title: Electrical and Optical Properties of Hydrogen Doped Aluminum-Doped Zinc Oxide Thin Films for Low Cost Applications.
abstract: Aluminum-doped zinc oxide (AZO) thin films were prepared on glass substrate using a magnetron sputtering system. In this work, a powder target was used as a source material for low cost applications, instead of a conventional sintered ceramic target. The effects of the hydrogen gas ratio on the electrical and optical properties of the AZO films. The hydrogen doped AZO (AZO:H) films had a hexagonal polycrystalline structure. A small amount of hydrogen gas deteriorated the electrical and optical properties of the AZO:H films. However, these properties improved, as the H2/(H2 + Ar) gas ratio increased. The AZO:H films grown at an H2/(H2+Ar) ratio of 10% showed good properties for low cost applications, such as a low resistivity of 1.35 x 10(-3) Ω-cm, high average transmittance of 83.1% in the visible range of light.
authors.forename: Yong Seob
authors.initials: YS
authors.lastname: Park
authors.forename: Young
authors.initials: Y
authors.lastname: Park
authors.forename: Samyoung
authors.initials: S
authors.lastname: Kwon
authors.forename: Eung Kwon
authors.initials: EK
authors.lastname: Kim
authors.forename: Wonseok
authors.initials: W
authors.lastname: Choi
authors.forename: Donguk
authors.initials: D
authors.lastname: Kim
authors.forename: Minha
authors.initials: M
authors.lastname: Kim
authors.forename: Jaehyeong
authors.initials: J
authors.lastname: Lee