title: Performance of Nano-Submicron-Stripe Pd Thin-Film Temperature Sensors.
abstract: Dozens of small dual-beam thin-film temperature sensors with a total width down to 430 nm were fabricated and tested. The sensors were all made from 90-nm-thick Pd thin films, where the width of the narrow stripes was 70-100 nm and that of the wide ones was 210-800 nm. Two different calibration methods showed consistent and repeatable sensitivities of 0.7-1.2 μV/K for the sensors, confirming that the sensitivity mainly depended on the width configuration of each sensor. By integrating arrays of such sensors on a practical testing platform using hybrid e-beam lithography and photolithography techniques, we demonstrated that these sensors were capable of detecting a weak surface temperature difference of 0.1-0.2 K at microscale, and they could be scaled up as built-in temperature sensors in many practical devices.
authors.affiliation: Key Laboratory for Physics and Chemistry of Nanodevices and Department of Electronics, Peking University, Beijing, 100871, People's Republic of China.
authors.forename: Xiaoye
authors.initials: X
authors.lastname: Huo
authors.affiliation: Key Laboratory for Physics and Chemistry of Nanodevices and Department of Electronics, Peking University, Beijing, 100871, People's Republic of China.
authors.forename: Jingjing
authors.initials: J
authors.lastname: Xu
authors.affiliation: Key Laboratory for Physics and Chemistry of Nanodevices and Department of Electronics, Peking University, Beijing, 100871, People's Republic of China.
authors.forename: Zhenhai
authors.initials: Z
authors.lastname: Wang
authors.affiliation: Key Laboratory for Physics and Chemistry of Nanodevices and Department of Electronics, Peking University, Beijing, 100871, People's Republic of China.
authors.forename: Fan
authors.initials: F
authors.lastname: Yang
authors.affiliation: Key Laboratory for Physics and Chemistry of Nanodevices and Department of Electronics, Peking University, Beijing, 100871, People's Republic of China. xusy@pku.edu.cn.
authors.forename: Shengyong
authors.initials: S
authors.lastname: Xu
keywords: Built-in temperature sensor; Nanostripe; Sensitivity; Submicron thermometry; Thin-film