title: Nanoscale Engineering of Closely-Spaced Electronic Spins in Diamond.
abstract: Numerous theoretical protocols have been developed for quantum information processing with dipole-coupled solid-state spins. Nitrogen vacancy (NV) centers in diamond have many of the desired properties, but a central challenge has been the positioning of NV centers at the nanometer scale that would allow for efficient and consistent dipolar couplings. Here we demonstrate a method for chip-scale fabrication of arrays of single NV centers with record spatial localization of about 10 nm in all three dimensions and controllable inter-NV spacing as small as 40 nm, which approaches the length scale of strong dipolar coupling. Our approach uses masked implantation of nitrogen through nanoapertures in a thin gold film, patterned via electron-beam lithography and dry etching. We verified the position and spin properties of the resulting NVs through wide-field super-resolution optically detected magnetic resonance imaging.
authors.affiliation: Department of Applied Physics and Applied Mathematics, Columbia University , New York, New York 10027, United States.
authors.forename: Diego
authors.initials: D
authors.lastname: Scarabelli
authors.affiliation: Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology , Cambridge, Massachusetts 02139, United States.
authors.forename: Matt
authors.initials: M
authors.lastname: Trusheim
authors.affiliation: Diamond Nanotechnologies, Inc., Boston, Massachusetts 02134, Unites States.
authors.forename: Ophir
authors.initials: O
authors.lastname: Gaathon
authors.affiliation: Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology , Cambridge, Massachusetts 02139, United States.
authors.forename: Dirk
authors.initials: D
authors.lastname: Englund
authors.affiliation: Department of Applied Physics and Applied Mathematics, Columbia University , New York, New York 10027, United States.
authors.forename: Shalom J
authors.initials: SJ
authors.lastname: Wind
keywords: Nanopatterning; diamond; ion implantation; nitrogen vacancy; quantum computing; single spin