title: Uncertainty in Quantitative Electron Probe Microanalysis.
abstract: Quantitative electron probe analysis is based on models based on the physics or x-ray generation, empirically adjusted to the analyses of specimens of known composition. Their accuracy can be estimated by applying them to a set of specimens of presumably well-known composition.
authors.affiliation: National Institute of Standards and Technology, Gaithersburg, MD 10899-0001.
authors.forename: Kurt F J
authors.initials: KF
authors.lastname: Heinrich
keywords: absorption coefficients; accuracy; microanalysis; models; x-ray absorption; x-ray spectrometry