title: Design of Diaphragm and Coil for Stable Performance of an Eddy Current Type Pressure Sensor.
abstract: The aim of this work was to develop an eddy current type pressure sensor and investigate its fundamental characteristics affected by the mechanical and electrical design parameters of sensor. The sensor has two key components, i.e., diaphragm and coil. On the condition that the outer diameter of sensor is 10 mm, two key parts should be designed so as to keep a good linearity and sensitivity. Experiments showed that aluminum is the best target material for eddy current detection. A round-grooved diaphragm is suggested in order to measure more precisely its deflection caused by applied pressures. The design parameters of a round-grooved diaphragm can be selected depending on the measuring requirements. A developed pressure sensor with diaphragm of t = 0.2 mm and w = 1.05 mm was verified to measure pressure up to 10 MPa with very good linearity and errors of less than 0.16%.
authors.affiliation: School of Mechanical Engineering, Pusan National University, 2, Busandaehak-ro 63 beon gil, Geumjeong-gu, Busan 46241, Korea. hong30140@pusan.ac.kr.
authors.forename: Hyo Ryeol
authors.initials: HR
authors.lastname: Lee
authors.affiliation: NOVASEN Co., LTD, 25, Bansong-ro 525 beon gil, Haeundae-gu, Busan 48002, Korea. novasen@naver.com.
authors.forename: Gil Seung
authors.initials: GS
authors.lastname: Lee
authors.affiliation: Research Institute of Mechanical Technology, Pusan National University, 2, Busandaehak-ro 63 beon gil, Geumjeong-gu, Busan 46241, Korea. hyokim@pusan.ac.kr.
authors.forename: Hwa Young
authors.initials: HY
authors.lastname: Kim
authors.affiliation: School of Mechanical Engineering, Pusan National University, 2, Busandaehak-ro 63 beon gil, Geumjeong-gu, Busan 46241, Korea. jhwahn@pusan.ac.kr.
authors.forename: Jung Hwan
authors.initials: JH
authors.lastname: Ahn
keywords: eddy current; impedance change; pressure sensor; round-groove