title: Implications of Polishing Techniques in Quantitative X-Ray Microanalysis.
abstract: Specimen preparation using abrasives results in surface and subsurface mechanical (stresses, strains), geometrical (roughness), chemical (contaminants, reaction products) and physical modifications (structure, texture, lattice defects). The mechanisms involved in polishing with abrasives are presented to illustrate the effects of surface topography, surface and subsurface composition and induced lattice defects on the accuracy of quantitative x-ray microanalysis of mineral materials with the electron probe microanalyzer (EPMA).
authors.affiliation: Australian Key Centre for Microscopy and Microanalysis, The University of Sydney, NSW 2006, Australia.
authors.forename: Guy
authors.initials: G
authors.lastname: Rémond
authors.affiliation: Electron Microscope Unit, The University of Sydney, NSW 2006, Australia.
authors.forename: Clive
authors.initials: C
authors.lastname: Nockolds
authors.affiliation: Microstructural Analysis Unit, University Technology of Sydney, NSW 2007, Australia.
authors.forename: Matthew
authors.initials: M
authors.lastname: Phillips
authors.affiliation: Laboratoire de Microanalyse des Surfaces, Ecole Nationale de Mécanique et des Microtechniques, Besançon, France.
authors.forename: Claude
authors.initials: C
authors.lastname: Roques-Carmes
keywords: abrasive wear; bound abrasives; chemical-mechanical polishing; loose abrasives; polishing; surface and subsurface damage; x-ray microanalysis