title: Quantitative Chemically Specific Coherent Diffractive Imaging of Reactions at Buried Interfaces with Few Nanometer Precision.
abstract: We demonstrate quantitative, chemically specific imaging of buried nanostructures, including oxidation and diffusion reactions at buried interfaces, using nondestructive tabletop extreme ultraviolet (EUV) coherent diffractive imaging (CDI). Copper nanostructures inlaid in SiO2 are coated with 100 nm of aluminum, which is opaque to visible light and thick enough that neither visible microscopy nor atomic force microscopy can image the buried interface. Short wavelength high harmonic beams can penetrate the aluminum layer, yielding high-contrast images of the buried structures. Quantitative analysis shows that the reflected EUV light is extremely sensitive to the formation of multiple oxide layers, as well as interdiffusion of materials occurring at the metal-metal and metal-insulator boundaries deep within the nanostructure with few nanometers precision.
authors.affiliation: JILA, University of Colorado , 440 UCB, Boulder, Colorado 80309-0440, United States.
authors.forename: Elisabeth R
authors.initials: ER
authors.lastname: Shanblatt
authors.affiliation: JILA, University of Colorado , 440 UCB, Boulder, Colorado 80309-0440, United States.
authors.forename: Christina L
authors.initials: CL
authors.lastname: Porter
authors.affiliation: JILA, University of Colorado , 440 UCB, Boulder, Colorado 80309-0440, United States.
authors.forename: Dennis F
authors.initials: DF
authors.lastname: Gardner
authors.affiliation: JILA, University of Colorado , 440 UCB, Boulder, Colorado 80309-0440, United States.
authors.forename: Giulia F
authors.initials: GF
authors.lastname: Mancini
authors.affiliation: JILA, University of Colorado , 440 UCB, Boulder, Colorado 80309-0440, United States.
authors.forename: Robert M
authors.initials: RM
authors.lastname: Karl
authors.affiliation: JILA, University of Colorado , 440 UCB, Boulder, Colorado 80309-0440, United States.
authors.forename: Michael D
authors.initials: MD
authors.lastname: Tanksalvala
authors.affiliation: JILA, University of Colorado , 440 UCB, Boulder, Colorado 80309-0440, United States.
authors.forename: Charles S
authors.initials: CS
authors.lastname: Bevis
authors.affiliation: SUNY Poly SEMATECH , 257 Fuller Road, Suite 2200, Albany, New York 12203, United States.
authors.forename: Victor H
authors.initials: VH
authors.lastname: Vartanian
authors.affiliation: JILA, University of Colorado , 440 UCB, Boulder, Colorado 80309-0440, United States.
authors.forename: Henry C
authors.initials: HC
authors.lastname: Kapteyn
authors.affiliation: JILA, University of Colorado , 440 UCB, Boulder, Colorado 80309-0440, United States.
authors.forename: Daniel E
authors.initials: DE
authors.lastname: Adams
authors.affiliation: JILA, University of Colorado , 440 UCB, Boulder, Colorado 80309-0440, United States.
authors.forename: Margaret M
authors.initials: MM
authors.lastname: Murnane
keywords: Nanometrology; buried layers; chemical specificity; extreme ultraviolet; high harmonic generation; imaging