title: Development of a suspension type sliding planar motion table using magnetic fluid lubrication.
abstract: A sliding planar motion table system that can be used for the lens driving actuator of a laser cutting machine was developed. The system uses magnetic fluid as the lubricant to avoid the leakage of lubricating oil under the table and reduce environmental pollution. The motion table is suspended from the guide surface by an attractive force generated by electromagnets to reduce the contact and frictional forces between the table and the guide surface. The table is capable of movement in one rotational and two translational directions over the guide surface using six electromagnets and three non-contact displacement sensors. Experimental results showed that the magnetic suspension of the table reduced the friction by 82.1% compared to the friction that would otherwise be generated by the dead weight of the table. Circular motion within a diameter of 2 mm was achieved with resolutions of 5 μm and 20 μrad in the translational and rotational directions, respectively. A bandwidth of higher than 100 Hz was also achieved in the three movement directions.
authors.affiliation: Division of Advanced Manufacturing, Graduate School at Shenzhen, Tsinghua University, Shenzhen 518055, China.
authors.forename: Xinghui
authors.initials: X
authors.lastname: Li
authors.affiliation: Institute of Innovative Research, Tokyo Institute of Technology, Yokohama 226-8503, Japan.
authors.forename: Tadahiko
authors.initials: T
authors.lastname: Shinshi
authors.affiliation: School of Engineering, Tokyo Institute of Technology, Tokyo 152-8550, Japan.
authors.forename: Wataru
authors.initials: W
authors.lastname: Hijikata
authors.affiliation: Advanced Technology R&D Center, Mitsubishi Electric Corporation, Amagasaki 661-8661, Japan.
authors.forename: Yoshihiro
authors.initials: Y
authors.lastname: Morimoto