title: Design of a MEMS-Based Oscillator Using 180nm CMOS Technology.
abstract: Micro-electro mechanical system (MEMS) based oscillators are revolutionizing the timing industry as a cost effective solution, enhanced with more features, superior performance and better reliability. The design of a sustaining amplifier was triggered primarily to replenish MEMS resonator's high motion losses due to the possibility of their 'system-on-chip' integrated circuit solution. The design of a sustaining amplifier observing high gain and adequate phase shift for an electrostatic clamp-clamp (C-C) beam MEMS resonator, involves the use of an 180nm CMOS process with an unloaded Q of 1000 in realizing a fixed frequency oscillator. A net 122dBΩ transimpedance gain with adequate phase shift has ensured 17.22MHz resonant frequency oscillation with a layout area consumption of 0.121 mm2 in the integrated chip solution, the sustaining amplifier draws 6.3mW with a respective phase noise of -84dBc/Hz at 1kHz offset is achieved within a noise floor of -103dBC/Hz. In this work, a comparison is drawn among similar design studies on the basis of a defined figure of merit (FOM). A low phase noise of 1kHz, high figure of merit and the smaller size of the chip has accredited to the design's applicability towards in the implementation of a clock generative integrated circuit. In addition to that, this complete silicon based MEMS oscillator in a monolithic solution has offered a cost effective solution for industrial or biomedical electronic applications.
authors.affiliation: Department of Electrical Engineering, University of Malaya, 50603 Kuala Lumpur, Federal Territory of Kuala Lumpur, Malaysia.
authors.forename: Sukanta
authors.initials: S
authors.lastname: Roy
authors.affiliation: Department of Electrical Engineering, University of Malaya, 50603 Kuala Lumpur, Federal Territory of Kuala Lumpur, Malaysia.
authors.forename: Harikrishnan
authors.initials: H
authors.lastname: Ramiah
authors.affiliation: Department of Electrical Engineering, University of Malaya, 50603 Kuala Lumpur, Federal Territory of Kuala Lumpur, Malaysia.
authors.forename: Ahmed Wasif
authors.initials: AW
authors.lastname: Reza
authors.affiliation: Department of Electrical Engineering, University of Malaya, 50603 Kuala Lumpur, Federal Territory of Kuala Lumpur, Malaysia.
authors.forename: Chee Cheow
authors.initials: CC
authors.lastname: Lim
authors.affiliation: Silterra Malaysia Sdn. Bhd.(368948-D), 47800 Petaling Jaya, Selangor, Malaysia.
authors.forename: Eloi Marigo
authors.initials: EM
authors.lastname: Ferrer
mesh_terms: D004582:Electronics, Medical; D008962:Models, Theoretical; D014741:Video Recording