title: Monolithic Cylindrical Fused Silica Resonators with High Q Factors.
abstract: The cylindrical resonator gyroscope (CRG) is a typical Coriolis vibratory gyroscope whose performance is determined by the Q factor and frequency mismatch of the cylindrical resonator. Enhancing the Q factor is crucial for improving the rate sensitivity and noise performance of the CRG. In this paper, for the first time, a monolithic cylindrical fused silica resonator with a Q factor approaching 8 × 10⁵ (ring-down time over 1 min) is reported. The resonator is made of fused silica with low internal friction and high isotropy, with a diameter of 25 mm and a center frequency of 3974.35 Hz. The structure of the resonator is first briefly introduced, and then the experimental non-contact characterization method is presented. In addition, the post-fabrication experimental procedure of Q factor improvement, including chemical and thermal treatment, is demonstrated. The Q factor improvement by both treatments is compared and the primary loss mechanism is analyzed. To the best of our knowledge, the work presented in this paper represents the highest reported Q factor for a cylindrical resonator. The proposed monolithic cylindrical fused silica resonator may enable high performance inertial sensing with standard manufacturing process and simple post-fabrication treatment.
authors.affiliation: College of Optoelectronic Science and Engineering, National University of Defense Technology, Changsha 410073, China. yaomeredithpan@hotmail.com.
authors.forename: Yao
authors.initials: Y
authors.lastname: Pan
authors.affiliation: College of Optoelectronic Science and Engineering, National University of Defense Technology, Changsha 410073, China. mywangdongya@126.com.
authors.forename: Dongya
authors.initials: D
authors.lastname: Wang
authors.affiliation: College of Optoelectronic Science and Engineering, National University of Defense Technology, Changsha 410073, China. wxy1356238776@163.com.
authors.forename: Yanyan
authors.initials: Y
authors.lastname: Wang
authors.affiliation: College of Optoelectronic Science and Engineering, National University of Defense Technology, Changsha 410073, China. l_jianp@sina.com.
authors.forename: Jianping
authors.initials: J
authors.lastname: Liu
authors.affiliation: College of Optoelectronic Science and Engineering, National University of Defense Technology, Changsha 410073, China. sywu2001@163.com.
authors.forename: Suyong
authors.initials: S
authors.lastname: Wu
authors.affiliation: College of Optoelectronic Science and Engineering, National University of Defense Technology, Changsha 410073, China. qutianliang@nudt.edu.cn.
authors.forename: Tianliang
authors.initials: T
authors.lastname: Qu
authors.affiliation: College of Optoelectronic Science and Engineering, National University of Defense Technology, Changsha 410073, China. muyiky@163.com.
authors.forename: Kaiyong
authors.initials: K
authors.lastname: Yang
authors.affiliation: College of Optoelectronic Science and Engineering, National University of Defense Technology, Changsha 410073, China. luohui.luo@163.com.
authors.forename: Hui
authors.initials: H
authors.lastname: Luo
keywords: Q factor; annealing; chemical etching; cylindrical resonator; fused silica