title: Development of a fluorescence based flux sensor for thin film growth and nanoparticle deposition.
abstract: An optical flux sensor, based on the fluorescence properties of materials and nanoparticles, has been developed to control the deposition rate in thin film deposition systems. Using a simple diode laser and a photomultiplier tube with a light filter, we report the detection of gallium atoms and CdSe-ZnS quantum dots. This setup has a high sensitivity and reproducibility.
authors.affiliation: Department of Physics and Astronomy, KU Leuven, Celestijnenlaan 200D, BE-3001 Leuven, Belgium.
authors.forename: Bert
authors.initials: B
authors.lastname: De Roo
authors.affiliation: Department of Physics and Astronomy, KU Leuven, Celestijnenlaan 200D, BE-3001 Leuven, Belgium.
authors.forename: Mattias
authors.initials: M
authors.lastname: Vervaele
authors.affiliation: DCA Instruments, 20360 Turku, Finland.
authors.forename: Markku
authors.initials: M
authors.lastname: Rajala
authors.affiliation: DCA Instruments, 20360 Turku, Finland.
authors.forename: Toni
authors.initials: T
authors.lastname: Miller
authors.affiliation: Kemstream, 34055 Montpellier, France.
authors.forename: Herve
authors.initials: H
authors.lastname: Guillon
authors.affiliation: Department of Materials Engineering, KU Leuven, Kasteelpark Arenberg 44 bus 2450, BE-3001 Leuven, Belgium.
authors.forename: Jin Won
authors.initials: JW
authors.lastname: Seo
authors.affiliation: Department of Physics and Astronomy, KU Leuven, Celestijnenlaan 200D, BE-3001 Leuven, Belgium.
authors.forename: Jean-Pierre
authors.initials: JP
authors.lastname: Locquet