title: Nanomechanical Pyrolytic Carbon Resonators: Novel Fabrication Method and Characterization of Mechanical Properties.
abstract: Micro- and nanomechanical string resonators, which essentially are highly stressed bridges, are of particular interest for micro- and nanomechanical sensing because they exhibit resonant behavior with exceptionally high quality factors. Here, we fabricated and characterized nanomechanical pyrolytic carbon resonators (strings and cantilevers) obtained through pyrolysis of photoresist precursors. The developed fabrication process consists of only three processing steps: photolithography, dry etching and pyrolysis. Two different fabrication strategies with two different photoresists, namely SU-8 2005 (negative) and AZ 5214e (positive), were compared. The resonant behavior of the pyrolytic resonators was characterized at room temperature and in high vacuum using a laser Doppler vibrometer. The experimental data was used to estimate the Young's modulus of pyrolytic carbon and the tensile stress in the string resonators. The Young's moduli were calculated to be 74 ± 8 GPa with SU-8 and 115 ± 8 GPa with AZ 5214e as the precursor. The tensile stress in the string resonators was 33 ± 7 MPa with AZ 5214e as the precursor. The string resonators displayed maximal quality factor values of up to 3000 for 525-µm-long structures.
authors.affiliation: Department of Micro- and Nanotechnology, Technical University of Denmark, Kgs. Lyngby 2800, Denmark. makku@nanotech.dtu.dk.
authors.forename: Maksymilian
authors.initials: M
authors.lastname: Kurek
authors.affiliation: Department of Micro- and Nanotechnology, Technical University of Denmark, Kgs. Lyngby 2800, Denmark. frederikklarsen@gmail.com.
authors.forename: Frederik K
authors.initials: FK
authors.lastname: Larsen
authors.affiliation: Department of Micro- and Nanotechnology, Technical University of Denmark, Kgs. Lyngby 2800, Denmark. peem@nanotech.dtu.dk.
authors.forename: Peter E
authors.initials: PE
authors.lastname: Larsen
authors.affiliation: Department of Micro- and Nanotechnology, Technical University of Denmark, Kgs. Lyngby 2800, Denmark. silvan.schmid@tuwien.ac.at.|Institute of Sensor and Actuator Systems, TU Wien, Vienna 1040, Austria. silvan.schmid@tuwien.ac.at.
authors.forename: Silvan
authors.initials: S
authors.lastname: Schmid
authors.affiliation: Department of Micro- and Nanotechnology, Technical University of Denmark, Kgs. Lyngby 2800, Denmark. Anja.Boisen@nanotech.dtu.dk.
authors.forename: Anja
authors.initials: A
authors.lastname: Boisen
authors.affiliation: Department of Micro- and Nanotechnology, Technical University of Denmark, Kgs. Lyngby 2800, Denmark. Stephan.Keller@nanotech.dtu.dk.
authors.forename: Stephan S
authors.initials: SS
authors.lastname: Keller
keywords: MEMS; microfabrication; pyrolysis; pyrolytic carbon; resonators