title: The Microcalorimeter for Industrial Applications.
abstract: To achieve the dramatic increases in x-ray spectral resolution (<20 eV at 1.5k eV) desired by market segments such as the semiconductor industry, NIST developed a transition-edge sensor (TES) microcalorimeter. To bring this exciting, yet demanding, new technology to the industrial users, certain criteria must be addressed. Aspects of resolution, cooling and hold time, count rates as well as vibrations are considered. Data is presented to the present efforts to handle these issues as well as discussing development plans for the future.
authors.affiliation: EDAX Inc., 91 McKee Dr., Mahwah, NJ 07430 USA.
authors.forename: Del
authors.initials: D
authors.lastname: Redfern
authors.affiliation: EDAX Inc., 91 McKee Dr., Mahwah, NJ 07430 USA.
authors.forename: Joe
authors.initials: J
authors.lastname: Nicolosi
authors.affiliation: CSP Cryogenic Spectrometers GmbH, Munich, Germany.
authors.forename: Jens
authors.initials: J
authors.lastname: Höhne
authors.affiliation: Infineon Technologies AG, Munich, Germany.
authors.forename: Rainer
authors.initials: R
authors.lastname: Weiland
authors.affiliation: Infineon Technologies AG, Munich, Germany.
authors.forename: Birgit
authors.initials: B
authors.lastname: Simmnacher
authors.affiliation: Technische Universita¨t München, Munich, Germany.
authors.forename: Christian
authors.initials: C
authors.lastname: Hollerich
keywords: cryogen-free cooling; energy resolution; microcalorimeter energy dispersive; transition-edge sensor; x-ray microanalysis; x-ray spectrometer