title: Decomposition of Wavelength Dispersive X-Ray Spectra.
abstract: Line shapes of atomic lines and soft x-ray emission bands measured with a wavelength dispersive spectrometer (WDS) with the Electron Probe Micro Analyzer (EPMA) are reviewed. Least square fitting to pseudo-Voigt profiles of the digitally measured spectra are used to account for the presence of non-diagram features (high and low energy satellites) and instrumental induced distortions. The effect of line width and relative intensities on the quality of fits is illustrated. Spectral distortions resulting from the presence of absorption edges within the analyzed wavelength region are illustrated for the case of FeLα,β emission bands for pure Fe and iron oxides. For quantitative analysis, an analytical approach is presented where the measured soft x-ray emission bands are corrected for self absorption before extracting the intensities from the experimental data.
authors.affiliation: Australian Key Centre for Microscopy and Microanalysis, The University of Sydney, NSW 2006, Australia.
authors.forename: Guy
authors.initials: G
authors.lastname: Rémond
authors.affiliation: National Institute of Standards and Technology, Gaithersburg, MD 20899-0001.
authors.forename: Robert
authors.initials: R
authors.lastname: Myklebust
authors.affiliation: Ura 736-CNRS, Université P et M Curie, Paris, France.
authors.forename: Michel
authors.initials: M
authors.lastname: Fialin
authors.affiliation: Electron Microsco Unit, The University of Sydney, NSW 2006, Australia.
authors.forename: Clive
authors.initials: C
authors.lastname: Nockolds
authors.affiliation: Microstructural Analysis Unit, University Technology of Sydney, NSW 2007, Australia.
authors.forename: Matthew
authors.initials: M
authors.lastname: Phillips
authors.affiliation: Laboratoire de Microanalyse des Surfaces, Ecole Nationale de Mécanique et des Microtechniques, Besançon, France.
authors.forename: Claude
authors.initials: C
authors.lastname: Roques-Carmes
keywords: WDS instrumental distortions; atomic lines; distortions induced by absorption edges; pseudo-Voigt profiles; satellites; soft x-ray bands