title: Two Primary Standards for Low Flows of Gases.
abstract: We describe two primary standards for gas flow in the range from 0.1 to 1000 μmol/s. (1 μmol/s ≅ 1.3 cm(3)/min at 0 °C and 1 atmosphere.) The first standard is a volumetric technique in which measurements of pressure, volume, temperature, and time are recorded while gas flows in or out of a stainless steel bellows at constant pressure. The second standard is a gravimetric technique. A small aluminum pressure cylinder supplies gas to a laminar flow meter, and the integrated throughput of the laminar flow meter is compared to the weight decrease of the cylinder. The two standards, which have standard uncertainties of 0.019 %, agree to within combined uncertainties with each other and with a third primary standard at NIST based on pressure measurements at constant volume.
authors.affiliation: National Institute of Standards and Technology, Gaithersburg, MD 20899-8364.
authors.forename: Robert F
authors.initials: RF
authors.lastname: Berg
authors.affiliation: Mykrolis Corporation, Allen, TX 75013-8003.
authors.forename: Stuart A
authors.initials: SA
authors.lastname: Tison
keywords: constant pressure; gas flow meter; gravimetric; laminar flow meter; nitrogen; primary standard; volumetric