title: Germanium-on-SOI waveguides for mid-infrared wavelengths.
abstract: We report on the development of Germanium-on-SOI waveguides for mid-infrared wavelengths. The strip waveguides have been formed in 0.85 and 2 μm thick Ge grown on SOI substrate with 220 nm thick Si overlayer. The propagation loss for various waveguide widths has been measured using the Fabry-Perot method with temperature tuning. The minimum loss of ~8 dB/cm has been achieved for 0.85 μm thick Ge core using 3.682 μm laser excitation. The transparency of these waveguides has been measured up to at least 3.82 μm.
authors.forename: Usman
authors.initials: U
authors.lastname: Younis
authors.forename: Sudheer K
authors.initials: SK
authors.lastname: Vanga
authors.forename: Andy Eu-Jin
authors.initials: AE
authors.lastname: Lim
authors.forename: Patrick Guo-Qiang
authors.initials: PG
authors.lastname: Lo
authors.forename: Andrew A
authors.initials: AA
authors.lastname: Bettiol
authors.forename: Kah-Wee
authors.initials: KW
authors.lastname: Ang