title: Low-loss photonic device in Ge-Sb-S chalcogenide glass.
abstract: Low-loss waveguides constitute an important building block for integrated photonic systems. In this work, we investigated low-loss photonic device fabrication in Ge23Sb7S70chalcogenide glass using electron beam lithography followed by plasma dry etching. High-index-contrast waveguides with a low propagation loss of 0.5 dB/cm and microdisk resonators with an intrinsic quality factor (Q-factor) of 1.2×106were demonstrated. Both figures represent, to the best of our knowledge, the best low-loss results reported thus far in submicrometer single-mode chalcogenide glass devices.
authors.forename: Qingyang
authors.initials: Q
authors.lastname: Du
authors.forename: Yizhong
authors.initials: Y
authors.lastname: Huang
authors.forename: Junying
authors.initials: J
authors.lastname: Li
authors.forename: Derek
authors.initials: D
authors.lastname: Kita
authors.forename: Jérôme
authors.initials: J
authors.lastname: Michon
authors.forename: Hongtao
authors.initials: H
authors.lastname: Lin
authors.forename: Lan
authors.initials: L
authors.lastname: Li
authors.forename: Spencer
authors.initials: S
authors.lastname: Novak
authors.forename: Kathleen
authors.initials: K
authors.lastname: Richardson
authors.forename: Wei
authors.initials: W
authors.lastname: Zhang
authors.forename: Juejun
authors.initials: J
authors.lastname: Hu