title: Highly efficient blazed grating with multilayer coating for tender X-ray energies.
abstract: For photon energies of 1 - 5 keV, blazed gratings with multilayer coating are ideally suited for the suppression of stray and higher orders light in grating monochromators. We developed and characterized a blazed 2000 lines/mm grating coated with a 20 period Cr/C- multilayer. The multilayer d-spacing of 7.3 nm has been adapted to the line distance of 500 nm and the blaze angle of 0.84° in order to provide highest efficiency in the photon energy range between 1.5 keV and 3 keV. Efficiency of the multilayer grating as well as the reflectance of a witness multilayer which were coated simultaneously have been measured. An efficiency of 35% was measured at 2 keV while a maximum efficiency of 55% was achieved at 4 keV. In addition, a strong suppression of higher orders was observed which makes blazed multilayer gratings a favorable dispersing element also for the low X-ray energy range.
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authors.lastname: Senf
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authors.lastname: Bijkerk
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authors.lastname: Eggenstein
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authors.lastname: Gwalt
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authors.lastname: Huang
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authors.lastname: Kruijs
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authors.lastname: Kutz
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authors.lastname: Packe
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authors.lastname: Schäfers
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authors.lastname: Siewert
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authors.lastname: Waberski
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authors.lastname: Wang
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authors.lastname: Zeschke
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authors.lastname: Erko