title: Temporally-stable active precision mount for large optics.
abstract: We present a temporally-stable active mount to compensate for manufacturing-induced deformations of reflective optical components. In this paper, we introduce the design of the active mount, and its evaluation results for two sample mirrors: a quarter mirror of 115 × 105 × 9 mm3, and a full mirror of 228 × 210 × 9 mm3. The quarter mirror with 20 actuators shows a best wavefront error rms of 10 nm. Its installation position depending deformations are addressed by long-time measurements over 14 weeks indicating no significance of the orientation. Size-induced differences of the mount are studied by a full mirror with 80 manual actuators arranged in the same actuator pattern as the quarter mirror. This sample shows a wavefront error rms of (27±2) nm over a measurement period of 46 days. We conclude that the developed mount is suitable to compensate for manufacturing-induced deformations of large reflective optics, and likely to be included in the overall systems alignment procedure.
authors.forename: Claudia
authors.initials: C
authors.lastname: Reinlein
authors.forename: Christoph
authors.initials: C
authors.lastname: Damm
authors.forename: Nicolas
authors.initials: N
authors.lastname: Lange
authors.forename: Andreas
authors.initials: A
authors.lastname: Kamm
authors.forename: Matthias
authors.initials: M
authors.lastname: Mohaupt
authors.forename: Aoife
authors.initials: A
authors.lastname: Brady
authors.forename: Matthias
authors.initials: M
authors.lastname: Goy
authors.forename: Nina
authors.initials: N
authors.lastname: Leonhard
authors.forename: Ramona
authors.initials: R
authors.lastname: Eberhardt
authors.forename: Uwe
authors.initials: U
authors.lastname: Zeitner
authors.forename: Andreas
authors.initials: A
authors.lastname: Tünnermann