title: Determination of the full scattering matrix using coherent Fourier scatterometry.
abstract: We demonstrate a method to obtain within an arbitrary numerical aperture (NA) the entire scattering matrix of a scatterer by using focused beam coherent Fourier scatterometry. The far-field intensities of all scattered angles within the NA of the optical system are obtained in one shot. The corresponding phases of the field are obtained by an interferometric configuration. This method enables the retrieval of the maximum available information about the scatterer from scattered far-field data contained in the given NA of the system.
authors.forename: Nitish
authors.initials: N
authors.lastname: Kumar
authors.forename: Luca
authors.initials: L
authors.lastname: Cisotto
authors.forename: Sarathi
authors.initials: S
authors.lastname: Roy
authors.forename: Gopika K P
authors.initials: GK
authors.lastname: Ramanandan
authors.forename: Silvania F
authors.initials: SF
authors.lastname: Pereira
authors.forename: H
authors.initials: H
authors.lastname: Paul Urbach