title: Parylene-on-oil packaging for long-term implantable pressure sensors.
abstract: This paper reports and analyzes the feasibility study of a parylene-on-oil encapsulation packaging method of pressure sensors targeted for long-term implantation. Commercial barometric digital-output pressure sensors are enclosed in silicone oil and then encapsulated in situ with parylene-C or -D (PA-C, PA-D) chemical vapor deposition. Experimentally, sensors encapsulated with 30,000 cSt silicone oil and 27 μm PA-D show good performance for 6 weeks in 77 °C saline with >99 % of original sensitivity, corresponding to an extrapolated lifetime of around 21 months in 37 °C saline. This work shows that, with proper designs, such a packaging method can preserve the original pressure sensor sensitivity without offset, validated throughout accelerated lifetime tests. In experiments, wires on the prototypes are used for external electronics but it is found that they contributed to early failures, which would be absent in real wireless versions, indicating a potential for even longer lifetimes. Finally, a verified model is presented to predict the pressure sensor sensitivity of parylene-on-oil packaging with and without the presence of a bubble in the oil.
authors.affiliation: Electrical Engineering, California Institute of Technology, 1200 E. California Blvd, MC 136-93, Pasadena, CA, 91125, USA. ashapero@mems.caltech.edu.
authors.forename: Aubrey M
authors.initials: AM
authors.lastname: Shapero
authors.affiliation: Electrical Engineering, California Institute of Technology, 1200 E. California Blvd, MC 136-93, Pasadena, CA, 91125, USA.
authors.forename: Yang
authors.initials: Y
authors.lastname: Liu
authors.affiliation: Electrical Engineering, California Institute of Technology, 1200 E. California Blvd, MC 136-93, Pasadena, CA, 91125, USA.
authors.forename: Yu-Chong
authors.initials: YC
authors.lastname: Tai
mesh_terms: D020099:Coated Materials, Biocompatible / Q000737:chemistry; D008962:Models, Theoretical; D009821:Oils / Q000737:chemistry*; D011108:Polymers / Q000737:chemistry*; D011312:Pressure; D019736:Prostheses and Implants; D012680:Sensitivity and Specificity; D014160:Transducers, Pressure; D014992:Xylenes / Q000737:chemistry*
chemical_list: D020099:Coated Materials, Biocompatible; D009821:Oils; D011108:Polymers; D014992:Xylenes; C011055:parylene
keywords: Implantable pressure sensor; Lifetime; Long-term stability; Packaging; Parylene; Reliability