title: Magnetic and electrical characterization of nickel-rich NiFe thin films synthesized by atomic layer deposition and subsequent thermal reduction.
abstract: Nickel-rich NiFe thin films (Ni92Fe8, Ni89Fe11 and Ni83Fe17) were prepared by combining atomic layer deposition (ALD) with a subsequent thermal reduction process. In order to obtain Ni x Fe1-x O y films, one ALD supercycle was performed according to the following sequence: m NiCp2/O3, with m = 1, 2 or 3, followed by one FeCp2/O3 cycle. The supercycle was repeated n times. The thermal reduction process in hydrogen atmosphere was investigated by in situ x-ray diffraction studies as a function of temperature. The metallic nickel iron alloy thin films were investigated and characterized with respect to crystallinity, morphology, resistivity, and magnetism. As proof-of-concept magnetic properties of an array of Ni83Fe17, close to the perfect Permalloy stoichiometry, nanotubes and an isolated tube were investigated.
authors.affiliation: Departamento de Física, Universidad de Santiago de Chile and Center for the Development of Nanoscience and Nanotechnology, 9170124 Santiago, Chile. Institute of Nanostructure and Solid State Physics, Universität Hamburg, Jungiusstr. 11, D-20335 Hamburg, Germany.
authors.forename: A P
authors.initials: AP
authors.lastname: Espejo
authors.forename: R
authors.initials: R
authors.lastname: Zierold
authors.forename: J
authors.initials: J
authors.lastname: Gooth
authors.forename: J
authors.initials: J
authors.lastname: Dendooven
authors.forename: C
authors.initials: C
authors.lastname: Detavernier
authors.forename: J
authors.initials: J
authors.lastname: Escrig
authors.forename: K
authors.initials: K
authors.lastname: Nielsch