title: Quartz tuning fork based microwave impedance microscopy.
abstract: Microwave impedance microscopy (MIM), a near-field microwave scanning probe technique, has become a powerful tool to characterize local electrical responses in solid state samples. We present the design of a new type of MIM sensor based on quartz tuning fork and electrochemically etched thin metal wires. Due to a higher aspect ratio tip and integration with tuning fork, such design achieves comparable MIM performance and enables easy self-sensing topography feedback in situations where the conventional optical feedback mechanism is not available, thus is complementary to microfabricated shielded stripline-type probes. The new design also enables stable differential mode MIM detection and multiple-frequency MIM measurements with a single sensor.
authors.affiliation: Geballe Laboratory for Advanced Materials, Stanford University, Stanford, California 94305, USA.
authors.forename: Yong-Tao
authors.initials: YT
authors.lastname: Cui
authors.affiliation: Geballe Laboratory for Advanced Materials, Stanford University, Stanford, California 94305, USA.
authors.forename: Eric Yue
authors.initials: EY
authors.lastname: Ma
authors.affiliation: Geballe Laboratory for Advanced Materials, Stanford University, Stanford, California 94305, USA.
authors.forename: Zhi-Xun
authors.initials: ZX
authors.lastname: Shen