title: Development of an ultrasonic linear motor with ultra-positioning capability and four driving feet.
abstract: This paper presents a novel linear piezoelectric motor which is suitable for rapid ultra-precision positioning. The finite element analysis (FEA) was applied for optimal design and further analysis, then experiments were conducted to investigate its performance. By changing the input signal, the proposed motor was found capable of working in the fast driving mode as well as in the precision positioning mode. When working in the fast driving mode, the motor acts as an ultrasonic motor with maximum no-load speed up to 181.2mm/s and maximum thrust of 1.7N at 200Vp-p. Also, when working in precision positioning mode, the motor can be regarded as a flexible hinge piezoelectric actuator with arbitrary motion in the range of 8μm. The measurable minimum output displacement was found to be 0.08μm, but theoretically, can be even smaller. More importantly, the motor can be quickly and accurately positioned in a large stroke.
authors.affiliation: Beijing Engineering Technological Research Center of High-efficient & Green CNC Machining Process and Equipment, School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China.
authors.forename: Cong
authors.initials: C
authors.lastname: Zhu
authors.affiliation: State Key Laboratory of New Ceramics and Fine Processing, School of Material Science and Engineering, Tsinghua University, Beijing 100084, China. Electronic address: chuxiangcheng@mail.tsinghua.edu.cn.
authors.forename: Xiangcheng
authors.initials: X
authors.lastname: Chu
authors.affiliation: Beijing Engineering Technological Research Center of High-efficient & Green CNC Machining Process and Equipment, School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China. Electronic address: yuansm@buaa.edu.cn.
authors.forename: Songmei
authors.initials: S
authors.lastname: Yuan
authors.affiliation: State Key Laboratory of New Ceramics and Fine Processing, School of Material Science and Engineering, Tsinghua University, Beijing 100084, China.
authors.forename: Zuojin
authors.initials: Z
authors.lastname: Zhong
authors.affiliation: Beijing Engineering Technological Research Center of High-efficient & Green CNC Machining Process and Equipment, School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China.
authors.forename: Yanqiang
authors.initials: Y
authors.lastname: Zhao
authors.affiliation: State Key Laboratory of New Ceramics and Fine Processing, School of Material Science and Engineering, Tsinghua University, Beijing 100084, China.
authors.forename: Shuning
authors.initials: S
authors.lastname: Gao
keywords: Flexible hinge; Linear piezoelectric motor; Optimization design; Ultrasonic motor