title: Shape-controllable, bottom-up fabrication of microlens using oblique angle deposition.
abstract: This Letter reports a novel method for the simple fabrication of microlens arrays with a controlled shape and diameter on glass substrates. Multilayer stacks of silicon dioxide deposited by oblique angle deposition with hole mask patterns enable microlens formation. Precise control of mask height and distance, as well as oblique angle steps between deposited layers, supports the controllability of microlens geometry. The fabricated microlens arrays with designed geometry exhibit uniform optical properties.
authors.forename: Hee Ju
authors.initials: HJ
authors.lastname: Choi
authors.forename: Eun Kyu
authors.initials: EK
authors.lastname: Kang
authors.forename: Gun Wu
authors.initials: GW
authors.lastname: Ju
authors.forename: Young Min
authors.initials: YM
authors.lastname: Song
authors.forename: Yong Tak
authors.initials: YT
authors.lastname: Lee