title: [Study on the Properties of the Pc-Si Films Prepared by Magnetron Co-Sputtering at Low Temperature].
abstract: The polycrystalline silicon thin films play an important role in the field of electronics. In the paper, α-SiAl composite membranes on glass substrates was prepared by magnetron co-sputtering. The contents of Al radicals encapsulated-in the α-Si film can be adjusted by changing the Al to Si sputtering power ratios. The as-prepared α-Si films were converted into polycrystalline films by using a rapid thermal annealing (RTP) at low temperature of 350 degrees C for 10 minutes in N2 atmosphere. An X-ray diffractometer, and Raman scattering and UV-Visible-NIR Spectrometers were used to characterize the properties of the Pc-Si films. The influences of Al content on the properties of the Pc-Si films were studied. The results showed that the polycrystalline silicon films were obtained from α-SiAl composite films which were prepared by magnetron co-sputtering at a low temperature following by a rapid thermal annealing. The grain size and the degree of crystallization of the Pc-Si films increased with the increase of Al content, while the optical band gap was reduced. The nc-Si films were prepared when the Al to Si sputtering power ratio was 0.1. And a higher Crystallization rate (≥ 85%) of polycrystalline silicon films were obtained when the ratio was 0.3. The band gaps of the polycrystalline silicon films can be controlled by changing the aluminum content in the films.
authors.forename: Liang-fei
authors.initials: LF
authors.lastname: Duan
authors.forename: Wen
authors.initials: W
authors.lastname: Yang
authors.forename: Li-yuan
authors.initials: LY
authors.lastname: Zhang
authors.forename: Xue-ming
authors.initials: XM
authors.lastname: Li
authors.forename: Xiao-bo
authors.initials: XB
authors.lastname: Chen
authors.forename: Pei-zhi
authors.initials: PZ
authors.lastname: Yang