title: Design and experimental demonstration of electromagnetic actuation utilized on micrograting accelerometers.
abstract: This paper presents the design, analysis, and experimental demonstration of electromagnetic actuation utilized on micrograting accelerometers. It mainly consists of a permanent magnet and a driving coil made of three planar printed circuit board coils. A silicon movable platform and the permanent magnet with an axial magnetization of 750×103A/m form the proof mass. The eight cantilever beams and the movable platform are made by means of the etching process, and the aluminum micrograting is fabricated by the lift-off process. Experimental data show that the electromagnetic force can reach 1.41 mN when the driving voltage is about 2.96 V. The linear operating region of the accelerometer is [-1  g,1  g] under a driving voltage of -2.8 to 2.96 V. A mean sensitivity of 2.82  V/g is obtained by three repeated feedback experiments. In addition, a linear operating region of [-2.2  g,2.2  g] is calculated when the driving voltage is [-7  V,7  V]. There is a linear relation between the driving voltage and the input acceleration.
authors.forename: Yang
authors.initials: Y
authors.lastname: Wang
authors.forename: Lishuang
authors.initials: L
authors.lastname: Feng
authors.forename: Xiao
authors.initials: X
authors.lastname: Wang