title: Computational method for simulation of thermal load distribution in a lithographic lens.
abstract: As a crucial step for thermal aberration prediction, thermal simulation is an effective way to acquire the temperature distribution of lenses. In the case of rigorous thermal simulation with the finite volume method, the amount of absorbed energy and its distribution within lens elements should be provided to guarantee simulation accuracy. In this paper, a computational method for simulation of thermal load distribution concerning lens material absorption was proposed based on light intensity of lens elements' surfaces. An algorithm for the verification of the method was also introduced, and the results showed that the method presented in this paper is an effective solution for thermal load distribution in a lithographic lens.
authors.forename: Xinfeng
authors.initials: X
authors.lastname: Yu
authors.forename: Mingyang
authors.initials: M
authors.lastname: Ni
authors.forename: Dawei
authors.initials: D
authors.lastname: Rui
authors.forename: Yi
authors.initials: Y
authors.lastname: Qu
authors.forename: Wei
authors.initials: W
authors.lastname: Zhang