title: ZnO-Based Microcavities Sculpted by Focus Ion Beam Milling.
abstract: We reported an easy fabrication method to realize ZnO-based microcavities with various cavity shapes by focused ion beam (FIB) milling. The optical characteristics of different shaped microcavities have been systematically carried out and analyzed. Through comprehensive studies of cathodoluminescence and photoluminescence spectra, the whispering gallery mode (WGM) was observed in different shaped microcavities. Up further increasing excitation, the lasing action was dominated by these WGMs and matched very well to the simulated results. Our experiment shows that ZnO microcavities with different shapes can be made with high quality by FIB milling for specific applications of microlight sources and optical devices.
authors.affiliation: Department of Photonics, National Chiao Tung University, 1001 University Road, Hsinchu, 300, Taiwan.
authors.forename: Tsu-Chi
authors.initials: TC
authors.lastname: Chang
authors.affiliation: Department of Photonics, National Chiao Tung University, 1001 University Road, Hsinchu, 300, Taiwan.
authors.forename: Kuo-Bin
authors.initials: KB
authors.lastname: Hong
authors.affiliation: Department of Photonics, National Chiao Tung University, 1001 University Road, Hsinchu, 300, Taiwan.
authors.forename: Ying-Yu
authors.initials: YY
authors.lastname: Lai
authors.affiliation: Department of Photonics, National Chiao Tung University, 1001 University Road, Hsinchu, 300, Taiwan.
authors.forename: Yu-Hsun
authors.initials: YH
authors.lastname: Chou
authors.affiliation: Department of Photonics, National Chiao Tung University, 1001 University Road, Hsinchu, 300, Taiwan.
authors.forename: Shing-Chung
authors.initials: SC
authors.lastname: Wang
authors.affiliation: Department of Photonics, National Chiao Tung University, 1001 University Road, Hsinchu, 300, Taiwan. timtclu@mail.nctu.edu.tw.
authors.forename: Tien-Chang
authors.initials: TC
authors.lastname: Lu
keywords: Focus ion beam; Microcavity; Microdisk; Whispering gallery mode; ZnO