title: Broadband tunable microwave photonic phase shifter with low RF power variation in a high-Q AlN microring.
abstract: An all-optically tunable microwave photonic phase shifter is demonstrated based on an epitaxial aluminum nitride (AlN) microring with an intrinsic quality factor of 3.2×106. The microring adopts a pedestal structure, which allows overcoupling with 700 nm gap size and facilitates the fabrication process. A phase shift for broadband signals from 4 to 25 GHz is demonstrated by employing the thermo-optic effect and the separate carrier tuning technique. A phase tuning range of 0°-332° is recorded with a 3 dB radio frequency (RF) power variation and 48 mW optical power consumption. In addition, AlN exhibits intrinsic second-order optical nonlinearity. Thus, our work presents a novel platform with a low propagation loss and the capability of electro-optic modulation for applications in integrated microwave photonics.
authors.forename: Xianwen
authors.initials: X
authors.lastname: Liu
authors.forename: Changzheng
authors.initials: C
authors.lastname: Sun
authors.forename: Bing
authors.initials: B
authors.lastname: Xiong
authors.forename: Jian
authors.initials: J
authors.lastname: Wang
authors.forename: Lai
authors.initials: L
authors.lastname: Wang
authors.forename: Yanjun
authors.initials: Y
authors.lastname: Han
authors.forename: Zhibiao
authors.initials: Z
authors.lastname: Hao
authors.forename: Hongtao
authors.initials: H
authors.lastname: Li
authors.forename: Yi
authors.initials: Y
authors.lastname: Luo
authors.forename: Jianchang
authors.initials: J
authors.lastname: Yan
authors.forename: Tong Bo
authors.initials: TB
authors.lastname: Wei
authors.forename: Yun
authors.initials: Y
authors.lastname: Zhang
authors.forename: Junxi
authors.initials: J
authors.lastname: Wang