exploiting the temperature gradients created by a lateral gradient laser spike anneal (lgLSA), is presented. Laser scans generate spatial thermal gradients of up to 5 °C/μm with peak temperatures ranging from ambient to in excess of 1400 °C, limited only by laser power and materials thermal limits. Discrete spatial property measurements across the temperature gradient are then equivalent to independent measurements after varying temperature anneals. Accurate temperature calibrations, essential to quantitative analysis, are critical and methods for both peak temperature and spatial/temporal temperature profile characterization are presented. These include absolute temperature calibrations based on melting and thermal decomposition, and time-resolved profiles measured using platinum thermistors. A variety of spatially resolved measurement probes, ranging from point-like continuous profiling to large area sampling, are discussed. Examples from annealing of III-V semiconductors, CdSe quantum dots, low-κ dielectrics, and block copolymers are included to demonstrate the flexibility, high throughput, and precision of this technique.
authors.affiliation: Department of Materials Science and Engineering, Cornell University , Ithaca, New York 14853, United States.
authors.forename: Robert T
authors.initials: RT
authors.lastname: Bell
authors.affiliation: Department of Materials Science and Engineering, Cornell University , Ithaca, New York 14853, United States.
authors.forename: Alan G
authors.initials: AG
authors.lastname: Jacobs
authors.affiliation: Department of Chemical and Biomolecular Engineering, Cornell University , Ithaca, New York 14853, United States.
authors.forename: Victoria C
authors.initials: VC
authors.lastname: Sorg
authors.affiliation: Department of Materials Science and Engineering, Cornell University , Ithaca, New York 14853, United States.
authors.forename: Byungki
authors.initials: B
authors.lastname: Jung
authors.affiliation: Department of Materials Science and Engineering, Cornell University , Ithaca, New York 14853, United States.
authors.forename: Megan O
authors.initials: MO
authors.lastname: Hill
authors.affiliation: Department of Materials Science and Engineering, Cornell University , Ithaca, New York 14853, United States.
authors.forename: Benjamin E
authors.initials: BE
authors.lastname: Treml
authors.affiliation: Department of Materials Science and Engineering, Cornell University , Ithaca, New York 14853, United States.
authors.forename: Michael O
authors.initials: MO
authors.lastname: Thompson
mesh_terms: D002138:Calibration; D057166:High-Throughput Screening Assays; D007834:Lasers; D008420:Manufactured Materials; D008422:Materials Testing; D055585:Physical Phenomena; D011108:Polymers; D045663:Quantum Dots; D012666:Semiconductors; D013696:Temperature
chemical_list: D011108:Polymers
keywords: annealing temperature gradients; high-throughput annealing studies; lateral gradient laser spike annealing; spatially refined measurements; thermal processing